Gas supply plate for semiconductor manufacturing apparatus
United States Patent D787458

Kim, Dae Youn (Daejeon, KR)
Kim, Hie Chul (Hwaseong-si, KR)
Jang, Hyun Soo (Daejeon, KR)
Application Number:
Publication Date:
Filing Date:
ASM IP Holding B.V. (Almere, NL)
Primary Class:
International Classes:
(IPC1-7): 1303
Field of Search:
D13/182, D23/213
View Patent Images:
US Patent References:
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Primary Examiner:
Oswecki, Elizabeth J.
Attorney, Agent or Firm:
Knobbe Martens Olson & Bear LLP

1. The ornamental design for a gas supply plate for a semiconductor manufacturing apparatus, as shown and described.


FIG. 1 is a perspective view of a gas supply plate for a semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 1; and,

FIG. 9 is an enlarged portion view taken along line 9 in FIG. 8.

The even dashed broken lines shown in the drawings represent portions of the gas supply plate for semiconductor manufacturing apparatus, that form no part of the claimed design. The dashed-dot-dashed lines represent the boundary lines of the claimed design.