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9016133 Pressure sensor with pressure-actuated switch  
Various embodiments relate to a pressure sensor and related methods of manufacturing and use. A pressure sensor may include an electrical contact included in a flexible membrane that deflects in...
9000779 Method of correcting the gain of a capacitive member, and a device for implementing the method  
A method of correcting the gain of a capacitive member having electrodes that are movable relative to each other including the steps of successively applying to one of the electrodes, reduced bias...
8997575 Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges  
A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the...
8997576 Method and system for monitoring gas pressure for reference cavity of capacitance diaphragm gauge  
A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has...
8984952 Capacitive pressure sensor  
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor may include: a tubular probe body; a capacitive sensor disposed at the distal end of the probe body; a...
8975714 Capacitive pressure sensor and method of manufacturing the same  
A capacitive pressure sensor includes: a semiconductor substrate having a reference pressure chamber formed therein; a diaphragm which is formed in a front surface of the semiconductor substrate...
8966989 Capacitive ceramic pressure measuring cell and pressure sensor with such a pressure measuring cell  
A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between...
8966990 MEMS devices exhibiting linear characteristics  
A micro electro mechanical system device has a first subassembly having sensor element including a coupler, and a second subassembly including a comb drive. The comb drive having stator plates and...
8965725 Automatic calibration adjustment of capacitance diaphragm gauges to compensate for errors due to changes in atmospheric pressure  
In order to mitigate the negative effects of a change in atmospheric pressure, an improved capacitance diaphragm gauge (CDG) sensor incorporates an independent ambient atmospheric pressure sensor...
8950265 Electroactive polymer based pressure sensor  
A sensor including a buffer material layer configured to at least partially deflect when a force or pressure is imparted on the buffer material layer; and an electroactive polymer (EAP) cartridge...
8943895 Capacitive pressure sensor  
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a pressure deflectable diaphragm end formed of a first material with a first coefficient of...
8899105 Slim capacitance sensor for downhole applications  
A capacitive pressure sensor includes a stator which encircles a portion of a cylindrical diaphragm. This encircling forms a circumferential gap between the sidewalls of the stator and the...
8887573 MEMS vacuum level monitor in sealed package  
A vacuum sensor for sensing vacuum in a sealed enclosure is provided. The sealed enclosure includes active MEMS devices desired to be maintained in vacuum conditions. The vacuum sensor includes a...
8887575 Pressure sensor  
One or more reactive gases are introduced to a capacitance manometer at a particular area or areas of the diaphragm between the inner and outer capacitive electrodes so the error-inducing...
8875583 Electromechanical transducer and method of manufacturing the same  
Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so...
8869622 Capacitive electromechanical transducer apparatus and method for adjusting its sensitivity  
A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave...
8844362 System, method, and device for capacitive pressure sensing  
A pressure sensor for sensing pressure of a fluid includes a tubular housing that has a first capacitor plate segment and a second capacitor plate segment. Each of the first capacitor plate...
8841735 Capacitive pressure sensing semiconductor device  
A capacitive pressure sensing semiconductor device is provided, which has pressure resistance against pressure applied by a pressing member and can detect the pressure surely and efficiently. The...
8833171 Pressure sensor  
As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber....
8770033 Capactive pressure sensor incorporating a temperature measurement and compatible with hot environments  
A capacitive measurement device including first measurement device designed to carry out a first measurement function in relation to a nearby object, the first measurement device including a body...
8766657 RF proximity sensor  
A sensor has a strip resonator filter that energizes an emitter patch which emits an electric field out from the strip resonator filter (away from the strip resonator filter). The capacitance of...
8763468 Electrode device, pressure sensor and pressure meter  
Provided are an electrode device, a pressure sensor and an electronic pressure meter. The electrode device may comprise: an electrode portion; and an elastically deformable portion arranged on a...
8739632 Pressure sensor structure and associated method of making a pressure sensor  
A pressure sensor can include a diaphragm plate of an electrically conductive material, the diaphragm plate including substantially planar opposed first and second surfaces. A layer of a...
8714022 Capacitance pressure sensor  
The present invention provides a capacitance pressure sensor having a traces structure which can stably measure a pressure. A capacitance pressure sensor according to an embodiment of the present...
8704538 Capacitance sensors  
A sensor assembly includes a housing assembly, an electrode arrangement and a diaphragm having a fixed portion secured to the housing assembly and an active portion movable relative to the...
8661910 Capacitive sensor  
A capacitive sensor for measuring pressure comprises a fixed charge plate integral to a printed circuit board, a flexible charge plate that is grounded, a conductive donut-shaped adhesive spacer...
8656787 Electrostatic capacitive pressure sensor  
In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium...
8643128 Micro-electro-mechanical-system sensor and method for making same  
The present invention discloses an MEMS sensor and a method for making the MEMS sensor. The MEMS sensor according to the present invention includes: a substrate including an opening; a suspended...
8631706 Noise suppressor for semiconductor packages  
One or more decoupling capacitors are coupled to a low inductance mount that is connected to the bottom layer of a printed circuit board (PCB) on which a semiconductor module is mounted. The low...
8601879 Capacitance type pressure sensor and method for manufacturing a capacitance type pressure sensor  
A capacitance type pressure sensor includes a semiconductor substrate having a reference pressure compartment formed therein, a diaphragm formed of a portion of the semiconductor substrate and...
8590387 Absolute capacitive micro pressure sensor  
An absolute capacitive micro pressure sensor including a pressure sensor element with a mechanically fixed electrode and a deflectable pressure sensor membrane separated from the fixed electrode...
8561471 Capacitive pressure sensor with improved electrode structure  
An improved capacitive manometer comprises a diaphragm that is constrained relative to an electrode structure spaced from the diaphragm. An electrode support structure is arranged to support the...
8564311 Sensing phase sequence to suppress single tone noise  
A noise suppression method for a capacitance-to-voltage converter varies a sequence of sensing signal edges during a plurality capacitance measurements to produce a number of noise responses. The...
8544336 Sealed conductive grid capacitive pressure sensor  
A capacitive pressure sensor array is made of two conductive layers, wherein each conductive layer is formed with a plurality of elongated conductors disposed in a substantially parallel manner...
8539839 Pressure sensor, sensor array, method for manufacturing sensor array, and grasping apparatus  
A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion...
8516894 Electronic circuit for controlling a capacitive pressure sensor and capacitive pressure sensor system  
An electronic circuit (10) for controlling a capacitive pressure sensor (1), which capacitive pressure sensor (1) comprises a plate electrode capacitor (C) with a capacity that varies in...
8511168 Sensor element for capacitively measuring differential pressure  
A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element...
8511169 Monolithic vacuum manometer utilizing electrostatic interference as a means of detection  
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in...
8504237 Device, method, and control unit for identifying a side impact, and pressure sensor  
In device for side impact recognition in a vehicle, at least one pressure sensor system that produces a signal is provided in a side part of the vehicle, and an evaluation circuit is provided that...
8471346 Semiconductor device including a cavity  
A semiconductor device includes a substrate including a cavity and a first material layer over at least a portion of sidewalls of the cavity. The semiconductor device includes an oxide layer over...
8443676 Pressure sensor for hydraulic media in motor vehicle brake systems  
Disclosed is a pressure sensor, especially for measuring pressures exceeding 100 bar, with a diaphragm (1, 1′) that can be deflected and/or deformed as a result of pressurization. It has an...
8434369 Preloaded pressure sensor module  
A preloaded pressure sensor module (PPSM) is disclosed, where the PPSM outputs a linear Conductivity Response versus Pressure Force input. The PPSM has a convex or concave profile which is...
8429979 Capacitance type pressure sensor  
The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a...
8429978 Resonant frequency based pressure sensor  
A pressure sensor for sensing a pressure of a process fluid includes a sensor body exposed to the pressure of the process fluid. The sensor body deforms in response to the pressure. A diaphragm...
8424388 Implantable capacitive pressure sensor apparatus and methods regarding same  
An implantable capacitive pressure sensor apparatus and method for making such an apparatus includes a first pressure sensor portion and a second pressure sensor portion. The first pressure sensor...
8397578 Capacitive pressure sensor assembly  
The disclosure is directed to a capacitive pressure sensor, and the assembly of a capacitive pressure sensor, that may be used within an implantable medical pump. In one example, a housing ferrule...
8333118 Capacitive pressure sensor  
An improved capacitive manometer includes a diaphragm including a common electrode and an electrode structure including a center electrode and ring electrode. The diaphragm is movable between (i)...
8316718 MEMS pressure sensor device and method of fabricating same  
A microelectromechanical systems (MEMS) pressure sensor device (20, 62) includes a substrate structure (22, 64) having a cavity (32, 68) formed therein and a substrate structure (24) having a...
8316717 Wireless self-powered monolithic integrated capacitive sensor and method of manufacture  
Disclosed is a wireless self-powered monolithic integrated capacitive sensor, as well as methods of manufacturing same. A single monolithic chip may include various technologies, including RF...
8261619 Time to digital converting circuit and pressure sensing device using the same  
A time-to-digital converting circuit and a pressure sensing device using the same are provided. The circuit includes: a delay time-varying unit generating a reference signal having a fixed delay...