Title:
Roller for substrate cleaning
Document Type and Number:
United States Patent D800401

Inventors:
Ishibashi, Tomoatsu (Tokyo, JP)
Application Number:
29/558949
Publication Date:
10/17/2017
Filing Date:
03/23/2016
View Patent Images:
Assignee:
EBARA CORPORATION (Tokyo, JP)
Primary Class:
International Classes:
(IPC1-7): 1505
Field of Search:
D7/387, D7/393, D32/25, D32/40, D32/35
US Patent References:
D707408Roller for semiconductor wafer cleaningJune, 2014IshibashiD32/25
8496758Cleaning apparatus and cleaning method for waferJuly, 2013Idani134/2
D682497Substrate cleaning brushMay, 2013WargoD15/138
7955693Foam composition roller brush with embedded mandrelJune, 2011Drury15/103.5
D622920Cleaning sponge rollerAugust, 2010Bejtlich, IIID32/40
7735177Brush core assemblyJune, 2010Farber15/102
6904637Scrubber with sonic nozzleJune, 2005Sugarman134/199
20050109371Post CMP scrubbing of substratesMay, 2005Sin134/6
D482566Hand grip for barbecue toolNovember, 2003ZemelD7/395
6616516Method and apparatus for asymmetric processing of front side and back side of semiconductor substratesSeptember, 2003Ravkin451/194
6557202Wafer scrubbing brush core having an internal motor and method of making the sameMay, 2003Bliven15/102
6543084Wafer scrubbing brush coreApril, 2003Dickey15/179
6502273Cleaning sponge rollerJanuary, 2003Mihara15/102
20020121289Spray barSeptember, 2002Brown134/6
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D456667Handle sleeveMay, 2002VeltriD7/387
6308369Wafer cleaning systemOctober, 2001Garcia15/102
6299698Wafer edge scrubber and methodOctober, 2001Emami134/6
6247197Brush interflow distributorJune, 2001Vail118/259
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6027573Industrial cleaning sponge apparatus and method for extracting residue from a sponge materialFebruary, 2000Cercone134/22.19
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5966765Cleaning apparatusOctober, 1999Hamada15/102
5745945Brush conditioner for a semiconductor cleaning brushMay, 1998Manfredi15/21.1
5675856Wafer scrubbing deviceOctober, 1997Itzkowitz15/102
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Primary Examiner:
Pratt, Michael A.
Assistant Examiner:
Wilson, Michelle E.
Attorney, Agent or Firm:
Pearne & Gordon LLP
Claims:
CLAIM

1. The ornamental design for a roller for substrate cleaning, as shown and described.

Description:

FIG. 1 is a first perspective view observed from rear, right and top sides of a first roller for substrate cleaning showing my new design;

FIG. 2 is a second perspective view observed from front, left and top sides thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a top view thereof, a bottom view being identical thereto;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a first perspective view observed from rear, right and top sides of a second roller for substrate cleaning showing my new design;

FIG. 8 is a second perspective view observed from front, left and top sides thereof;

FIG. 9 is a front view thereof;

FIG. 10 is a top view thereof, a bottom view being identical thereto;

FIG. 11 is a right side view thereof;

FIG. 12 is a left side view thereof;

FIG. 13 is a first perspective view observed from rear, right and top sides of a third roller for substrate cleaning showing my new design;

FIG. 14 is a second perspective view observed from front, left and top sides thereof;

FIG. 15 is a front view thereof;

FIG. 16 is a top view thereof, a bottom view being identical thereto;

FIG. 17 is a right side view thereof; and,

FIG. 18 is a left side view thereof.

The broken lines depict environmental subject matter only and form no part of the claimed design.