METHOD AND ARRAY FOR THE DETECTION OF FOREIGN GAS IN OPTICAL IMAGING AND/OR BEAM CONTROL SYSTEMS
Kind Code:
A1
Abstract not available for EP1463929
Abstract of corresponding document: DE10200349
The invention relates to a method and an array for detecting foreign substances in the beam path of optical imaging or beam control systems (10), in which the housing enclosing the beam path and the optical components (10') is filled or flushed with a protective gas. Said protective gas is exposed to an intensity-modulated electromagnetic analytical wavefield (4') in a test volume (3). A photoacoustic signal (5) is generated for detecting impurities or foreign gases by means of the photoacoustic effect created when frequency components of the analytical wavefield (4') are absorbed by said foreign gases and/or impurities.
Abstract of corresponding document: DE10200349
The invention relates to a method and an array for detecting foreign substances in the beam path of optical imaging or beam control systems (10), in which the housing enclosing the beam path and the optical components (10') is filled or flushed with a protective gas. Said protective gas is exposed to an intensity-modulated electromagnetic analytical wavefield (4') in a test volume (3). A photoacoustic signal (5) is generated for detecting impurities or foreign gases by means of the photoacoustic effect created when frequency components of the analytical wavefield (4') are absorbed by said foreign gases and/or impurities.
Inventors:
Schroff, Gerhart (DE)
Stetter, Michael (DE)
Stetter, Michael (DE)
Application Number:
EP20020806029
Publication Date:
10/06/2004
Filing Date:
12/30/2002
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Export Citation:
Assignee:
Schroff, Gerhart (DE)
Stetter, Michael (DE)
Stetter, Michael (DE)
International Classes:
B23K26/00; B23K26/12; B23K26/12; B23K26/42; G01N21/17; G01N21/17; (IPC1-7): G01N21/17; B23K26/12; B23K26/42
European Classes:
B23K26/12; B23K26/42D; G01N21/17B
Other References:
See references of WO 03058213A1