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7344755 Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers  
The present disclosure provides methods and apparatus that may be used to process microfeature workpieces, e.g., semiconductor wafers. Some aspects have particular utility in depositing TiN in a...
7335396 Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers  
Methods, apparatuses, and systems for controlling mass flow rates and pressures in passageways coupled to reaction chambers are disclosed herein. In one embodiment, a method includes controlling a...
7323231 Apparatus and methods for plasma vapor deposition processes  
One aspect of the invention is directed toward a method of forming a conductive layer on a microfeature workpiece. In one embodiment, the method comprises placing a microfeature workpiece in a...
7282239 Systems and methods for depositing material onto microfeature workpieces in reaction chambers  
In one embodiment, the system includes a gas supply assembly having a first gas source, a first gas conduit coupled to the first gas source, a first valve assembly, a reaction chamber, and a gas...
7279398 Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces  
The present disclosure provides methods and apparatus useful in depositing materials on batches of microfeature workpieces. One implementation provides a method in which a quantity of a first...
7270715 Chemical vapor deposition apparatus  
A chemical vapor deposition apparatus includes a subatmospheric substrate transfer chamber. A subatmospheric deposition chamber is defined at least in part by a chamber sidewall. A passageway in...
7258892 Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition  
The present disclosure provides methods and systems for controlling temperature. The method has particular utility in connection with controlling temperature in a deposition process, e.g., in...
7235138 Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces  
The present disclosure describes apparatus and methods for processing microfeature workpieces, e.g., by depositing material on a microelectronic semiconductor using atomic layer deposition. Some of...
7192487 Semiconductor substrate processing chamber and accessory attachment interfacial structure  
A semiconductor substrate processor includes a substrate transfer chamber and a plurality of substrate processing chambers connected therewith. An interfacial structure is received between at least...
7056806 Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces  
The present disclosure provides methods and apparatus useful in depositing materials on batches of microfeature workpieces. One implementation provides a method in which a quantity of a first...
6926775 Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces  
Reactors having gas distributors for depositing materials onto micro-device workpieces, systems that include such reactors, and methods for depositing materials onto micro-device workpieces are...
6858264 Chemical vapor deposition methods  
A chemical vapor deposition chamber has a vacuum exhaust line extending therefrom. Material is deposited over a first plurality of substrates within the deposition chamber under conditions...
5944803 Isolatable multi-point serial communication utilizing a single universal asynchronous receiver and transmitter (UART)  
A communication interface circuit in an aircraft entertainment system uses a single Universal Asynchronous Receiver and Transmitter (UART) for sending and receiving data to and from a number of...
5844496 Signal generation method and structure for a transmission and reception system  
A transmission and reception system including a transmitter for transmitting a signal including identification (security) information and function information, and a receiver for receiving and...
5734659 Computer network having a virtual circuit message carrying a plurality of session messages  
A system has a node connected to a network, the node generating a separate session message for each of a plurality of users. The node places each of the separate session message in a slot in a...
5646602 Switching network for selective product demonstration  
A switching network for interconnecting selected products of different electronic groups on display for purposes of active demonstration includes a plurality of nodes. Each product on display is...
5621734 Local area network with server and virtual circuits  
A communications network has a plurality of users connected by virtual circuits to a plurality of service providers. A server has the plurality of users connected thereto. A node provides the...
5559962 Data transmission system selecting both source and destination using addressing mechanism  
A data transmission system includes a main controlling unit for producing pieces of address information, each piece of address information being indicative of a first address for a data source and...
5422631 Apparatus and method for interconnecting electronic products  
A switching network including a plurality of nodes, one node connected to a product of different electronic product groups on display. Each node includes a satellite node microprocessor and a...
5224097 Data communication system  
A data communication system which can eliminate the need for repeating equipment therein system, and allowing coexistence of an analog line and a digital line. The system also prevents generating...
5220566 Multiplexer for use in data processing system  
There is disclosed a multiplexer for communicating between plural first apparatuses and a second apparatus. The multiplexer comprises plural receiver for receiving data transmitted from plural...
5210531 Monitoring and control system with binary addressing  
A network of addressable modules is disclosed with each module being addressable by a particular multi-digit binary code and each having first and second normally high address input lines which go...
5206863 Processor-to-processor communications protocol for a public service trunking system  
A downlink between a communications dispatch console and a digitally trunked radio repeater system site controller efficiently transfers message data between the site controller and the console...
5131078 Printer controller  
A printer controller for controlling a printer shared with plural external data processors is disclosed. The printer controller includes a first memory for memorizing control data received from...
5130983 Method of polling to determine service needs and the like  
Tis method provides high utilization collision free access to a digital pulse communications medium with priority provided by message class and/or terminal type, regardless of network topology....
5128930 Processor-to-processor communications protocol for a public service trunking system  
A downlink between a communications dispatch console and a digitally trunked radio repeater system site controller efficiently transfers message data between the site controller and the console...
5128664 Search technique for identifying slave devices connected to a serial bus  
A slave device detecting system utilizes the past history of devices connected to a data bus to optimize the time required to re-establish communications. Whenever a master controller senses a...
5081576 Advance polling bus arbiter for use in multiple bus system  
An advance polling bus arbiter includes a priority selector for selecting during a polling cycle a highest priority source system unit which is seeking access to a system bus. Bus grant logic sends...
5038140 Supervisory system in communication system  
In a communication system wherein repeater stations and terminal stations are connected in tandem, a supervisory system in which a logical hierarchical configuration is used for the transmission of...
4940974 Multiterminal communication system and method  
In an exemplary communications system a multiplicity of mobile terminals are to share a communications link with a primary processor. The primary processor may transmit a multiterminal polling...
4858230 Multiport/multidrop computer communications  
Multiport/multidrop computer communication is provided over a single communication facility between a plurality of central stations at a central location their respective remote stations at remote...
4837704 Computer controlled material handling  
Apparatus and a method are disclosed for use in a computer controlled factory environment which includes workstations and automated vehicles servicing those workstations for monitoring the status...
4835731 Processor-to-processor communications protocol for a public service trunking system  
A downlink between a communications dispatch console and a digitally trunked radio repeater system site controller efficiently transfers message data between the site controller and the console...
4829297 Communication network polling technique  
In a communication network wherein a master station periodically polls a number of remote stations to determine whether or not each remote station has data to transmit to the master, each of the...
4750115 Data communication system between two different data transmission systems  
A data communication system for the communication between two different data transmission systems, the SDT system and the RDT system. The SDT system includes a host CPU having an output terminal...
4742513 Adaptive window multiplexing technique  
An adaptive window multiplexing technique. A multiplexer is coupled between a single destination and a plurality of data sources. The multiplexer includes control circuitry for sequentially...
4685149 Meteor scatter burst communication system  
The specification discloses a meteor burst communication system including at least two spaced apart master stations, in association with a plurality of groups of remote stations spaced at locations...
4608560 Computer controlled energy monitoring system  
A centralized data communications system incorporating a plurality of remote stations, each having a plurality of information channels associated therewith. A selected remote station and its...
4603418 Multiple access data communications controller for a time-division multiplex bus  
Method and apparatus are provided for control of a dedicated data slot in a time-division multiplex system for both voice and data communications enabling equal access to the data slot, efficient...
4477799 Security apparatus with alarm search and verification capability  
A cable TV security system utilizes three radio frequency signals as three data communication channels: one downstream channel and two upstream channels. The system includes a plurality of...
4441107 Measuring arrangement having a plurality of measuring points connected to one another by means of a cable  
A measuring cable with spaced measuring stations is laid. The measuring stations each have a sensor whose electrical conductivity depends on an ambient variable such as temperatures light etc.,...
4437170 Method and circuit arrangement for the acceptance and temporary storage of data signals in a switching system  
A method and circuit arrangement for the acceptance and temporary storage of data signals in a data switching system includes a data communication control to which the data signals are supplied, a...
4415896 Computer controlled energy monitoring system  
Disclosed is a centralized data communications system incorporating a plurality of remote stations, each having a plurality of information channels associated therewith. A selected remote station...
4398192 Battery-saving arrangement for pagers  
A pager or other selectively-addressed electronic device powered by a small power cell operates in four different modes and at two power levels, depending on signals received and a timing sequence....
4385382 Communication multiplexer having a variable priority scheme using a read only memory  
A data processing system includes a number of input/output devices coupled to a communication multiplexer which polls the devices in a predetermined order. Apparatus in the communication controller...
4380065 Communication multiplexer variable priority scheme  
A communication multiplexer stores the receive and transmit channel numbers of input/output devices coupled to the multiplexer by communication lines in a first-in-first out (FIFO) memory. The...
EP0049157A2 Polling means for communication multiplexer.  
Polling means for polling a plurality of devices with receive and transmit channel numbers. The channel numbers are held in a register 504 and a recirculatory FIFO memory 500, and circulated...
4281315 Collection of messages from data terminals using different protocols and formats  
A central controller (104) for a multipoint polling system arranged to collect inquiry messages from data terminals (102a-n, 103a-n) for processing by a data base (101) and for distributing...
4251865 Polling system for a duplex communications link  
Channel efficiency in a communications link between a controller and multiple portable units is increased by polling the active units and a set number of inactive units in a sequence where a "poll"...
4160128 Digital data transmission system providing multipoint connections  
Digital transmission system providing multipoint connections in which a main data transceiver can communicate with a plurality of secondary data transceivers and the secondary data transceivers can...
Matches 1 - 50 out of 50