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7408428 Temperature-compensated film bulk acoustic resonator (FBAR) devices  
The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack. The FBAR stack comprises an FBAR and a temperature-compensating element. The FBAR is characterized by...
7400217 Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith  
The band-pass filter has an upper film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic...
7391286 Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters  
A film acoustically-coupled transformer (FACT) has a first and a second stacked bulk acoustic resonator (SBAR 1 , SBAR 2 ). Each SBAR has a stacked pair of film bulk acoustic resonators (FBARs)...
7391285 Film acoustically-coupled transformer  
One embodiment of the film acoustically-coupled transformer (FACT) includes a decoupled stacked bulk acoustic resonator (DSBAR) having a lower film bulk acoustic resonator (FBAR) an upper FBAR...
7388455 Film acoustically-coupled transformer with increased common mode rejection  
The film acoustically-coupled transformer (FACT) has a first and second decoupled stacked bulk acoustic resonators (DSBARs). Each DSBAR has a lower film bulk acoustic resonator (FBAR), an upper...
7388454 Acoustic resonator performance enhancement using alternating frame structure  
Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is...
7369013 Acoustic resonator performance enhancement using filled recessed region  
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the...
7367095 Method of making an acoustically coupled transformer  
Embodiments of an acoustically-coupled transformer have a first stacked bulk acoustic resonator (SBAR) and a second SBAR. Each of the SBARs has a lower film bulk acoustic resonator (FBAR) and an...
7362198 Pass bandwidth control in decoupled stacked bulk acoustic resonator devices  
The decoupled stacked bulk acoustic resonator (DSBAR) device has a lower film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and an acoustic decoupler between the FBARs....
7358831 Film bulk acoustic resonator (FBAR) devices with simplified packaging  
The encapsulated film bulk acoustic resonator (FBAR) device comprises a substrate, an FBAR stack over the substrate, an element for acoustically isolating the FBAR stack from the substrate,...
7332985 Cavity-less film bulk acoustic resonator (FBAR) devices  
The film bulk acoustic resonator (FBAR) device comprises a substrate, an acoustic Bragg reflector over the substrate, a piezoelectric element over the acoustic Bragg reflector, and a remote-side...
7328497 Incremental tuning process for electrical resonators based on mechanical motion  
A method is provided for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove...
7296329 Method of isolation for acoustic resonator device  
A method of isolating piezoelectric thin film acoustic resonator devices to prevent laterally propagating waves generated by the device from leaving the device and/or interfering with adjacent...
EP1405410B1 FREQUENCY-TUNABLE RESONATOR  
Abstract not available for EP1405410 Abstract of corresponding document: US2004212277 A frequency-tunable resonator comprises a basic element having at least one piezoelectric layer and at least...
7242270 Decoupled stacked bulk acoustic resonator-based band-pass filter  
The band-pass filter has first terminals, second terminals, a first decoupled stacked bulk acoustic resonator (DSBAR), a second DSBAR, and an electrical circuit connecting the first DSBAR and the...
7240410 Method for manufacturing a piezoelectric resonator  
A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric...
7098573 Frequency-tunable resonator  
A frequency-tunable resonator comprises a basic element having at least one piezoelectric layer and at least one semiconducting layer. The electrodes, formed on main surface situated opposite one...
6936954 Bulk resonator  
A resonator having temperature and electronic compensation. The resonator has several layers on a substrate having opposite thermal coefficients of the sound velocity for temperature compensation....
6906451 Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator  
A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric...
6746577 Method and apparatus for thickness control and reproducibility of dielectric film deposition  
The invention embodies a method and apparatus for controlling the thickness of a dielectric film formed by physical vapor deposition (PVD). The method compensates for the continuously varying...
6743731 Method for making a radio frequency component and component produced thereby  
A method for making a radio frequency (RF) component includes forming a dielectric layer on a semiconductor substrate and forming and patterning a conductive layer on the dielectric layer to define...
6675450 Method of manufacturing and mounting electronic devices to limit the effects of parasitics  
A method of producing and mounting electronic devices to negate the effects of parasitics on device performance. In one aspect, the substrate surface of the device is coated with a thin,...
6674291 Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom  
The effects of electromigration have been shown to lead to damage of metal electrodes of electronic devices such as thin film resonator (TFR) devices in only a few hours, for a test input power...
6603241 Acoustic mirror materials for acoustic devices  
A reflector stack or acoustic mirror arrangement for an acoustic device is described which may attain the highest possible impedance mismatch between alternating higher and lower impedance...
6587212 Method and apparatus for studying vibrational modes of an electro-acoustic device  
A method for studying vibrational modes of an electro-acoustic device includes driving the electro-acoustic device to produce at least one vibrational mode therein, collecting phase and amplitude...
6586861 Film bulk acoustic wave device  
There is provided a film bulk acoustic wave device comprising: a silicon substrate 1 , a dielectric film 21 including a silicon nitride 16 formed on the substrate 1 and a silicon oxide 2 ...
6556103 Piezoelectric resonator with electrode radius related to resonator thickness and vibration mode, and filter using the same  
A piezoelectric resonator using an n th -order mode of a thickness longitudinal vibration or a thickness-shear vibration includes a vibrating section having a piezoelectric layer, a pair of...
6524971 Method of deposition of films  
The invention presents a deposition method which varies the growth conditions of a film on a patterned substrate. For example, deposition conditions required for obtaining growth are determined for...
6515402 Array of ultrasound transducers  
The invention relates to an array of ultrasound transducers which each comprise a substrate ( 1 ), a membrane ( 2 ), a first electrode ( 4 ), a piezoelectric layer ( 5 ), and a second electrode ( 6...
6486751 Increased bandwidth thin film resonator having a columnar structure  
Improved bandwidths and oscillation uniformity is obtained through a rod type BAW TFR structure formed over a semiconductor support. The resonator includes a first and a second electrode and a...
6437667 Method of tuning thin film resonator filters by removing or adding piezoelectric material  
The present invention provides a method for tuning a thin film resonator (TFR) filter comprising a plurality of TFR components formed on a substrate. Each of the TFR components has a set of...
6420202 Method for shaping thin film resonators to shape acoustic modes therein  
A process for configuring a thin film resonator to advantageously shape a desired acoustic mode of the resonator such that the electrical and acoustic performance of the resonator is enhanced. As a...
6377136 Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance  
A thin film resonator (TFR) filter circuit including a plurality of TFRs connected in a series-shunt or shunt-series arrangement between input and output ports of the filter. A method is provided...
6355498 Thin film resonators fabricated on membranes created by front side releasing  
A new bulk resonator may be fabricated by a process that is readily incorporated in the traditional fabrication techniques used in the fabrication of monolithic integrated circuits on a wafer. The...
6349454 Method of making thin film resonator apparatus  
A thin film resonator (TFR) is produced with an improved piezoelectric film which is epitaxially grown on a growing surface, resulting in a piezoelectric film with less grain boundaries. Epitaxial...
6323744 Grounding of TFR ladder filters  
A TFR ladder filter which may yield less degradation in the stopband near the passband edges than conventionally grounded TFR ladder filters. Each of the plurality of shunt-coupled TFR elements of...
6306313 Selective etching of thin films  
The invention removes a portion(s) of a material of interest, while leaving an adjacent or underlying electrode(s) intact. The material is exposed to a plasma containing at least...
6131256 Temperature compensated resonator and method  
A temperature compensated resonator (15) and method for making the temperature compensated resonator (15). The temperature compensated resonator (15) has a substrate (110) including a cavity (120,...
5932953 Method and system for detecting material using piezoelectric resonators  
A method and system for detecting material bound on a surface of a piezoelectric resonator introduces a signal of a constant frequency through the sensing resonator and detects a change in the...
5884378 Method of making an enhanced quality factor resonator  
A high quality factor resonator (15) including a substrate (110) and a resonator layer (150). The resonator layer includes a first electrode (157). The resonator layer (150) is disposed on a...
5864261 Multiple layer acoustical structures for thin-film resonator based circuits and systems  
A stacked thin film device structure grown on a substrate, the resonator structure comprising a thin film device comprising at least one piezoelectric crystal layer sandwiched between metallic...
5747857 Electronic components having high-frequency elements and methods of manufacture therefor  
Integrated circuits utilizing piezoelectric elements can be advantageously constructed by bonding elements together via direct bonds. Such integrated circuits include an electro-acoustic hybrid...
5696423 Temperature compenated resonator and method  
A temperature compensated resonator (15) and method for making the temperature compensated resonator (15). The temperature compensated resonator (15) has a substrate (110) including a cavity (120,...
5681410 Method of producing a piezoelectric/electrostrictive actuator  
A method of producing a piezoelectric/electrostrictive actuator including a ceramic substrate and a piezoelectric/electrostrictive portion, including the steps of: superposing on each other a first...
5668057 Methods of manufacture for electronic components having high-frequency elements  
Integrated circuits utilizing piezoelectric elements can be advantageously constructed by bonding elements together via direct bonds. Such integrated circuits include an electro-acoustic hybrid...
5617065 Filter using enhanced quality factor resonator and method  
A filter (500) including a first resonator (505) coupled in shunt with a first port (507), a first bridging network (510) coupled between the first port (507) and a first node (509), a second...
5596239 Enhanced quality factor resonator  
A high quality factor resonator (15) including a substrate (110) and a resonator layer (150). The resonator layer includes a first electrode (157). The resonator layer (150) is disposed on a...
5594292 Piezoelectric device  
A piezoelectric device includes a ceramic substrate having at least one cavity defined by a thin-walled region of the substrate. The thin-walled region has an outer surface provided with at least...
5548178 Piezoelectric vibrator and manufacturing method thereof  
A piezoelectric vibrator includes a thin quartz plate portion for generating vibrations, and non-contact electrodes for applying an alternating electric field. The electrodes are arranged on...
5404628 Method for optimizing piezoelectric resonator-based networks  
The method comprises decomposing an original resonator within a network into a pair of series connected resonators to add an additional connecting electrode to the network. The pair of resonators...
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