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7624643 Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor  
The present invention is directed at methods and apparatuses for facilitating the establishment of a reference pressure within a reference chamber of a pressure transducer. The transducer has a...
7614308 Diaphragm pressure measuring cell arrangement  
A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to...
7591184 Industrial pressure sensor having enhanced dielectric fill fluid  
A capacitive pressure sensor for an industrial process transmitters comprises a housing, a sensing diaphragm, an electrode and a fill fluid. The housing includes an interior cavity and a channel...
7586749 Protecting casing for transducer  
A protecting casing for a transducer has an outer casing, an inner casing, a circuit board and a connector. The inner casing is detachably mounted in the outer casing and has a mounting hole and a...
7559248 High pressure transducer having an H shaped cross-section  
A high pressure transducer has an H shaped cross-section with a center arm of the H having a top and bottom surface with the top surface of the H accommodating four strain gauges. Two strain gauges...
7549342 Capacitative pressure sensor for oxidative environments  
A capacitative pressure sensor ( 30 ) for harsh environments such as vehicle tires. The sensor has two opposing electrodes ( 36 and 50 ). One electrode is a membrane ( 50 ) that extends between...
7536915 Diaphragm vacuum measuring cell and method for the production of such measuring cell  
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the...
7533573 Pressure sensor including temperature adjustment  
A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such...
7526961 Method and apparatus for monitoring fluid pressure  
A method and apparatus for monitoring the pressure of a fluid within a rigid vessel are disclosed. A preferred method comprises monitoring the capacitance of a capacitor comprising a deformable...
7516669 Capacitance sensing circuit for a pressure sensor  
The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller...
7493821 Micromachined acoustic transducer and method of operating the same  
This invention relates generally to a micromachined acoustic transducer that has a scalable array of sealed cavities and perforated members forming capacitive cells that convert the electrical...
7484416 Process control transmitter with vibration sensor  
A transmitter for use in an industrial process control system, includes a process coupling configured to couple to a process fluid. A sensor housing has a cavity formed therein which is in fluidic...
7478560 Sensor apparatus responsive to pressure and temperature within a vessel  
A sensor apparatus includes pressure and temperature sensors for measuring the pressure and temperature of high-pressure fluid media within a vessel. The pressure sensor is disposed in a sensor...
7478559 Capacitive pressure sensor with a cantilever member  
A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm...
7469590 Package structure of pressure sensor  
A pressure-sensor package mainly includes a pressure sensor, a support substrate, and a resin layer. The pressure sensor includes a glass substrate having a fixed electrode, and a silicon substrate...
7462918 Pressure sensor having gold-silicon eutectic crystal layer interposed between contact layer and silicon substrate  
A pressure sensor includes a gold-silicon eutectic crystal layer interposed between the contact layer and the silicon substrate. Because the contact layer and the silicon substrate are electrically...
7461558 Capacitive pressure sensor with sealed reference chamber  
A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane...
7451654 Constant power dissipation in capacitance pressure transducers  
A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector...
7448277 Capacitive pressure sensor and method therefor  
A capacitive pressure sensor and method for its fabrication. The sensor is fabricated from first and second wafers to have a mechanical capacitor comprising a fixed electrode and a moving electrode...
7448276 Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate  
A diffusion bonded space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The disclosure includes an integrated...
7430919 Capacitive pressure sensor with reference chamber  
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the...
7415886 Pressure sensor with deflectable diaphragm  
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a...
7409867 Pressure sensor using light source  
A pressure sensor includes a structure that deforms in response to an applied pressure. A light source is directed at the structure. This provides a reflection from the structure. A sensor is...
7395717 Flexible capacitive sensor  
The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor comprises a dielectric, an electrically conductive layer on the first side of the...
7395716 Variable capacitance measuring device  
A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering...
7389697 Pressure sensor for detecting small pressure differences and low pressures  
A capacitive pressure sensor of substantially ceramic material comprises a thick base plate ( 100 ), a front plate ( 140 ) having the same thickness as the base plate and a movable diaphragm ( 120...
7383737 Capacitive pressure sensor  
A capacitive pressure sensor includes a electrically conductive, generally piston shaped diaphragm with a flexible base wall configured to deflect under pressure. The diaphragm is generally...
7381969 Load lock control  
A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a...
7373833 MEMS pressure sensing device  
A pressure sensing system formed in a monolithic semiconductor substrate. The pressure sensing system comprises a pressure sensing device formed on the monolithic semiconductor substrate. The...
7367234 Pressure sensor  
To accurately set a detection axis of a sensor even when the sensor is attached to an inclined surface, provided is: a sensor responsive to an operation to a predetermined detection axis. A sensor...
7360431 Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm  
The pressure sensor device has a laminated diaphragm ( 12 ) in which a strain resistance gauge is formed in a surface and a stopper member ( 13 ) including a concave portion forming a curved...
7360429 High sensitivity pressure actuated switch based on MEMS-fabricated silicon diaphragm and having electrically adjustable switch point  
A pressure actuated switch for a pressure control region includes a diaphragm with a first electrically conductive surface and a second conductive surface electrically isolated from the first...
7353711 Capacitive sensor  
A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the...
7350417 Pressure sensor with conductive laminate membrane  
A pressure sensor ( 30 ) for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber ( 58 ) partially defined by a flexible membrane ( 50 ), the...
7334484 Line pressure measurement using differential pressure sensor  
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the...
7331239 Self calibrating dual diaphragm pressure sensor  
A pressure sensor having a predetermined chamber dome angle with an electrode. A hole is located in the top to provide pressure readings and the bottom has an input port. A primary diaphragm is...
7325457 Sensor and sensor module  
A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a...
7324029 Capacitance-to-digital interface circuit for differential pressure sensor  
A two phase, second order capacitance-to-digital (CD) modulator includes a first stage sigma-delta integrator that forms charge packets as a function of sensor capacitance during an auto-zero phase...
7319421 Foldback free capacitance-to-digital modulator  
A capacitance-to-digital (CD) modulator converts capacitance of a differential pressure sensor to a pulse code modulation output signal. The first stage of the CD modulator is a sigma-delta...
7316163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor  
The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the...
7308830 Pressure sensor fault detection  
A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in...
7284439 Method for producing a pressure sensor for detecting small pressure differences and low pressures  
A process for producing a plate for a capacitive sensor element. In one embodiment of the present invention, a method includes forming a plate from a substantially pure aluminum oxide slurry,...
7270009 Diaphragm type pressure sensor  
A diaphragm pressure sensor includes a first insulating substrate, a conductive substrate with a diaphragm, and a second insulating substrate with a gas inlet are bonded so as to form a pressure...
7254008 Integrated capacitive microfluidic sensors method and apparatus  
A microfluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid...
7252011 Surface area deposition trap  
The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of...
7252007 Method for the manufacturing of a capacitive pressure sensor, and a capacitive pressure sensor  
The invention relates to measuring devices for the measuring of pressure, and more specifically to capacitive pressure sensors. The silicon crystal planes { 111 } are located at the corners of a...
7249515 Capacitive pressure sensor  
For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being...
7245208 Tire condition detecting system and method  
A tire condition detecting system has transmitters and a receiver. The transmitter is installed in a plurality of wheels and the receiver is installed in a chassis of a vehicle. The receiver has a...
7222538 Fluid permeable membrane sensor  
A pressure sensor ( 30 ) for sensing fluid pressure in harsh environments such as the air pressure in a tire by providing a chamber ( 58 ) partially defined by a flexible membrane ( 50 ). The...
7219551 Differential pressure sensor  
According to the present invention, there is provided a high-precision differential pressure sensor which is not affected by a considerable change in baseline pressure. A differential pressure...
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