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7559247 |
Pressure sensor with reduced size strain gauge mounting structure and manufacturing method of the same
A pressure sensor for detecting pressure includes: a metallic diaphragm for receiving the pressure; four strain gauges providing a Wheatstone bridge, wherein each strain gauge outputs an electric...
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7509866 |
Pressure sensor
The invention relates to a pressure sensor with a carrier ( 2 ), which in an inner region comprises a membrane ( 4 ) on which at least one first measurement element (R 1− ) for detecting a...
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7444879 |
Displacement transducer
A displacement transducer includes a load cell structure having a thick outer peripheral area, a thick inner central area and two symmetrical thin beams. The two beams are disposed along a common...
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7434471 |
Pressure measurement transducer with protective device
A pressure measurement device with protection from long-term loads and pressure shocks. The novel device includes a diaphragm adapted to deform in response to a pressure applied thereto, and a...
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7412892 |
Method of making pressure transducer and apparatus
A method for making a pressure transducer comprising: forming a recess in a diaphragm, the diaphragm having a thinned region that deflects responsively to pressure being applied thereto; depositing...
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7350418 |
Fluid supply assembly with measuring guide
A fluid supply assembly having a measuring guide comprising a fluid container, a lid, and a measuring guide. A method of measuring fluid components in a fluid supply assembly is also described.
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7343810 |
Pressure sensor and manufacturing method therefor
A pressure sensor is composed of a pressure housing having a pressure chamber inside and a pressure sensitive element arranged in the pressure chamber, and a joint housing having a fluid passage...
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7316164 |
Pressure detection device and manufacturing method of the same
A pressure detection device includes a sensing part that is provided at one end portion of the housing to output an electrical signal responsive to an applied pressure, a circuit part that is...
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7290453 |
Composite MEMS pressure sensor configuration
A pressure sensor assembly comprised of a single and dual layer diaphragm with integrated force sensing flexure, such as a cantilever beam. Strain gages are positioned on the force sensing beam....
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7284444 |
Hermetically sealed displacement sensor apparatus
A hermetically sealed displacement sensor has strain gauges placed on thin flexible triangular shaped beams of a load beam cell. The strain gauges are enclosed in a hermetically sealed cavity which...
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7263895 |
Strain detector and method of manufacturing the same
A fluid pressure sensor ( 1 ) for measuring the pressure of a fluid comprises a diaphragm portion ( 12 ) which is a strain generating body, a silicon oxide film ( 21 ) as an insulating film, and a...
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6997058 |
Pressure sensor
A pressure sensor includes a metal stem having a diaphragm, and a semiconductor substrate in which an insulation layer is inserted between first and second semiconductor layers. A plurality of...
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6986285 |
Pressure sensor and a rocket engine incorporating it
The pressure sensor ( 2 ) comprises a pressure detector element ( 21 ) arranged to receive a pressure that is to be measured and to detect it, and a printed circuit ( 22 ) connected to the pressure...
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6957588 |
Fluid measuring device and method
A pressure transducer and method for measuring pressure of a fluid flow in a tube include use of a sensing tube through which the pressurized flow passes. The sensing tube deforms outward in...
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6941815 |
Sensor with built-in circuits and pressure detector using the same
A sensor with built-in circuits can be improved in the stability of the operation or characteristics. A circuit region and a sensor region are covered by a passivation film. The sensor region is...
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6925885 |
Pressure sensor
A pressure sensor includes a sensor element, and a resin package member that holds the sensor element. The sensor element is constructed by a semiconductor, and is capable of externally outputting...
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6889554 |
Method of adjusting pressure sensor
It is an object to provide a method of adjusting a pressure sensor, in which adjustment of a diaphragm portion and adjustment of an amplification circuit connected to the diaphragm portion are...
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6742395 |
Hermetic pressure transducer
A port fitting ( 102 ) is formed with a closed, pedestal end forming a diaphragm ( 102 a ) on which a strain gauge sensor is mounted. A support member ( 106 ) is received on the pedestal end and is...
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6739198 |
Pressure sensitive sensor
A pressure sensitive sensor is provided that includes a net braid member formed by knitting a plurality of insulating yarn strands, such as an aramid fiber, interposed between an elastic...
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6724202 |
Physical quantity detection device with temperature compensation
First and second resistors (sensing elements) are connected in series between first and second potentials. The junction point voltage between the first and second resistor is supplied to an...
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6718829 |
Semiconductor pressure sensor and an exhaust system including the same
The full bridge circuit in a pressure sensor including semiconductor piezoelectric resistive elements in a pressure detection structure is connected to a filter. That is, first and second output...
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6647796 |
Semiconductor nitride pressure microsensor and method of making and using the same
An integrated microsensor includes a bowed micromachined membrane coupled to a substrate to define a microcavity therebetween. An integrated strain sensor is coupled to the micromachined membrane...
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6643976 |
Pressure sensor device
A pressure sensor device is described that has a diaphragm acted upon by a working medium, on a first side, and a sensor chip, which is disposed on a second side of the diaphragm that is remote...
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6625029 |
Sensor unit
A sensor unit S for water heating systems, particularly for water boilers, is designed with a single housing H as a combined relative pressure and temperature sensor and has a ceramic support...
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6427539 |
Strain gauge
A reliable sensor provides a user-friendly semiconductor sensing device and transducer which accurately detects the characteristics of a fluid, such as pressure and strain, at high temperature...
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6407553 |
Strain gages for determining charge of a battery having a thin walled pressure vessel
A strain gage system for determining state of charge in a battery having a pressure vessel includes a strain gage bridge system mounted on a first cylindrical portion of the pressure vessel. The...
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6289738 |
Testable membrane sensor with two full bridges
A sensor is proposed that has a measuring diaphragm (2), with at least one resistor measurement bridge (7, 8); a deflection of the measuring diaphragm (2) causes mistuning of the respective...
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6247369 |
Multi-channel electronically scanned cryogenic pressure sensor and method for making same
A miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multi-element array. These dies are bonded at specific sites on a glass,...
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6240785 |
Cryogenic, absolute, high pressure sensor
A pressure sensor is provided for cryogenic, high pressure applications. A highly doped silicon piezoresistive pressure sensor is bonded to a silicon substrate in an absolute pressure sensing...
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6208586 |
Method and apparatus for communicating data in a wellbore and for detecting the influx of gas
A transducer is described especially for use in providing acoustic transmission in a borehole. The transducer includes a multiple number of magnetic circuit gaps and electrical windings that have...
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6177727 |
Saddle bracket for solid state pressure gauge
A semiconductor component (31) and a method for coupling a semiconductor device (36) to a substrate (81). The semiconductor component (31) includes a saddle (34) and the semiconductor device (36)....
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6148673 |
Differential pressure sensor and method thereof
A differential pressure sensor (10) has a sensor die (30) eutectically attached to a mounting flag (14). The mounting flag has a similar coefficient of thermal expansion to the sensor die. The...
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6116092 |
Fluid pressure detector using a diaphragm
A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic...
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6092425 |
Differential pressure sensor having an alloy or metal isolator
A differential pressure sensor (10) having a housing 12 and a metal or alloy isolator (14) for stress isolation of a sensing cell (28) that is mounted to the isolator (14). The metal or alloy...
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6066882 |
Semiconductor pressure detecting device
A semiconductor pressure detecting device which effectively reduces stress that occurs on a base member due to welding between cap and the base member or any external load. The semiconductor...
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6062087 |
Heat and pressure sensor apparatus employing a piston in direct contact with the measured fluid
Apparatus is provided for sensing the pressure and temperature of fluid within a cavity of a block, such as hot plastic that flows into a mold cavity. The apparatus includes a piston (30) lying...
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6006607 |
Piezoresistive pressure sensor with sculpted diaphragm
The present invention is a semiconductor pressure sensor. In one embodiment, the semiconductor pressure sensor includes a diaphragm having a first thickness and at least cone raised boss that is...
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5994161 |
Temperature coefficient of offset adjusted semiconductor device and method thereof
A non-zero temperature coefficient of offset (Tco) in a semiconductor device (5) is adjusted by reducing the amount of adhesive material used to secure a first structure to a second structure. An...
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5974892 |
Pressure transducer, in particular for sensing a lateral collision in a motor vehicle
A pressure transducer, in particular for sensing a lateral collision in a motor vehicle, delivers an electric useful signal which is determined by a relative pressure change relating to a pressure...
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5948991 |
Semiconductor physical quantity sensor device having semiconductor sensor chip integrated with semiconductor circuit chip
An IC chip for signal processing circuit is enclosed in a mold IC and a pressure sensitive element unit is integrally provided thereon. When the mold IC is housed in a case, the mold IC is fixed to...
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5949118 |
Etching method for silicon substrates and semiconductor sensor
An etching method for a silicon substrate, which can easily smooth the etching surface of the (110)-oriented silicon, is disclosed. A container is filled with KOH solution. In the KOH solution is...
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5945605 |
Sensor assembly with sensor boss mounted on substrate
A non-invasive sensor assembly device includes a pedestal mounted sensor die for stress isolation of the sensor die from external stresses, a substrate and die porting configuration to limit...
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5932809 |
Sensor with silicon strain gage
A media-compatible sensing structure (210) that employs strain-sensing elements (222) formed in or on a silicon chip (212). The sensor (210) generally includes a metal body (214) having a diaphragm...
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5925826 |
Integrated pressure sensor unit and solenoid valve unit
A compact pressure detecting apparatus comprising a pressure sensor unit, having a semiconductor pressure-detecting device provided with gauge resistance, integrated with a solenoid valve unit for...
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5925825 |
Clamp and cup securing strain gauge cell adjacent pressure transmitting diaphragm
Apparatus comprising a flow carrier connectable in a liquid flow system including an electric motor-pump unit and a conduit for conveying a pumped liquid to a liquid utilization apparatus. The flow...
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5880372 |
Media compatible pressure sensor device utilizing self-aligned components which fit together without the need for adhesives
The present invention provides a pressure sensor device which is media compatible and very inexpensive. A medium compatible device according to the present invention for sensing pressure comprising...
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5877423 |
Method for providing temperature compensation for a wheatstone bridge-type pressure sensor
A method of compensating for differences of temperature, in a pressure sensor of the kind wherein a pressure is sensed by use of a diaphragm connected in a Wheatstone bridge circuit. First...
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5877425 |
Semiconductor-type pressure sensor with sensing based upon pressure or force applied to a silicon plate
A combustion pressure sensor suitable for a highly precise combustion control system of an automobile engine and a sensing system using the sensor. The combustion pressure sensor includes a SOI...
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5872315 |
Pressure detecting apparatus
A pressure detecting apparatus includes a sensing body with a diaphragm to which pressure is applied and a strain gauge plate having a {100} silicon substrate and a glass base, which is bonded on...
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5866821 |
Apparatus for a temperature compensation of a catheter tip pressure transducer
A compensation circuit for a resistance bridge corrects errors in the response of signal outputs thereof and has a voltage controlled current source across a power input and a ground reference...
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