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8176781 |
Multilayer piezoelectric thin film and method of manufacturing the same, angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the...
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8146424 |
Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
The present invention generally relates to systems and methods for an inertial sensor suspension that minimizes proof mass rotation and translation. The system contains a microelectromechanical...
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8127609 |
Angular velocity sensing element
An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2...
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8125280 |
Method for regulating an excited oscillation
In a method for regulating an excited oscillation of a system to a resonance case of the system, instantaneous values of the oscillating quantity are discretely recorded using one sampling...
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8122766 |
Inertia force sensor
Inertial force sensor includes detecting element that detects inertial force. Detecting element includes: two first orthogonal arms each having first arm and second arm that are connected to each...
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8117916 |
Electronic component and method for manufacturing the same
An electronic component is disclosed, and this component includes an element with an electrode section which is formed of upper electrode (74), lower electrode (72), piezoelectric unit (70) placed...
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8087152 |
Manufacturing method of an electromechanical transducer
A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element....
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8087296 |
Angular velocity sensor
An angular velocity sensor includes a substrate having an upper surface having a first recess provided therein, an electronic component mounted in the first recess, and a vibration element mounted...
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8065914 |
Vibration gyro
A vibration gyro made of a single crystal piezoelectric material includes: a base; a plurality of resonating arms extending from the base; an excitation electrode formed on a surface of at least...
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8061202 |
Angular velocity sensor element
There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an...
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8056414 |
Angular velocity sensor and angular velocity sensing device
An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof...
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8028578 |
Composite sensor
A composite sensor includes an angular velocity sensor element, an acceleration sensor element, a signal processing IC for processing signals from the angular velocity sensor element and the...
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8028579 |
Vibration body for angular speed sensor
A vibration body for angular speed sensor has a vibrator that includes vibration pieces, a supporting part for supporting the vibration pieces, and a mounting substrate for mounting the vibrator....
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8015874 |
Inertia force sensor
An inertial force sensor is provided in which each of switches is connected in parallel with each of resistors of low-pass filter and high-pass filter, respectively, and capacitor of high-pass...
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8018291 |
Transistor-based micrometric or nanometric resonant device
The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals...
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7997135 |
Angular velocity sensor
An angular velocity sensor includes a drive electrode section (26) for inputting a drive signal for driving a detecting element (21), a monitor electrode section (28) detecting the drive status of...
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7987715 |
Angular speed sensor
An angular velocity sensor includes a vibrator vibrating, first and second differential circuits for outputting first and second difference signals, respectively, and a synchronous detector circuit...
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7975546 |
Angular velocity sensor and angular velocity sensing device
An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed...
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7975545 |
Angular velocity sensor and angular velocity sensor device
Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity...
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7946173 |
Angular velocity sensor and process for producing the same
An angular velocity sensor has a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with...
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7937231 |
Order tracking method and system
The present invention describes an order tracking system (200) and method (100) for tracking at least one order from mechanical and/or acoustic vibrations generated by a periodic excitation process...
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7934306 |
Method for packaging micro electromechanical systems microphone
A method for packaging micro electromechanical systems (MEMS) microphone has steps of providing a base, arranging and mounting multiple microphone component assemblies on the base, providing a...
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7913560 |
Angular rate sensor and electronic device
An angular rate sensor includes a piezoelectric vibration device; and a detection section, wherein the piezoelectric vibration device includes a vibration section having a first support section,...
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7900514 |
Tuning-fork-type bimorph piezoelectric vibrator and vibrating gyroscope module including the vibrator
A tuning-fork-type bimorph piezoelectric vibrator includes two piezoelectric bodies that are bonded together and have opposite polarization directions. An intermediate metal layer is disposed...
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7891245 |
Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
The present invention particularly relates to an inertial force sensor used in various electronic equipment, for example, used for altitude control, navigation, or the like, of a mobile body such...
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7886622 |
Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor
A method for processing a detection signal of a vibratory inertial force sensor is disclosed. This method improves detection accuracy of the vibratory inertial force sensor. A detection circuit of...
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7877848 |
Method for fabricating an angular velocity sensor
An angular velocity sensor includes a tuning-fork vibrator having a base and multiple arms extending from the base. Two arms out of the multiple arms driven to vibrate have first end parts opposite...
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7870787 |
Piezoelectric thin film and method of manufacturing the same, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the...
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7870786 |
Detection device, sensor, and electronic instrument
A detection device includes a detection circuit and a reference voltage supply circuit. The detection circuit includes an amplifier circuit, a synchronous detection circuit, and a filter section....
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7849741 |
Gyro module
A gyro module includes: two gyro element pieces outputting a signal, the signal being obtained by combining a signal of an angular velocity of a first detection axis and a signal of an angular...
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7845227 |
Detection device, sensor, and electronic instrument
A detection device includes a detection circuit. The detection circuit includes an amplifier circuit, a synchronous detection circuit, and a filter section. The amplifier circuit includes a...
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7845226 |
Composite sensor
A composite sensor includes an external holding portion, an internal holding portion supported within the external holding portion via coupling portion, and a vibration-type angular velocity sensor...
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7832272 |
Tuning fork vibrator and vibratory gyroscope using the same
A tuning fork vibrator includes a vibrating body having the shape of a tuning fork as a whole. The vibrating body includes legs having a meandering shape and a base coupled to an end of the legs. A...
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7824098 |
Composite mechanical transducers and approaches therefor
Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example...
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7823450 |
Angular velocity sensor and method of setting temperature characteristics of angular velocity sensor
In a method of setting temperature characteristics of an angular velocity sensor, temperature characteristics of a detuning frequency are acquired. The detuning frequency is a frequency difference...
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7814792 |
Gyro-module
A gyro-module includes: a first gyro element component having a first detection axis and a second detection axis, and outputting at least a signal that is based on angular velocity around the first...
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7817331 |
MEMS device with an angular vertical comb actuator
A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame...
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7805995 |
Vibrating gyroscope
A vibrating gyroscope includes a tuning-fork vibrator having a base and legs. The vibrator is joined to a support plate by conductive adhesive members. The support plate includes an outer frame...
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7802473 |
Angular velocity sensor
An angular velocity sensor includes a tuning-fork oscillator that includes a base portion, arm portions extending from the base portion, and a pair of driving electrodes that are provided to extend...
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7788978 |
Support member of vibrator
The present invention provides, in a physical quantity measuring system using a vibrator, a supporting structure of a vibrator for reducing the zero-point temperature drift of detection signal. It...
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7779688 |
Vibration gyro sensor
A vibration gyro sensor, including: a vibrating element; a pair of drive electrodes for driving the vibrating element; at least two detection electrodes for detecting Coriolis force applied to the...
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7770450 |
Tuning bar vibrator and vibrating gyroscope using the same
A tuning bar vibrator formed on a substrate and including a vibrating body. The vibrating body is formed into a meander shape as a whole, and a middle vibrating reed is used as a first detection...
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7673512 |
Angular velocity sensor and electronic device
An angular velocity sensor includes a base portion, three arm portions that extend as one piece from the base portion to an approximately same direction, a piezoelectric film formed on one surface...
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7673511 |
Vibration gyro
A vibration gyro having a high accuracy, no vibration leak, and high S/N. The width of a detection leg of a resonator used in the vibration gyro is less than ⅗ of the width of drive legs. The l...
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7673529 |
Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor
A method for processing a detection signal of a vibratory inertial force sensor is disclosed. This method improves detection accuracy of the vibratory inertial force sensor. A detection circuit of...
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7637159 |
Vibration gyro and the process of producing the same
An inclination of an inclined surface formed by working a ridge of a resonator is set to be within a predetermined angular range, whereby a leakage of vibration in the out-of-plane direction is...
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7624494 |
Method of fabricating a mesoscaled resonator
An inertial sensor includes a mesoscaled disc resonator comprised of micro-machined substantially thermally non-conductive wafer with low coefficient of thermal expansion for sensing substantially...
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7617728 |
Tuning fork gyroscope
A gyroscope for detecting rotation about a gyro input axis, having a support structure, at least one mass flexibly coupled to the support structure such that it is capable of motion in two...
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7584661 |
Tuning fork gyro sensor
A tuning fork gyro sensor includes a tuning fork vibrator and a casing. The tuning fork vibrator includes a pair of arms that extend parallel, a base that supports the pair of arms, and supporting...
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7536910 |
Vibration acceleration sensor
An acceleration sensor, including: an oscillator unit for outputting an oscillator signal, the oscillator unit including a first piezoelectric vibrating reed having a vibrating arm that performs...
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