|
Match
|
Document |
Document Title |
|
|
8178836 |
Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope
A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the...
|
|
|
8074292 |
High resolution wide angle tomographic probe
The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a...
|
|
|
7958564 |
Scanning measurement instrument
A scanning measurement instrument is capable of simultaneously achieving both higher accuracy and higher speed in autonomous scanning measurement. The instrument includes a path information holding...
|
|
|
7877816 |
Scanning probe in pulsed-force mode, digital and in real time
Microscope, in particular a scanning probe microscope, comprising a programmable logic device.
|
|
|
7865966 |
Method and apparatus of automatic scanning probe imaging
A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning...
|
|
|
7836757 |
Phase feedback AFM and control method therefor
A phase feedback AFM (atomic force microscope) and method for the phase feedback AFM. A cantilever is driven to oscillate at a constant frequency close to the resonance frequency of the cantilever...
|
|
|
7834315 |
Method for STEM sample inspection in a charged particle beam instrument
A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A...
|
|
|
7770439 |
Method and apparatus of scanning a sample using a scanning probe microscope
A method and apparatus of scanning a sample with a scanning probe microscope including scanning a surface of the sample according to at least one scan parameter to obtain data corresponding to the...
|
|
|
7770232 |
Scanning probe microscope system
A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with...
|
|
|
7745782 |
Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope
A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the...
|
|
|
7694346 |
Cantilevered probe detector with piezoelectric element
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a...
|
|
|
7663103 |
Line-width measurement adjusting method and scanning electron microscope
A line-width measurement adjusting method, which is used when first and second electron beam intensity distributions for measuring a line width are produced from intensity distribution images of...
|
|
|
7618465 |
Near-field antenna
The invention relates to a near-field antenna comprising a dielectric shaped body having a tip. The shaped body is characterized in that at least the surface of the tip is metallized, thereby...
|
|
|
7588605 |
Scanning type probe microscope
To be able to measure a value with regard to a dissipation, or a value in proportion to a dissipation energy without making a premise by being brought into a steady state. Exciting means 12 for...
|
|
|
7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal...
|
|
|
6979824 |
Filtered e-beam inspection and review
The disclosure relates to filtered e-beam inspection and review. One embodiment pertains to the filtered inspection or review of a specimen with a high aspect ratio feature. Advantageously, the...
|
|
|
6980937 |
Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data
A method and system for quantifying profile characteristics of semiconductor devices, including receiving profile data for a device under evaluation and isolating from the profile data a region...
|
|
|
6967328 |
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor
A method for the electron-microscopic observation of a semiconductor arrangement is provided. It includes providing an electron microscopy optics for imaging secondary electrons emanating from the...
|
|
|
6963067 |
Scanning electron microscope and sample observing method using it
The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights...
|
|
|
6959108 |
Image based defect detection system
In an inspection system, workpieces to be inspected are consecutively and automatically launched to pass unsupported through the field of view of a plurality of cameras. As a workpiece passes...
|
|
|
6956212 |
Electron microscope observation system and observation method
An electron microscope observation system and an observation method are provided. The electron microscope observation system and the observation method can reduce initial investment, and can...
|
|
|
6956210 |
Methods for preparing samples for atom probe analysis
The present disclosure provides methods for preparing samples for atom probe analysis and methods for analyzing such samples. In one exemplary implementation, a surface of the sample may be...
|
|
|
6946654 |
Collection of secondary electrons through the objective lens of a scanning electron microscope
A high resolution scanning electron microscope collects secondary Auger electrons through its objective lens to sensitively determine the chemical make-up with extremely fine positional resolution....
|
|
|
6936816 |
High contrast inspection and review of magnetic media and heads
One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons...
|
|
|
6933499 |
Electron microscope, method for operating the same, and computer-readable medium
An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image...
|
|
|
6930308 |
SEM profile and surface reconstruction using multiple data sets
A highly accurate technique for inspecting semiconductor devices is described. The technique involves utilizing multiple sets of measurement data obtained by a scanning electron microscope (SEM) to...
|
|
|
6924481 |
Scanning microscope with brightness control
Automatic pattern matching and shape measurement are enabled by adjusting a brightness level of a microscope image based on information of a local region of the image so that a magnified image of...
|
|
|
6919564 |
Inspection method, apparatus and system for circuit pattern
Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by...
|
|
|
6911832 |
Focused ion beam endpoint detection using charge pulse detection electronics
A system and method for detecting a milling endpoint on a semiconductor sample by directing an ion beam from a focused ion beam (FIB) apparatus at the sample and using charge pulse detection...
|
|
|
6888137 |
Instrument and method for observing selected stored images acquired from a scanning charged-particle beam
There is disclosed a scanning electron charged-particle beam instrument facilitating a search for a desired field of view on a specimen. Also, a method of observing a specimen image with this...
|
|
|
6878935 |
Method of measuring sizes in scan microscopes
For measuring sizes in a scanning measuring microscope a nominal magnification is selected so that an object image occupies a substantial part of a field of view, an actual magnification is...
|
|
|
6867407 |
Light probe microscope including picture signal processing means
A light probe microscope has a probe having a tip, a mechanism for positioning the probe tip closely to a sample surface and causing two-dimensional scanning movement between the probe tip and the...
|
|
|
6859760 |
Remote semiconductor microscopy
A method and apparatus are described for remote semiconductor microscopy whereby video signals are broadcast from one or more microscopes to remote viewers. A live video signal is broadcast from...
|
|
|
6841776 |
Method and apparatus for high-speed inspection and review
One embodiment disclosed relates to an apparatus for substrate inspection and review. The apparatus includes at least a first subsystem, a processor, and a second subsystem. The first subsystem is...
|
|
|
6841775 |
Electron microscope
An electron microscope which permits an operator to perform astigmatic correction and beam alignment. A field of view capable of clearly displaying astigmatism or beam misalignment in terms of a...
|
|
|
6838667 |
Method and apparatus for charged particle beam microscopy
By use of charged particle beam images picked up in different conditions, a positional displacement caused by parallax is analyzed, and an optics of an apparatus for charged particle beam...
|
|
|
6828571 |
Apparatus and methods of controlling surface charge and focus
One embodiment disclosed relates to a method of setting a surface charge of an area on a substrate to a desired level. The substrate is held on a stage, and a stage bias voltage applied to the...
|
|
|
6825467 |
Apparatus for scanning a crystalline sample and associated methods
The present invention provides and apparatus and method for scanning a crystalline sample comprising a sample holder, an electron source for generating an electron beam and a scanning actuator for...
|
|
|
6822260 |
Linewidth measurement structure with embedded scatterometry structure
A method of manufacturing a semiconductor device includes depositing a layer over a substrate and etching the layer to form a grating structure, a cross bridge test structure and a line width...
|
|
|
6822232 |
Electronic microscope observation system and observation method
An electron microscope observation system and an observation method are provided. According to one aspect of the invention, an observation appointment and approval screen is displayed on the two...
|
|
|
6816806 |
Method of characterizing a semiconductor surface
A method of characterizing a sample surface having a surface anomaly region includes the steps of profiling the sample surface to generate surface characteristic data, and generating a histogram...
|
|
|
6803584 |
Electron beam control device
An electron beam control device controls an electron beam for use, such as an electron beam exposure device and the like, wherein a track of an electron beam is not adversely Influenced by the...
|
|
|
6803571 |
Method and apparatus for dual-energy e-beam inspector
In accordance with one embodiment, the disclosure pertains to an apparatus for inspection of substrates. The apparatus includes at least a dual-energy e-beam source, an energy-dependent dispersive...
|
|
|
6787770 |
Method of inspecting holes using charged-particle beam
This disclosure is directed to a method of inspecting how contact holes or via holes are formed in a sample, such as a wafer. An electron beam is directed to the contact holes in succession. An...
|
|
|
6777674 |
Method for manipulating microscopic particles and analyzing
We disclose a method for analyzing the composition of a microscopic particle resting on a first sample surface. The method comprises positioning a micro-manipulator probe near the particle;...
|
|
|
6777656 |
Near-field spectrometer having background spectral information
The near-field spectrometer 10 comprises a Z-axis scanner 18, 20 for bringing a sample 24 and the tip of a probe 12 close to each other at a predetermined distance within a near-field 26 region...
|
|
|
6770879 |
Motion picture output from electron microscope
An apparatus for recording a series of images of a sample over a period of time while varying at least one image parameter. An electron microscope captures images of the sample and also varies the...
|
|
|
6762402 |
Apparatus for recording and reading data and method of recording and reading data using contact resistance measurement thereof
An apparatus for recording and reading data by measuring contact resistance and a method for recording and reading data thereof are provided. The apparatus for recording and reading data includes a...
|
|
|
6763322 |
Method for enhancement in screening throughput
The present invention provides methods and an apparatus for the rapid analysis of data from imaging, spectroscopic, scanning probe, or sensor methods. By application of mathematical transform...
|
|
|
6753525 |
Materials analysis using backscatter electron emissions
Techniques for determining the composition of a specimen under inspection by measuring backscatter electron emissions and then estimating the atomic number of the specimen are described. Typically,...
|