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7411254 Semiconductor substrate  
The invention includes methods of forming conductive metal silicides by reaction of metal with silicon. In one implementation, such a method includes providing a semiconductor substrate comprising...
7384727 Semiconductor processing patterning methods  
The invention includes semiconductor processing patterning methods and semiconductor constructions. A semiconductor processing patterning method includes forming a second composition resist layer...
7368399 Methods of forming patterned photoresist layers over semiconductor substrates  
This invention includes methods of forming patterned photoresist layers over semiconductor substrates. In one implementation, a porous antireflective coating is formed over a semiconductor...
7358188 Method of forming conductive metal silicides by reaction of metal with silicon  
The invention includes methods of forming conductive metal silicides by reaction of metal with silicon. In one implementation, such a method includes providing a semiconductor substrate comprising...
7291555 Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon  
A method of forming a reaction product includes providing a semiconductor substrate comprising a first material. A second material is formed over the first material. The first and second materials...
7241705 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects  
The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of...
7153769 Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon  
A method of forming a reaction product includes providing a semiconductor substrate comprising a first material. A second material is formed over the first material. The first and second materials...
7119031 Methods of forming patterned photoresist layers over semiconductor substrates  
This invention includes methods of forming patterned photoresist layers over semiconductor substrates. In one implementation, a porous antireflective coating is formed over a semiconductor...
7115532 Methods of forming patterned photoresist layers over semiconductor substrates  
This invention comprises methods of forming patterned photoresist layers over semiconductor substrates. In one implementation, a semiconductor substrate is provided. An antireflective coating is...
6969677 Methods of forming conductive metal silicides by reaction of metal with silicon  
The invention includes methods of forming conductive metal silicides by reaction of metal with silicon. In one implementation, such a method includes providing a semiconductor substrate comprising...
Matches 1 - 10 out of 10