|
Match
|
Document |
Document Title |
|
|
7432629 |
Articulated MEMs structures
The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e....
|
|
|
7429334 |
Methods of fabricating interferometric modulators by selectively removing a material
Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of...
|
|
|
7428353 |
MEMS device control with filtered voltage signal shaping
A MEMS system is disclosed. The system includes a MEMS device having including a gimbal-less device mount supported by two or more bi-axial linkages. Each bi-axial linkage is mechanically coupled...
|
|
|
7424198 |
Method and device for packaging a substrate
A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the...
|
|
|
7420728 |
Methods of fabricating interferometric modulators by selectively removing a material
Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of...
|
|
|
7420725 |
Device having a conductive light absorbing mask and method for fabricating same
A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device...
|
|
|
7417784 |
Microelectromechanical device and method utilizing a porous surface
A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator...
|
|
|
7417783 |
Mirror and mirror layer for optical modulator and method
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as...
|
|
|
7417735 |
Systems and methods for measuring color and contrast in specular reflective devices
Disclosed herein are systems and methods for measuring color and contrast in specular reflective devices such as interferometric modulators. To make color and contrast determinations, light...
|
|
|
7415186 |
Methods for visually inspecting interferometric modulators for defects
A method is provided for visual inspection of an array of interferometric modulators in various driven states. This method may include driving multiple columns or rows of interferometric modulators...
|
|
|
7405924 |
System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
Disclosed is an electronic device utilizing interferometric modulation and a package of the device. The packaged device includes a substrate, an interferometric modulation display array formed on...
|
|
|
7405863 |
Patterning of mechanical layer in MEMS to reduce stresses at supports
A method of fabricating a MEMS device includes the formation of support posts having horizontal wing portions at the edges of the post. A mechanical layer is deposited over the support posts and...
|
|
|
7405861 |
Method and device for protecting interferometric modulators from electrostatic discharge
A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS...
|
|
|
7405860 |
Spatial light modulators with light blocking/absorbing areas
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates...
|
|
|
7403324 |
Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
A spatial light modulator has an array of reflective surfaces of deflectable mirror plates. For improving the reflectivity of the mirror plates, layers that are preferably transmissive to visible...
|
|
|
7403323 |
Process control monitors for interferometric modulators
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide...
|
|
|
RE40436 |
Hermetic seal and method to create the same
An electronic display screen is created by processing a mirror on a substrate glass. A back plate glass is then placed on top of the substrate glass and sealed to the back plate glass. A hermetic...
|
|
|
7391973 |
Two-stage gain equalizer
An apparatus for selectively adjusting power levels of component signals of a wavelength division multiplexed signal. The apparatus comprises a first filter and a second filter. The first filter...
|
|
|
7388706 |
Photonic MEMS and structures
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
|
|
|
7388704 |
Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
Air gap variation in an interferometric modulator over a two-dimensional spatial map of the modulator is determined by acquiring a digital photograph of the modulator. Color parameters of...
|
|
|
7388697 |
System and method for addressing a MEMS display
A system and method for addressing an array of MEMS display elements, such as interferometric modulators, from a drive control. A display includes groups of display elements that are addressed with...
|
|
|
7385744 |
Support structure for free-standing MEMS device and methods for forming the same
A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first...
|
|
|
7382515 |
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
The fabrication of a MEMS device such as an interferometric modulator is improved by employing an etch stop layer between a sacrificial layer and a an electrode. The etch stop may reduce...
|
|
|
7379227 |
Method and device for modulating light
“Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each...
|
|
|
7373026 |
MEMS device fabricated on a pre-patterned substrate
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper...
|
|
|
7372619 |
Display device having a movable structure for modulating light and method thereof
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
|
|
|
7372617 |
Hidden hinge MEMS device
The present invention relates to a method for manufacturing a MEMS device, including the actions of: providing a substrate having a back and front surface essentially in parallel with each other,...
|
|
|
7372613 |
Method and device for multistate interferometric light modulation
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and...
|
|
|
7369296 |
Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
By varying the spacing between a partially-reflective, partially-transmissive surface and a highly reflective surface positioned behind the partially-reflective, partially-transmissive surface, an...
|
|
|
7369294 |
Ornamental display device
An ornamental display device having an interferometric modulator for displaying an ornamental image. The ornamental device may have a patterned diffuser formed on a transparent substrate to provide...
|
|
|
7369292 |
Electrode and interconnect materials for MEMS devices
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity,...
|
|
|
7369252 |
Process control monitors for interferometric modulators
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide...
|
|
|
7368803 |
System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
Disclosed is an electronic device utilizing interferometric modulation and a package of the device. The packaged device includes a substrate, an interferometric modulation display array formed on...
|
|
|
7362493 |
Micromirror and post arrangements on substrates
A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the...
|
|
|
7359066 |
Electro-optical measurement of hysteresis in interferometric modulators
Disclosed herein are methods and apparatus for testing interferometric modulators. The interferometric modulators may be tested by applying a time-varying voltage stimulus and measuring the...
|
|
|
7355780 |
System and method of illuminating interferometric modulators using backlighting
An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the...
|
|
|
7355779 |
Method and system for driving MEMS display elements
Systems and methods for driving MEMS display elements are disclosed. In one embodiment, a display comprises an array of MEMS display elements, and a driving circuit coupled to said array, wherein...
|
|
|
7349139 |
System and method of illuminating interferometric modulators using backlighting
An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the...
|
|
|
7349136 |
Method and device for a display having transparent components integrated therein
A display panel includes an array of interferometric modulators arranged over a transparent substrate and a transparent electrical device arranged between the array of interferometric modulators...
|
|
|
7345805 |
Interferometric modulator array with integrated MEMS electrical switches
An interferometric modulator array is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have similar physical geometry as the display elements. The switches...
|
|
|
7343080 |
System and method of testing humidity in a sealed MEMS device
One embodiment provides a method of testing humidity, comprising: determining a property of a device which encloses a plurality of interferometric modulators; and determining a relative humidity...
|
|
|
7327510 |
Process for modifying offset voltage characteristics of an interferometric modulator
An interferometric modulator manufactured according to a particular set of processing parameters may have a non-zero offset voltage. A process has been developed for modifying the processing...
|
|
|
7321457 |
Process and structure for fabrication of MEMS device having isolated edge posts
A method of fabricating an array of MEMS devices includes the formation of support structures located at the edge of upper strip electrodes. A support structure is etched to form a pair of...
|
|
|
7321456 |
Method and device for corner interferometric modulation
A display is described, wherein the display includes surfaces arranged at a non-zero angle to one another. A least one of the surfaces may include an interferometric modulator. Compensation for...
|
|
|
7317568 |
System and method of implementation of interferometric modulators for display mirrors
A specular interferometric modulator array is configured to be at least partially selectably reflective. As such, the array forms a mirror surface having the capability of displaying information to...
|
|
|
7310179 |
Method and device for selective adjustment of hysteresis window
The width and location of a hysteresis window of an interferometric modulator may be altered by adjusting various physical characteristics of the interferometric modulator. Thus, depending on the...
|
|
|
7304784 |
Reflective display device having viewable display on both sides
An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.
|
|
|
7302157 |
System and method for multi-level brightness in interferometric modulation
A display having a plurality of reflective display elements. In one embodiment, the display elements comprise at least one electrode having a plurality of active areas. In one embodiment, at least...
|
|
|
7300162 |
Projection display
In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention,...
|
|
|
7299681 |
Method and system for detecting leak in electronic devices
The methods and systems for testing electronic devices for leak detection are provided. In one method of detecting a leak in a sealed package, a sealed package is placed in a test gas environment,...
|