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7624644 |
Semiconductor pressure sensor and method for manufacturing semiconductor pressure sensor
A semiconductor pressure sensor includes a diaphragm; a resistor provided on a top surface of the diaphragm; an insulating film formed on the diaphragm and the resistor having a penetrating part...
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7617734 |
Pressure sensor with dual chamber cover
A pressure sensor assembly is provided for fitting within the valve stem of a vehicle tire. The assembly comprises a substrate assembly defining a plurality of holes. A pressure sensor and a...
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7610812 |
High accuracy, high temperature, redundant media protected differential transducers
A semiconductor chip for use in fabricating pressure transducers, including: a semiconductor wafer having a top and a bottom surface, a layer of an insulating material formed on the top surface,...
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7607356 |
Pirani vacuum gauge
A Pirani vacuum gauge in which dependency of temperature of a filament on variation of gas pressure is raised and the gas pressure can be measured with high accuracy. The Pirani vacuum gauge...
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7607355 |
Semiconductor device
A semiconductor device is equipped with a semiconductor sensor chip for detecting pressure variations that is arranged inside of a hollow cavity of a housing, wherein an opening is formed in a...
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7603908 |
Semiconductor pressure sensor, manufacturing method thereof, and die for molding semiconductor pressure sensor
A semiconductor pressure sensor is provided with a semiconductor pressure sensor part that converts a pressure to an electrical signal, a sensor module in which said semiconductor pressure sensor...
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7600433 |
Pressure sensor with roughened and treated surface for improving adhesive strength and method of manufacturing the sensor
A pressure sensor comprises a housing, a housing socket and a pressure port which projects into the housing and which is made of a lead free material. The pressure sensor exhibits a pressure...
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7594440 |
Highly sensitive piezoresistive element
A mechanical-to-electrical sensing structure has first and second movable blocks formed in a handle layer. A first hinge is coupled to the first and second movable blocks and configured to resist...
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7584666 |
Pressure sensor for measuring blood pressure and method of fabricating the same
A pressure sensor includes at least one cantilever formed on an upper surface of a silicon substrate, a piezoresistor formed on a fixed end of the cantilever, and a metal wire and an electrode pad...
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7581447 |
Temperature compensating pressure sensing arrangement
The invention provides for a temperature compensating pressure sensing arrangement. The arrangement includes a substrate having sealed channels on which is deposited a CMOS layer, with a conductive...
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7578196 |
Integrated pressure sensor with double measuring scale and a high full-scale value
In a pressure sensor with double measuring scale: a monolithic body of semiconductor material has a first main surface, a bulk region and a sensitive portion upon which pressure acts; a cavity is...
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7568395 |
Pressure sensor with dual chambers
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive...
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7559247 |
Pressure sensor with reduced size strain gauge mounting structure and manufacturing method of the same
A pressure sensor for detecting pressure includes: a metallic diaphragm for receiving the pressure; four strain gauges providing a Wheatstone bridge, wherein each strain gauge outputs an electric...
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7555956 |
Micromechanical device having two sensor patterns
A micromechanical device and a method for producing this device are provided, two sensor patterns being provided in the semiconductor material to record two mechanical variables, in particular the...
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7549344 |
Pressure sensor package and electronic part
A pressure sensor package of the present invention includes a pressure sensor including a cavity disposed within a semiconductor substrate, wherein a region of the substrate above the cavity...
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7549343 |
Sensor system for measuring pressure
A sensor system for measuring the pressure in the combustion chamber of an internal combustion engine, by the use of which a high measuring accuracy may be achieved, based on high measuring...
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7549342 |
Capacitative pressure sensor for oxidative environments
A capacitative pressure sensor ( 30 ) for harsh environments such as vehicle tires. The sensor has two opposing electrodes ( 36 and 50 ). One electrode is a membrane ( 50 ) that extends between...
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7540198 |
Semiconductor device
It is an object of the present invention to provide a small, yet high sensitivity semiconductor device. A semiconductor pressure sensor 1 includes an SOI substrate 2 on which a diaphragm 3 is...
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7536917 |
Pressure sensor
A pressure sensor comprises: a case body including a pressure introduction port; a sensor chip including a top surface, a bottom surface, a sensing member disposed on the top surface and a concave...
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7533573 |
Pressure sensor including temperature adjustment
A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such...
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7530276 |
Semiconductor pressure sensor and manufacturing method thereof
This invention aims to realize reduction in size without impairing measurement accuracy or connection reliability in a semiconductor pressure sensor in which a glass substrate is adhered to a...
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7526963 |
Pressure sensor having a pressure detecting element and a circuit board on opposite sides of a housing
A pressure sensor includes a pressure detecting element for detecting a pressure, a circuit board having an electrical circuit to be connected to the pressure detecting element, and a housing...
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7520173 |
Interdigitated electrode for electronic device and electronic device using the same
Provided are an interdigitated electrode (IDE) for an electronic device, which includes a plurality of anodes and a plurality of cathodes arranged radially in an alternating fashion for electrical...
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7493823 |
Pressure transducer with differential amplifier
A semiconductor-based pressure sensor adapted for enhanced operation with controls electronics includes a pressure transducer having an output formed on a silicon die and an amplifier having an...
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7484418 |
Ultra miniature multi-hole probes having high frequency response
A pressure probe includes a longitudinal tubular housing symmetrically disposed about a central axis and having an ultra miniature conical front end and an opened back end. A plurality of aperture...
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7464603 |
Sensor component with a cavity housing and a sensor chip and method for producing the same
A semiconductor sensor component including a housing with a cavity and a sensor chip and a method for producing the same are described herein. The housing includes an opening to the surroundings of...
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7464598 |
Method of pressure sensing with a pressure sensor having a sensor membrane and a compensation membrane
The invention provides for a method of sensing pressure with a pressure sensor having a sensor membrane and a compensation membrane. The pressure sensor also includes a power supply, a controller;...
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7461558 |
Capacitive pressure sensor with sealed reference chamber
A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane...
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7458272 |
Capacitative pressure sensor with ceramic membrane
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer...
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7451656 |
Semiconductor device embedded with pressure sensor and manufacturing method thereof
The method for promoting the size reduction, the performance improvement and the reliability improvement of a semiconductor device embedded with pressure sensor is provided. In a semiconductor...
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7450021 |
Vacuum system capacity analyzer
There is provided a method for monitoring a vacuum system such as that used in a dairy milking system. Several independent measurements are made whereby a long term degradation of the vacuum pump...
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7448278 |
Semiconductor piezoresistive sensor and operation method thereof
A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor...
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7430919 |
Capacitive pressure sensor with reference chamber
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the...
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7421773 |
Method of making pressure sensor assemblies
Silicon-based high pressure sensor modules are manufactured in an array arrangement, incorporating a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high...
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7418872 |
System and apparatus for sensing pressure in living organisms and inanimate objects
System and apparatus for measuring pressure comprising a microelectronic device, an interface member attached to the microelectronic device, a pressure sensor having a diaphragm responsive to...
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7418871 |
Method for detecting a pressure of a medium and pressure measuring device
A pressure measuring device for detecting a pressure to be measured of a medium, having a pressure housing; a converter situated in the pressure housing for converting a mechanical force produced...
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7418870 |
Pressure sensor with expanding member
Systems and methodologies that provide for multi-parameter sensing via micro fabricated sensing structures operatively connected to oscillators, each micro-fabricated sensing structure in part...
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7412895 |
Semiconductor pressure sensor and die for molding a semiconductor pressure sensor
A semiconductor pressure sensor is provided with a semiconductor pressure sensor part that converts a pressure to an electrical signal, a sensor module in which said semiconductor pressure sensor...
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7404247 |
Method for making a pressure sensor
A method for making a pressure sensor including the steps of providing a substrate and forming or locating a pressure sensing component on the substrate. The method further includes the step of,...
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7401525 |
Micro-machined pressure sensor with polymer diaphragm
A piezoresistive pressure and/or strain sensor micro-machined primarily from plastic and/or glass. In one illustrative embodiment, the piezoresistive pressure sensor is formed on a polymer...
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7398694 |
Pressure sensor and method for manufacturing pressure sensor
The present invention aims at providing a pressure sensor having excellent reliability in sealing a pressure reference chamber and a method for manufacturing the pressure sensor. A movable...
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7395718 |
Reliable piezo-resistive pressure sensor
A pressure sensor system for measuring the pressure of a corrosive media includes a silicon plate forming a diaphragm and a glass plate or ring bonded to said silicon plate with an opening over the...
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7392716 |
Piezoresistive strain concentrator
A piezoresistive device is provided for sensing mechanical input and converts mechanical movement of at least two relatively movable parts into an electrical output. A silicon substrate is provided...
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7380460 |
Dual wafer pressure sensor
A pressure sensor ( 30 ) for sensing a fluid pressure in harsh environments such as the air pressure in a tire. The sensor has a dual wafer construction with a first wafer substrate ( 32 ) that has...
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7377175 |
Sensor having a diaphragm
A sensor hard to break and capable of improving sensitivity is obtained. This sensor comprises an electrode plate and a diaphragm, opposed to the electrode plate, including a first elastic film...
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7373835 |
Semiconductor sensor
A semiconductor sensor for improving manufacturing productivity. Opposing electrodes, or a diaphragm electrode and a fixed electrode, form an electrostatic capacity sensing semiconductor microphone...
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7373834 |
Pressure sensor
A lower capacitive electrode and a capacitive electrode of an opposite substrate are provided to mutually facing surfaces of a TFT substrate and the opposite substrate, respectively; and a seal...
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7373833 |
MEMS pressure sensing device
A pressure sensing system formed in a monolithic semiconductor substrate. The pressure sensing system comprises a pressure sensing device formed on the monolithic semiconductor substrate. The...
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7370536 |
Pressure sensor device and pressure sensor cell thereof
A pressure sensor device includes a pressure sensor cell that includes a sensor chip having a diaphragm with piezo-resistors, an amplifying circuit, and various adjusting circuits, and a base...
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7367235 |
Thermal expansion compensated pressure sensor
A pressure sensor ( 30 ) for environments with wide ranging temperatures such as vehicle tires. The sensor has a conductive sensor membrane ( 53 ) exposed to the fluid pressure to be sensed, and a...
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