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7389690 |
Micro-gyrometer with frequency detection
This invention suggests a micro-gyrometer, advantageously machined using conventional micro-electronic techniques, based on the detection of Coriolis forces generated by an angular movement Ω...
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7383729 |
Tuning fork gyro with sense plate read-out
A micro-electromechanical (MEM) device includes a proof mass resiliently mounted to a substrate. The proof mass has first and second combs formed on opposite sides thereof and is electrically...
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7377167 |
Nonresonant micromachined gyroscopes with structural mode-decoupling
A four-degrees-of-freedom (DOF) nonresonant micromachined gyroscope utilizes a dynamical amplification both in the drive-direction oscillator and the sense-direction oscillator, which are...
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7370531 |
Detection circuits, detection method and systems of measuring physical quantities
A detection circuit 30 has a unit 30 a for inputting a signal to be detected by synchronized wave detection, a unit 30 b for inputting a standard signal for the signal to be detected and a...
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7363814 |
Multi-axial angular velocity sensor
An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a...
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7360423 |
Resonating star gyroscope
Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type...
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7360422 |
Silicon inertial sensors formed using MEMS
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the...
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7357025 |
Micromachined apparatus with co-linear drive arrays
A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers....
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7353705 |
Oscillation type intertial force sensor
The oscillation type inertial force sensor includes an oscillator arranged to detect an inertial force, an oscillation circuit unit arranged to drive the oscillator, and a signal processing circuit...
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7347095 |
Integral resonator gyroscope
The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for...
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7347094 |
Coupling apparatus for inertial sensors
A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a...
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7347093 |
Angular velocity sensor and automobile using the same
The invention provides an angular velocity sensor which is provided with a smoothing circuit having a large smoothing time constant so that it can be reduced in size and integrated into an IC....
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7343802 |
Dynamic-quantity sensor
A piezoelectric-vibrator series circuit including two series-connected piezoelectric vibrators to which stresses induced by a dynamic quantity are applied in opposite directions is used, and a...
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7340954 |
Method for measurement of rotation rates/accelerations using a rotation rate coriolis gyro, as well as a coriolis gyro which is suitable for this purpose
A Coriolis gyro includes a first and a second resonator, each in the form of a coupled system comprising first and second linear oscillators. The first resonator can be caused to oscillate in...
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7337666 |
Movable sensor device
A movable sensor device includes a laminate body in which a micromechanical acting layer having a movable sensor structure and a coating layer coated on the micromechanical acting layer is...
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7337665 |
Method for electronically tuning the readout vibration of a coriolis gyroscope
In a method for electronic tuning of the frequency of the read oscillation to the frequency of the stimulation oscillation in a Coriolis gyro, the resonator of the Coriolis gyro has a disturbance...
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7334473 |
Structures for supporting vibrators and devices for measuring physical quantities
A structure for supporting a vibrator 1 is provided. The structure comprises a substrate 12 and bonding wires 14 A, 14 B fixed to the substrate 12 and connected with the vibrator 1 . The...
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7325452 |
Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor
A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection...
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7325451 |
Oscillating micro-mechanical sensor of angular velocity
The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular...
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7322238 |
Support of vibrating beam near nodal point
An apparatus in one example comprises a vibrating beam that comprises a nodal point for oscillation in any one or more of a plurality of substantially perpendicular directions for driving into...
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7322237 |
Gyro sensor of an electrostatic driving and capacitance detecting type
A gyro sensor having a vibrator and a start circuit generates an oscillation encouraging signal by boosting a first voltage to a voltage of the signal in response to a start signal of a start...
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7318348 |
Angular rate sensor and mounting structure of angular rate sensor
An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second...
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7316161 |
Rotation rate sensor
A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to...
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7313958 |
Rotational rate sensor
A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the...
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7308827 |
Integrated gyroscope and temperature sensor
A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in...
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7305880 |
Resonant micro-electro-mechanical system with analog driving
A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to...
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7302847 |
Physical quantity sensor having movable portion
An angular rate sensor includes: a support substrate; a semiconductor layer; and a movable portion. The movable portion includes a driving vibration portion and a detecting vibration portion. The...
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7296468 |
Digital coriolis gyroscope
Apparatus, systems, and methods to control the frequency of a plurality of gyroscopes are disclosed. The gyroscopes are configured such that each individual gyroscope operates independently of one...
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7296467 |
Angular velocity sensor
An angular velocity sensor 1 includes support members 10 A 1 , 10 A 2 , 10 B 1 and 10 B 2 , bonded to two nodal points of a pillar-shaped oscillator, generated on oscillations of the...
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7292021 |
Anomaly detector for vibratory angular rate sensor
In an anomaly detector that detects an abnormal condition of an oscillation signal of a circuit such as a vibratory sensing circuit, the oscillation signal, having AC and DC components, is...
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7290449 |
Physical quantity sensor having angular speed sensor and acceleration sensor
A physical quantity sensor includes: a substrate; an angular speed sensor disposed on the substrate; and an acceleration sensor disposed on the substrate. The angular speed sensor includes an...
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7290435 |
Method and apparatus for electronic cancellation of quadrature error
Methods and apparatus are provided for detecting a rate of rotation. In one implementation, the method includes vibrating a proof mass at a pre-determined frequency in a drive axis. In response to...
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7287428 |
Inertial sensor with a linear array of sensor elements
An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair...
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7284430 |
Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator
A three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope with nonresonant actuation with a drive direction, sense direction and a direction perpendicular to the drive and sense...
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7284429 |
Micromachined double tuning-fork gyrometer with detection in the plane of the machined wafer
The invention relates to a gyrometer based on a vibrating structure, produced by micromachining in a thin planar wafer. It comprises four moving assemblies placed at the vertices of a virtual...
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7284408 |
Sensor system
An inertia sensor system incorporates a vibration-type angular-speed sensor unit and an acceleration sensor unit provided separately. The inertia sensor system also includes a second-type...
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7281406 |
Sensor system
In a sensor system, a detection waveform-forming unit detects a vibration component and forms a waveform of a detected angular velocity based on the vibration component. Components of the waveform...
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7278312 |
Method for electronic tuning of the read oscillation frequency of a coriolis gyro
In a method for electronic tuning of the frequency of the read oscillation to the frequency of the stimulation oscillation in a Coriolis gyro the resonator of the Coriolis gyro has a disturbance...
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7275433 |
Micro-electro-mechanical sensor with force feedback loop
A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a...
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7274002 |
Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations
One or more heating elements comprise a heating element. One or more elongated beams comprise an elongated beam. The heating element is coupled with the elongated beam and induces a time-varying...
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7270003 |
BMEMS-type high-sensitivity inertial sensor and manufacturing process thereof
The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile...
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7268463 |
Stress release mechanism in MEMS device and method of making same
MEMS devices ( 100 ) and methods for forming the devices have now been provided. In one exemplary embodiment, the MEMS device ( 100 ) comprises a substrate ( 106 ) having a surface, an electrode (...
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7267005 |
SOI-MEMS gyroscope having three-fold symmetry
A SOI-MEMS gyroscope has a three fold symmetrical construction such that is symmetrical in the x direction, the y direction and diagonally. The gyroscope is suspended above a silicon substrate by...
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7267004 |
Inertial micromechanical tuning-fork gyrometer
The invention relates to a micromachined gyrometer having a planar moving structure anchored on a fixed substrate by anchoring feet, the fixed substrate being mounted on a support substrate via...
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7263884 |
Vibration type gyrosensor device
Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11 , provided with a lower electrode, a...
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7260991 |
Rotation-rate sensor
A micromechanical rotation-rate sensor includes a substrate, an anchoring device provided on the substrate, as well as a first spiral spring device and a second spiral spring device, the two spiral...
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7260990 |
Angular speed sensor and method for fabricating the same
Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the...
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7258009 |
Clock generating device, vibration type gyro sensor, navigation device, imaging device, and electronic apparatus
A vibration gyro sensor is provided which is capable of generating time information and detecting an angular velocity. A driving signal for driving a tuning fork piezoelectric vibrating reed is...
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7258008 |
Micro-electro-mechanical gyroscope having electrically insulated regions
An Integrated gyroscope includes a suspended mass; mobile actuation electrodes extending from the suspended mass; and a sensing mass connected to the actuation mass through coupling springs. The...
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7255005 |
Piezoelectric vibrating gyro element and gyro sensor
A piezoelectric vibrating gyro element is constructed by crystal and includes at least in the same plane a base portion; a pair of vibrating arms for detection extended out from the base portion to...
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