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8117917 Vibrating beam accelerometer with improved performance in vibration environments  
An accelerometer that has a cross coupling coefficient due to pendulum droop of the proof mass that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator...
7905146 Inertial sensor  
An inertial sensor includes a stopper having a first locking member extending from a flame onto a proof-mass, a first recess formed at the proof-mass, including a bottom surface, a second locking...
RE42083 Acceleration sensor and process for the production thereof  
A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A...
7870789 Seismic sensor  
A seismic sensor includes a frame, a pendulum pivotably mounted to the frame, a mechanism for sensing angular position of the pendulum, and a monolithic flat spring oriented between the frame and...
7868709 Oscillating current converter  
To provide an oscillating current converter fabricated by utilizing the MEMS technology making it possible to further decrease the size yet improving the conversion efficiency. An oscillating...
7849745 Ultra-low noise MEMS piezoelectric accelerometers  
Sensing structures are provided which are designed using non-conventional designs. These sensing structures have improved sensitivity and noise floor at low frequencies.
7757393 Capacitive microaccelerometers and fabrication methods  
Disclosed are moveable microstructures comprising in-plane capacitive microaccelerometers, with submicro-gravity resolution (<200 ng/√Hz) and very high sensitivity (>17 pF/g). The microstructures a...
7721604 Micromechanical inertial sensor having reduced sensitivity to the influence of drifting surface charges, and method suited for operation thereof  
A micromechanical inertial sensor having at least one seismic mass which may be deflected relative to a substrate, and at least one electrode surface which in terms of circuitry, together with at...
RE41213 Dynamic amount sensor and process for the production thereof  
A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A...
RE41047 Acceleration sensor and process for the production thereof  
A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A...
7631559 Acceleration sensor  
An acceleration sensor includes a base having an XY-substrate surface which is parallel to an XY plane, a beam portion having a frame shape which is arranged in a floating state above the...
7594438 Inertial sensor having a flexing element supporting a movable mass  
A long-period weak-motion inertial sensor includes a frame having a frame mounting surface, a movable mass having a movable mass mounting surface, a transducer for sensing displacements of the...
7464591 Semiconductor acceleration sensor  
A semiconductor acceleration sensor having beam parts formed in substantially L-shape to surround a weight part, wherein formed to surround a square part, as seen in plan view and constituting the...
7406868 Compensating accelerometer with optical angle sensing  
A compensating accelerometer includes a housing, and a sensing element mounted in the housing. The sensing element includes a pendulum flexibly mounted on a base. The sensing element includes a...
7389691 Acceleration sensor  
A acceleration sensor includes a supporting part, a beam part connected to the supporting part, a weight part connected to the beam part, and a protruding part formed beneath the beam part so that...
7371601 Piezoresistive sensing structure  
A technique for manufacturing a piezoresistive sensing structure includes a number of process steps. Initially, a piezoresistive element is implanted into a first side of an assembly that includes...
7353706 Weighted released-beam sensor  
A released-beam sensor includes a semiconductor substrate having a layer formed thereon, and an aperture formed in the layer. A beam is mechanically coupled at a first end to the layer and...
7296471 Acceleration sensor  
A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion the lower end of which is fixed to a substrate; a...
7288873 Device for emission of high frequency signals  
A device for emission of high frequency signals is provided. The emission device is capable of emission of signals in the Gigahertz (GHz) and Terahertz (THz) range. The device may utilize, for...
7225675 Capacitance type dynamic quantity sensor  
A capacitance type dynamic quantity sensor has a first substrate, a second substrate disposed over the first substrate, and first and second electrodes each disposed on a main surface of a...
7223624 Micromechanical device with thinned cantilever structure and related methods  
In one aspect, a microelectromechanical device and method of producing the device includes an accelerometer with a thinned flexure structure. In another embodiment, the device and method of...
7159442 MEMS multi-directional shock sensor  
A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching...
7146856 Dynamically balanced capacitive pick-off accelerometer  
A Micro Electro-Mechanical System (MEMS) acceleration sensing device formed of a silicon substrate having a substantially planar surface; a pendulous sensing element having a substantially planar...
7137300 Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making  
An accelerometer device comprises a dielectric seismic mass separated by a gap from an underlying comb-shaped planar capacitor. The principle for measuring acceleration detecting capacitance change...
7100447 Super Invar magnetic return path for high performance accelerometers  
A force rebalance accelerometer (20) includes a silicon dioxide-based proof mass (28) having capacitive elements (40) engaged with excitation rings (61) made from alloys of Super Invar. The magnet...
7024933 Internally shock caged serpentine flexure for micro-machined accelerometer  
An apparatus and method for sensing accelerations and other forces. The apparatus having a capacitance pick-off force sensor having a proof mass that is suspended relative to a relatively...
7021141 Beam-type accelerometer  
An accelerometer has a cantilever beam supported at one end and having an opposite free end with a longitudinal direction between the supported end and the free end, the beam being formed of a...
7019231 Inertial sensor  
An inertial sensor includes a sensing portion having a weight supported by beams, the weight being a movable portion, and a weight stopper that limits a movable range of the weight, the weight...
7005193 Method of adding mass to MEMS structures  
A proof mass (11) for a MEMS device is provided herein. The proof mass comprises a base (13) comprising a semiconductor material, and at least one appendage (15) adjoined to said base by way of a...
6938487 Inertia sensor  
An inertia device is constructed by both suspension structure and micro-electroplating structure. The suspension structure may be manufactured by surface micromachining technique of sacrificial...
6912902 Bending beam accelerometer with differential capacitive pickoff  
A low cost, pendulous, capacitive-sensing Micro Electro-Mechanical Systems (MEMS) accelerometer is provided. The accelerometer includes a pendulous proof mass, one or more securing pads, and one or...
6874363 Trapped charge field bias vibrating beam accelerometer  
A mechanical resonator having an electrical charge buried and substantially permanently trapped in a layer of insulating material grown or otherwise formed on either or both of the electrode and...
6868725 Hinge position location that causes pendulous axis to be substantially parallel with drive component direction  
A drive component that comprises a drive axis, a pendulous sensor component that comprises a center of mass, and a hinge component that comprises a rotation axis of an electromechanical system. The...
6862795 Method of manufacturing of a monolithic silicon acceleration sensor  
A method of manufacturing a monolithic silicon acceleration sensor is disclosed. The monolithic silicon acceleration sensor includes one or more sensor cells, each sensor cell having an inertial...
6750775 Integrated sensor having plurality of released beams for sensing acceleration and associated methods  
An integrated circuit and method are provided for sensing activity such as acceleration in a predetermined direction of movement. The integrated released beam sensor preferably includes a switch...
6701779 Perpendicular torsion micro-electromechanical switch  
A semiconductor torsional micro-electromechanical (MEM) switch is described having a conductive movable control electrode; an insulated semiconductor torsion beam attached to the movable control...
6662658 Whiffletree accelerometer  
An apparatus and method for suspending two or more force-versus-displacement sensors for measuring displacement of a pendular structure relative to a frame structure, wherein a suspension structure...
6619123 Micromachined shock sensor  
A micromachined shock sensor has a substrate with a surface on which are formed an array of acceleration sensing units. Each sensing unit has a mount fixed to the substrate, a cantilever beam...
6615465 Method for producing an acceleration sensor  
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two...
6591678 Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion  
A dynamic quantity sensor includes a semiconductor substrate, a movable electrode, first fixed electrodes and second fixed electrodes. The movable electrode includes a mass portion and electrode...
6430999 Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove  
A semiconductor physical quantity sensor has a beam connecting a movable portion and a support substrate for displacing the movable portion in a displacement direction. The beam has a rectangular...
6389898 Microsensor with a resonator structure  
A microsensor with a resonator structure, which is excited by first electrical signals to oscillate and emits second electrical signals in dependence on the measuring variable, wherein a heating...
6389899 In-plane micromachined accelerometer and bridge circuit having same  
A micromachined accelerometer for measuring acceleration in a direction parallel with the plane of the accelerometer substrate. The accelerometer has a strain-isolation pedestal, a flexure attached...
6388300 Semiconductor physical quantity sensor and method of manufacturing the same  
A semiconductor physical quantity sensor, in which a beam-structure having a movable electrode and a fixed electrode confronted with the movable electrode are integrally formed in one substrate,...
6355964 Microelectronic integrated sensor  
A microelectronic integrated sensor is formed with a cantilever. For the purpose of ensuring a system which is especially invulnerable to mechanical strains during production, the cantilever is...
6336658 Acceleration switch and the manufacturing method  
A small acceleration switch adapted to switch between ON and OFF states depending upon the magnitude of acceleration applied to the switch. The acceleration switch includes a first contact formed...
6336366 Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film  
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means...
6316796 Single crystal silicon sensor with high aspect ratio and curvilinear structures  
In one aspect, the invention provides a semiconductor sensor which includes a first single crystal silicon wafer layer. A single crystal silicon structure is formed in the first wafer layer. The...
6285111 Axis alignment method  
An apparatus and method for determining the rate of angular rotation of a moving body and, in particular, for alignment of the dither motion and the Coriolis acceleration sensing direction in a...
6263736 Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film  
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing...
Matches 1 - 50 out of 219 1 2 3 4 5 >