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7387025 Angular velocity sensor  
An angular velocity sensor is provided, which is capable of accurate failure diagnosis on a detecting portion despite of its simple configuration and small size without providing additional means...
7363815 Angular velocity sensor  
An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in...
7360422 Silicon inertial sensors formed using MEMS  
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the...
7347093 Angular velocity sensor and automobile using the same  
The invention provides an angular velocity sensor which is provided with a smoothing circuit having a large smoothing time constant so that it can be reduced in size and integrated into an IC....
7337667 Angular velocity sensor and its designing method  
An angular velocity sensor includes a tuning fork vibrator, a drive unit provided on the tuning folk vibrator, and a detection unit for detecting an amount of deflection of the tuning folk...
7302848 Force compensated comb drive  
A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the...
7284429 Micromachined double tuning-fork gyrometer with detection in the plane of the machined wafer  
The invention relates to a gyrometer based on a vibrating structure, produced by micromachining in a thin planar wafer. It comprises four moving assemblies placed at the vertices of a virtual...
7267004 Inertial micromechanical tuning-fork gyrometer  
The invention relates to a micromachined gyrometer having a planar moving structure anchored on a fixed substrate by anchoring feet, the fixed substrate being mounted on a support substrate via...
7260990 Angular speed sensor and method for fabricating the same  
Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the...
7255005 Piezoelectric vibrating gyro element and gyro sensor  
A piezoelectric vibrating gyro element is constructed by crystal and includes at least in the same plane a base portion; a pair of vibrating arms for detection extended out from the base portion to...
7249488 Method for detecting a zero-point error of a coriolis gyroscope and coriolis gyroscope using said method  
In a method for determining the zero-point error of a Coriolis gyro, the resonator of the Coriolis gyro has a disturbance force applied to it such that a change in the stimulation oscillation of...
7246520 Transducer, electronic equipment, and method of adjusting frequency of transducer  
To provide a transducer that can detect the rotation of the transducer with high degree of accuracy, a transducer includes a pair of oscillating reeds extending in the Y-direction to generate a...
7246512 Method for determining a zero-point error in a vibratory gyroscope  
A method for determination of the zero error of a Coriolis gyro. Appropriate disturbance forces are applied to the resonator of the Coriolis gyro such that at least one natural oscillation of the...
7234352 Angular velocity senor  
An angular velocity sensor includes a tuning fork unit; a base block provided with a terminal for outputting an output signal from the tuning fork unit to the exterior; a cover for housing the...
7225101 Electronic device, signal compensation device and signal compensation method  
An electronic device that prevents a failure caused by a temperature drift of an angular velocity sensor, and a signal compensation system and a signal compensation method for compensating for the...
7216540 Six-legged type piezoelectric vibration gyroscope  
A six-legged type piezoelectric vibration gyroscope having a pair of exciting arms extending from a body ( 2 ) in a first direction (A 1 ) with a space therebetween, one non-exciting arm ( 3 c )...
7191653 Tuning fork vibratory MEMS gyroscope  
A tuning fork vibratory MEMS gyroscope for sensing angular velocity and angular acceleration generated due to the rotation of a movable body. The tuning fork vibratory MEMS gyroscope includes an...
7188525 Angular velocity sensor  
An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed...
7185540 Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus  
In a piezoelectric element 20, a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble...
7167061 Tuning fork shaped crystal oscillator and method of fabrication thereof  
The present invention provides a tuning fork shaped oscillator, an angular velocity sensor element, and an angular velocity sensor with improved breaking strength with respect to CI and drive...
7140251 Devices for measuring physical values and vibrators  
A device for measuring a physical value, such as a vibratory gyroscope, is provided. The device comprises a vibrator; a driving means for exciting a driving vibration in the vibrator; a detecting...
7134335 Vibratory gyro piezoelectric vibrator  
A vibratory gyro piezoelectric vibrator includes a vibrating body having a laminate of piezoelectric layers stacked on each other in a lamination direction, and having a length extending in the...
7127945 Angular velocity sensor  
An angular velocity sensor comprises a receiving member receiving therein a case containing a vibration element and an IC, and having a hole usable in soldering one end of a terminal strip to a...
7107843 Angular velocity sensor  
The present invention provides an angular velocity sensor that can diagnose abnormalities without having on a tuning fork vibrator special abnormality diagnostic signal input electrodes or...
7096733 Angular velocity sensor  
An angular velocity sensor includes a stem and a vibrator that is supported by the stem. The vibrator is inclined to a mounting surface of the stem. The angle of inclination of the vibrator to the...
7093487 Angular-rate detecting apparatus  
An Angular-rate detecting apparatus includes four mass portions connected by at least one support beam, and the mass portions have respective individual vibration generators disposed thereon. The...
7069783 Angular velocity sensor  
The angular velocity sensor for detecting an angular velocity for detecting movement amounts and for controlling postures of vehicles, airplanes, cameras, and the like. The angular velocity sensor...
7051592 Angular velocity sensor  
An angular velocity sensor includes a tuning-fork resonator having prongs, a supporting substrate having the tuning-fork resonator mounted thereon, and a casing accommodating the tuning-fork...
7043988 Angular velocity sensor  
An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element and a detector part for detecting an angular velocity of the...
7031852 Apparatus and method for detecting abnormality of a vibration-type angular velocity sensor, abnormality detecting program, and a related vehicle control system  
An acceleration sensor, installed together with an angular velocity sensor in the same casing, detects the acceleration induced by the external vibration. Its detection signal Vs is supplied to...
7028548 Vibration type angular velocity sensor  
To cancel in-phase components acting on vibrators of first and second sensor units in an angular velocity sensing direction Y, a differential amplification circuit obtains a differential waveform...
7010978 Electrically operated tuning fork  
An electrically operated tuning fork apparatus includes a tuning fork having a base and a pair of tines. The tines have tips remote from the base, and are formed of or include material in which a...
7004024 Horizontal and tuning fork vibratory microgyroscope  
A horizontal and tuning fork vibratory microgyroscope is provided for detecting angular velocity and angular acceleration of an inertial object when the inertial object is rotated, wherein...
7000472 Supporting mechanism for a vibrator and a vibrator unit including a supporting mechanism  
A gyro-vibrator supporting mechanism for supporting a gyro-vibrator via a support section upon a substrate in a vibration unit in which a vibrator is installed, the gyro-vibrator having a drive...
6981415 Reduced start time for MEMS gyroscope  
By applying a first value of voltage to a first side of a MEMS gyroscope and applying a second value of voltage to a second side of the MEMS gyroscope, the start time of the MEMS gyroscope may be...
6978673 Methods and systems for simultaneously fabricating multi-frequency MEMS devices  
A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least...
6972619 Amplifier with a gain proportional to power source voltage  
In order that an amplifier with a gain proportional to source voltage is obtained, the drain-source voltages of first and second P-channel MOS-FETs are zero-biased, and a voltage shifted higher by...
6955084 Isolated resonator gyroscope with compact flexures  
The present invention discloses a gyroscope comprising an isolated resonator including a post proof mass and counterbalancing plate. One or more double beam flexures each interconnect the...
6940433 Modulation method for signal crosstalk mitigation in electrostatically driven devices  
A method of distinguishing an analog drive signal from a pickoff signal for attenuating the effect of electrical cross-coupling between the analog drive signal and the pickoff signal. The method...
6934660 Multi stage control architecture for error suppression in micromachined gyroscopes  
Due to restrictive tolerancing, structural imperfections that reduce performance of fabricated micro gyroscopes are typical. While feedback control is normally used to compensate for these...
6931927 Tuning fork vibration gyro  
A tuning-fork vibration gyro including a ferroelectric tuning-fork vibration body generating a plurality of sensor signals and a sensor circuit to which the sensor signals generated by the...
6915694 Double-ended tuning fork vibratory gyro-sensor  
The object of the present invention is to provide an angular velocity sensor that uses Coriolis force with a flatly supported double tuning fork structure that uses an in-plane asymmetrical...
6904802 Vibrating gyroscope using a tuning fork vibrator  
A vibrating gyroscope includes a tuning fork vibrator having two legs defined by piezoelectric members which are polarized in opposite directions of thickness which are bonded to each other between...
6880399 Angular velocity sensor  
A vibrator is received within a case and the case is contained in a containing portion. Further, the case is arranged to be supported by the surrounding terminals having first ends thereof embedded...
6865945 Angular velocity sensor  
An angular velocity sensor, which is able to reduce the variations of driving resonance frequency of the vibrator and to improve the reliability of the sensitivity of detection signal with respect...
6862934 Tuning fork gyroscope  
A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for...
6860151 Methods and systems for controlling movement within MEMS structures  
A method for reducing undesired movements of proof masses in micro-electromechanical systems (MEMS) devices is described where the proof masses are suspended above a substrate by one or more...
6837108 Increasing the dynamic range of a MEMS gyroscope  
A MEMS gyroscope system and method for increasing a dynamic range of the MEMS gyroscope is provided. By adjusting a scale factor of the MEMS gyroscope, the highest sensed rate will be increased,...
6834247 Off-set elimination system for a vibrating gyroscope  
A gyroscope that may include various sources of error, with those sources of error each being dependent upon a different parameter, is associated with a simulation or “model” of the gyroscope...
6817244 Methods and systems for actively controlling movement within MEMS structures  
A method for reducing effects of common mode oscillations between two respective proof masses in micro-electromechanical systems (MEMS) devices is described. The MEMS devices also include a motor...
Matches 1 - 50 out of 191 1 2 3 4 >