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8160848 |
Apparatus for generating coarse-grained simulation image of sample to be measured with a probe of a scanning probe microscope
A sample atomic configuration creation part in a control section creates the atomic arrangement data of a sample, and a sample surface height calculation part calculates a sample surface height for...
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8141168 |
Scanning probe microscope and a method to measure relative-position between probes
A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope...
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8089053 |
Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs)
The present invention relates to double-tilt specimen holders of the side-entry type for transmission electron microscopy (TEM). The invention uses Micro Electro Mechanical Systems (MEMS) and...
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8063383 |
Inertial positioner and an optical instrument for precise positioning
We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any...
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8024816 |
Approach method for probe and sample in scanning probe microscope
In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement...
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8001831 |
Positioning apparatus and scanning probe microscope employing the same
There is provided a scanning probe microscope employing a positioning apparatus M1 including a unit to be driven in XY direction having a substantially square form in plane geometry at the center...
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7945962 |
Information memory apparatus using probe
In a two-dimensional probe array, an interval between the leading ends of probes adjacent to each other in an X direction is made shorter than that between the leading ends of probes adjacent to...
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7904966 |
Scanning probe microscope apparatus
There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably...
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7891015 |
High-bandwidth actuator drive for scanning probe microscopy
An actuator subsystem for use in a scanning probe microscope (SPM) system having a probe for measuring a sample comprises and actuator and an actuator driving circuit. The actuator operates in the...
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7874016 |
Scanning probe microscope and scanning method
To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the...
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7849516 |
Probe for scanning over a substrate and a data storage device
A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a...
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7709791 |
Scanning probe microscope with automatic probe replacement function
Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that...
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7694347 |
Measuring device with daisy type cantilever wheel
A measuring device with a daisy type cantilever wheel enabling easier setting of a measuring head and modification head by rotating the daisy type cantilever wheel, enabling modification, adhesion...
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7659509 |
System for scanning probe microscope input device
In accordance with the invention, a computer pointing device is interfaced with an SPM system to provide real time control of the SPM and improve the ease of use.
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7569077 |
Position control for scanning probe spectroscopy
A method of position control for scanning probe spectroscopy of a specimen. Probe positional error is determined by comparing images generated from a sequence of scans to identify differences...
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6734426 |
Probe scanning device
A probe scanning device has a first tubular member extending in a z direction. A second tubular member has a rear end portion extending into the first tubular member to define a space between an...
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6630668 |
Remote control of a scanning electron microscope aperture and gun alignment
This invention relates to a remote control system which through gear motors coupled to the scanning electron microscope (SEM) manual control knobs readily permits remote adjustments as necessary.
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6310342 |
Optical microscope stage for scanning probe microscope
Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure...
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6257053 |
Scanning probe microscope having piezoelectric member for controlling movement of probe
A scanning probe microscope comprises an elastic probe having a longitudinal axis and a probe tip. A vibration device has a piezoelectric vibrating member and an AC voltage generator for vibrating...
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5852232 |
Acoustic sensor as proximity detector
An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic...
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5705814 |
Scanning probe microscope having automatic probe exchange and alignment
A scanning probe microscope and method having automated exchange and precise alignment of probes, wherein one or more additional stored probes for installation onto a probe mount are stored in a...
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5614712 |
Method of engaging the scanning probe of a scanning probe microscope with a sample surface
A method for initially positioning the scanning probe of a scanning probe microscope includes the steps of initially using fine position control to reduce the distance between probe and sample and,...
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5496999 |
Scanning probe microscope
A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so...
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5418771 |
Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate
An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate...
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5262643 |
Automatic tip approach method and apparatus for scanning probe microscope
A non-contact, step-wise method for automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface utilizing acoustic and Van der Waals interactions...
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5223713 |
Scanner for scanning tunneling microscope
A three-dimensional scanner for moving the probe tip of a scanning tunneling microscope. The scanner has a table equipped with a three-dimensional coarse displacement mechanism. Two xy...
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4839520 |
Production of pulsed electron beams
Apparatus for producing a pulsed electron beam, particularly adapted for inspecting integrated circuits, includes a beam scanner (10) for causing a continuous electron beam to scan a circle, which...
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4814622 |
High speed scanning tunneling microscope
A scanning tunneling microscope with a stage capable of coarse motion in the horizontal (or X Y) plane and also capable of fine or scanning motion in the X, Y and Z directions. The stage comprises...
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4766311 |
Method and apparatus for precision SEM measurements
A method and apparatus for making precise measurements as small as in submicron distances of an object or specimen (13) includes a stage (18) which is movable under the control of a microprocessor...
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4762996 |
Coarse approach positioning device
This die-shaped coarse-approach positioning device is particularly suited for the sample holder of a scanning tunneling microscope or the like. It comprises two blocks (21, 23), one (21)...
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4392058 |
Electron beam lithography
In electron beam lithography apparatus a substrate, on which an exposure pattern is to be produced, is exposed to a plurality of electron beams. In a double beam arrangement one beam is capable of...
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