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7631559 |
Acceleration sensor
An acceleration sensor includes a base having an XY-substrate surface which is parallel to an XY plane, a beam portion having a frame shape which is arranged in a floating state above the...
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7594438 |
Inertial sensor having a flexing element supporting a movable mass
A long-period weak-motion inertial sensor includes a frame having a frame mounting surface, a movable mass having a movable mass mounting surface, a transducer for sensing displacements of the...
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7574914 |
Acceleration sensor
An acceleration sensor includes a frame-shaped beam portion disposed above an XY substrate surface of a base in a floating state and a beam-portion supporting/fixing unit arranged to attach the...
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7464591 |
Semiconductor acceleration sensor
A semiconductor acceleration sensor having beam parts formed in substantially L-shape to surround a weight part, wherein formed to surround a square part, as seen in plan view and constituting the...
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RE40561 |
Acceleration sensor and process for the production thereof
A single crystal silicon substrate ( 1 ) is bonded through an SiO 2 film ( 9 ) to a single crystal silicon substrate ( 8 ), and the single crystal silicon substrate ( 1 ) is made into a thin film....
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7406868 |
Compensating accelerometer with optical angle sensing
A compensating accelerometer includes a housing, and a sensing element mounted in the housing. The sensing element includes a pendulum flexibly mounted on a base. The sensing element includes a...
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7389691 |
Acceleration sensor
A acceleration sensor includes a supporting part, a beam part connected to the supporting part, a weight part connected to the beam part, and a protruding part formed beneath the beam part so that...
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7371601 |
Piezoresistive sensing structure
A technique for manufacturing a piezoresistive sensing structure includes a number of process steps. Initially, a piezoresistive element is implanted into a first side of an assembly that includes...
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7353706 |
Weighted released-beam sensor
A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and...
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7296471 |
Acceleration sensor
A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion the lower end of which is fixed to a substrate; a...
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7288873 |
Device for emission of high frequency signals
A device for emission of high frequency signals is provided. The emission device is capable of emission of signals in the Gigahertz (GHz) and Terahertz (THz) range. The device may utilize, for...
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7225675 |
Capacitance type dynamic quantity sensor
A capacitance type dynamic quantity sensor has a first substrate, a second substrate disposed over the first substrate, and first and second electrodes each disposed on a main surface of a...
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7223624 |
Micromechanical device with thinned cantilever structure and related methods
In one aspect, a microelectromechanical device and method of producing the device includes an accelerometer with a thinned flexure structure. In another embodiment, the device and method of...
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7159442 |
MEMS multi-directional shock sensor
A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching...
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7146856 |
Dynamically balanced capacitive pick-off accelerometer
A Micro Electro-Mechanical System (MEMS) acceleration sensing device formed of a silicon substrate having a substantially planar surface; a pendulous sensing element having a substantially planar...
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7137300 |
Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making
An accelerometer device comprises a dielectric seismic mass separated by a gap from an underlying comb-shaped planar capacitor. The principle for measuring acceleration detecting capacitance change...
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7100447 |
Super Invar magnetic return path for high performance accelerometers
A force rebalance accelerometer ( 20 ) includes a silicon dioxide-based proof mass ( 28 ) having capacitive elements ( 40 ) engaged with excitation rings ( 61 ) made from alloys of Super Invar. The...
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7024933 |
Internally shock caged serpentine flexure for micro-machined accelerometer
An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively...
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7021141 |
Beam-type accelerometer
An accelerometer has a cantilever beam supported at one end and having an opposite free end with a longitudinal direction between the supported end and the free end, the beam being formed of a...
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7019231 |
Inertial sensor
An inertial sensor includes a sensing portion having a weight supported by beams, the weight being a movable portion, and a weight stopper that limits a movable range of the weight, the weight...
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7005193 |
Method of adding mass to MEMS structures
A proof mass ( 11 ) for a MEMS device is provided herein. The proof mass comprises a base ( 13 ) comprising a semiconductor material, and at least one appendage ( 15 ) adjoined to said base by way...
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6938487 |
Inertia sensor
An inertia device is constructed by both suspension structure and micro-electroplating structure. The suspension structure may be manufactured by surface micromachining technique of sacrificial...
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6912902 |
Bending beam accelerometer with differential capacitive pickoff
A low cost, pendulous, capacitive-sensing Micro Electro-Mechanical Systems (MEMS) accelerometer is provided. The accelerometer includes a pendulous proof mass, one or more securing pads, and one or...
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6874363 |
Trapped charge field bias vibrating beam accelerometer
A mechanical resonator having an electrical charge buried and substantially permanently trapped in a layer of insulating material grown or otherwise formed on either or both of the electrode and...
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6868725 |
Hinge position location that causes pendulous axis to be substantially parallel with drive component direction
A drive component that comprises a drive axis, a pendulous sensor component that comprises a center of mass, and a hinge component that comprises a rotation axis of an electromechanical system. The...
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6862795 |
Method of manufacturing of a monolithic silicon acceleration sensor
A method of manufacturing a monolithic silicon acceleration sensor is disclosed. The monolithic silicon acceleration sensor includes one or more sensor cells, each sensor cell having an inertial...
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6750775 |
Integrated sensor having plurality of released beams for sensing acceleration and associated methods
An integrated circuit and method are provided for sensing activity such as acceleration in a predetermined direction of movement. The integrated released beam sensor preferably includes a switch...
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6701779 |
Perpendicular torsion micro-electromechanical switch
A semiconductor torsional micro-electromechanical (MEM) switch is described having a conductive movable control electrode; an insulated semiconductor torsion beam attached to the movable control...
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6662658 |
Whiffletree accelerometer
An apparatus and method for suspending two or more force-versus-displacement sensors for measuring displacement of a pendular structure relative to a frame structure, wherein a suspension structure...
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6619123 |
Micromachined shock sensor
A micromachined shock sensor has a substrate with a surface on which are formed an array of acceleration sensing units. Each sensing unit has a mount fixed to the substrate, a cantilever beam...
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6615465 |
Method for producing an acceleration sensor
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two...
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6591678 |
Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion
A dynamic quantity sensor includes a semiconductor substrate, a movable electrode, first fixed electrodes and second fixed electrodes. The movable electrode includes a mass portion and electrode...
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6430999 |
Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove
A semiconductor physical quantity sensor has a beam connecting a movable portion and a support substrate for displacing the movable portion in a displacement direction. The beam has a rectangular...
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6389899 |
In-plane micromachined accelerometer and bridge circuit having same
A micromachined accelerometer for measuring acceleration in a direction parallel with the plane of the accelerometer substrate. The accelerometer has a strain-isolation pedestal, a flexure attached...
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6389898 |
Microsensor with a resonator structure
A microsensor with a resonator structure, which is excited by first electrical signals to oscillate and emits second electrical signals in dependence on the measuring variable, wherein a heating...
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6388300 |
Semiconductor physical quantity sensor and method of manufacturing the same
A semiconductor physical quantity sensor, in which a beam-structure having a movable electrode and a fixed electrode confronted with the movable electrode are integrally formed in one substrate,...
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6355964 |
Microelectronic integrated sensor
A microelectronic integrated sensor is formed with a cantilever. For the purpose of ensuring a system which is especially invulnerable to mechanical strains during production, the cantilever is...
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6336658 |
Acceleration switch and the manufacturing method
A small acceleration switch adapted to switch between ON and OFF states depending upon the magnitude of acceleration applied to the switch. The acceleration switch includes a first contact formed...
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6336366 |
Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means...
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6316796 |
Single crystal silicon sensor with high aspect ratio and curvilinear structures
In one aspect, the invention provides a semiconductor sensor which includes a first single crystal silicon wafer layer. A single crystal silicon structure is formed in the first wafer layer. The...
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6285111 |
Axis alignment method
An apparatus and method for determining the rate of angular rotation of a moving body and, in particular, for alignment of the dither motion and the Coriolis acceleration sensing direction in a...
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6263735 |
Acceleration sensor
An acceleration sensor made available without using a high-level semiconductor technology or a micro-machining technology. The sensor detects an acceleration with a high precision, yet the...
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6263736 |
Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing...
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6236005 |
Micromechanical acceleration switch
A micromechanical acceleration switch of silicon or similar materials, comprising a resilient electrode element, a proof mass, a housing and a spring element connecting the electrode element and...
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6199430 |
Acceleration sensor with ring-shaped movable electrode
An acceleration sensor has a ring-shaped movable electrode connected to an anchor part via beams and a fixed electrode facing the ring-shaped movable electrode defining a specific interval, which...
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6170331 |
Detecting rotational acceleration
Rotational motion about at least two different axes may be resolved to measure the direction, magnitude and pivot point of the rotational displacements In some embodiments, these measurements may...
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6149190 |
Micromechanical accelerometer for automotive applications
A micromechanical capacitive accelerometer is provided from a single silicon wafer. The basic structure of the micromechanical accelerometer is etched in the wafer to form a released portion in the...
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6134964 |
Mechanical resonator having a variable resonance frequency
A mechanical resonator has an electronically adjustable resonance frequency and is especially adapted to be used as a tunable vibration absorber. The mechanical resonator includes an inertial mass...
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6136631 |
Method for producing a microelectronic integrated cantilever
A microelectronic integrated sensor is formed with a cantilever. For the purpose of ensuring a system which is especially invulnerable to mechanical strains during production, the cantilever is...
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6122965 |
System for the measurement of acceleration in three axes
A system for measuring acceleration in three axes comprises four individual sensors arranged in a rectangle on a common substrate with each having one main sensitivity axis. Each individual sensor...
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