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5317574 |
Method and apparatus for generating x-ray and/or extreme ultraviolet laser
A method and apparatus for producing x-ray and/or extreme ultraviolet (EUV) is described. A liquid edge 2 is electrically connected to a cathode 8 via a high voltage pulse power supply 10. Liquid...
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4723263 |
X-ray source
An X-ray source with a cathode formed as a cylindrical electrode having a hollow central anode tube on its axis, with a grid surrounding the anode and interposed between the anode and cathode. The...
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4589123 |
System for generating soft X rays
A system for generating soft X rays. This system includes valve apparatus for repetitively providing bursts of a gas of brief duration and a magnetic pulse compression power supply for providing...
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