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7636053 |
Article and method for monitoring temperature and pressure within a pressurized gas cylinder
A wireless based sensor assembly incorporated within a sealed and pressurized vessel including an end plug secured against an inner surface of the vessel. Temperature and pressure sensors are...
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7624643 |
Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
The present invention is directed at methods and apparatuses for facilitating the establishment of a reference pressure within a reference chamber of a pressure transducer. The transducer has a...
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7610811 |
Method and system for sensing differential pressure with elastomer
A differential pressure sensor method and system includes a number of elastomer plates, which can be placed with certain distance and sealed in a small tube, wherein the tube can be connected to a...
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7591185 |
Pressure sensor configurations for implantable medical electrical leads
An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit....
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7591184 |
Industrial pressure sensor having enhanced dielectric fill fluid
A capacitive pressure sensor for an industrial process transmitters comprises a housing, a sensing diaphragm, an electrode and a fill fluid. The housing includes an interior cavity and a channel...
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7578195 |
Capacitive sensor
The invention relates to a flexible, resilient capacitive sensor suitable for large-scale manufacturing. The sensor comprises a dielectric, an electrically conductive layer on the first side of the...
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7559248 |
High pressure transducer having an H shaped cross-section
A high pressure transducer has an H shaped cross-section with a center arm of the H having a top and bottom surface with the top surface of the H accommodating four strain gauges. Two strain gauges...
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7536915 |
Diaphragm vacuum measuring cell and method for the production of such measuring cell
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the...
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7533573 |
Pressure sensor including temperature adjustment
A pressure sensor for sensing a fluid pressure comprising: a first chamber including a first conductive membrane, wherein a fluid is sealed within the first chamber at a reference pressure such...
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7526961 |
Method and apparatus for monitoring fluid pressure
A method and apparatus for monitoring the pressure of a fluid within a rigid vessel are disclosed. A preferred method comprises monitoring the capacitance of a capacitor comprising a deformable...
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7516669 |
Capacitance sensing circuit for a pressure sensor
The invention provides for a capacitance sensing circuit for a pressure sensor. The pressure sensor includes a sensor membrane and a compensation membrane. The circuit includes a controller...
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7493821 |
Micromachined acoustic transducer and method of operating the same
This invention relates generally to a micromachined acoustic transducer that has a scalable array of sealed cavities and perforated members forming capacitive cells that convert the electrical...
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7487682 |
Measuring cell as well as constructing methods for a measuring cell and measuring apparatus with a mount for such a measuring cell
The invention relates to a measuring cell, comprising a support and a sensor, whereby a measuring chamber is arranged between the support and the sensor and the sensor is arranged on the support by...
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7484416 |
Process control transmitter with vibration sensor
A transmitter for use in an industrial process control system, includes a process coupling configured to couple to a process fluid. A sensor housing has a cavity formed therein which is in fluidic...
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7478559 |
Capacitive pressure sensor with a cantilever member
A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm...
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7477996 |
Integrated absolute and differential pressure transducer
A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single...
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7469590 |
Package structure of pressure sensor
A pressure-sensor package mainly includes a pressure sensor, a support substrate, and a resin layer. The pressure sensor includes a glass substrate having a fixed electrode, and a silicon substrate...
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7464598 |
Method of pressure sensing with a pressure sensor having a sensor membrane and a compensation membrane
The invention provides for a method of sensing pressure with a pressure sensor having a sensor membrane and a compensation membrane. The pressure sensor also includes a power supply, a controller;...
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7464599 |
Temperature compensating pressure sensor having active and reference membranes
Provided is a temperature compensating pressure sensor. The sensor includes a silicon substrate having sealed channels on which is deposited a CMOS layer, and a conductive layer and a passivation...
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7461558 |
Capacitive pressure sensor with sealed reference chamber
A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane...
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7458270 |
Inflation and pressure gauge apparatus
A device for introducing air or other pressurized gas into a tire, sports ball or other pneumatic device. The device advantageously allows the user to check the pressure of the gas and to release...
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7458272 |
Capacitative pressure sensor with ceramic membrane
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire formed on a wafer substrate. Associated circuitry deposited in CMOS layers on the wafer...
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7451654 |
Constant power dissipation in capacitance pressure transducers
A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector...
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7451659 |
Gap-change sensing through capacitive techniques
A gap-change sensing through capacitive techniques is disclosed. In one embodiment, an apparatus includes a first conductive surface and a second conductive surface substantially parallel to the...
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7448276 |
Capacitance dual electrode pressure sensor in a diffusion bonded layered substrate
A diffusion bonded space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The disclosure includes an integrated...
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7448277 |
Capacitive pressure sensor and method therefor
A capacitive pressure sensor and method for its fabrication. The sensor is fabricated from first and second wafers to have a mechanical capacitor comprising a fixed electrode and a moving electrode...
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7430919 |
Capacitive pressure sensor with reference chamber
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the...
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7415886 |
Pressure sensor with deflectable diaphragm
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a...
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7401524 |
Capacitive pressure sensor
In a capacitance type pressure sensor ( 1 ) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the...
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7401523 |
Capacitive sensor and method of fabricating
A capacitive sensor and a method of making it with a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining...
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7395716 |
Variable capacitance measuring device
A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering...
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7383737 |
Capacitive pressure sensor
A capacitive pressure sensor includes a electrically conductive, generally piston shaped diaphragm with a flexible base wall configured to deflect under pressure. The diaphragm is generally...
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7373833 |
MEMS pressure sensing device
A pressure sensing system formed in a monolithic semiconductor substrate. The pressure sensing system comprises a pressure sensing device formed on the monolithic semiconductor substrate. The...
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7367234 |
Pressure sensor
To accurately set a detection axis of a sensor even when the sensor is attached to an inclined surface, provided is: a sensor responsive to an operation to a predetermined detection axis. A sensor...
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7360429 |
High sensitivity pressure actuated switch based on MEMS-fabricated silicon diaphragm and having electrically adjustable switch point
A pressure actuated switch for a pressure control region includes a diaphragm with a first electrically conductive surface and a second conductive surface electrically isolated from the first...
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7360428 |
Capacitive pressure measuring cell with a membrane bed
The invention relates to a pressure measuring cell comprising a base body, a membrane that is connected to the base body, thus forming a measuring chamber. During operation, the membrane is...
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7353711 |
Capacitive sensor
A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the...
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7350417 |
Pressure sensor with conductive laminate membrane
A pressure sensor ( 30 ) for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber ( 58 ) partially defined by a flexible membrane ( 50 ), the...
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7343810 |
Pressure sensor and manufacturing method therefor
A pressure sensor is composed of a pressure housing having a pressure chamber inside and a pressure sensitive element arranged in the pressure chamber, and a joint housing having a fluid passage...
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7345867 |
Capacitive pressure sensor and method of manufacturing the same
A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A...
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7343814 |
Multi-zone capacitive force sensing device and methods
A multi-zone capacitive force sensing apparatus/method is disclosed. In one embodiment, an apparatus includes one or more capacitors each having an upper conductive surface and a lower conductive...
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7334480 |
Dual membrane sensor for temperature compensated pressure sensing
A pressure sensor that has a sensor membrane for exposure to fluid at a pressure to be sensed, and a compensation membrane sealed from the fluid at the pressure to be sensed. Associated circuitry...
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7334484 |
Line pressure measurement using differential pressure sensor
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the...
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7331239 |
Self calibrating dual diaphragm pressure sensor
A pressure sensor having a predetermined chamber dome angle with an electrode. A hole is located in the top to provide pressure readings and the bottom has an input port. A primary diaphragm is...
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7324029 |
Capacitance-to-digital interface circuit for differential pressure sensor
A two phase, second order capacitance-to-digital (CD) modulator includes a first stage sigma-delta integrator that forms charge packets as a function of sensor capacitance during an auto-zero phase...
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7319421 |
Foldback free capacitance-to-digital modulator
A capacitance-to-digital (CD) modulator converts capacitance of a differential pressure sensor to a pulse code modulation output signal. The first stage of the CD modulator is a sigma-delta...
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7316163 |
Method of forming a seal between a housing and a diaphragm of a capacitance sensor
The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the...
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7308830 |
Pressure sensor fault detection
A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in...
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7305888 |
Optical interferometric pressure sensor
A vacuum measuring cell has a first housing body and a membrane, both of Al 2 O 3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing...
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7270009 |
Diaphragm type pressure sensor
A diaphragm pressure sensor includes a first insulating substrate, a conductive substrate with a diaphragm, and a second insulating substrate with a gas inlet are bonded so as to form a pressure...
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