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Match Document Document Title
7628072 MEMS device and method of reducing stiction in a MEMS device  
A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring...
7614301 Acceleration sensor chip package and method of producing the same  
An acceleration sensor chip package includes an acceleration sensor chip formed of a frame portion with an opening portion, a movable structure, a detection element, and an electrode pad. The...
7608985 Method of detecting acceleration in vehicles  
Piezomagnetic, magneto-strictive, or electro-strictive material particles may also be distributed throughout the structural material of the structural member, which serve to amplify and otherwise...
7562575 Impact-resistant acceleration sensor  
An acceleration sensor, which has realized such a high impact-resistance that a weight bottom surface of an acceleration sensor element does not directly collide with an inner bottom plate of a...
7555956 Micromechanical device having two sensor patterns  
A micromechanical device and a method for producing this device are provided, two sensor patterns being provided in the semiconductor material to record two mechanical variables, in particular the...
7541574 Sensor device  
A sensor device includes a board, a sensor element and a resin member made of resin. The sensor element has a displace part to be displaced in a predetermined detection direction, and detects a...
7541939 Mounted shock sensor  
This application is directed to a shock sensor mounted in an electronic device. The shock sensor includes both active and passive shock detection methods that allow a technician to determine...
7533570 Electrostatic-capacitance-type acceleration sensor  
In an electrostatic-capacitance-type acceleration sensor, water, etc. penetrating into a sealed space incorporating an acceleration detector having a movable electrode 6 , and sticking of the...
7516659 Inertial force sensor  
A sensor having a mass that moves relative to a structure is disclosed. A spring mechanism applies a restoring force to the mass when the mass moves from an equilibrium position with respect to the...
7467060 Method and apparatus for estimating a motion parameter  
A method and apparatus for estimating a motion parameter corresponding to a subject element employs one or more accelerometers operable to measure accelerations and a processing system operable to...
7466000 Semiconductor device having multiple substrates  
A semiconductor device includes a first substrate including first, second and third layers; a second substrate; and a loop bump. The first and second substrates provides an electric device and...
7458264 Generalized inertial measurement error reduction through multiple axis rotation during flight  
An inertial measurement unit is provided. The inertial measurement unit comprises two rotational axes, wherein a first of the two rotational axes is aligned nominally along a thrust axis and a...
7434466 Gyro sensor  
The electrostatically-driven/capacitance-detection type gyro sensor has a sensing element including a movable part, the sensitivity of the sensing element and accordingly the sensitivity of a...
7430915 Vibration sensor  
A vibration sensor capable of preventing a diaphragm electrode from being damaged without lowering sensitivity as well as realizing a satisfactory assembling process. The vibration sensor includes...
7428841 Acceleration sensor and inclination-detecting method  
In an acceleration sensor detecting inclined displacement of a predetermined article from a basic position, the acceleration sensor ( 10 ) includes a sensor chip having a detection plane including...
7416150 Overmolded inertia sensor mass for a seat belt retractor  
A seat belt retractor ( 10 ) has an actuator ( 14 ) for unlocking and locking the seat belt retractor ( 10 ) An inertial sensor ( 18 ) detects changes in vehicle acceleration and interacts with the...
7412887 Multiple axis acceleration sensor  
One or more fixed sensing electrodes are employed to sense movement of a mass both within the plane of the mass/electrodes and along an axis normal to that plane. In order to measure movement of...
7392685 Accelerometer having adjustable damping  
An apparatus and method for an accelerometer mechanism having a proof mass that is suspended for out-of-plane motion between first and second damping plates, wherein at least one of the first and...
7373821 Semiconductor sensor and manufacturing method therefor  
A semiconductor sensor is disclosed that includes a semiconductor substrate, a sensing portion provided on the semiconductor substrate, and a pad in electrical communication with the sensing...
7361524 Method of manufacturing floating structure  
A method of manufacturing a floating structure capable of providing increased device yield. The method includes: a) forming an insulation film, a predetermined area of which is removed, between a...
7361523 Three-axis accelerometer  
The invention comprises a method of fabricating a three-axis accelerometer. A first wafer having a first and a second major surface provided with etching at least two cavities in the first major...
7328615 Method and apparatus for detecting free fall of electronic device  
A method and apparatus for detecting a free fall of an electronic device. The method includes: sensing a falling acceleration of the electronic device using an acceleration sensor; determining...
7322239 Semiconductor device and manufacturing method thereof  
A semiconductor device includes a lead frame. The lead frame has a chip mounting section and a plurality of leads. The chip mounting section has a base section, an insulation film covering the base...
7312553 Micromechanical component and method for producing same  
A micromechanical component and a method for producing the component are provided. The micromechanical component includes a substrate and a micromechanical functional layer of a first material...
7299696 Acceleration sensor chip package  
An acceleration sensor chip package includes an acceleration sensor chip formed of a frame portion with an opening portion, a movable structure, a detection element, and an electrode pad. The...
7295184 Computer input device  
A computer input device includes a magnetized fluid and an inertial body within the magnetized fluid. A signal converter provides angular acceleration information based on behavior of the inertial...
7282697 High sensitivity fibre optic vibration sensing device  
A vibration sensing device, an acceleration sensing system and a method of manufacturing a vibration sensing device wherein the vibration sensing device comprises a flexible disk that is mounted...
7275432 Acceleration sensor and method of manufacturing acceleration sensor  
An acceleration sensor includes a semiconductor substrate, a sensing element formed on the semiconductor substrate, a bonding frame made of polysilicon which is formed on the semiconductor...
7267007 Acceleration sensing device  
An acceleration sensing device includes a movable sensing member, a frame member and a supporting member. The supporting member is coupled between the movable sensing member and the frame member so...
7258012 Integrated monolithic tri-axial micromachined accelerometer  
A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure...
7232701 Microelectromechanical (MEM) device with a protective cap that functions as a motion stop  
A microelectromechanical (MEM) device includes a substrate, a structure, a travel stop, and a protective cap. The substrate has a surface, and the structure is coupled to, and movably suspended...
7211998 Acceleration sensing apparatus  
A collision sensing apparatus includes an acceleration sensor, first and second connector terminals, reference connector terminals and leads. The acceleration sensor is shaped into a square form....
7194905 Acceleration sensor  
A three-axis acceleration sensor having a simple construction is provided for improving shock resistance without lowering sensor sensitivity. An acceleration sensor for detecting acceleration in...
7196404 Motion detector and method of producing the same  
A method of producing an electronic device electrically and mechanically couples an integrated circuit to a leadframe to produce an intermediate assembly. At least a portion of the intermediate...
7178398 Coplanar proofmasses employable to sense acceleration along three axes  
An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a...
7159442 MEMS multi-directional shock sensor  
A multi-directional shock sensor having a central post surrounded by an omnidirectionally moveable toroidal mass. A plurality of anchor members surrounds the mass and carries one arm of a latching...
7155101 Manufacturing method for high temperature fiber optic accelerometer  
A method of making a fiber optic accelerometer includes (a) drawing an optical fiber through a resin; (b) winding the resin coated fiber onto a disc mounted on an assembly having a central shaft;...
7121141 Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area  
An accelerometer includes a pair of conductive plates fixedly mounted on a substrate surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least...
7104128 Multiaxial micromachined differential accelerometer  
The invention relates to a differential accelerometer micromachined in a plane plate, comprising a base and a differential measurement cell which includes a moveable seismic mass and two force...
7075209 Compliant bistable micromechanism  
A method for designing and optimnizing compliant mechanisms is provided, in addition to bistable compliant mechanism designs. According to the method, a selected compliant structure may be modeled...
7071709 Circuit for detecting capacitance change in variable capacitance  
A capacitance of a capacitor member, which varies according to a dynamic force such as an acceleration force imposed on the capacitor member, is detected by a detecting circuit. The detecting...
7061469 Method of data input into a computer  
A computer input device and method used to input coordinates and three-dimensional graphical information into a computer. The device includes an acceleration sensor that has a fixed volume vessel...
7005193 Method of adding mass to MEMS structures  
A proof mass ( 11 ) for a MEMS device is provided herein. The proof mass comprises a base ( 13 ) comprising a semiconductor material, and at least one appendage ( 15 ) adjoined to said base by way...
7004030 Acceleration sensor  
An acceleration sensor capable of standing a great acceleration is to be provided. It is configured of a mounting board and a sensor chip in which the sensor chip is formed of a weight, a beam and...
6988407 Acceleration sensor  
An acceleration sensor includes an acceleration sensor element and a frame portion surrounding the element. The sensor element and the frame portion are located on a major surface of a substrate....
6925875 Packaged accelerometer  
A micro machined accelerometer package includes a chip having a top surface and a bottom surface. A micro machined accelerometer is formed in the chip, the accelerometer including a mass...
6923062 Sensor  
For a sensor whose sensor structure is implemented in a micromechanical structural component and which has parts which are movable in relation to the stationary substrate of the structural...
6904804 Device for measuring acceleration  
A device for acceleration measurement, in which measuring signals from a two-dimensional sensor from measuring different directions are combined (gated) with one another and then jointly evaluated...
6895819 Acceleration sensor  
An acceleration sensor which has a vibrator, a weight portion that is connected to the vibrator, and supported at a position different from the center of gravity of the vibrator plus its own...
6895321 Angular and linear flexure plate accelerometer  
An accelerometer system includes a rigid plate system coupled to an inertial platform. A first flexure plate defines a first flex axis and is adjacent to the rigid plate system a first distance...
Matches 1 - 50 out of 141 1 2 3 >