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7380459 Absolute pressure sensor  
An absolute pressure sensor is provided comprising a vibration sensing element such as a piezoelectric element disposed on a vibratable seal. The seal is disposed between two gas spring chambers...
7194909 Pressure and vibration sensing apparatus  
A pressure and vibration sensing apparatus designed to sense pressure together with vibration through one apparatus. The pressure and vibration sensing apparatus includes a case adapted to be...
7191658 Pressure-detecting device and method of manufacturing the same  
One end of a rod-like pressure-conveying member is disposed in a sensing unit, and the other end extends into and through an insertion hole of an engine. A combustion pressure, to which the other...
7104134 Piezoelectric cantilever pressure sensor  
A piezoelectric cantilever pressure sensor has a substrate and a piezoelectric cantilever having a base portion attached to the substrate and a beam portion suspended over a cavity. The...
7032454 Piezoelectric cantilever pressure sensor array  
A piezoelectric cantilever pressure sensor array is disclosed. The piezoelectric cantilever pressure sensor array contains a substrate, a readout circuit, and piezoelectric cantilever pressure...
7013733 Silicon resonant type pressure sensor  
A silicon resonant type pressure sensor has a sensing diaphragm to which a measuring pressure is to be applied; and a vibrating beam which is embedded on the sensing diaphragm, and which is made of...
6972447 Semiconductor component having a first earlier structure differing from a second earlier structure  
A semiconductor component for a semiconductor substrate, in which a first section and a second section are provided, and in which the pore structure of the first section differs from the pore...
6938489 Oscillatory type pressure sensor  
A high-sensitive and high accuracy vibrating type pressure sensor ( 1 ) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of...
6546804 Method of making a pressure sensor comprising a resonant beam structure  
A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended by a diaphragm at one or more points by suspension elements. Pressure applied to the diaphragm will cause the...
6461301 Resonance based pressure transducer system  
The invention relates to a resonance based pressure transducer system, insertable into a living body for the in vivo measurement of pressure. It comprises a pressure sensor ( 2 ) having a...
6182513 Resonant sensor and method of making a pressure sensor comprising a resonant beam structure  
A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the...
6092423 Tunnel pick-off vibrating rate sensor  
A rate sensor has a tine cut from a silicon substrate and resiliently mounted by two integral flexure beams. An electrostatic actuator drives the tine to vibrate in its plane. The tine supports two...
6085594 High resolution and large dynamic range resonant pressure sensor based on Q-factor measurement  
A pressure sensor has a high degree of accuracy over a wide range of pressures. Using a pressure sensor relying upon resonant oscillations to determine pressure, a driving circuit drives such a...
5808210 Thin film resonant microbeam absolute pressure sensor  
A micromechnical sensor having a polysilicon beam that is an integral part of the diaphragm resulting in a frequency of the beam that is a direct result of the pressure applied to the external...
5679901 Vortex sensing pressure transducer  
A vortex flowmeter employs a differential pressure transducer converting oscillation in a differential pressure to an alternating electrical signal, wherein the differential pressure transducer...
5528939 Micromechanical pressure gauge having extended sensor range  
An improved gas pressure gauge is disclosed that extends the linear range of pressure dependent damping to higher pressures by placing a stationary member in very close proximity to the vibrating...
5477737 Oscillatory pressure transducer  
A transducer converting an oscillation in fluid pressure into an alternating electrical signal comprises a transducer body including a first pressure compartment disposed intermediate a second and...
5473944 Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture  
A pressure transducer comprising at least one diaphragm formed in a wafer of semiconducting material, the at least one diaphragm being spaced from a first surface of the wafer, a first layer of...
5457999 Method and apparatus for measurement of forces and pressures using tensioned bellows  
A method and apparatus for measuring differences between forces, pressures, and combinations thereof. One or more force or pressure deformable members, preferably metal bellows, are internally...
5450762 Reactionless single beam vibrating force sensor  
A reactionless single beam vibrating force transducer utilizes counterbalances at opposite ends of the beam that rotate in directions opposite to the ends of the vibrating beam to reduce rotational...
5447071 Direct coupled pressure sensing device  
Pressure sensing devices which have a vibrating crystal or other load sensitive component responsive to external pressures and a reference component of the same character for outputting a signal...
5426981 Vibrating sensor  
A vibrating sensor comprises an elongated element arranged to vibrate at a frequency dependent upon an external stress applied to the sensor, and an optical fiber for coupling light into an end of...
5415043 Acceleration sensor and process for its production  
An acceleration sensor is used in particular for recognizing an impact experienced by a motor vehicle. The sensor has a spring-mass system (1) with at least one stable original position (4) and one...
5305643 Pressure micro-sensor  
A pressure micro-sensor is formed by a sandwich of three silicon plates in contact by their periphery, with an interposed insulating layer in order to define an internal cavity. The lower plate (2)...
5231881 Digital pressure sensor with a pretensioned vibrating cord  
A pressure measuring device comprises a pair of pressure compartments, a deflective structural element subjected to a force resulting from a differential pressure between two pressures respectively...
5195374 Sensor systems  
In pressure sensor systems based upon a micromachined silicon pressure sensor comprising a resonantly vibratable beam supported on a diaphragm, the beam is excited into resonant vibration by...
5170668 Unit for measuring or other device  
A unit which is useful in a measuring device such as a vibration rod transducer. The unit comprises supported diamond layers having an unsupported bridging diamond strip which is integrally formed...
5146787 Pressure microsensor  
A pressure microsensor comprises, between two plates in an insulating material: a bottom silicon plate (3) forming a base; a middle silicon plate (2) constituting a diaphragm (11) surrounded by a...
5142913 Non-quartz resonating transducer  
A transducer for measuring a moment force as a related function of pressure and tension where a spirally wound bourdon tube has a confined end arrayed to apply a moment force to pretensioned metal...
5123282 Vibrating type pressure measuring device  
A vibrating type pressure measuring device having good shock wave proof measuring characteristics, high frequency response, good temperature characteristics, and can be readily miniaturized,...
5115675 Tensioned bellows pressure transducer  
A tensioned bellows pressure transducer having a pressure chamber [40], an elastic vibrating member [50], an electromagnetic coil [60] a linkage [33], a rigid body [30], a body extension [35], and...
5105665 Sensors  
In a micromachined silicon pressure sensor comprising a resonantly vibratable beam supported on a diaphragm, the beam is indirectly excited into resonant vibration by directing an optical...
5101664 Optical pressure transducer  
A micromachined silicon pressure transducer employs a vibrating bridge that is formed from the same silicon slab as the pressure responsive diaphragm. The resonant frequency of the bridge is a...
5095763 Load-sensitive resonator beam transducer  
A vibratory force transducer comprising a vibratory beam (21) of rectangular transverse cross section having a uniform thickness t, a major span section of length L 1 and width w 1 , and at least...
5070736 Differential pressure sensor with read-out device  
A differential pressure sensor comprises a pair of bourdon tubes disposed in an arrangement wherein deflections of the two bourdon tubes resulting from fluid pressures connected thereto take place...
5036715 Cantilevered force sensing assembly utilizing one or two resonating force sensing devices  
A force sensing assembly and particularly one which is especially suitable for use as a pressure transducer is disclosed herein. This assembly includes at least one and preferably a stacked pair of...
5009108 Vibrating type transducer  
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural...
5003825 Digital pressure sensor  
This invention discloses a differential or absolute pressure sensing apparatus that measures pressure exerted on a mechanical pressure sensing element in digitized electrical signals, which...
5000050 Mass-flow sensor using aerodynamic damping  
A fluid mass flow sensor uses the effect of aerodynamic drag on a vibrating object. The drag damps the resonance oscillations of the vibrator in an amount proportional to the mass flow. An...
4991153 Vibration type transducer  
The apparatus of the present invention detects the resonant frequency of a vibratory member in contact with a fluid. The detection of the resonant frequency enables the device to be used to detect...
4942766 Transducer  
In a transducer, e.g. a pressure transducer, the sensing element comprises a torsional oscillator provided with magnetic means for feedback of signals to maintain oscillation. Typically the sensing...
4938068 Pressure transducer  
A pressure transducer 10 is disclosed wherein a bellows 11 is expanded by an external pressure applied at pressure port 16. The force created by external pressure applied to bellows 11 is...
4878385 Differential pressure sensing apparatus  
An apparatus for sensing differential pressures is provided. The apparatus includes a housing having an inner chamber filled with an incompressible working fluid. First and second diaphragms are...
4841775 Vibratory transducer  
A vibratory transducer comprising a vibratory beam composed of an n-type layer and having at least one end fixed. The vibratory beam is formed by selectively etching an n-type layer formed by...
4764244 Resonant sensor and method of making same  
Microminiature resonant sensor structures are prepared according to micromachining/microfabrication techniques, which structures include thin-film deposits of piezoelectric materials. Such...
4739664 Absolute fluid pressure sensor  
A pressure sensor uses two fluidically coupled piezoelectrically driven, vibrating cantilever structures, each tuned to the same fundamental resonance frequency. One cantilever, the driver, is...
4651569 Torque tube digital differential pressure sensor  
A digital differential pressure sensor with relatively low sensitivity to common mode line pressure errors. The sensor includes an airtight enclosure having a pair of pressure ports through which...
4614119 Resonant hollow beam and method  
A microminiature resonant hollow beam sensor is manufactured by micromachining and microfabrication techniques. Specifically, a sensor is formed by etching troughs in a pair of silicon substrates,...
4600855 Piezoelectric apparatus for measuring bodily fluid pressure within a conduit  
An apparatus for measuring pressure within a conduit is disclosed preferably comprising a tube whose resonant frequency varies with the pressure of fluid within the tube; means for passing the...
4476725 Differential pressure gauge  
A differential pressure gauge comprises a balance beam (3) acting upon a vibrating blade (6). The beam (3) and the blade (6) are disposed in a rigid chamber 4 under vacuum. The beam (3) is acted...
Matches 1 - 50 out of 86 1 2 >