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7631549 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures  
Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.
7578186 Inertial sensor and fabrication method of inertial sensor  
An inertial sensor and a fabrication method of an inertial sensor are provided. An inertial sensor includes: an elastic support whose one end is supported by a support part disposed on a substrate;...
7578187 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor  
A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator...
7570061 Cantilever control device  
A cantilever control device is provided that can prevent, in an atomic force microscope, self-excited oscillation of a cantilever from stopping and prevent a probe of the cantilever from coming...
7536910 Vibration acceleration sensor  
An acceleration sensor, including: an oscillator unit for outputting an oscillator signal, the oscillator unit including a first piezoelectric vibrating reed having a vibrating arm that performs...
7514680 Apparatus for modifying and measuring diamond and other workpiece surfaces with nanoscale precision  
Apparatus and techniques are provided for modifying and measuring surfaces of diamond workpieces and other workpieces with nanoscale precision. The apparatus and techniques exploit scanning probe...
7437933 Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof  
Micro-electro-mechanical structure formed by a substrate of semiconductor material and a suspended mass extending above the substrate and separated therefrom by an air gap. An insulating region of...
7401516 Vibration gyro sensor element with cantilever vibrator extending from substrate and positioned within opening in substrate  
A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to...
7325452 Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor  
A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection...
7275434 Micromechanical component  
In order to implement two different sensitivities simultaneously in one component, in particular in an acceleration sensor having a substrate, at least one spring device, and at least one seismic...
7266998 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures  
Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.
7263884 Vibration type gyrosensor device  
Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11 , provided with a lower electrode, a...
7246520 Transducer, electronic equipment, and method of adjusting frequency of transducer  
To provide a transducer that can detect the rotation of the transducer with high degree of accuracy, a transducer includes a pair of oscillating reeds extending in the Y-direction to generate a...
7225101 Electronic device, signal compensation device and signal compensation method  
An electronic device that prevents a failure caused by a temperature drift of an angular velocity sensor, and a signal compensation system and a signal compensation method for compensating for the...
7197930 Gyro sensor  
The gyro sensor uses a clock signal as a timing signal or synchronous signal for reading various data stored in a built-in memory for its yaw rate sensing operation. The gyro sensor is configured...
7107842 Angular rate sensor using micro electromechanical haltere  
An angular rate sensing system suitable for a micromechanical flying insect (MFI) device. The system includes a rod, or haltere, that is moved in a plane by a piezoelectric actuator. Bending of the...
6918297 Miniature 3-dimensional package for MEMS sensors  
An apparatus for mechanically mounting one or more Micro Electro-Mechanical System (MEMS) sensors on a stable, structurally sound base, the base being a generally cubical block formed in a ceramic...
6834247 Off-set elimination system for a vibrating gyroscope  
A gyroscope that may include various sources of error, with those sources of error each being dependent upon a different parameter, is associated with a simulation or “model” of the gyroscope...
6613601 Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor  
An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static...
6561028 Mechanical resonator for a rotation sensor  
Resonator which can be produced by micromachining and has a mass part (DF 1 , DF 2 , V 1 , V 2 ) which is fixed by means of a resilient suspension (FA) to an anchoring point (AN) in such a way that...
6550331 Semiconductor mechanical sensor  
A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam...
6457360 High-precision integrated semiconductor peizoresistive detector devices and methods using the same  
An integrated semiconductor MEMS detector device includes a piezo-resistive detector located at a fixed end of a cantilever, a bi-layer resonance actuator including two thin layer materials having...
6427518 Apparatus for ascertaining a rotation rate and for performing a self-test  
An apparatus for determining a rotation rate has an oscillatory body 11 on which a plurality of electromechanical converters A, A′, B, B′, C, C′, D, D′ are mounted. At least a first...
6391674 Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing  
This invention describes fabrication procedures to construct MEMS devices, specifically band-pass filter resonators, in a manner compatible with current integrated circuit processing. The final...
6227050 Semiconductor mechanical sensor and method of manufacture  
A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam...
6199429 Vibrating gyroscope with elastic vibration isolator  
A vibrating gyroscope comprises a vibrator having a base part and provided with cantilever vibrating arms having vibrating free end parts, elastic vibration isolator having first and second elastic...
6158280 Detector for detecting angular velocities about perpendicular axes  
A detector has first and second excitation beams extending along X-axis and Y-axis directions. These beams are fixed to a substrate via an intersecting portion. Mass portions are disposed at free...
6109105 Tunneling-based rate gyros with simple drive and sense axis coupling  
Various structures for cantilever beam tunneling rate gyro devices formed on a single substrate are disclosed. A cantilever electrode having a plurality of portions extending from the substrate...
6092417 Gyrosensor  
A gyrosensor has a weight. A plurality of deformable support portions support the peripheral portion of the weight. A driving device sequentially deforms the respective support portions to move the...
6089087 Method for adjusting the temperature characteristic of a vibrating gyroscope  
A vibrating gyroscope includes a vibration member in which first and second piezoelectric substrates are joined together. On the outside main surface of the first piezoelectric substrate, a first...
6053044 Vibratory gyroscope  
Described herein is a vibratory gyroscope. In the present vibratory gyroscope, two detection output portions are provided on a vibrator. The detection output portions are constructed such that an...
6049115 Scanning probe microscope, and semiconductor distortion sensor for use therein  
A semiconductor distortion sensor comprises a flexible cantilever having a free end portion and a fixed end portion. A p-type region and an n-type region define a pn junction formed in a...
6044708 Oscillation type gyroscope  
The oscillation type gyroscope comprises an oscillator having electrodes for driving and for detection and also having oscillating arms adapted to oscillate in a cantilevered state, with front end...
6023974 Angular velocity sensor device  
An angular velocity sensor device that is produced in a simplified manufacturing process and at a reduced manufacturing cost. The angular velocity sensor device includes a first beam which extends...
6003372 Semiconductor angular velocity determining device  
A semiconductor angular velocity determining device includes a piezoelectric substance, a first substrate 21 disposed on the piezoelectric substance, a detector main body disposed on the first...
5952573 Micro-beam motion sensor  
A cantilevered micro-beam formed on a micro-circuit substrate such that when beam is vibrated it produces an output signal directly related to rotation of the substrate about an axis perpendicular...
5905202 Tunneling rotation sensor  
Various structures for cantilever beam tunneling rate gyro devices formed on a single substrate are disclosed. A cantilever electrode having a plurality of portions extending from the substrate...
5859368 Tunneling-based rotation rate sensor  
A high-accuracy, low-cost rotation rate sensor is based on a vibrating mechanical element induced to laterally oscillate. When rotated, the element, preferably a cantilever beam, is subjected to a...
5847487 Vibration gyroscope and image blur prevention apparatus using the same  
A vibration gyroscope includes a cross-shaped vibration member having two axes perpendicular to each other, an excitation structure for generating a bending vibration such that vibrations along the...
5796152 Cantilevered microstructure  
A cantilever microstructure includes a cantilever arm with a proximal end connected to a substrate and a freely movable distal end. The cantilever arm comprises first and second sections and...
5796000 Vibration angular-velocity sensor and process for producing it  
A vibrator is formed on a silicon substrate to become a base by the silicon-processing procedure and a thin film of a piezoelectric material is formed on the substrate by a method matching with the...
5691471 Acceleration and angular velocity detector  
An acceleration and angular velocity detector comprises a body mass, a flexible portion, which is connected to the body mass, that deforms in consonance with a displacement of the body mass, and a...
5285686 Coliolis rate sensor using tunnel-effect displacement sensor  
A rate detection system (10) uses a balanced resonant sensor (12) having first and second tines (14,16) interconnected with a mounting pad (20). A sensing circuit (50) including a tunnel effect...
5284059 Rotation sensor  
A silicon chip is micromachined so that a plurality of tines extend radially and coplanarly from an outer peripheral surface of a circular base. First and second mounting members extend from the...
5193391 Controlled vibration angular rate sensor  
Apparatus for measuring an angular rate of turn employing vibrating elements which are so arranged that the reaction forces from both the driven deflection vibration mode as well as from the...
5056366 Piezoelectric vibratory rate sensor  
A vibrating rotation rate sensor of the type that includes a generally-planar, H-shaped frame of piezoelectric material such as quartz. A first set of drive electrodes is fixed to a pair of upper...
5001940 Gyro for detecting signals along two axes  
A gyro comprises a support member and a rod member supported by the support member. A vibrator attached to the rod member has two pairs of vibrating members projecting at right angles to the rod...
4381672 Vibrating beam rotation sensor  
A rotation sensor having a vibrating cantilever beam is disclosed herein. The sensor comprises an integral single crystal silicon cantilever beam and support structure, an oscillator circuit for...
4267731 Force balanced vibratory rate sensor  
A vibratory inertial rate of turn sensor employs force feed back for maintaining the free end of a vibrating cantilever in a nulled lineal path when subjected to a turn about the beam axis, the...
4264838 Force balanced piezoelectric vibratory rate sensor  
The present invention is an inertial rate of turn sensor of the vibratory type employing force feed back techniques for maintaining the free end of a cantilever in a nulled lineal path, constant...
Matches 1 - 50 out of 56 1 2 >