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5852245 |
Piezoelectric pressure sensor suitable for sensing pressure at high temperatures
A piezoelectric pressure sensor for detecting pressure in a combustion chamber of an internal combustion engine includes a backing plate secured within a housing. The sensor also includes a...
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5844141 |
Pressure sensor having stress sensitive member
A pressure sensor device 10 comprises three layers 11a, 12 and 11b of silicon, fusion-bonded together. The outer layers 11a and 11b form a sealed housing around the central layer 12 to which they...
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5836203 |
Magnetically excited flexural plate wave apparatus
A non-piezoelectric flexural plate wave apparatus having meander-line transducers mounted on a non-piezoelectric membrane. A static magnetic field is directed perpendicularly to the conductive legs...
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5821425 |
Remote sensing of structural integrity using a surface acoustic wave sensor
A surface acoustic wave (SAW) sensing device for remotely sensing structu integrity of a physical structure. The sensing device includes a piezoelectric substrate with a notch formed part way in...
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5780745 |
Acoustic pressure gradient sensor
An acoustic pressure gradient sensor able to detect a sound signal. The sensor includes a mechanical-acoustic device formed of a sphere that has omnidirectional sensitivity to the pressure...
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5753827 |
Coriolis meteR having a geometry insensitive to changes in fluid pressure and density and method of operation thereof
A method of compensating for at least one of pressure and density with a Coriolis meter, the meter having two modes of vibration impressed thereon, a fluid in the meter altering the modes of...
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5739418 |
Vibration pick-up and method of producing the same
In a vibration pick-up having a pressure sleeve with a central opening for a mounting element and a supporting surface to be supported on a component to cause vibrations, a detection member is...
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5663505 |
Pressure sensor having a piezoelectric vibrator with concencentric circular electrodes
A pressure sensor includes a vibrator having a diaphragm valve for detecting pressure. First and second circular piezoelectric bodies are located on a respective one of the two principal planes of...
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5585567 |
Method and apparatus for determining the internal pressure of a sealed container
Apparatus (10) includes means (14) for exciting at least the fundamental radial circumferential mode of vibration (f 1 ) and the first harmonic (f 2 ) thereof, detection means (22) for detecting...
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5578759 |
Pressure sensor with enhanced sensitivity
A pressure sensor having enhanced sensitivity without loss of accuracy over a broad pressure range. The sensor includes a resonator element sandwiched between two hollow end caps to form a sealed...
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5569856 |
Differential pressure transducer wherein a bridge connects two pressure diaphragms
A differential pressure transducer is provided in which first and second diaphragms are formed within a block of material, such as monocrystalline silicon. Each diaphragm carries a support for a...
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5557971 |
Pressure sensor
A pressure sensor for detecting engine knocking includes a diaphragm 40, and a pressure transmitting medium 10 filled between a pressure sensing element 5 and the diaphragm. The diaphragm has a...
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5546810 |
Pressure measuring device and method using quartz resonators
The temperature dependence of the difference in oscillation frequency between two quartz resonators caused by the pressure difference between the two quartz resonators as well as the intrinsic...
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5528939 |
Micromechanical pressure gauge having extended sensor range
An improved gas pressure gauge is disclosed that extends the linear range of pressure dependent damping to higher pressures by placing a stationary member in very close proximity to the vibrating...
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5473944 |
Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture
A pressure transducer comprising at least one diaphragm formed in a wafer of semiconducting material, the at least one diaphragm being spaced from a first surface of the wafer, a first layer of...
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5471882 |
Quartz thickness-shear mode resonator temperature-compensated pressure transducer with matching thermal time constants of pressure and temperature sensors
A pressure transducer assembly for measuring fluid pressure. The transducer assembly includes a thickness-shear mode resonator pressure sensor and a thickness-shear mode resonator temperature...
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5461922 |
Pressure sensor isolated within housing having integral diaphragm and method of making same
A pressure transducer is provided for measuring pressure within a measurand environment, the transducer comprising a header which includes a substantially nondeformable molded housing formed from a...
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5458000 |
Static pressure compensation of resonant integrated microbeam sensors
A temperature and static pressure compensated differential pressure sensor includes a semiconductor substrate in which a flexible, pressure responsive diaphragm is formed. A pressure responsive...
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5447071 |
Direct coupled pressure sensing device
Pressure sensing devices which have a vibrating crystal or other load sensitive component responsive to external pressures and a reference component of the same character for outputting a signal...
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5417115 |
Dielectrically isolated resonant microsensors
A resonant strain gauge includes a silicon substrate, a polysilicon flexure beam fixed at both ends relative to the substrate, and a polysilicon rigid cover cooperating with the substrate to...
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5394345 |
Method and apparatus for correcting a pressure measurement for the influence of temperature
The invention relates to a method of correcting the measurements of a pressure gauge for the influence of temperature transients. In a preferred embodiment, a correction term is added to the...
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5363691 |
Vibratile sensing instrument
An instrument for the detection or measurement of attributes of a material comprises at least one vane which is mounted on a support that allows the vane to vibrate, a drive transducer which is...
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5359445 |
Fiber optic sensor
A fiber optic sensor includes a generally cylindrical housing including a fiber optic transmitter in one end connected to a source of light, a sensor within the housing attached to the cylindrical...
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5325719 |
Magnetically driven resonant disc pressure transducer
A vibrating disc transducer assembly suitable for accurately measuring high pressures utilizes a transducer having a vibratory disc that is preferably fabricated from silicon and excited to vibrate...
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5317917 |
Resonant pressure transducer
A resonant pressure transducer, having a deformable diaphragm or membrane exposed to an ambient environment wherein a pressure force to be measured exists, is provided. A transducer according to...
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5305642 |
Portable high precision pressure transducer system
A high precision pressure transducer system for checking the reliability of a second pressure transducer system used to monitor the level of a fluid confined in a holding tank. Since the response...
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5299868 |
Crystalline transducer with ac-cut temperature crystal
An apparatus and method for sensing temperature in an oil or gas well use an AC-cut temperature crystal connected to a Z-cut crystalline member contained in a crystalline housing that can be...
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5275055 |
Resonant gauge with microbeam driven in constant electric field
A resonant strain gauge includes a silicon substrate, a polysilicon flexure beam attached at both ends to the substrate, and a polysilicon rigid cover cooperating with the substrate to enclose the...
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5265479 |
Micro resonator
An optically driven microresonator sensor comprising a sensor member having a vibratory bridge onto which a light beam is directed at a non-zero angle relative to a normal to said bridge, the light...
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5249467 |
Pressure detecting apparatus
A pressure detecting apparatus comprises a pressure sensor having a vibrating element forming a pressure sensing surface, which is secured to a housing at the periphery thereof; and a pressure...
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5231880 |
Pressure transducer assembly
A pressure transducer including a first pressure crystal, a second temperature crystal, a third reference crystal and associated electronics. All three crystals resonate in the thickness-shear mode.
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5228344 |
Method of measuring pressures using a tuning fork crystal oscillator
A pressure is measured by obtaining a difference between an actual resonance resistance of a tuning fork oscillator subjected to the pressure and a natural resonance resistance of the tuning fork...
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5220836 |
Method and arrangement for piezoelectric measurement
A sensor containing at least one piezoelectric transducer element is operated via a common, single signal line in both possible operating modes--first, at low frequencies as a measuring element for...
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5214343 |
Fluoroether grease acoustic couplant
A couplant material for establishing a sonic path of good acoustical impedance between an ultrasonic transducer housing and its crystal, and the housing and a pipe to which the housing is attached....
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5181423 |
Apparatus for sensing and transmitting in a wireless manner a value to be measured
A device for measuring physical values, each as pressure changes, includes a sensor transponder section and an interrogator receiver section for transmitting interrogation signals including a power...
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5165289 |
Resonant mechanical sensor
The sensor according to the present invention provides a device for measuring the magnitude of an applied load as a shift in resonant frequency of a mechanical resonator caused by load-induced...
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5152173 |
Optical sensing systems
In an optically-excited micromachined silicon pressure sensor comprising a resonantly vibrating beam mounted on a diaphragm, vibration of the beam is sensed optically via the same optical fibre...
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5142912 |
Semiconductor pressure sensor
Pressure sensor having a silicon diaphragm chip. The diaphragm in the chip is less than 200 mils in diameter and has an ultrasonic resonant frequency that varies with pressure exerted on it. The...
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5136885 |
Quartz crystal pressure sensor
A quartz crystal gas pressure sensor senses a range of pressures within a gaseous environment, such as from 0.1 millibar to 1 bar. The sensor includes a quartz crystal connected to manifest a...
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5119679 |
Optically powered and linked pressure transducer
A pressure sensing system that is relatively immune to EMI. The system comprises a sensor and a controller linked to one another by a fiber optic cable. The sensor includes an electronic pressure...
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5060526 |
Laminated semiconductor sensor with vibrating element
An electromechanical sensor is provided which comprises: a first silicon wafer which defines a resonant element; wherein the resonant element is doped with approximately the same impurity...
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5022269 |
Resonance frequency position sensor
A position sensor includes a vibrating elongated member with a marker retained thereto in a sliding relationship thereon, wherein the marker coupled to a displacement of a target corresponding to a...
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5010770 |
Vibrating tube fiber optic pressure transducer with light-powered electro-magnetic drive
A fiber optic transducer system to measure the pressure within a vibrating tube is disclosed. Light pulses produced by a laser diode are transmitted through an optical fiber to a photo diode which...
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5010771 |
Fast response, high sensitivity manometric wind sensor
A gas flow alternator cyclically connects a microphone to a dynamic flow ssure and then a reference static flow pressure. The microphone converts the pressures to a resultant alternating...
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5000050 |
Mass-flow sensor using aerodynamic damping
A fluid mass flow sensor uses the effect of aerodynamic drag on a vibrating object. The drag damps the resonance oscillations of the vibrator in an amount proportional to the mass flow. An...
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4995264 |
Gas pressure gauge and pressure measuring method
A process for measuring pressure, preferably vacuum is described. The measuring signals from a heat conduction gauge and the measuring signals from a gas friction gauge are processed to a common...
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4995263 |
Tuning fork quartz manometer
The tuning fork quartz manometer has a tuning fork quartz (2) mounted in a protective casing (3) which is in turn part of a self-oscillating feedback circuit. According to the invention the...
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4995265 |
Degradation and contamination compensated tuning fork quartz monometer, and method to compensate for tuning quartz degradation and contamination
In the present pressure measurement process the damping signal of a tuning fork quartz manometer, which is a measure of the prevailing pressure, is so combined with the correction value...
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4991153 |
Vibration type transducer
The apparatus of the present invention detects the resonant frequency of a vibratory member in contact with a fluid. The detection of the resonant frequency enables the device to be used to detect...
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4936147 |
Transducer and sensor apparatus and method
A sensor apparatus includes a pressure sensor, a reference device and a temperature sensor collocated within a common environment. The reference device and the temperature sensor are constructed to...
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