Title:
Air flow controller for heater of substrate processing apparatus
United States Patent D825501


Inventors:
Yamaguchi, Takatomo (Toyama, JP)
Kosugi, Tetsuya (Toyama, JP)
Saido, Shuhei (Toyama, JP)
Application Number:
29/596953
Publication Date:
08/14/2018
Filing Date:
03/13/2017
Assignee:
Hitachi Kokusai Electric Inc. (Tokyo, JP)
Primary Class:
International Classes:
(IPC1-7): 1303
Field of Search:
D13/123-132, D13/154, D13/184, D13/199, D15/138, D15/140, D15/144.1
View Patent Images:
US Patent References:
D776077Electrical signal relayJanuary, 2017KondoD13/159
D773427Signal relay deviceDecember, 2016KondoD13/159
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D758365Signal relay deviceJune, 2016ShimanoD14/358
D739353Module-mounting base for an industrial control systemSeptember, 2015MielnikD13/123
D706232Semiconductor deviceJune, 2014NakamuraD13/182
D605119Power controller coverDecember, 2009PapeD13/123
D605120Power controller cover with terminal blockDecember, 2009PapeD13/123
20080006617THERMAL WAFER PROCESSORJanuary, 2008Harris219/390
6307153ControllerOctober, 2001Imoto174/50
D371113Integrated power distribution and transient voltage surge supression systemJune, 1996HubbellD13/160
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D222471N/AOctober, 1971Shebanow et al.D14/385



Primary Examiner:
Johannes, Thomas
Assistant Examiner:
Mcvey, Lauren
Attorney, Agent or Firm:
Fitch, Even, Tabin & Flannery, LLP
Claims:
CLAIM

1. We claim the ornamental design for an air flow controller for heater of substrate processing apparatus, as shown and described.

Description:

FIG. 1 is a front, bottom and right side perspective view of an air flow ontroller for heater of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken in the direction of line 8-8 in FIG. 2.

The broken lines immediately adjacent to the shaded areas represent the bounds of the claimed design while all other broken lines are directed to environment; the broken lines form no part of the claimed design.