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8161568 |
Self displacement sensing cantilever and scanning probe microscope
A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever...
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8141168 |
Scanning probe microscope and a method to measure relative-position between probes
A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope...
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8099792 |
Methods and apparatus for spatially resolved photocurrent mapping of operating photovoltaic devices using atomic force photovoltaic microscopy
Atomic force photovoltaic microscopy apparatus and related methodologies, as can be used to quantitatively measure spatial performance variations in functioning photovoltaic devices.
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8089053 |
Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs)
The present invention relates to double-tilt specimen holders of the side-entry type for transmission electron microscopy (TEM). The invention uses Micro Electro Mechanical Systems (MEMS) and...
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8063383 |
Inertial positioner and an optical instrument for precise positioning
We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any...
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8024816 |
Approach method for probe and sample in scanning probe microscope
In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement...
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8006315 |
Photon-emission scanning tunneling microscopy
The present invention relates to an indirect-gap semiconductor substrate, the gap being greater than that of silicon and preferably greater than 1.5 eV, to its use for imaging a specimen by...
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8001831 |
Positioning apparatus and scanning probe microscope employing the same
There is provided a scanning probe microscope employing a positioning apparatus M1 including a unit to be driven in XY direction having a substantially square form in plane geometry at the center...
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7891015 |
High-bandwidth actuator drive for scanning probe microscopy
An actuator subsystem for use in a scanning probe microscope (SPM) system having a probe for measuring a sample comprises and actuator and an actuator driving circuit. The actuator operates in the...
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7891016 |
Automatic landing method and apparatus for scanning probe microscope using the same
Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a...
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7849516 |
Probe for scanning over a substrate and a data storage device
A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a...
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7825378 |
Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus
A method for improving the resolution of STEM images of thick samples. In STEM, the diameter of the cross-over depends on the opening half-angle α of the beam and can be as low as 0.1 nm. For ...
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7784107 |
High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
An system for the measurement, analysis, and imaging of objects and surfaces in a variety of sizes is provided. In the most general terms, the invention relates to a device capable of measuring an...
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7709791 |
Scanning probe microscope with automatic probe replacement function
Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that...
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7690046 |
Drive stage for scanning probe apparatus, and scanning probe apparatus
A drive stage for a scanning probe apparatus includes a supporting member, a plurality of movable portions fixed to the supporting member, and a plurality of drive elements configured and...
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7659509 |
System for scanning probe microscope input device
In accordance with the invention, a computer pointing device is interfaced with an SPM system to provide real time control of the SPM and improve the ease of use.
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7644447 |
Scanning probe microscope capable of measuring samples having overhang structure
Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a...
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7569077 |
Position control for scanning probe spectroscopy
A method of position control for scanning probe spectroscopy of a specimen. Probe positional error is determined by comparing images generated from a sequence of scans to identify differences...
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6946654 |
Collection of secondary electrons through the objective lens of a scanning electron microscope
A high resolution scanning electron microscope collects secondary Auger electrons through its objective lens to sensitively determine the chemical make-up with extremely fine positional resolution....
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6690007 |
Three-dimensional atom microscope, three-dimensional observation method of atomic arrangement, and stereoscopic measuring method of atomic arrangement
Forward scattering peaks of photoelectrons having different angular momenta is generated by radiating to a sample two rays of circularly polarized light that differ in a rotary direction. Two...
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6677581 |
High energy electron diffraction apparatus
A high-energy electron diffraction apparatus in which its electron beam source includes a field emission type electron emitter and a final lens stop or diaphragm is disposed between an objective...
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6630668 |
Remote control of a scanning electron microscope aperture and gun alignment
This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.
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6593571 |
Scanning probe microscope
A scanning probe microscope has a cantilever section comprised of a single cantilever chip, at least one first conductive cantilever having a first probe at a free end thereof and extending from...
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6525316 |
Multiaxis actuator and measuring head, especially for a scanning probe microscope
Finely adjustable actuators are used for positioning a sensor or a scanning tip, especially for scanning tunnelling microscopes and other scanning microscopes, i.e. scanning probe microscopes. The...
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6489611 |
Atomic force microscope for profiling high aspect ratio samples
Apparatus and methods are provided for using atomic force microscopy for profiling high aspect ratio features. Probe landing techniques include scanning prior to bringing the probe into contact...
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6407385 |
Methods and apparatus for removing particulate foreign matter from the surface of a sample
Methods and apparatus are disclosed in which pulses of laser light are used to remove particles from a sample surface. The laser light can have a wavelength absorbed by water, and the sample...
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6405137 |
Method and apparatus for performing chemical analysis using imaging by scanning thermal microscopy
Sub-micron chemical analysis of the surface and sub-surface of a sample material is performed at, above or under atmospheric pressure, or on for a sample material submerged in a substance. A...
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6313461 |
Scanning-aperture electron microscope for magnetic imaging
A scanning-aperture electron microscope system and method in which a radiation source generates a radiation beam that is incident upon a surface of a sample material causing electrons to be ejected...
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6291822 |
Scanning probe microscope
A scanning probe microscope comprises a cantilever having a probe at an end portion thereof. A scanning signal generating device generates a main scanning signal and a sub-scanning signal. A main...
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6257053 |
Scanning probe microscope having piezoelectric member for controlling movement of probe
A scanning probe microscope comprises an elastic probe having a longitudinal axis and a probe tip. A vibration device has a piezoelectric vibrating member and an AC voltage generator for vibrating...
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6252238 |
Micro-processing method using a probe
An electroconductive micro-region surrounded by a non-electroconductive region is formed on a non-electroconductive substrate surface. Such an electroconductive micro-region is formed by forming a...
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6229607 |
Fine movement mechanism unit and scanning probe microscope
A fine movement mechanism unit is configured by a supporting member, two fixed sections fixed to this supporting member, two pairs of parallel-plate flexural sections disposed between the two fixed...
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6198097 |
Photocharge microscope
An apparatus and/or system is described which uses the photocharge voltage concept in lieu of optical scattering techniques to measure surface topology and properties of materials. The system is...
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6078044 |
Probe scanning apparatus
A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample comprises a probe and voice coil motors for generating a moving force for...
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6051833 |
Probe scanning device
A spindle scans a scanner unit comprising a slender tube portion, a thick tube portion and the like in x and y directions by receiving power from a movable member of a voice coil motor. A...
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6000947 |
Method of fabricating transistor or other electronic device using scanning probe microscope
A scanning probe microscope is used to fabricate a gate or other feature of a transistor by scanning a silicon substrate in which the transistor is to be formed. An electric field is created...
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5990477 |
Apparatus for machining, recording, and reproducing, using scanning probe microscope
A machining, recording, and reproducing apparatus using a scanning probe microscope comprising: a probe equipped with a probe tip at its front end, a vibration application portion consisting of a...
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5945671 |
Scanning probe microscope and micro-area processing machine both having micro-positioning mechanism
A scanning probe microscope has a probe for measuring the shape of a sample surface and various physical properties of the sample, and a micro-positioning mechanism for positioning the sample...
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5852232 |
Acoustic sensor as proximity detector
An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic...
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5808302 |
Fine positioning apparatus with atomic resolution
A fine-positioning apparatus for a scanning probe microscope includes magnetic solenoid actuators for each of the x, y and z scanning axes of the microscope. The sample is mounted on the coil of...
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5801939 |
Precision positioning control apparatus and precision positioning control method
A precision positioning control apparatus includes a coarse positioner, a fine positioner, a displacement totalizer for totaling the displacements of the two positioners, a total displacement...
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5763879 |
Diamond probe tip
A probe for electrical contact with a metal layer of an integrated circuit wherein the probe features a polycrystalline diamond layer coating a fine conductive wire. The diamond coating has exposed...
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5756997 |
Scanning probe/optical microscope with modular objective/probe and drive/detector units
A scanning probe and optical microscope for inspecting an object the comprises a microscope stand to support the object, a modular objective/probe unit, a modular drive/detector unit, and an...
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5744799 |
Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
A method of and apparatus for producing improved real-time continual nanometer scale positioning data of the location of sensing probe used with one of a scanning tunneling microscope, an atomic...
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5700953 |
Method for mapping mechanical property of a material using a scanning force microscope
The method for mapping a mechanical property of a surface of a sample with a scanning force microscope comprises the steps of (a) scanning a fine tip in contact with the surface of the sample...
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5664036 |
High resolution fiber optic probe for near field optical microscopy and method of making same
The near field optical microscopy probe has a conically tapered tip formed from the inner core of a fiber optic cable. The tapered tip protrudes longitudinally from the outer cladding and has a...
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5618760 |
Method of etching a pattern on a substrate using a scanning probe microscope
A scanning probe microscope is used to pattern a layer of resist, and the pattern is transferred to a substrate. First, an underlayer formed of, for example, polyimide and a top layer formed of,...
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5589686 |
Method of an apparatus for real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
A method of and apparatus for producing real-time continual nanometer scale positioning data of the location of sensing probe used with one of a scanning tunneling microscope, an atomic force...
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5581082 |
Combined scanning probe and scanning energy microscope
A combined scanning probe and scanning energy microscope, in which the same scanning system is used for both the scanning probe and scanning energy images. A sample is translated substantially...
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5543614 |
Scanning probe microscope capable of suppressing probe vibration caused by feedback control
A scanning probe microscope having a probe for scanning a sample, a piezoelectric unit finely movable in the X, Y and Z directions, and a probe control unit for controlling a fine movement amount...
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