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8117668 |
Optical scanning probe
The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light...
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8108943 |
Method and system for near-field spectroscopy using targeted deposition of nanoparticles
There is provided in one embodiment of the invention a method for analyzing a sample material using surface enhanced spectroscopy. The method comprises the steps of imaging the sample material with...
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7977633 |
Phase plate, in particular for an electron microscope
The invention concerns a phase plate, in particular for an electron microscope, which is disposed in an electron beam path (4), comprises at least one thin film (8, 8a-h), which thin film is at...
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7928409 |
Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions
A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at...
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7858935 |
Method and system for conducting event-streamed spectrum imaging
A method and system for conducting event-streamed spectrum imaging concurrently collects electron and spectral signals resulting from a raster scan of a sample. The signals are formatted and...
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7770232 |
Scanning probe microscope system
A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with...
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7735146 |
Protein microscope
A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an...
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7723681 |
Observation method with electron beam
For the purpose of repeatedly observing the bottom of a contact hole with a high aspect ratio, the potential of an electrostatic charge in each of a pattern to be observed and a vicinity of a range...
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7709791 |
Scanning probe microscope with automatic probe replacement function
Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that...
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7694346 |
Cantilevered probe detector with piezoelectric element
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a...
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7663102 |
High current density particle beam system
The present invention relates to charged particle beam devices. The devices comprise an emitter for emitting charged particles; an aperture arrangement with at least two apertures for separating...
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7663103 |
Line-width measurement adjusting method and scanning electron microscope
A line-width measurement adjusting method, which is used when first and second electron beam intensity distributions for measuring a line width are produced from intensity distribution images of...
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7655923 |
Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system
A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are...
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7591858 |
Mirror optic for near-field optical measurements
A mirror optic (10) is provided for near-field optical measurement of a specimen (1), wherein the mirror optic (10) has a reflector (11) with the shape of a paraboloid with a paraboloid axis (12)...
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7566873 |
High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus
One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a...
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7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal...
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7553334 |
Defective product inspection apparatus, probe positioning method and probe moving method
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table...
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6985223 |
Raman imaging and sensing apparatus employing nanoantennas
A Raman imaging and sensing apparatus is described. The apparatus employs a nanoantenna structure which includes a metal tip spaced from a metal surface or particle. A light beam impinges upon the...
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6984822 |
Apparatus and method for secondary electron emission microscope
An apparatus and method for inspecting a surface of a sample, particularly but not limited to a semiconductor device, using an electron beam is presented. The technique is called Secondary Electron...
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6979824 |
Filtered e-beam inspection and review
The disclosure relates to filtered e-beam inspection and review. One embodiment pertains to the filtered inspection or review of a specimen with a high aspect ratio feature. Advantageously, the...
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6980937 |
Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data
A method and system for quantifying profile characteristics of semiconductor devices, including receiving profile data for a device under evaluation and isolating from the profile data a region...
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6977377 |
Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus
A charged particle beam control method and apparatus emit a charged particle beam from a charged particle gun, and then accelerate and guide the charged particle beam toward a surface of a sample...
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6969853 |
Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus
A pattern width measuring apparatus for accurately measuring pattern width of a pattern formed on a wafer using an electron beam. The pattern width measuring apparatus includes: an electron gun for...
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6967328 |
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor
A method for the electron-microscopic observation of a semiconductor arrangement is provided. It includes providing an electron microscopy optics for imaging secondary electrons emanating from the...
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6963067 |
Scanning electron microscope and sample observing method using it
The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights...
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6960766 |
Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method
A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan...
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6956212 |
Electron microscope observation system and observation method
An electron microscope observation system and an observation method are provided. The electron microscope observation system and the observation method can reduce initial investment, and can...
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6953939 |
Testing apparatus using scanning electron microscope
A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test...
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6949744 |
Electron microscopy system, electron microscopy method and focusing system for charged particles
An electron microscopy system and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron...
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6946655 |
Spot grid array electron imaging system
A high data-rate electron beam spot-grid array imaging system is provided that overcomes the low resolution and severe linearity requirements of prior art systems. Embodiments include an imaging...
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6946654 |
Collection of secondary electrons through the objective lens of a scanning electron microscope
A high resolution scanning electron microscope collects secondary Auger electrons through its objective lens to sensitively determine the chemical make-up with extremely fine positional resolution....
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6943349 |
Multi beam charged particle device
The present invention provides an improved column for a charged particle beam device. The column comprises an aperture plate having multiple apertures to produce multiple beams of charged particles...
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6943350 |
Methods and apparatus for electron beam inspection of samples
Methods and apparatus are providing for inspecting a test sample. An electron beam is tuned to cause secondary electron emissions upon scanning a target area. Reactive substances are introduced to...
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6943351 |
Multi-column charged particle optics assembly
A multi-column charged particle optics assembly comprises: a first optical component which is continuous through all columns of the charged particle optics assembly; and a multiplicity of...
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6936816 |
High contrast inspection and review of magnetic media and heads
One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons...
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6936981 |
Retarding electron beams in multiple electron beam pattern generation
A multiple electron beam pattern generator includes a multiple electron beam source to generate a plurality of electron beams that are modulated according to a pattern. An anode accelerates the...
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6933499 |
Electron microscope, method for operating the same, and computer-readable medium
An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image...
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6930308 |
SEM profile and surface reconstruction using multiple data sets
A highly accurate technique for inspecting semiconductor devices is described. The technique involves utilizing multiple sets of measurement data obtained by a scanning electron microscope (SEM) to...
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6930309 |
Dual-energy electron flooding for neutralization of charged substrate
One embodiment disclosed relates to a method of electron beam inspection or review of a substrate having insulating materials therein. An area of the substrate is simultaneously exposed to a...
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6924484 |
Void characterization in metal interconnect structures using X-ray emission analyses
Disclosed are methods and apparatus for characterizing a potential void or voids by analyzing the X-ray count of one or more emitted X-ray species as emitted from an interconnect structure under...
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6917043 |
Individually addressable cathodes with integrated focusing stack or detectors
Systems and method are described for addressable field emission array (AFEA) chips. A plurality of individually addressable cathodes are integrated with an electrostatic focusing stack and/or a...
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6903338 |
Method and apparatus for reducing substrate edge effects in electron lenses
One embodiment disclosed pertains to a method for inspecting a substrate. The method includes inserting the substrate into a holding place of a substrate holder, moving the substrate holder under...
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6897442 |
Objective lens arrangement for use in a charged particle beam column
An objective lens arrangement is presented for mounting in a charged particle beam column adjacent to an anode tube that defines a beam drift space for a charged particle beam propagating towards a...
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6897443 |
Portable scanning electron microscope
We have developed a particular combination of elements and devices which enables the portability of a scanning electron microscope (SEM). In particular the combination enables a small size,...
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6897441 |
Reducing chromatic aberration in images formed by emmission electrons
An imaging device, such as an EEM, includes an electric/magnetic lens used to focus pulsed electrons emitted from an object on to a target plane. Before a pulse of emitted electrons reaches the...
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6893986 |
Method of reducing internal stress in materials
Methods are provided for adjusting and controlling the stress between layers of material in a multilayer structure. A first stress is configured in a region of stress on the substrate material. A...
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6894277 |
Scanning electron microscope
A scanning electron microscope in the present invention includes an electron source 1 to radiate an electron beam, an objective lens system 9 to focus the radiated electron beam on a sample 10,...
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6891159 |
Converting scanning electron microscopes
A device for converting a scanning electron microscope (SEM) to a scanning transmission electron microscope (STEM) is adapted to be mounted on a conventional SEM. The device has a casing mountable...
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6888138 |
Absorption current image apparatus in electron microscope
It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional...
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6885000 |
Method and apparatus to correct for stage motion in E-beam inspection
One embodiment disclosed relates to an apparatus for inspecting a substrate. The apparatus includes at least an illumination system, a stage, a multiple-pixel detector, an imaging system, a...
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