Matches 151 - 200 out of 351 < 1 2 3 4 5 6 7 8 >
Match Document Document Title
6662664 Electronic pressure sensing device  
An electronic pressure sensing device includes a pressure sensing/transmitter module including at least one pressure sensor having a pair of opposed sensing elements, and a pair of inlet port on...
6651508 Pressure sensor having semiconductor sensor chip  
A semiconductor sensor chip includes a thin diaphragm and an electrical circuit formed on a front surface of the diaphragm. The diaphragm distorts according to a pressure difference between...
6651506 Differential capacitive pressure sensor and fabricating method therefor  
A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so...
6647796 Semiconductor nitride pressure microsensor and method of making and using the same  
An integrated microsensor includes a bowed micromachined membrane coupled to a substrate to define a microcavity therebetween. An integrated strain sensor is coupled to the micromachined membrane...
6644125 Pressure sensor  
The invention relates to a pressure sensor consisting of a chip ( 11 ) which is mounted on a support wall ( 10 ) and which is provided with a resistance unit consisting of strip conductors and...
6626046 Pressure-sensitive resistor sensor having electrodes with reduced contact resistance deviation  
It is the objective of this invention to reduce deviation in contact resistance variation between electrodes among pressure-sensitive resistor sensors. The sensor is composed of a pair of films....
6619132 Sensor including a circuit lead frame and a terminal lead frame formed by a metal plate  
A pressure sensor ( 1 ) has a circuit board ( 5 ) having a circuit portion ( 11 ) for amplifying an electric signal detected by a pressure detecting element ( 2 C) and attached with an IC die ( 16...
6619133 Semiconductor pressure sensor and its manufacturing method  
That portion of an n-type single-crystal Si layer 1 which corresponds to a pressure-sensitive region is etched to an SiO 2 layer 2 by using the SiO 2 layer 2 as an etching stopper layer....
6612180 Dielectrically isolated plastic pressure transducer  
A pressure sensing device suitable for medical use including: a dielectrically isolated sensor chip including a first wafer having first and second surfaces, a deflectable diaphragm formed therein...
6601452 Semiconductor pressure sensor having rounded corner portion of diaphragm  
A semiconductor pressure sensor has a recess formed on a semiconductor substrate. The recess has a sidewall, a bottom wall that serves as a diaphragm for detecting a pressure, and a corner portion...
6601453 Pressure detecting apparatus  
The present invention provides a pressure detector capable of easily responding to changes in specification. The pressure detector has a sensor unit for detecting pressure and electronic parts for...
6598484 Physical quantity detection device  
Respective first ends of first and second strain gates are connected to a first voltage potential. First and second constant currents from first and second current sources flow through the first...
6595067 Pressure sensor using resin adhesive between sensor element and stem  
In a pressure sensor made by bonding a sensor chip and a metal stem together with a resin adhesive, fluctuation of the sensor output caused by temperature changes are maximally reduced. The resin...
6591689 Sensor held by base having lead  
A pressure sensor has a sensor chip with a diaphragm formed therein and bumps formed thereon, and a stem with leads extending from a surface thereof to the sensor chip. The bumps and the leads are...
6584854 Pressure sensor and pressure-measuring apparatus using pressure buffering  
A pressure-detecting chamber 23 , a pressure-directing path 25 and a buffer space 24 are formed on the upper face of a main-body-side substrate 22 as recessed portions, and the upper face of...
6584853 Corrosion-proof pressure transducer  
A corrosion proof pressure transducer for measuring exhaust gas pressure includes a chip with a semiconductive diaphragm, electronics, and conductive pads thereon; with leads sonically bonded to...
6564644 High temperature surface mount transducer  
There is disclosed a high temperature surface mounted pressure transducer. The pressure transducer consists of three basic parts which include an ultra thin surface mount sensor positioned on a...
6543672 Method of forming vacuum chamber of control valve for variable capacity compressor  
A vacuum chamber-forming method for forming a vacuum chamber in a power element of a control valve for a variable capacity compressor through a reduced number of steps. A power element is assembled...
6526832 Disk-shaped silicon sensor element for a pressure sensor and pressure sensor using such a silicon sensor element  
A disk-shaped silicon sensor element for a pressure sensor is described. The sensor element has a disk upper side, a disk underside, stress measuring elements that convert mechanical stresses into...
6521965 Integrated pressure sensor  
An integrated pressure sensor system and method for making such a device are provided. The pressure system includes a capacitor having an underlying electrode, a dielectric cavity, an upper...
6510742 Sensor formed on silicon on insulator structure and having reduced power up drift  
A semiconductor structure includes an upper and a lower layer of semiconductor material separated by a layer of insulation material. Resistors formed in the upper layer are connected into a...
6453749 Physical sensor component  
A physical sensor component includes a housing ( 110 ) having a cavity ( 112 ), a pressure sensor device ( 120 ) mounted in the cavity of the housing, and a chemically selective and physically...
6439058 Semiconductor sensor  
A semiconductor pressure sensor in which a semiconductor sensor element is contained in a package which is made by assembling a first case and a second case, and which have simple structure with...
6435033 Process for manufacturing a microsystem with a flexible membrane for a pressure sensor  
A process for manufacturing a microsystem for a pressure sensor includes the steps of deposit and forming a first conducting layer on a support. Deposit and forming a layer of sacrificial material...
6425294 Pressure sensor unit  
A pressure sensor unit which comprises (i) a housing, (ii) pressure sensor members installed therein including a mount, the bottom of which is fixed to the inner base of the housing by means of an...
6422088 Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus  
A reference voltage generating circuit is constituted by resistors RE and RF each having a resistance not influenced by an application of pressure. The reference voltage generating circuit is...
6405597 Flip-chip mounted pressure sensor  
A device for measuring pressure in a space includes a semiconductor component suitable for measuring pressure that is positioned in the space and that has connecting pads for flip-chip mounting, a...
6401545 Micro electro-mechanical system sensor with selective encapsulation and method therefor  
Selective encapsulation of a micro electro-mechanical pressure sensor provides for protection of the wire bands ( 140 ) through encapsulation while permitting the pressure sensor diaphragm ( 121 )...
6401544 Micromechanical component protected from environmental influences  
A method is disclosed for producing a micromechanical component. The micromechanical component has sensor holes, wherein at least one component protective layer and/or a spacer coating is applied...
6393922 Pressure sensor component with hose connection  
The invention relates to a pressure sensor component comprising a base body and a pressure connection element. The base body comprises a chip carrier, onto which a semiconductor chip with an...
6389902 Micromechanical sensor and method for its production  
The invention relates to a micromechanical sensor and to a corresponding production method that includes the following steps: a) preparing a doped semiconductor wafer; b) applying an epitaxial...
6389903 Pressure-detecting device coupling member with interchangeable connector part  
A pressure-detecting device in which a pressure sensor unit having the same specifications can be used even when there are numerous different forms of an outside member to which connection leads of...
6378378 Wafer to measure pressure at a number of points in a process chamber  
A device for measuring pressure at several locations in a processing chamber under dynamic Conditions, i.e. when gas is flowing into and/or out of the chamber. A substrate has a plurality of...
6357299 Micromechanical sensor and method for producing the same  
A micromechanical sensor integrated on a chip, includes a semiconductor substrate, an electronic circuit, a void, a diaphragm, a counterelectrode and valve openings connecting a volume of the void...
6279402 Device for measuring pressure in a chamber  
A device for measuring pressure at several locations in a processing chamber under dynamic conditions, i.e. when gas is flowing into and/or out of the chamber. A substrate has a plurality of...
6263740 CMOS compatible integrated pressure sensor  
A pressure sensor fabricated onto a substrate using conventional CMOS fabrication processes. The pressure sensor is built on a substrate having a first conductivity type and has defined in it a...
6260417 Semiconductor pressure sensor device with multi-layered protective member that reduces void formation  
A semiconductor pressure sensor chip is mounted on a recess of a resin package, and is electrically connected to bonding pads on the bottom of the recess through bonding wires. The recess is filled...
6234027 Pressure sensor for semi-conductor  
A pressure sensor is based, in part, on the piezoresistive effect. In this, a pressure acting from outside effects a deformation of a resistor, arranged on a membrane, whose resistance changes as a...
6236096 Structure of a three-electrode capacitive pressure sensor  
A structure and producing method of a three-electrode capacitive pressure sensor can integrate and produce sensor capacitor and reference capacitor in the same pressure sensor cavity. This dual...
6214634 Sensor device and method of forming a sensor device  
A sensor device (20) comprises a sensor package (22) having a cavity (24) formed therein, a sensor die (26) mounted on a bottom surface (28) of the cavity (24) and a protective coating (30) formed...
6192761 Sensor chip, laminated wafer for sensor chip and manufacturing method of sensor chip  
In a pressure sensor chip (10), an extension (42) is provided on a lower glass (40) and a signal receiving portion (50) of a conductive layer is formed from a surface (42A) of an extension (42) to...
6191359 Mass reflowable windowed package  
A windowed package is capable of withstanding a mass reflow process. During mass reflow, the entire package is subjected to the solder reflow temperature. In one embodiment, the lid comprises a...
6186008 Semiconductor sensor component  
A housing for a semiconductor sensor configuration, in which a sensor and an evaluation logic are integrated in a semiconductor body is disclosed. The housing has a base body upon which the...
6177727 Saddle bracket for solid state pressure gauge  
A semiconductor component (31) and a method for coupling a semiconductor device (36) to a substrate (81). The semiconductor component (31) includes a saddle (34) and the semiconductor device (36)....
6122974 Semiconductor type pressure sensor  
A pressure sensor superior in pressure resistance and capable of covering from a low to high pressure range as a measuring range is to be provided. Plural pressure sensing sections for high and low...
6101883 Semiconductor pressure sensor including a resistive element which compensates for the effects of temperature on a reference voltage and a pressure sensor  
A semiconductor pressure sensor includes a substrate with a semiconductor pressure detecting element mounted thereon. The pressure detecting element includes a pressure detector, having two...
6089099 Method for forming a bonded silicon-glass pressure sensor with strengthened corners  
A unique backside mask for the backside of a silicon wafer which is to be diced in a rectangular shape to form a silicon pressure sensor. The backside mask is shaped to extend farther towards the...
6085596 Pressure sensor having an insulating layer and fluid tight amorphous metal layer  
The invention relates to a pressure or differential pressure sensor comprising a membrane with at least one measuring element located thereon, as well evaluation electronics for measuring the...
6070469 Pressure sensor  
A pressure sensor includes a body, a pressure inlet tube housed in the body and having a pressure inlet opening defined therein for introducing oil pressure, and a pressure sensor unit affixed to a...
6065346 Measurement system utilizing a sensor formed on a silicon on insulator structure  
A measurement system utilizes a sensor formed in a semiconductor on insulator structure that has an offset related to the time that power is applied. A controller applies power, obtains readings...
Matches 151 - 200 out of 351 < 1 2 3 4 5 6 7 8 >