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6662664 |
Electronic pressure sensing device
An electronic pressure sensing device includes a pressure sensing/transmitter module including at least one pressure sensor having a pair of opposed sensing elements, and a pair of inlet port on...
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6651508 |
Pressure sensor having semiconductor sensor chip
A semiconductor sensor chip includes a thin diaphragm and an electrical circuit formed on a front surface of the diaphragm. The diaphragm distorts according to a pressure difference between...
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6651506 |
Differential capacitive pressure sensor and fabricating method therefor
A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so...
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6647796 |
Semiconductor nitride pressure microsensor and method of making and using the same
An integrated microsensor includes a bowed micromachined membrane coupled to a substrate to define a microcavity therebetween. An integrated strain sensor is coupled to the micromachined membrane...
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6644125 |
Pressure sensor
The invention relates to a pressure sensor consisting of a chip ( 11 ) which is mounted on a support wall ( 10 ) and which is provided with a resistance unit consisting of strip conductors and...
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6626046 |
Pressure-sensitive resistor sensor having electrodes with reduced contact resistance deviation
It is the objective of this invention to reduce deviation in contact resistance variation between electrodes among pressure-sensitive resistor sensors. The sensor is composed of a pair of films....
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6619132 |
Sensor including a circuit lead frame and a terminal lead frame formed by a metal plate
A pressure sensor ( 1 ) has a circuit board ( 5 ) having a circuit portion ( 11 ) for amplifying an electric signal detected by a pressure detecting element ( 2 C) and attached with an IC die ( 16...
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6619133 |
Semiconductor pressure sensor and its manufacturing method
That portion of an n-type single-crystal Si layer 1 which corresponds to a pressure-sensitive region is etched to an SiO 2 layer 2 by using the SiO 2 layer 2 as an etching stopper layer....
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6612180 |
Dielectrically isolated plastic pressure transducer
A pressure sensing device suitable for medical use including: a dielectrically isolated sensor chip including a first wafer having first and second surfaces, a deflectable diaphragm formed therein...
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6601452 |
Semiconductor pressure sensor having rounded corner portion of diaphragm
A semiconductor pressure sensor has a recess formed on a semiconductor substrate. The recess has a sidewall, a bottom wall that serves as a diaphragm for detecting a pressure, and a corner portion...
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6601453 |
Pressure detecting apparatus
The present invention provides a pressure detector capable of easily responding to changes in specification. The pressure detector has a sensor unit for detecting pressure and electronic parts for...
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6598484 |
Physical quantity detection device
Respective first ends of first and second strain gates are connected to a first voltage potential. First and second constant currents from first and second current sources flow through the first...
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6595067 |
Pressure sensor using resin adhesive between sensor element and stem
In a pressure sensor made by bonding a sensor chip and a metal stem together with a resin adhesive, fluctuation of the sensor output caused by temperature changes are maximally reduced. The resin...
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6591689 |
Sensor held by base having lead
A pressure sensor has a sensor chip with a diaphragm formed therein and bumps formed thereon, and a stem with leads extending from a surface thereof to the sensor chip. The bumps and the leads are...
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6584854 |
Pressure sensor and pressure-measuring apparatus using pressure buffering
A pressure-detecting chamber 23 , a pressure-directing path 25 and a buffer space 24 are formed on the upper face of a main-body-side substrate 22 as recessed portions, and the upper face of...
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6584853 |
Corrosion-proof pressure transducer
A corrosion proof pressure transducer for measuring exhaust gas pressure includes a chip with a semiconductive diaphragm, electronics, and conductive pads thereon; with leads sonically bonded to...
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6564644 |
High temperature surface mount transducer
There is disclosed a high temperature surface mounted pressure transducer. The pressure transducer consists of three basic parts which include an ultra thin surface mount sensor positioned on a...
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6543672 |
Method of forming vacuum chamber of control valve for variable capacity compressor
A vacuum chamber-forming method for forming a vacuum chamber in a power element of a control valve for a variable capacity compressor through a reduced number of steps. A power element is assembled...
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6526832 |
Disk-shaped silicon sensor element for a pressure sensor and pressure sensor using such a silicon sensor element
A disk-shaped silicon sensor element for a pressure sensor is described. The sensor element has a disk upper side, a disk underside, stress measuring elements that convert mechanical stresses into...
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6521965 |
Integrated pressure sensor
An integrated pressure sensor system and method for making such a device are provided. The pressure system includes a capacitor having an underlying electrode, a dielectric cavity, an upper...
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6510742 |
Sensor formed on silicon on insulator structure and having reduced power up drift
A semiconductor structure includes an upper and a lower layer of semiconductor material separated by a layer of insulation material. Resistors formed in the upper layer are connected into a...
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6453749 |
Physical sensor component
A physical sensor component includes a housing ( 110 ) having a cavity ( 112 ), a pressure sensor device ( 120 ) mounted in the cavity of the housing, and a chemically selective and physically...
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6439058 |
Semiconductor sensor
A semiconductor pressure sensor in which a semiconductor sensor element is contained in a package which is made by assembling a first case and a second case, and which have simple structure with...
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6435033 |
Process for manufacturing a microsystem with a flexible membrane for a pressure sensor
A process for manufacturing a microsystem for a pressure sensor includes the steps of deposit and forming a first conducting layer on a support. Deposit and forming a layer of sacrificial material...
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6425294 |
Pressure sensor unit
A pressure sensor unit which comprises (i) a housing, (ii) pressure sensor members installed therein including a mount, the bottom of which is fixed to the inner base of the housing by means of an...
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6422088 |
Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus
A reference voltage generating circuit is constituted by resistors RE and RF each having a resistance not influenced by an application of pressure. The reference voltage generating circuit is...
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6405597 |
Flip-chip mounted pressure sensor
A device for measuring pressure in a space includes a semiconductor component suitable for measuring pressure that is positioned in the space and that has connecting pads for flip-chip mounting, a...
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6401545 |
Micro electro-mechanical system sensor with selective encapsulation and method therefor
Selective encapsulation of a micro electro-mechanical pressure sensor provides for protection of the wire bands ( 140 ) through encapsulation while permitting the pressure sensor diaphragm ( 121 )...
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6401544 |
Micromechanical component protected from environmental influences
A method is disclosed for producing a micromechanical component. The micromechanical component has sensor holes, wherein at least one component protective layer and/or a spacer coating is applied...
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6393922 |
Pressure sensor component with hose connection
The invention relates to a pressure sensor component comprising a base body and a pressure connection element. The base body comprises a chip carrier, onto which a semiconductor chip with an...
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6389902 |
Micromechanical sensor and method for its production
The invention relates to a micromechanical sensor and to a corresponding production method that includes the following steps: a) preparing a doped semiconductor wafer; b) applying an epitaxial...
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6389903 |
Pressure-detecting device coupling member with interchangeable connector part
A pressure-detecting device in which a pressure sensor unit having the same specifications can be used even when there are numerous different forms of an outside member to which connection leads of...
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6378378 |
Wafer to measure pressure at a number of points in a process chamber
A device for measuring pressure at several locations in a processing chamber under dynamic Conditions, i.e. when gas is flowing into and/or out of the chamber. A substrate has a plurality of...
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6357299 |
Micromechanical sensor and method for producing the same
A micromechanical sensor integrated on a chip, includes a semiconductor substrate, an electronic circuit, a void, a diaphragm, a counterelectrode and valve openings connecting a volume of the void...
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6279402 |
Device for measuring pressure in a chamber
A device for measuring pressure at several locations in a processing chamber under dynamic conditions, i.e. when gas is flowing into and/or out of the chamber. A substrate has a plurality of...
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6263740 |
CMOS compatible integrated pressure sensor
A pressure sensor fabricated onto a substrate using conventional CMOS fabrication processes. The pressure sensor is built on a substrate having a first conductivity type and has defined in it a...
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6260417 |
Semiconductor pressure sensor device with multi-layered protective member that reduces void formation
A semiconductor pressure sensor chip is mounted on a recess of a resin package, and is electrically connected to bonding pads on the bottom of the recess through bonding wires. The recess is filled...
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6234027 |
Pressure sensor for semi-conductor
A pressure sensor is based, in part, on the piezoresistive effect. In this, a pressure acting from outside effects a deformation of a resistor, arranged on a membrane, whose resistance changes as a...
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6236096 |
Structure of a three-electrode capacitive pressure sensor
A structure and producing method of a three-electrode capacitive pressure sensor can integrate and produce sensor capacitor and reference capacitor in the same pressure sensor cavity. This dual...
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6214634 |
Sensor device and method of forming a sensor device
A sensor device (20) comprises a sensor package (22) having a cavity (24) formed therein, a sensor die (26) mounted on a bottom surface (28) of the cavity (24) and a protective coating (30) formed...
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6192761 |
Sensor chip, laminated wafer for sensor chip and manufacturing method of sensor chip
In a pressure sensor chip (10), an extension (42) is provided on a lower glass (40) and a signal receiving portion (50) of a conductive layer is formed from a surface (42A) of an extension (42) to...
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6191359 |
Mass reflowable windowed package
A windowed package is capable of withstanding a mass reflow process. During mass reflow, the entire package is subjected to the solder reflow temperature. In one embodiment, the lid comprises a...
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6186008 |
Semiconductor sensor component
A housing for a semiconductor sensor configuration, in which a sensor and an evaluation logic are integrated in a semiconductor body is disclosed. The housing has a base body upon which the...
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6177727 |
Saddle bracket for solid state pressure gauge
A semiconductor component (31) and a method for coupling a semiconductor device (36) to a substrate (81). The semiconductor component (31) includes a saddle (34) and the semiconductor device (36)....
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6122974 |
Semiconductor type pressure sensor
A pressure sensor superior in pressure resistance and capable of covering from a low to high pressure range as a measuring range is to be provided. Plural pressure sensing sections for high and low...
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6101883 |
Semiconductor pressure sensor including a resistive element which compensates for the effects of temperature on a reference voltage and a pressure sensor
A semiconductor pressure sensor includes a substrate with a semiconductor pressure detecting element mounted thereon. The pressure detecting element includes a pressure detector, having two...
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6089099 |
Method for forming a bonded silicon-glass pressure sensor with strengthened corners
A unique backside mask for the backside of a silicon wafer which is to be diced in a rectangular shape to form a silicon pressure sensor. The backside mask is shaped to extend farther towards the...
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6085596 |
Pressure sensor having an insulating layer and fluid tight amorphous metal layer
The invention relates to a pressure or differential pressure sensor comprising a membrane with at least one measuring element located thereon, as well evaluation electronics for measuring the...
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6070469 |
Pressure sensor
A pressure sensor includes a body, a pressure inlet tube housed in the body and having a pressure inlet opening defined therein for introducing oil pressure, and a pressure sensor unit affixed to a...
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6065346 |
Measurement system utilizing a sensor formed on a silicon on insulator structure
A measurement system utilizes a sensor formed in a semiconductor on insulator structure that has an offset related to the time that power is applied. A controller applies power, obtains readings...
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