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RE41047 |
Acceleration sensor and process for the production thereof
A single crystal silicon substrate ( 1 ) is bonded through an SiO 2 film ( 9 ) to a single crystal silicon substrate ( 8 ), and the single crystal silicon substrate ( 1 ) is made into a thin film....
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7624638 |
Electrostatic capacitance type acceleration sensor
First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at...
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7614300 |
System and method for mitigating errors in electrostatic force balanced instrument
System and method for mitigating errors in electrostatic force balanced instrument is provided. The system and method mitigate errors in measurement readings caused by charge buildup in force...
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7597002 |
Diamagnetic levitation system
The invention concerns an inertial sensor or an actuator based on diamagnetic levitation, said inertial sensor or actuator comprising support means serving as main support body for an inertial...
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7578189 |
Three-axis accelerometers
Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from...
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7562573 |
Integrated sensor and circuitry and process therefor
A micromachined sensor and a process for fabrication and vertical integration of a sensor and circuitry at wafer-level. The process entails processing a first wafer to incompletely define a sensing...
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7552638 |
Accelerometer with reduced extraneous vibrations owing to improved return movement
An accelerometer uses variations in capacitance to detect and measure the movement of a moving mass in relation to a fixed part. The accelerometer comprises a first series of electrodes, which are...
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7552637 |
Torque driving circuit
A torque driver that includes a regulator circuit for mitigating zero-g discontinuity effects and deadbanding is presented. An accelerometer may comprise the torque driver and the torque driver may...
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7461553 |
Self-calibrating oversampling electromechanical modulator and self-calibration method
An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity...
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7451647 |
MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is...
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RE40561 |
Acceleration sensor and process for the production thereof
A single crystal silicon substrate ( 1 ) is bonded through an SiO 2 film ( 9 ) to a single crystal silicon substrate ( 8 ), and the single crystal silicon substrate ( 1 ) is made into a thin film....
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7355782 |
Systems and methods of controlling micro-electromechanical devices
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of...
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7355318 |
Micromachined device utilizing electrostatic comb drives to filter mechanical vibrations
A micromachined device for filtering mechanical vibrations caused by an external disturbance is disclosed. The device can include a first electrostatic vertical comb drive assembly having a first...
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7347096 |
Digital accelerometer
A force-balance accelerometer having a pick-off coil responsive to displacement of a seismic mass from a balance position for providing an output corresponding to the displacement, includes a...
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7334474 |
Force balanced instrument system and method for mitigating errors
A force balanced instrument system and method for mitigating errors is provided. The system and method mitigate errors in measurement readings caused by charge buildup in force balanced instruments...
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7279761 |
Post-release capacitance enhancement in micromachined devices and a method of performing the same
A MEMS device which utilizes a capacitive sensor or actuator is enhancement by initially fabricating the capacitive assembly which comprises the sensor or actuator as two sets of interdigitated...
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7275433 |
Micro-electro-mechanical sensor with force feedback loop
A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a...
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7243542 |
Closed loop analog gyro rate sensor
The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially...
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7225674 |
Self-stabilizing, floating microelectromechanical device
The present invention relates to MicroElectroMechanical Systems (MEMS), devices and applications thereof in which a proof mass is caused to levitate by electrostatic repulsion. Configurations of...
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7134338 |
Sensor with symmetrical limiting of a signal
A sensor having a seismic mass and having an arrangement for detecting the deflection of the mass and converting it into an electrical signal; in at least one operating mode of the sensor, a...
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7055387 |
Apparatus for and method of sensing a measured input
Apparatus is used in sensing a measured input. The apparatus includes a capacitor with a capacitance that varies non-linearly in response to the measured input, and a circuitry that derives, from...
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6966225 |
Capacitive accelerometer with liquid dielectric
An accelerometer includes a capacitive sensing device and circuitry. The capacitive sensing device has electrode structures spaced by a gap for relative movement in response to a force applied to...
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6962081 |
Semiconductor physical quantity sensor with improved noise resistance
An inexpensive, accurate, and reliable semiconductor physical quantity sensor having improved resistance to noise is provided, wherein pads that have been pulled down to ground inside a...
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6848317 |
Method and apparatus for uniformizing output signal levels of micro-electro mechanical systems (MEMS) capacitive sensors
The present invention is an apparatus and method for making output signal (AC voltage) levels of MEMS capacitive sensors uniform, each including a microstructure being displaced by a certain force...
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6792804 |
Sensor for measuring out-of-plane acceleration
An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the...
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6782748 |
High-G acceleration protection by caging
For use in a MEMS device having a suspended proof mass, a method and apparatus for securing the MEMS device during a period of high acceleration. The method may include applying a DC voltage...
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6761069 |
Feedback circuit for micromachined accelerometer
An accelerometer had a movable electrode between two fixed electrodes to form a differential capacitor. Drivers provide AC drive signals to the fixed electrodes. The movable electrode is coupled...
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6744264 |
Testing circuit and method for MEMS sensor packaged with an integrated circuit
A MEMS sensor packaged with an integrated circuit includes switches and control circuitry. In a test mode, the control circuitry causes the switches to turn off and on such that the first and...
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6718605 |
Single-side microelectromechanical capacitive accelerometer and method of making same
A high sensitivity, Z-axis, capacitive microaccelerometer having stiff sense/feedback electrodes and a method of its manufacture on a single-side of a semiconductor wafer are provided. The...
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6705165 |
High voltage drive circuitry aligned with MEMS array
Pulse-width modulation (PWM) control and drive circuitry particularly applicable to an array of electrostatic actuators formed in a micro electromechanical system (MEMS), such as used for optical...
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6691572 |
Acceleration measuring device with pulse width modulation resetting
An accelerometer having a micromechanical pendulum, a capacitive pick off and a control loop reset by electrostatic forces and, in a time sequence, applies a resetting voltage between the pendulum...
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6679118 |
Accelerometer and spherical sensor type measuring instrument
An object is to provide an accelerometer or a spherical sensor-type measurement device, able to control by means of an active restraining control system a spherical mass part or a spherical sensor...
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6543286 |
High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array
Pulse-width modulation (PWM) drive circuitry particularly applicable to an array of electrostatic actuators formed in a micro electromechanical system (MEMS), such as used for optical switching. A...
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6536280 |
Thin film MEMS sensors employing electrical sensing and force feedback
This invention discloses a method for electronically decreasing the sensitivity of thin film movable micromachined layers to vibrations, accelerations, or rotations that would result in part or all...
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6504385 |
Three-axis motion sensor
A microelectromechanical system (MEMS) motion sensor is disclosed for detecting movement in three dimensions of a semiconductor wafer structure. The MEMS device has top, middle, and bottom layers,...
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6450029 |
Capacitive physical quantity detection device
A capacitive semiconductor acceleration sensor capable of efficiently performing a self-diagnostic procedure without having to provide any separate electrodes for self-diagnosis purposes. The...
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6430998 |
Resonant element
A resonant element includes: a fixed substrate having a main surface in orthogonal X- and Z-directions; a planar vibrating body fixed via support beams so as to be vibratable in an X-direction, the...
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6386032 |
Micro-machined accelerometer with improved transfer characteristics
A micromechanical, dithered device comprising a substrate, a movable mass connected to the substrate by a suspension, a position sensor, a dither signal generator, a dither force transducer...
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6360602 |
Method and apparatus reducing output noise in a digitally rebalanced accelerometer
A closed loop accelerometer includes apparatus within an associated digital rebalance loop for reducing the presence of low frequency moding noise in the accelerometer output. In one embodiment,...
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6324910 |
Method and device for measuring a physical variable
A method for measuring a physical variable in which a structure is put in resonant oscillations and a change in the oscillation frequency of the structure as a result of a change in the physical...
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6301965 |
Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state
A digital feedback control circuit is disclosed for use in an accelerometer (e.g. a microelectromechanical accelerometer). The digital feedback control circuit, which periodically re-centers a...
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6286369 |
Single-side microelectromechanical capacitive acclerometer and method of making same
A high sensitivity, Z-axis, capacitive microaccelerometer having stiff sense/feedback electrodes and a method of its manufacture on a single-side of a semiconductor wafer are provided. The...
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6257061 |
Capacitive physical-quantity detection apparatus
A capacitive physical-quantity detection apparatus includes a movable electrode (2d) which is displaced in response to a physical quantity. A fixed electrode (3, 4) opposed to the movable electrode...
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6240782 |
Semiconductor physical quantity sensor and production method thereof
A semiconductor physical quantity sensor includes a substrate, a beam-structure movable portion and a fixed portion. The beam-structure movable portion is suspended by four anchors formed of...
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6151967 |
Wide dynamic range capacitive transducer
A variable area capacitor with a flexible electrode responsive to a physical effect and a rigid electrode with a predetermined surface contour. The surface contour is dimensioned to provide a...
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6127767 |
Complementary electrostatic driving apparatus for microactuator with parasitic capacitances offset
An electrostatic driving apparatus for a microactuator is provided, in which a parasitic capacitance is offset to improve the performance thereof. According to the complementary electrostatic...
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6082196 |
Physical quantity detecting device
A physical quantity detecting is capable of easily adjusting sensitivity and an offset of a detected output without being increased in size. In a signal processor for driving a sensor element in...
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5991990 |
Method for fabricating a tunneling sensor with linear force rebalance
A tunneling sensor has a pair of force rebalance capacitors that are used in a push-pull relationship so as to provide a rebalance force that is a linear function of applied rebalance voltages,...
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5894144 |
Semiconductor acceleration sensor
In a semiconductor acceleration sensor, a weight and thin beam parts adjacent to the weight are formed on a substrate, a moving electrode is formed on the weight, and a fixed electrode is formed at...
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5831164 |
Linear and rotational accelerometer
A two degree of freedom (2 DOF) accelerometer comprising two imbalanced sensing modules (i.e., bar modules having an unbalance) is provided such that two sensing modules are located in the plane to...
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