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7331228 |
Acceleration sensor
An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is...
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7322242 |
Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package
In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile...
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7241959 |
Mechanical power breaker for a vehicle
A mechanical power breaker for a vehicle has a casing, a power input, a master power output, and a breaker positioned in the casing and electrically connected between the power input and master...
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7159442 |
MEMS multi-directional shock sensor
A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching...
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7082830 |
Physical quantity sensor capable of outputting time-serial signal indicative of plural ranges of physical quantity
A physical quantity sensor detecting physical quantity, such as acceleration or angular velocity, is provided and mounted on, for example, a vehicle. The sensor has a physical quantity transducer...
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7040166 |
Multiple output inertial sensing device
An inertial sensor includes a single linear accelerometer disposed upon a silicon wafer. The accelerometer is electrically connected to a plurality of signal conditioning circuits that generate an...
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6644117 |
Electro-mechanical component and method for producing the same
An electromechanical component consists of a polymeric body comprising a mechanically active part with a spring and a frame, and of a metal layer which encompasses the spring substantially...
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6615465 |
Method for producing an acceleration sensor
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two...
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6569045 |
Gear-change system including a sensor device for detecting the operation of a gear change for bicycles
A sensor device for detecting for detecting the operating position of a gear-change system for bicycles comprises a shell positioned at any point along the flexible control cable of a bicycle...
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6405594 |
Silicon base plate with low parasitic electrical interference for sensors
A microgyroscope has a baseplate made of the same material as the rest of the microgyroscope. The baseplate is a silicon baseplate having a heavily p-doped epilayer covered by a thick dielectric...
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6147790 |
Spring-ring micromechanical device
An improved micromechanical device comprising a substrate (104), a rigid deflectable member (302, 314, 326) suspended over the substrate, and at least one spring (328) supported above the substrate...
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6048774 |
Method of manufacturing dynamic amount semiconductor sensor
In a method of manufacturing a dynamic amount sensor including a beam structure and a fixed electrode which are respectively supported by anchor parts of a substrate, opening portions are formed on...
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6041654 |
Method and device in an aerial towed hit detector
An aerial towed hit detector used together with a sleeve target can obtain an oscillatory movement in the roll angular direction because of the small aerodynamic stability of the target. For...
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6030850 |
Method for manufacturing a sensor
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions,...
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5992233 |
Micromachined Z-axis vibratory rate gyroscope
A microfabricated gyroscope to measure rotation about an axis perpendicular to the surface of the substrate. The driving electrodes, X-axis sensing electrodes, and Y-axis sensing electrodes may all...
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5901046 |
Surface mount type package unit and method for manufacturing the same
A package body holding an acceleration sensor circuit therein has signal electrodes and four dummy electrodes insulated from the signal electrode on a mounted surface thereof. The signal electrodes...
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5817942 |
Capacitive in-plane accelerometer
An accelerometer having one or more flexure stops for increasing the stiffness of the flexures when the accelerometer is subjected to relatively high acceleration. A wrap-around proof mass is...
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5756901 |
Sensor and method for manufacturing a sensor
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions,...
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5737961 |
Method and apparatus for detecting operational failure of a digital accelerometer
An apparatus includes an accelerometer (24) for providing an analog acceleration signal indicative of crash acceleration. A sigma-delta A/D converter (26) is operatively connected to the...
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5693882 |
Force sensing device having breakout tabs
A force sensing component for use with a force sensing unit includes a planar flexure member having a moveable portion separated from a fixed portion by a strain sensitive connection and a...
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5646349 |
Floating mass accelerometer
A floating mass accelerometer having at least one elastic member contacting a mass that is supported by a low friction surface is disclosed. At least one proximity sensor is located adjacent the...
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5627317 |
Acceleration sensor
A sensor in which the structure of a movable element is produced from an upper silicon layer of a laminated substrate. Individual regions of the upper layer are insulated from one another by...
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5585566 |
Low-power shock detector for measuring intermittent shock events
A shock detector for measuring intermittent shock events comprises a mechanical delay line to supply delayed output motion in response to input motion along an input axis. A transducer converts the...
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5511421 |
Acceleration sensor
An acceleration detecting method and an acceleration sensor are disclosed. An inverted potential distribution structure of a metal-insulator-semiconductor type is formed on a semiconductor...
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5504032 |
Micromechanical accelerometer and method of manufacture thereof
A high precision micromechanical accelerometer comprises a layered structure of five (5) semiconductor wafers insulated from one another by thin semiconductor material oxide layers. The...
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5485041 |
Impact sensor for vehicle safety restraint system
An acceleration sensor that includes a permanent magnet mounted for movement within a cylindrical cavity in a body of non-magnetic material. The magnet has a cylindrical geometry and an outer...
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5456110 |
Dual pendulum vibrating beam accelerometer
A micromachined push-pull accelerometer formed with dual vibrating beam transducers in one plane of a silicon substrate includes a pair of proof masses or pendulums supported by flexures formed in...
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5454266 |
Force measuring device
The device for measuring a force, and notably an inertial force corresponding to an acceleration, comprises a capacitive detector comprising two capacitors, the difference between the capacitances...
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5433110 |
Detector having selectable multiple axes of sensitivity
A detector for detecting an oriented physical variable includes, in a casing, an acceleration chip-shaped sensor and a board bearing electronic components. The sensor is mounted on a first surface...
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5412986 |
Accelerometer with improved strain gauge sensing means
An accelerometer device comprises a silicon semiconductor member having a mass mounted on a support by integral beams extending between the mass and support to permit movement of the mass in...
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5408879 |
Assembly of linear accelerometers mounted on a rigid body remote from the center of mass measuring three dimensional movements
The invention provides an assembly of accelerometers for use in a system for measuring the three dimensional movements of a rigid body comprising nine linear accelerometers which are connected to...
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5369057 |
Method of making and sealing a semiconductor device having an air path therethrough
This invention generally relates to the provision of a vent path during the bonding of silicon wafers and the subsequent encapsulation of the individual devices. A double-sided polished silicon...
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5282387 |
Shock sensor
A shock sensor comprises: a piezoelectric element for generating, when pushed, a voltage having a level according to the pushing force; an inertia member held in close contact with the...
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5265474 |
Static electricity resistant accelerometer proof mass
Static electric charges are removed from the proof mass 10 and support 12 of an accelerometer by covering the proof mass 10 and support 12 with a thin metallic film 36, such as chromium oxide.
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5253526 |
Capacitive acceleration sensor with free diaphragm
The acceleration sensor has a first stationary substrate having a stationary electrode and a second stationary substrate having another stationary electrode and being opposed to the first...
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5233872 |
Acceleration sensor and acceleration sensing system
An acceleration sensor includes a tubular bobbin only one end of which is fixed to a body whereas the other end is movable relative to the body axially of the bobbin. Supported on the body are...
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5221400 |
Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
A microaccelerometer is provided which has a silicon substrate bonded to a silicon capping plate and silicon back plate, wherein the bonds between the three silicon wafers are characterized by a...
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5216490 |
Bridge electrodes for microelectromechanical devices
A bridge electrode structure and method of fabrication thereof is provided that is adapted to provide electrically isolated metal bridges over the active portions of a monolithic micromechanical...
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5195371 |
Semiconductor chip transducer
A motion transducer fabricated from a semiconductor material by etched exposure and release of a resiliently suspended element. Electrical sensing and/or torquing is applied to the suspended...
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5134881 |
Micro-machined accelerometer with composite material springs
A transducer fabricated by micro-machining includes E-shaped leaf springs suspending a mass from a support. The transducer is formed by chemical etching through openings of opposite faces of a...
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5123035 |
Processing circuit for signals supplied by two transducers measuring a physical parameter in the differential mode
A processing circuit is provided for signals (S 1 , S 2 ) supplied by two transducers measuring a physical quantity parameter in a differential mode and delivering a signal representative of this...
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5111693 |
Motion restraints for micromechanical devices
Motion restraints and a method for their fabrication are provided for use with a micromechanical transducer, such as a gyroscope or an accelerometer, to limit the motion of resiliently supported...
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5068640 |
Method of operating a safety device for vehicle occupants
A safety device for vehicle occupants has an operational voltage source, typically the vehicle's battery, and a storage device for electrical energy, typically a capacitor. Several tripping...
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4992943 |
Apparatus for detecting and storing motor vehicle impact data
An invention which facilitates motor vehicle accident reconstruction by providing apparatus for detecting and storing data describing the status of a motor vehicle when it is involved in a...
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4908767 |
Acceleration measuring system
An acceleration measuring system, mountable on the body of a vehicle of the type having a suspension system which permits the vehicle to pitch and roll with respect to the surface over which the...
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4726627 |
Deceleration sensor for an electric brake controller
The present invention relates to a self-contained electric brake controller for energizing electrically operated brakes in a towed vehicle in response to a demand by a driver in a towing vehicle....
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4627011 |
Vehicle monitoring device
A vehicle monitoring device 10 consists of a damped-pendulum transducer 12 coupled to a potentiometer 14. The analog output of the potentiometer 14, following a braking test with the vehicle...
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4245510 |
Portable accelerometer
A portable accelerometer unit is described for measuring deviations or excursions from a datum due to an applied load or force. The portable accelerometer unit includes an accelerometer device...
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3882736 |
Apparatus for maintaining an object in bouncing motion, and for sensing and indicating the position and/or motion thereof
To provide a "free" reference body for measurement of relative motion, a ball is maintained bouncing between a pair of opposed concave striking surfaces which are provided with an increasing inward...
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3851531 |
ELECTRONIC FUZE SYSTEM
An electronic system for providing a safe/arm signal. A number of digital accelerometers are located in various parts of a moving body such as an artillery shell when the shell is fired,...
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