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7628070 |
Inertial sensor with disturbing current reduced by reducing the width and the spacing of tracks in critical zones
The inertial sensor comprises a piezoelectric plate having a vibrator member defined therein that carries excitation electrodes connected to an excitation circuit comprising conductor tracks...
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7624639 |
Acceleration sensor
An acceleration sensor includes a detection element having a plurality of piezoelectric ceramic layers laminated together and a pair of retaining members that retain an end portion of the detection...
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7626888 |
Ultrasound sensor
An ultrasound sensor for a vehicle has a housing which is fixedly arranged at a vehicle inner side of a periphery member of the vehicle, an ultrasound vibrator for sending and receiving ultrasound,...
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7608900 |
Semiconductor device and method of manufacturing and inspection thereof
An accelerator sensor includes a semiconductor substrate having a main front surface and a main rear surface, a first groove portion being formed along a front surface pattern, in the main front...
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7565840 |
Acceleration sensor element and acceleration sensor
An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this...
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7536913 |
Rigidly mounted underwater acoustic inertial vector sensor
An underwater acoustic sensor is designed for attachment to a rigid or semi-rigid mounting structure. The sensor includes an outer casing and a secondary casing spaced therefrom. A compliance layer...
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7509859 |
Acceleration sensor with redundant contact holes
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and...
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7482732 |
Layered surface acoustic wave sensor
A surface acoustic wave sensor which incorporates: a) a first layered SAW device consisting of a piezoelectric crystal such as lithium niobate or lithium tantalate with interdigital electrodes on...
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7406948 |
Internal combustion engine controller
An engine ECU executes a program including: the step of outputting a fuel-cut instruction when conditions that an accelerator position PA is not higher than a threshold value and a rate of increase...
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7353707 |
Acceleration sensor
An acceleration sensor in which a difference in resonance characteristics between two resonators can be easily adjusted even when casing components are already attached to an acceleration-sensor...
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7350424 |
Acceleration sensor
A low-cost breakable inertial threshold sensor using mainly micro-machining silicon technology constructed on a silicon-wafer or on some other brittle material according to the MEMS process. The...
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7343802 |
Dynamic-quantity sensor
A piezoelectric-vibrator series circuit including two series-connected piezoelectric vibrators to which stresses induced by a dynamic quantity are applied in opposite directions is used, and a...
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7325455 |
High-temperature piezoelectric vibration sensor assembly
An integral connectorless hermetically sealed high-temperature piezoelectric sensor housing and cable assembly includes signal conditioning/processing circuitry having a charge...
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7299695 |
Acceleration sensor
An acceleration sensor includes a weight and a vibrator that supports the weight at its center of gravity. When acceleration is applied to the weight, stress equivalent to the applied acceleration...
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7243546 |
Acceleration sensor chip
An acceleration sensor chip has a frame portion having a frame body portion and protruding portions. The acceleration sensor chip also includes a mobile structure having a central weight portion...
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7219550 |
Piezoelectric accelerometer
A piezoelectric accelerometer comprising a housing with two complementary parts ( 2005, 2006 ) in which a metal mass ( 2002 ) and an abutting piezoelectric element ( 2003 ) movably mounted in place...
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7216542 |
Three-component piezoelectric vibration accelerometer provided with a sensor
The inventive device comprises a piezo element, embodied in the form of a square based rectangular parallelopiped fixed to a substrate. A piezo module matrix is embodied in a given shape. A...
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7194906 |
Acceleration sensor having resonators with reduced height
A compact, highly sensitive acceleration sensor that is not affected by factors other than acceleration, such as a change in temperature, includes a bimorph acceleration-sensor element including...
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7168321 |
Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith
The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer,...
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7134339 |
Acceleration sensor
A compact, high-sensitivity acceleration sensor that is prevented from being affected by factors other than acceleration, such as a change in temperature, has a bimorph acceleration-sensor element...
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7132722 |
Physical quantity sensor
A physical quantity sensor is constituted using a plurality of piezoelectric sensors each having first and second semiconductor layers realizing resistances and terminals, and a conductive weight...
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7127948 |
Piezoelectric sensor, sensor array, and associated method for measuring pressure
A sensor, sensory array, and associated method for measuring a pressure are provided. The sensor includes a piezoelectric sensory device that is disposed on an electrically insulative substrate...
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7093489 |
Acceleration sensor
A piezoelectric vibrator 2 that generates an electric charge according to a stress and a weight 1 provided on the piezoelectric vibrator 2 are included. The piezoelectric vibrator 2 has...
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7066026 |
Underwater acoustic vector sensor using transverse-response free, shear mode, PMN-PT crystal
The present invention is directed to an acoustic vector sensor, also called particle velocity sensor. <111> direction poled, shear mode, relaxor single crystals are used as the sensing...
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7035056 |
Piezoelectric actuator and a lithographic apparatus and a device manufacturing method
A lithographic projection apparatus comprising at least one of a radiation system and a projection system having at least one of a reflective and a refractive optical member, wherein the optical...
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7021141 |
Beam-type accelerometer
An accelerometer has a cantilever beam supported at one end and having an opposite free end with a longitudinal direction between the supported end and the free end, the beam being formed of a...
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7002225 |
Compliant component for supporting electrical interface component
An apparatus in one example includes a compliant component for supporting an electrical interface component that serves to electrically and mechanically couple a die with a separate layer. In one...
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6946695 |
Solid-state rotational rate sensor device and method
The present invention provides a solid-state rotational rate sensor device formed by a thin-film for generating an electrical voltage output proportional to the rate of rotational motion. The...
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6925878 |
Acceleration sensor
An acceleration sensor comprises a fixed case member and a cover assembly collectively defining a closed space in which the oscillation plate and the piezoelectric element received therein. The...
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6917139 |
Film bulk acoustic resonator
FBAR device includes a membrane supporting layer between a substrate and a membrane layer, surrounding an air gap region. The membrane supporting layer support the membrane layer to obtain a robust...
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6895819 |
Acceleration sensor
An acceleration sensor which has a vibrator, a weight portion that is connected to the vibrator, and supported at a position different from the center of gravity of the vibrator plus its own...
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6810740 |
Acceleration sensor
An acceleration sensor includes a piezoelectric element and a support member for supporting the piezoelectric element at both longitudinal ends thereof. The piezoelectric element includes a...
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6798306 |
High-frequency oscillation circuit and measuring device
A high-frequency oscillation circuit incorporates a crystal resonator having a natural oscillation frequency in a high-frequency area within a closed circuit including one or more logic elements....
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6792806 |
Acceleration sensor device
Providing a small-sized acceleration sensor including a vibrator formed of a piezoelectric single crystal, and a weight section connected to the vibrator and supported at a position different from...
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6705167 |
Accelerometer
An accelerometer comprises a housing including a mass-supporting frame and a mass supported on the frame by a pair of outer spring member aligned along a first axis. The mass may comprise an outer...
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6681631 |
Piezoelectric sensor
A piezoelectric sensor includes a carrier, a piezoelectric measurement sensing element arranged on the carrier, a covering layer covering the measurement sensing element and an electronic...
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6655211 |
Piezoelectric accelerometer with laterally stabilizing element
The seismic mass ( 4 ) of an accelerometer that comprises at least one electromechanical transducer is stabilized in the direction perpendicular to the sensible axis by at least one laterally...
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6629462 |
Acceleration sensor, an acceleration detection apparatus, and a positioning device
An acceleration sensor housed in a confined space can detect rotational acceleration with great accuracy. The acceleration sensor has first and second piezoelectric elements with electrodes for...
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6627965 |
Micromechanical device with an epitaxial layer
A micromechanical device includes a single crystal micromechanical structure where at least a portion of the micromechanical structure is capable of performing a mechanical motion. An epitaxial...
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6615465 |
Method for producing an acceleration sensor
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element includes providing at least two piezoelectric substrates where each has two...
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6588276 |
Acceleration sensor
An acceleration sensor includes a bridge circuit including two capacitors and two piezoelectric vibrators on which reverse stresses are exerted by acceleration, and a voltage-dividing impedance...
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6583374 |
Microelectromechanical system (MEMS) digital electrical isolator
A microelectricalmechanical system (MEMS) digital isolator may be created in which an actuator such as an electrostatic motor drives a beam against a predefined force set, for example, by another...
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6578421 |
Acceleration sensor, acceleration sensor device, and method of fabricating an acceleration sensor
Providing a small-sized acceleration sensor including a vibrator formed of a piezoelectric single crystal, and a weight section connected to the vibrator and supported at a position different from...
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6546800 |
Acceleration sensor element, acceleration sensor, and method of manufacturing the same
An acceleration sensor element including a weight, a support having a hollow part, which is disposed around the weight as a center, and a flexible plate having piezoelectric elements including a...
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6532429 |
Offset regulation device
The invention relates to an offset regulation device for a sensor module and a method for realizing such an offset regulation, particularly for acceleration sensors and pressure sensors. The...
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6530276 |
Acceleration sensor and acceleration apparatus using acceleration sensor
An acceleration sensor having a well controlled dispersion in the detection characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric...
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6513383 |
Acceleration sensor and acceleration detection system
The present invention relates to an acceleration sensor which can be provided in a place with extreme ambient temperature variations, for example, near a vehicle engine, and an acceleration...
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6490926 |
Acceleration sensor module
An acceleration sensor module capable of performing sensitivity adjustment in a minimum arrangement without containing an amplifier includes an acceleration sensor and a trimmable resistor which...
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6474134 |
Method for adjusting sensitivity of acceleration sensor
The present invention provides a method for adjusting the sensitivity of an acceleration detecting device comprising a pair of piezoelectric elements, of an acceleration sensor device for detecting...
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6397677 |
Piezoelectric rotational accelerometer
A rotational accelerometer using piezoelectric material, preferably quartz, in a shear orientation. Piezoplates and conducting seismic masses, each having bores therethrough, are bolted to posts...
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