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7636053 Article and method for monitoring temperature and pressure within a pressurized gas cylinder  
A wireless based sensor assembly incorporated within a sealed and pressurized vessel including an end plug secured against an inner surface of the vessel. Temperature and pressure sensors are...
7624643 Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor  
The present invention is directed at methods and apparatuses for facilitating the establishment of a reference pressure within a reference chamber of a pressure transducer. The transducer has a...
7610811 Method and system for sensing differential pressure with elastomer  
A differential pressure sensor method and system includes a number of elastomer plates, which can be placed with certain distance and sealed in a small tube, wherein the tube can be connected to a...
7591185 Pressure sensor configurations for implantable medical electrical leads  
An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit....
7591184 Industrial pressure sensor having enhanced dielectric fill fluid  
A capacitive pressure sensor for an industrial process transmitters comprises a housing, a sensing diaphragm, an electrode and a fill fluid. The housing includes an interior cavity and a channel...
7578195 Capacitive sensor  
The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor comprises a dielectric, an electrically conductive layer on the first side of the...
7559248 High pressure transducer having an H shaped cross-section  
A high pressure transducer has an H shaped cross-section with a center arm of the H having a top and bottom surface with the top surface of the H accommodating four strain gauges. Two strain gauges...
7536915 Diaphragm vacuum measuring cell and method for the production of such measuring cell  
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the...
7533573 Pressure sensor including temperature adjustment  
A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such...
7526961 Method and apparatus for monitoring fluid pressure  
A method and apparatus for monitoring the pressure of a fluid within a rigid vessel are disclosed. A preferred method comprises monitoring the capacitance of a capacitor comprising a deformable...
7516669 Capacitance sensing circuit for a pressure sensor  
The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller...
7493821 Micromachined acoustic transducer and method of operating the same  
This invention relates generally to a micromachined acoustic transducer that has a scalable array of sealed cavities and perforated members forming capacitive cells that convert the electrical...
7487682 Measuring cell as well as constructing methods for a measuring cell and measuring apparatus with a mount for such a measuring cell  
The invention relates to a measuring cell, comprising a support and a sensor, whereby a measuring chamber is arranged between the support and the sensor and the sensor is arranged on the support by...
7484416 Process control transmitter with vibration sensor  
A transmitter for use in an industrial process control system, includes a process coupling configured to couple to a process fluid. A sensor housing has a cavity formed therein which is in fluidic...
7478559 Capacitive pressure sensor with a cantilever member  
A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm...
7477996 Integrated absolute and differential pressure transducer  
A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single...
7469590 Package structure of pressure sensor  
A pressure-sensor package mainly includes a pressure sensor, a support substrate, and a resin layer. The pressure sensor includes a glass substrate having a fixed electrode, and a silicon substrate...
7464598 Method of pressure sensing with a pressure sensor having a sensor membrane and a compensation membrane  
The invention provides for a method of sensing pressure with a pressure sensor having a sensor membrane and a compensation membrane. The pressure sensor also includes a power supply, a controller;...
7464599 Temperature compensating pressure sensor having active and reference membranes  
Provided is a temperature compensating pressure sensor. The sensor includes a silicon substrate having sealed channels on which is deposited a CMOS layer, and a conductive layer and a passivation...
7461558 Capacitive pressure sensor with sealed reference chamber  
A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane...
7458270 Inflation and pressure gauge apparatus  
A device for introducing air or other pressurized gas into a tire, sports ball or other pneumatic device. The device advantageously allows the user to check the pressure of the gas and to release...
7458272 Capacitative pressure sensor with ceramic membrane  
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer...
7451654 Constant power dissipation in capacitance pressure transducers  
A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector...
7451659 Gap-change sensing through capacitive techniques  
A gap-change sensing through capacitive techniques is disclosed. In one embodiment, an apparatus includes a first conductive surface and a second conductive surface substantially parallel to the...
7448276 Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate  
A diffusion bonded space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The disclosure includes an integrated...
7448277 Capacitive pressure sensor and method therefor  
A capacitive pressure sensor and method for its fabrication. The sensor is fabricated from first and second wafers to have a mechanical capacitor comprising a fixed electrode and a moving electrode...
7430919 Capacitive pressure sensor with reference chamber  
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the...
7415886 Pressure sensor with deflectable diaphragm  
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a...
7401524 Capacitive pressure sensor  
In a capacitance type pressure sensor ( 1 ) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the...
7401523 Capacitive sensor and method of fabricating  
A capacitive sensor and a method of making it with a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining...
7395716 Variable capacitance measuring device  
A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering...
7383737 Capacitive pressure sensor  
A capacitive pressure sensor includes a electrically conductive, generally piston shaped diaphragm with a flexible base wall configured to deflect under pressure. The diaphragm is generally...
7373833 MEMS pressure sensing device  
A pressure sensing system formed in a monolithic semiconductor substrate. The pressure sensing system comprises a pressure sensing device formed on the monolithic semiconductor substrate. The...
7367234 Pressure sensor  
To accurately set a detection axis of a sensor even when the sensor is attached to an inclined surface, provided is: a sensor responsive to an operation to a predetermined detection axis. A sensor...
7360429 High sensitivity pressure actuated switch based on MEMS-fabricated silicon diaphragm and having electrically adjustable switch point  
A pressure actuated switch for a pressure control region includes a diaphragm with a first electrically conductive surface and a second conductive surface electrically isolated from the first...
7360428 Capacitive pressure measuring cell with a membrane bed  
The invention relates to a pressure measuring cell comprising a base body, a membrane that is connected to the base body, thus forming a measuring chamber. During operation, the membrane is...
7353711 Capacitive sensor  
A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the...
7350417 Pressure sensor with conductive laminate membrane  
A pressure sensor ( 30 ) for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber ( 58 ) partially defined by a flexible membrane ( 50 ), the...
7343810 Pressure sensor and manufacturing method therefor  
A pressure sensor is composed of a pressure housing having a pressure chamber inside and a pressure sensitive element arranged in the pressure chamber, and a joint housing having a fluid passage...
7345867 Capacitive pressure sensor and method of manufacturing the same  
A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A...
7343814 Multi-zone capacitive force sensing device and methods  
A multi-zone capacitive force sensing apparatus/method is disclosed. In one embodiment, an apparatus includes one or more capacitors each having an upper conductive surface and a lower conductive...
7334480 Dual membrane sensor for temperature compensated pressure sensing  
A pressure sensor that has a sensor membrane for exposure to fluid at a pressure to be sensed, and a compensation membrane sealed from the fluid at the pressure to be sensed. Associated circuitry...
7334484 Line pressure measurement using differential pressure sensor  
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the...
7331239 Self calibrating dual diaphragm pressure sensor  
A pressure sensor having a predetermined chamber dome angle with an electrode. A hole is located in the top to provide pressure readings and the bottom has an input port. A primary diaphragm is...
7324029 Capacitance-to-digital interface circuit for differential pressure sensor  
A two phase, second order capacitance-to-digital (CD) modulator includes a first stage sigma-delta integrator that forms charge packets as a function of sensor capacitance during an auto-zero phase...
7319421 Foldback free capacitance-to-digital modulator  
A capacitance-to-digital (CD) modulator converts capacitance of a differential pressure sensor to a pulse code modulation output signal. The first stage of the CD modulator is a sigma-delta...
7316163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor  
The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the...
7308830 Pressure sensor fault detection  
A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in...
7305888 Optical interferometric pressure sensor  
A vacuum measuring cell has a first housing body and a membrane, both of Al 2 O 3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing...
7270009 Diaphragm type pressure sensor  
A diaphragm pressure sensor includes a first insulating substrate, a conductive substrate with a diaphragm, and a second insulating substrate with a gas inlet are bonded so as to form a pressure...