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8454728 |
Method of recycling hydrogen
A method is described for recycling hydrogen (H2) supplied to a chamber (10) in a gas stream comprising hydrogen and at least one other gas, such as silane. A gas comprising at least hydrogen is...
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8409329 |
Method for the purification of a gas containing CO2 using an adsorption purification unit
A method for the purification of a feed gas stream containing CO2 and water and at least one impurity chosen from NOx and SOx, comprising the incorporation of a purification step for the...
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8337595 |
Purification of trans-1,3,3,3-tetrafluoropropene
Disclosed is a process for removing impurities from a product stream comprising trans HFO-1234ze and an HFO-1234 impurity that uses one or more adsorbents that are selective for the HFO-1234...
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8206488 |
Fluoride ion cleaning method
A fluoride ion cleaning method includes generating hydrogen fluoride (HF) gas in-situ in a cleaning retort; contacting a part in need of cleaning with the generated HF gas; scrubbing an initial...
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8182775 |
Dry-scrubbing media compositions and methods of production and use
Dry-scrubbing media compositions, methods of preparing same, and methods of use are provided. The compositions contain activated alumina and potassium carbonate. Optionally, activated carbon and...
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8142549 |
Purification of fluorine containing gases and systems and materials thereof
A method of reducing moisture in a fluorine-containing gas is described. The method may include the steps of providing a purifier material that includes elemental carbon, and flowing the unpurified...
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8038772 |
Filter cartridge for recuperating halogenated hydrocarbons
A filter cartridge for recovering halogenated hydrocarbons (HKW), such as those occurring in inhalation anesthetics in the medical field, contains a first gas inlet; a container which contains a...
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8034163 |
Apparatus and process for preparing sorbents for mercury control at the point of use
A system for treating a contaminated gas stream is provided that includes a comminution device 204 operable to effect size reduction of a plurality of sorbent particles and form a plurality of...
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7993616 |
Methods and devices for reducing hazardous air pollutants
The disclosure provides methods and systems for sequestering and/or reducing sulfur oxides, nitrogen oxides and/or carbon dioxide present in industrial effluent fluid streams. A solid particulate...
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7931737 |
Systems and methods for restricting scale in gas scrubbers and related components
Systems, methods and apparatus for restricting scale build-up in gas scrubbers and piping are disclosed. The scrubbers and/or pipes may have a coating disposed on internal surfaces thereof. The...
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7883568 |
Separation of light gases from halogens
A process is provided for separating one or more light gases from bromine or chlorine using one or more physical separations and contact with a chemical scrubber to recover additional halogen. In...
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7862646 |
Nanoporous articles and methods of making same
An adsorbent having porosity expanded by contact with a first agent effecting such expansion and a pressurized second agent effecting transport of the first agent into the porosity, wherein the...
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7842125 |
Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite
Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is...
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7790130 |
Wide mesoporous alumina composites having trimodal pore structure
Wide mesoporous alumina composites are produced by an “in situ reaction” route comprising agglomeration of an alumina powder that is capable of rehydration together with a second reactive pow...
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7763174 |
Process for removing contaminants using reverse flow reactor with integrated separation
The present invention pertains to a reverse-flow reactor comprising at least one catalyst bed which is preceded and followed by at least one bed containing selectively adsorbing material, and its...
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7731780 |
Apparatus and process for preparing sorbents for mercury control at the point of use
A system for treating a contaminated gas stream is provided that includes a comminution device 204 operable to effect size reduction of a plurality of sorbent particles and form a plurality of...
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7678354 |
Integrated lime kiln process
A process and system for recovering waste heat from a kiln used for lime or cement production. The system unifies the kiln, a waste heat recovery and power generation circuit and a dry scrubber for...
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7666379 |
Process and apparatus for removing Bronsted acid impurities in binary halides
A process and apparatus is provided for the purification of binary halide fluid. The process and apparatus purifies the binary halide fluid by selectively removing Bronsted acid impurities and/or...
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7637986 |
Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite
Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent therefor. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is...
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7384618 |
Purification of nitrogen trifluoride
A process and system for adsorption purification of NF3 wherein a crude product containing NF3 and impurities such as CF4 is brought into contact with a polyacrylonitrile-based carbon molecular...
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7364603 |
Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream
An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a...
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7361209 |
Apparatus and process for preparing sorbents for mercury control at the point of use
A system for treating a contaminated gas stream is provided that includes a comminution device 204 operable to effect size reduction of a plurality of sorbent particles and form a plurality of...
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7326279 |
Method for removing harmful substance in vent gas
A method for removing harmful substances in a vent gas containing a halogen or halogen compound gas remaining in the pipeline of a cylinder cabinet, which comprises contacting the vent gas with a...
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7306775 |
Method for removing halogen series gas
A method for removing a halogen series gas, which comprises contacting a gas containing a halogen series gas forming at least one kind selected from the group consisting of HF, HCl, HBr and HI by...
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7258725 |
Gas supplying method and system
Gas supplying method and system in which effective component gas in exhaust gas can be separated and purified efficiently to be resupplied regardless of variation in the flow rate or composition of...
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7252768 |
Method for eliminating metal halides that are present in a liquid or gaseous, organic or non-organic effluent
The invention relates to a method for eliminating metal halides which are present in a liquid or gaseous, organic or non-organic effluent. According to the invention, the elimination is carried out...
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7022160 |
Method of purifying gaseous nitrogen trifluoride
The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF4 as impurity. The method comprises selective adsorption of nitrogen trifluoride by dehydrated erionite at...
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6888040 |
Method and apparatus for abatement of reaction products from a vacuum processing chamber
An exemplary method and apparatus for abating reaction products from a vacuum processing chamber includes a reaction chamber in fluid communication with the vacuum processing chamber, a coil...
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6846472 |
Process for treating gaseous emissions generated during production of carbon anodes in an aluminum plant
A process for treating gaseous emissions generated during the production of carbon anodes in the aluminum industry. In this process, first gaseous emissions generated during green anode preparation...
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6767513 |
Method of treating exhaust gases containing halogen based compound
A method of treating exhaust gases containing halogen compound, the improvement in that the exhaust gases containing halogen compounds such as halogen gases and/or hydrogen halide gases...
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6706090 |
Method for recovering and/or separating sulfur oxyfluorides from gas mixtures
A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of...
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6702874 |
Gas separation apparatus and gas separation method
Using a distillation separator, a gas to be treated is separated into a plurality of gas groups having different boiling points. Then, the specific gases included in each of the plurality of gas...
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6669760 |
Separation of C2F6 from CF4 by adsorption on activated carbon
This invention relates to an improvement in a process for removing C2F6 as an impurity from a CF4 containing gas, preferably CF4 produced by the reaction of F2 with carbon. The improvement in the...
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6632368 |
Process for removing fluorides from fluids
A new method for removing HF and related organic fluorides from fluid streams in which the fluoride species exist as impurities and, in particular, from hydrocarbon fluid streams containing no more...
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6592653 |
Fluid storage and delivery system utilizing low heels carbon sorbent medium
A fluid storage and dispensing system including a vessel containing a low heel carbon sorbent having fluid adsorbed thereon, with the system arranged to effect desorption of the fluid from the...
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6589494 |
Process for eliminating halogen-containing compounds contained in a gas or liquid using an adsorbent composition based on at least one metallic element
The present invention provides a process for eliminating halogen-containing compounds contained in a gas or a liquid, characterized in that the gas or liquid is brought into contact with a...
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6544319 |
Purification of hexafluoro-1,3-butadiene
An HFBD purification process includes: (a) contacting a composition containing HFBD with an adsorbent to remove from the HFBD at least two impurities selected from the group consisting of water, an...
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6464757 |
Filter for chemical oxygen generators
The filter contains about 1-15% lithium hydroxide and about 85-99% hopcalite material, having a particle size of approximately 20 to 100 mesh, and can be used in combination with a chemical oxygen...
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6454837 |
Separation of gases containing SF6
Gas mixtures of SF6 and N2, which have been used, for example, as an insulating filler gas for underground cables, for insulating-gas window panes or as a filler gas for car tires and SF6/air...
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6406524 |
Plant for removing fluor containing waste gases
A decentralized cleaning plant for dry cleaning by removing fluorine containing waste gases from a reduction process in several electrolytic cells for aluminum, comprising: a storing place for...
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6325841 |
Purifying agent and purification method for halogen-containing exhaust gas
A cleaning agent and a cleaning process for efficiently removing noxious halogen-based gases such as fluorine, chlorine, boron trifluoride, boron trichloride and tungsten hexafluoride from exhaust...
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6277173 |
System and method for discharging gas
A system for discharging gas emitted from an apparatus or facility having a vacuum pump which sucks the gas emitted from the apparatus or facility while being supplied with a gas other than the...
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6277342 |
Storage and safe delivery of hazardous specialty gases by acid/base reactions with ionic polymers
A method for delivering a gas having a proton affinity of less than 866 kJ/mol is disclosed. A support including at least one polymer sufficiently acidic to protonate the gas is contacted with the...
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6273935 |
Apparatus and method for trapping a toxic gas
An apparatus and a method for trapping a toxic gas contained in an exhaust gas from a process chamber are disclosed. In the apparatus, two toxic gas traps are provided which are connected in series...
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6224677 |
Gas recovery unit utilizing dual use of gas
A CVD device A is provided which is equipped with a gas introduction part A3 having an inert gas supply part G1 for supplying a diluting inert gas and a cleaning gas supply path G2 for supplying a...
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6187077 |
Separation of CF4 and C2F6 from a perfluorocompound mixture
A process for separating at least one of CF4 and C2 F6 from a gas. The process includes the steps of: (a) contacting a gas mixture comprising (i) at least one of CF4 and C2 F6, (ii) at least one of...
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6060033 |
Process for removing HCl from hydrocarbon streams
The invention relates to a process for removing hydrogen halides from hydrocarbon-containing streams. More particularly, the invention relates to a process and an HCl sorbent for the removal of HCl...
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6017382 |
Method of processing semiconductor manufacturing exhaust gases
A method of processing semiconductor manufacturing exhaust gases for recovering at least hexafluoroethane in which a feed stream composed of the exhaust gases is passed through an adsorbent bed...
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6004377 |
System for collecting and refining SF6 gas and method therefor
SF6 gas is collected from the inside of a gas insulated machine during maintenance and inspection and is refined. Compositions of the refined SF6 gas are analyzed and confirmed to be reusable at...
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5993766 |
Gas source and dispensing system
A system for the storage and delivery of a sorbable fluid, comprising a storage and dispensing vessel containing a sorbent material having sorptive affinity for the sorbable fluid, and from which...
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