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8181267 |
Scanning-type probe microscope
To provide a scanning probe microscope wherein the scanning means is not damaged by fluids, the scanning probe microscope 30 comprises a cantilever support part 2 for supporting a cantilever 1;...
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8161568 |
Self displacement sensing cantilever and scanning probe microscope
A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever...
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8156568 |
Hybrid contact mode scanning cantilever system
This invention addresses a contact mode hybrid scanning system (HSS), which can be used for measuring topography. The system consists of a cantilever or a cantilever array, a scanning stage, a...
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8151368 |
Dynamic mode AFM apparatus
A dynamic mode AFM apparatus for allowing high-speed identification of atoms of a sample surface, which comprises a scanner for performing three-dimensional scanning; an AC signal of a resonance...
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8141168 |
Scanning probe microscope and a method to measure relative-position between probes
A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope...
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8108942 |
Probe microscope
A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting...
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8074293 |
Defective product inspection apparatus, probe positioning method and probe moving method
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table...
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8074291 |
Harmonic correcting controller for a scanning probe microscope
A scanning probe microscope and method for operating the same to correct for errors introduced by a repetitive scanning motion are disclosed. The microscope includes an actuator that moves the...
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8074292 |
High resolution wide angle tomographic probe
The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a...
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8028567 |
AFM tweezers, method for producing AFM tweezers, and scanning probe microscope
AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a...
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8028343 |
Scanning probe microscope with independent force control and displacement measurements
A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the...
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8024963 |
Material property measurements using multiple frequency atomic force microscopy
Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs...
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7982194 |
Single nanoparticle tracking spectroscopic microscope
A system that can maintain and track the position of a single nanoparticle in three dimensions for a prolonged period has been disclosed. The system allows for continuously imaging the particle to...
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7971266 |
Method for providing a probe for a probe-microscopic analysis of a test sample in a probe microscope and arrangement with a probe microscope
The present invention relates to a method for providing a measuring probe (1, 1a, 2) for a probe microscopic examination of a sample in a probe microscope, in particular a scanning probe...
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7958566 |
AFM probe with variable stiffness
Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a...
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7958563 |
Method for using an atomic force microscope
The present invention relates to a method of using an atomic force microscope comprising exciting natural lower and higher vibration modes of a microlever (M) placed on a sample, and analyzing the...
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7921466 |
Method of using an atomic force microscope and microscope
The invention relates to a method of using an atomic force microscope and to a microscope. The inventive method comprises the following steps consisting in at least performing bimodal excitation of...
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7904966 |
Scanning probe microscope apparatus
There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably...
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7877816 |
Scanning probe in pulsed-force mode, digital and in real time
Microscope, in particular a scanning probe microscope, comprising a programmable logic device.
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7874016 |
Scanning probe microscope and scanning method
To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the...
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7818816 |
Substrate patterning by electron emission-induced displacement
Disclosed are methods and devices for patterning micro- and/or nano-sized pattern elements on a substrate using field emitted electrons from an element. Disclosed methods and devices can also be...
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7810166 |
Device and method for scanning probe microscopy
The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements...
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7770231 |
Fast-scanning SPM and method of operating same
A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image....
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7745206 |
AFM for simultaneous recognition of multiple factors
An atomic force microscope and a method for detecting interactions between a probe and two or more sensed agents on a scanned surface and determining the relative location of two or more sensed...
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7735358 |
Self-sensing tweezer devices and associated methods for micro and nano-scale manipulation and assembly
The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first...
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7709791 |
Scanning probe microscope with automatic probe replacement function
Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that...
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7608842 |
Driving scanning fiber devices with variable frequency drive signals
Methods of moving or vibrating cantilevered optical fibers of scanning fiber devices are disclosed. In one aspect, a method may include vibrating the cantilevered optical fiber at an initial...
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7569077 |
Position control for scanning probe spectroscopy
A method of position control for scanning probe spectroscopy of a specimen. Probe positional error is determined by comparing images generated from a sequence of scans to identify differences...
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7559261 |
Device and method for measuring molecule using gel substrate material
A device for measuring a molecule, wherein a gel substrate material (200) comprises a gel (220) containing a solvent in the network structure thereof and a molecular chain (210), and a cantilever...
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6984589 |
Method for determining etching process conditions and controlling etching process
Conventionally, there is no method for quantitatively evaluating the three-dimensional shape of an etched pattern in a non-destructive manner and it takes much time and costs to determine etching...
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6985425 |
Electron beam recorder and method thereof
Pits are exposed and formed on a resist master disc by an electron beam recorder. A leading end and a trailing end of each pit are substantially the same form. The electron beam recorder includes:...
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6969853 |
Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus
A pattern width measuring apparatus for accurately measuring pattern width of a pattern formed on a wafer using an electron beam. The pattern width measuring apparatus includes: an electron gun for...
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6967328 |
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor
A method for the electron-microscopic observation of a semiconductor arrangement is provided. It includes providing an electron microscopy optics for imaging secondary electrons emanating from the...
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6936981 |
Retarding electron beams in multiple electron beam pattern generation
A multiple electron beam pattern generator includes a multiple electron beam source to generate a plurality of electron beams that are modulated according to a pattern. An anode accelerates the...
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6930308 |
SEM profile and surface reconstruction using multiple data sets
A highly accurate technique for inspecting semiconductor devices is described. The technique involves utilizing multiple sets of measurement data obtained by a scanning electron microscope (SEM) to...
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6927400 |
Sample manipulation system
A sample manipulator that includes a shaft, a proximal end, a distal end that includes a sample holder and a support arm having both a retracted position and a deployed position. The support arm is...
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6924489 |
Device for reducing the impact of distortions in a microscope
This invention relates to a device for reducing the impact of undesired distortions when studying a sample in an electron microscope, wherein said sample is arranged to be mounted on a...
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6894287 |
Microfabrication apparatus and microfabrication method
A microfabrication apparatus and a microfabrication method that, using a mechanical probe formed at its tip with a microscopic rod in sample preparation, can improve the life of the probe to 10 to...
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6890772 |
Method and apparatus for determining two dimensional doping profiles with SIMS
A method of forming a SIMS monitor device for determining a doping profile of a semiconductor device structure including providing a plurality of regularly repeating semiconductor structures...
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6872958 |
Platform positioning system
A system for precisely positioning and moving a platform relative to a support structure is disclosed herein. The platform is particularly suitable for carrying wafers. Charged particle optics can...
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6828571 |
Apparatus and methods of controlling surface charge and focus
One embodiment disclosed relates to a method of setting a surface charge of an area on a substrate to a desired level. The substrate is held on a stage, and a stage bias voltage applied to the...
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6740876 |
Scanning probe microscope
A scanning probe microscope comprises scanning control means for controlling raster scanning of an XYZ translator, and displacement detection means for detecting amount of displacement of the XYZ...
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6621082 |
Automatic focusing system for scanning electron microscope equipped with laser defect detection function
A scanning electron microscope equipped with a laser defect detection function has an automatic focusing function that performs the steps of: obtaining a deviation (offset) amount between focal...
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6611140 |
Magnetic sensing unit for detecting nanometer scale displacements or flections
A magnetic sensing unit for measuring displacements on a nanometer scale is provided. A moveable part and a fixed part of a microdevice magnetic sensing unit comprises a magnetic element having a...
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6573508 |
Electron beam exposing method
In order to provide an electron beam exposure apparatus and an exposing method using an electron beam that realizes highly precise pattern exposure, an axis difference generated by the variable...
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6566653 |
Investigation device and method
An investigation device includes a time of flight mass spectrometer with an entrance opening, and an electrically conductive tip on a cantilever which is movable from a first position near a sample...
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6441371 |
Scanning probe microscope
The present invention relates to a two-phase scanning method and apparatus for obtaining information necessary to analyze physical properties of materials using a scanning probe microscope. The...
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6426501 |
Defect-review SEM, reference sample for adjustment thereof, method for adjustment thereof, and method of inspecting contact holes
There is disclosed a defect-review SEM (scanning electron microscope) and method for inspecting contact holes having small aperture diameters (e.g., less than 0.05 μm) and high aspect ratios ...
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6410929 |
Electron beam irradiation apparatus
An electron beam irradiation apparatus has an electron accelerator for accelerating electrons emitted from an electron beam source to irradiate a target, and a power supply for supplying power of...
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6405584 |
Probe for scanning probe microscopy and related methods
A scanning probe microscope includes a sensor head adjacent a stage for holding a sample, a scanning actuator for positioning the sensor head relative to the sample, and a probe carried by the...
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