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6062089 |
Semiconductor pressure sensor having a flange surface configured to fit into a stepped hole of a housing body
The pressure sensor is simplified in structure and its assembled state to the housing body is made more compact. In the semiconductor pressure sensor for detecting pressure of a pressure medium,...
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6055865 |
Semiconductor pressure sensor
A semiconductor pressure sensor having a sensor element including a sensor chip to which pressure from a pressure medium is applied, and a pedestal for supporting the sensor chip. The sensor...
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6047604 |
Pressure sensor component for mounting on the component-mounting surface of a printed circuit board
The pressure sensor component is mountable on the component-mounting surface of a printed circuit board. The component has a chip carrier of electrically insulating material formed with a...
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6030709 |
Electronic component
The invention relates to an electronic component manufactured in thick film technology, thin film technology or silicon technology and then provided with an electrically insulating layer which is...
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6016102 |
Pressure sensor housing
An apparatus (10) allows atmospheric pressure into an environmentally sealed enclosure for creating an equilibrium that allows a sensor (28) make a proper measurement. A slot or opening (26) in the...
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6012336 |
Capacitance pressure sensor
A microelectromechanical (MEM) capacitance pressure sensor integrated with electronic circuitry on a common substrate and a method for forming such a device are disclosed. The MEM capacitance...
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5948992 |
Semiconductor pressure detecting device
In a semiconductor pressure detecting device, residual stress due to die bonding between pedestal seat and base member as well as stress due to welding between base member and cap are reduced. The...
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5929472 |
Semiconductor floating gate sensor device
A sensor device (40) is formed in a semiconductor substrate (41). The sensor device (40) includes a microstructure (60) that is free to move in response to a force. The microstructure (60) is...
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5880373 |
Differential pressure measuring arrangement
An arrangement for measuring high pressure differences. The arrangement has a differential pressure sensor made using thin film technology. The arrangement has a metallic layer in which measuring...
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5793073 |
Semiconductor thin film sensor device with (110) plane
A semiconductor thin film sensor device including a semiconductor body formed of silicon having a (110) plane; a depression formed by an anisotropic etch applied to a first surface of the...
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5734106 |
Integrated electronic sensor for characterizing physical quantities and process for producing such a sensor
The integrated electronic sensor for characterizing physical quantities comprises a substrate (5) having a characterizing member (3) and a cover (9) maintained in the vicinity of and in front of...
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5672826 |
Semiconductor pressure sensor
The present invention provides a semiconductor pressure sensor having a glass base and a metal base bonded together satisfactorily so that a silicon diaphragm may not be affected by residual...
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5670721 |
Capacitive pressure sensor with heated electrodes
An apparatus for measuring the pressure of a liquid in a container includes a capacitor formed by a pair of electrodes. A charging circuit produces a charging current of constant magnitude. The...
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5592442 |
Watch having a sensor
A sensor housing pipe is secured to a back of a watch at a recess formed on an underside of the back. A sensor is housed in the sensor housing pipe. A sensor lid is provided for securing the sensor...
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5578528 |
Method of fabrication glass diaphragm on silicon macrostructure
A method for fabricating microelectromechanical systems containing a glass diaphragm formed on a silicon macrostructure is disclosed. The method comprises the steps of: (a) obtaining a silicon...
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5544529 |
Pressure sensor and chip therefor
A pressure sensor is capable of detecting a certain pressure and an atmospheric pressure individually and independently in real time, with miniaturization and light weight. This is attained by...
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5522266 |
Low cost pressure transducer particularly for medical applications
A pressure transducer (10) for measuring fluid pressure in a fluid path comprising a strain gauge circuit (37) of thick film piezoresistors formed on an alumina diaphragm (36) in a Wheatstone...
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5511428 |
Backside contact of sensor microstructures
A sensor microstructure contact scheme is provided for making backside electrical, mechanical, fluidic, or other contact to mechanical microstructures. The contact scheme is applicable to pressure...
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5510645 |
Semiconductor structure having an air region and method of forming the semiconductor structure
A method for forming an air region or an air bridge overlying a base layer (12). Air regions (20a, 20b, 28a, and 48) are formed overlying the base layer (12) to provide for improved dielectric...
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5499535 |
Pressure sensor and temperature sensor
A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting...
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5488868 |
High-temperature pressure sensor
A diaphragm portion 20 causes deflection, when high-temperature fluid pressure acts on the pressure sensing surface A of the diaphragm portion 20. This deflection is transmitted via pressure...
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5488869 |
Capacitive absolute pressure measurement sensor and method of manufacturing a plurality of such sensors
The invention relates to a capacitive absolute pressure measurement sensor having a first element (2) in which is arranged a mobile electrode (4), a second element (6) in which is arranged a fixed...
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5481506 |
Electronic devices with sensors
A sensor unit which comprises a sensor, and a detector for detecting an output from the sensor is attached removably to a device case with a display. Data on the basis of detection signals from the...
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5465626 |
Pressure sensor with stress isolation platform hermetically sealed to protect sensor die
An electronic pressure sensor (10) is enhanced by attaching a sensor die (18) to a stress isolation platform (12) using an adhesive (42) having a similar thermal coefficient of expansion. The...
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5454270 |
Hermetically sealed pressure sensor and method thereof
A differential pressure sensor (10) has a sensor die (16) attached to a stress isolation package base (12) with a bonding glass (27) having a similar coefficient of thermal expansion. The bonding...
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5444286 |
Packaged semiconductor pressure sensor including lead supports within the package
A semiconductor pressure sensor has a package base provided with an adhesive supporting portion for supporting nearly the entire lengths of inner portions of outer leads. Since nearly the entire...
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5412993 |
Pressure detection gage for semiconductor pressure sensor
A pressure detection gage for a semiconductor pressure sensor includes a gage portion, a pair of lead out portions, and an isolation layer. The gage portion is formed on the upper surface of a...
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5398885 |
Discrete distributed sensors and system for spatial sensing
A sensor has a sensing region that responds to a surface property by producing an output signal. The sensor has a spatially distributed shape or sensitivity so that the output decreases away from a...
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5394343 |
Electronic tire gauge
An electronic tire pressure gauge has a tire valve stem receiver, a thin silicon square diaphragm with four diffused resistors configured in a full Wheatstone bridge as a pressure transducer, a...
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5357488 |
Watch having a sensor
A watch having a sensor, a watch case (2), a sensor holding portion (5) mounted in the watch case, sensor housing spaces (11, 25) formed in the watch case and the holding portion, a sensor...
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5313849 |
Device for temporarily holding pressure sensor in place within spark plug attaching hole of cylinder head
A retaining ring is provided for temporarily holding a pressure sensor in place within a spark plug attaching hole prior to installation of a spark plug. The retaining ring is resiliently deformed...
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5303596 |
Piezoelectric airblast gage mounting device for use in high shock environments
A mounting assembly for a piezoelectric airblast gage includes a steel insert into which the gage is screwed. The insert is contained within a steel housing to provide a protective enclosure for...
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5293095 |
Air pressure variation detector
The air pressure variation detector comprises a base plate having a through hole or a cavity, a piezoelectric element fixed to the base plate so as to locate above the through hole or the cavity...
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5220837 |
Differential pressure transducer assembly
A transducer assembly for measuring the pressure difference between first and second pressures comprises a differential pressure transducer and a valve coupled to the differential pressure...
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5217015 |
Pressure sensing device having transducer overlying and deforming eye
A method for sensing pressure within a work object including placing an electrically deformable member on the work object so as to cover a portion of the surface area thereof; applying electrical...
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5209125 |
Piezoelectric pressure sensor
A vortex sensor 14 measures a flow rate of a fluid flowing through a flow passage by detecting alternating pressure variations 26a and 28a generated by a shedding body 16 placed in the flow...
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5191237 |
Field-effect transistor type semiconductor sensor
A semiconductor sensor for detecting physical quantities such as pressure, acceleration, mechanical vibration, etc. includes a semiconductor substrate, and a field-effect transistor on the...
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5179956 |
Contact pressure sensor
A contact pressure sensor including a semiconductor chip having opposite surfaces, at least one pressure sensing element provided in one of the opposite surfaces of the chip, a spacer member...
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5155061 |
Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
A method for fabricating an all silicon absolute pressure sensor employing silicon-on-insulator structures. More particularly, a method for fabricating an all silicon absolute pressure sensor based...
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5144841 |
Device for measuring pressures and forces
The invention relates to a device for measuring pressures or forces, comprising a pressure or force sensor in the form of a piezoelectric or piezoresistive pressure or force transducer having at...
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5138885 |
Piezoelectric-type pressure sensor
Members as an upper fixing screw, a piezoelectric element, a pressure transmitting member are located closer to region of an engine to be measured and the like than a fitting thread portion of a...
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5111699 |
Sensor for measuring the pressure of a medium
A pressure sensor particularly for measuring pressure within a diesel fuel pump comprises a screw-threaded bolt having a head and a shank and having a bore extending through the bolt through the...
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5109852 |
Method for sensing pressure in an object
A method for sensing pressure within a work object including placing an electrically deformable member on the work object so as to cover a portion of the surface area thereof; applying electrical...
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5105665 |
Sensors
In a micromachined silicon pressure sensor comprising a resonantly vibratable beam supported on a diaphragm, the beam is indirectly excited into resonant vibration by directing an optical...
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5099695 |
Pressure detection apparatus
A pressure detection apparatus is provided with a semiconductor pressure sensor interposed between a reference pressure side and a measured pressure side and adapted to detect pressure in fluid...
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5095741 |
Pressure transducer for determining the pressure in the combustion chamber of an internal combustion engine
In a pressure transducer (11), the diaphragm (14) is fastened at the front side of the housing (10) facing the combustion chamber of an internal combustion engine by weld connections. The pressure...
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5086777 |
Small-sized disposable pressure transducer apparatus with a temperature compensating circuit disposed adjacent a passageway coupled with a catheter
A blood pressure transducer apparatus having a semiconductor pressure sensor and a temperature compensating circuit mounted on a substrate which is fixedly mounted on a wall portion of a housing,...
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5063784 |
Refrigerant transducer assembly and method
A refrigerant transducer assembly has a housing with first and second interconnected openings, and the first opening is adapted to be installed in a refrigeration system for connection to the fluid...
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5062302 |
Laminated semiconductor sensor with overpressure protection
An electromechanical sensor is provided which comprises: first semiconductor wafer including a first stop surface residing in a first shallow recessed region of the first wafer; a second...
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5059556 |
Low stress polysilicon microstructures
Method for relieving stress in silicon microstructures by forming a silicide on the microstructures. Sensors comprising a stress-relieved silicon microstructure are also described.
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