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9009861 Substrate measurement apparatus with electron distortion unit  
Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of...
8884608 AFM-coupled microscale radiofrequency probe for magnetic resonance imaging and spectroscopy  
The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of...
8832859 Probe alignment tool for the scanning probe microscope  
A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of...
8793811 Method and apparatus for infrared scattering scanning near-field optical microscopy  
This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically,...
8739311 Image force microscopy of molecular resonance  
A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical...
8723116 Method of determining an applicable threshold for determining the critical dimension of at least one category of patterns imaged by atomic force scanning electron microscopy  
A method of determining an applicable threshold for determining the critical dimension of a category of patterns imaged by atomic force scanning electron microscopy is presented. The method...
8713711 Cantilevered probe detector with piezoelectric element  
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a...
8656510 System, apparatus, and method for simultaneous single molecule atomic force microscopy and fluorescence measurements  
An apparatus, system, and method of integrating atomic force microscopy (AFM) and fluorescence microscopy (FM). One particular application is to simultaneous single molecular fluorescence with AFM...
8601609 Friction force microscope  
Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism...
8549661 Apparatus for performing magnetic resonance force microscopy on large area samples  
An apparatus for performing magnetic resonance force microscopy on one or more large area samples comprising a base plate, one or more heat sink plates coupled to the base plate, one or more...
8533861 Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy  
Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and...
8528111 Method for positioning an atomic force microscopy tip in a cell  
A method for positioning a tip of an atomic force microscope relative to a intracellular target site in a cell is provided. In general terms, the method comprises: a) positioning a fluorescent tip...
8495761 Planar positioning device and inspection device provided with the same  
According to one embodiment, a planar positioning device includes a first actuator displaceable in a first axis direction, a second actuator displaceable in a second axis direction perpendicular...
8445846 Beam optical component having a charged particle lens  
The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a...
8438660 Micro contact prober  
The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at...
8434161 Cantilevered probe detector with piezoelectric element  
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a...
8434160 Cantilevered probe detector with piezoelectric element  
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a...
8418261 Stage for scanning probe microscopy and sample observation method  
It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample...
8368017 Method for the operation of a measurement system with a scanning probe microscope and a measurement system  
The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a...
8353061 Near-field scanning optical microscopy with nanoscale resolution from microscale probes  
To date, the probes of scanning near-field optical microscopes were aimed at creating electromagnetic field characteristics that are maximally localized near a nano-sized point (miniature...
8353059 Optical scanning probe  
The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light...
8286260 Protein microscope  
A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques and includes: (A) an atmospheric...
8220067 Cantilevered probe detector with piezoelectric element  
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a...
8212227 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus  
An electron beam apparatus equipped with a height detection system includes an electron beam unit emitting an electron beam to the specimen, and a height detection system for detecting height of...
8117668 Optical scanning probe  
The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light...
8108943 Method and system for near-field spectroscopy using targeted deposition of nanoparticles  
There is provided in one embodiment of the invention a method for analyzing a sample material using surface enhanced spectroscopy. The method comprises the steps of imaging the sample material...
7977633 Phase plate, in particular for an electron microscope  
The invention concerns a phase plate, in particular for an electron microscope, which is disposed in an electron beam path (4), comprises at least one thin film (8, 8a-h), which thin film is at...
7928409 Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions  
A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at...
7858935 Method and system for conducting event-streamed spectrum imaging  
A method and system for conducting event-streamed spectrum imaging concurrently collects electron and spectral signals resulting from a raster scan of a sample. The signals are formatted and...
7770232 Scanning probe microscope system  
A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with...
7735146 Protein microscope  
A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an...
7723681 Observation method with electron beam  
For the purpose of repeatedly observing the bottom of a contact hole with a high aspect ratio, the potential of an electrostatic charge in each of a pattern to be observed and a vicinity of a...
7709791 Scanning probe microscope with automatic probe replacement function  
Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner...
7694346 Cantilevered probe detector with piezoelectric element  
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a...
7663102 High current density particle beam system  
The present invention relates to charged particle beam devices. The devices comprise an emitter for emitting charged particles; an aperture arrangement with at least two apertures for separating...
7663103 Line-width measurement adjusting method and scanning electron microscope  
A line-width measurement adjusting method, which is used when first and second electron beam intensity distributions for measuring a line width are produced from intensity distribution images of...
7655923 Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system  
A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn)...
7591858 Mirror optic for near-field optical measurements  
A mirror optic (10) is provided for near-field optical measurement of a specimen (1), wherein the mirror optic (10) has a reflector (11) with the shape of a paraboloid with a paraboloid axis (12)...
7566873 High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus  
One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a...
7566888 Method and system for treating an interior surface of a workpiece using a charged particle beam  
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal...
7553334 Defective product inspection apparatus, probe positioning method and probe moving method  
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table...
6985223 Raman imaging and sensing apparatus employing nanoantennas  
A Raman imaging and sensing apparatus is described. The apparatus employs a nanoantenna structure which includes a metal tip spaced from a metal surface or particle. A light beam impinges upon the...
6984822 Apparatus and method for secondary electron emission microscope  
An apparatus and method for inspecting a surface of a sample, particularly but not limited to a semiconductor device, using an electron beam is presented. The technique is called Secondary...
6980937 Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data  
A method and system for quantifying profile characteristics of semiconductor devices, including receiving profile data for a device under evaluation and isolating from the profile data a region...
6979824 Filtered e-beam inspection and review  
The disclosure relates to filtered e-beam inspection and review. One embodiment pertains to the filtered inspection or review of a specimen with a high aspect ratio feature. Advantageously, the...
6977377 Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus  
A charged particle beam control method and apparatus emit a charged particle beam from a charged particle gun, and then accelerate and guide the charged particle beam toward a surface of a sample...
6969853 Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus  
A pattern width measuring apparatus for accurately measuring pattern width of a pattern formed on a wafer using an electron beam. The pattern width measuring apparatus includes: an electron gun...
6967328 Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor  
A method for the electron-microscopic observation of a semiconductor arrangement is provided. It includes providing an electron microscopy optics for imaging secondary electrons emanating from the...
6963067 Scanning electron microscope and sample observing method using it  
The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights...
6960766 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method  
A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large...