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7363814 |
Multi-axial angular velocity sensor
An angular velocity sensor for detecting angular velocity about a Z-axis in an XYZ coordinate system has a substrate oscillator, a flexible member for connecting the oscillator to a casing, a...
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7363717 |
System and method for using rotation sensors within a borehole
A system and method for using a survey tool within a borehole is provided. The survey tool includes a plurality of rotation sensors each having a sensing axis and a direction of least acceleration...
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7340954 |
Method for measurement of rotation rates/accelerations using a rotation rate coriolis gyro, as well as a coriolis gyro which is suitable for this purpose
A Coriolis gyro includes a first and a second resonator, each in the form of a coupled system comprising first and second linear oscillators. The first resonator can be caused to oscillate in...
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7334491 |
Sensor arrangement, in particular a micro-mechanical sensor arrangement
A sensor array, in particular a micromechanical sensor array, and methods for manufacturing the sensor array are provided, which sensor array includes a sensor section for supplying certain sensor...
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7331212 |
Sensor module
A sensor module is provided having a compact housing containing a sensor. A low temperature co-fired ceramic substrate is located on the housing. The sensor and signal processing circuitry are...
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7325451 |
Oscillating micro-mechanical sensor of angular velocity
The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular...
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7305880 |
Resonant micro-electro-mechanical system with analog driving
A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to...
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7284408 |
Sensor system
An inertia sensor system incorporates a vibration-type angular-speed sensor unit and an acceleration sensor unit provided separately. The inertia sensor system also includes a second-type...
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7281406 |
Sensor system
In a sensor system, a detection waveform-forming unit detects a vibration component and forms a waveform of a detected angular velocity based on the vibration component. Components of the waveform...
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7274002 |
Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations
One or more heating elements comprise a heating element. One or more elongated beams comprise an elongated beam. The heating element is coupled with the elongated beam and induces a time-varying...
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7258008 |
Micro-electro-mechanical gyroscope having electrically insulated regions
An Integrated gyroscope includes a suspended mass; mobile actuation electrodes extending from the suspended mass; and a sensing mass connected to the actuation mass through coupling springs. The...
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7250773 |
Circuit for detecting difference in capacitance
A circuit for detecting a difference in capacitance between a first capacitor and a second capacitor provided in a sensor includes an oscillator configured to generate an oscillating signal, a...
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7243542 |
Closed loop analog gyro rate sensor
The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially...
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7237169 |
Cross-monitoring sensor system and method
Cross-monitoring sensor system and method in which a plurality of sensors each having a sensing element, circuitry for processing signals from the sensing element, an output interface for...
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7225550 |
System and method for using microgyros to measure the orientation of a survey tool within a borehole
A system and method for determining an orientation of the survey tool within a borehole utilizes a survey tool including a plurality of rotation sensors each having a sensing axis and a direction...
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7222533 |
Torsional rate sensor with momentum balance and mode decoupling
Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis...
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7219548 |
Pickoff sensor obtaining of value of parameter from substantially zero net dampening torque location of pendulous sensor component
A pendulous sensor component of an apparatus in one example reacts to a parameter. One or more pickoff sensors that obtain a value of the parameter from a substantially zero net dampening torque...
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7197930 |
Gyro sensor
The gyro sensor uses a clock signal as a timing signal or synchronous signal for reading various data stored in a built-in memory for its yaw rate sensing operation. The gyro sensor is configured...
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7197928 |
Solid-state gyroscopes and planar three-axis inertial measurement unit
The present invention relates to a z-axial solid-state gyroscope. Its main configuration is manufactured with a conductive material and includes two sets of a proof mass and two driver bodies...
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7168317 |
Planar 3-axis inertial measurement unit
The present invention relates to a z-axial solid-state gyroscope. Its main configuration is manufactured with a conductive material and includes two sets of a proof mass and two driver bodies...
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7159461 |
Vibrating rate gyro with slaving of detection frequency to excitation frequency
The invention relates to a gyroscope comprising at least one mass capable of vibrating along an x axis at a resonant excitation frequency F x capable of vibrating along a y axis perpendicular to...
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7159441 |
Cloverleaf microgyroscope with electrostatic alignment and tuning
A micro-gyroscope ( 10 ) having closed loop output operation by a control voltage (V ty ), that is demodulated by a drive axis (x-axis) signal V thx of the sense electrodes (S 1 , S 2 ), providing...
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7155976 |
Rotation sensing apparatus and method for manufacturing the same
The invention provides a rotation sensing apparatus and method for manufacturing the same, in which the rotation sensing apparatus comprises at least a pair of vibration parts and a sensing...
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7140255 |
Devices and method of measuring a mass
A device 1 for measuring a mass comprises a vibrator 2, driving means 3 A, 3 B, 3 C, 3 D for exciting a basic vibration in the vibrator 2, detecting means 4 A, 4 B for detecting a...
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7117605 |
System and method for using microgyros to measure the orientation of a survey tool within a borehole
A system and method for determining an orientation of the survey tool within a borehole utilizes a survey tool including a plurality of rotation sensors each having a sensing axis and a direction...
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7112793 |
One-chip compass implemented using magnetoresistive (MR) sensor temperature compensation and magnetic cross-term reduction techniques
A measurement technique for normalizing the sensitive-axis output of a magnetoresistive (MR) sensor which greatly reduces both temperature effects and magnetic contributions from the...
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7104129 |
Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
A MEMS assembly having a MEMS subassembly sandwiched between and bonded to a cap and a base is provided. The MEMS subassembly includes at least one MEMS device element flexibly connected to the...
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7100445 |
Rotation rate sensor comprising a vibration gyroscope
In a rotation rate sensor having a vibrational gyroscope which is part of at least one control loop which excites the vibrational gyroscope by supplying an excitation signal at its natural...
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7093488 |
Vibrating resonator inertial rotation sensor
The inertial rotation sensor comprising a vibrating resonator associated with transducers defining a pair of control channels and a pair of detection channels, preferably comprises a single...
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7059188 |
Angular velocity sensor
A flexible substrate ( 110 ) having flexibility and a fixed substrate ( 120 ) disposed so as to oppose it are supported at their peripheral portions by a sensor casing ( 140 ). An oscillator ( 130...
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7057173 |
Magnetoresistive (MR) sensor temperature compensation and magnetic cross-term reduction techniques utilizing selective set and reset gain measurements
A measurement technique for normalizing the sensitive-axis output of a magnetoresistive (MR) sensor which greatly reduces both temperature effects and magnetic contributions from the...
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7051590 |
Structure for attenuation or cancellation of quadrature error
A movable microstructure includes a first finger set comprising two or more first fingers affixed to a substrate and extending substantially parallel to a defined displacement axis towards a...
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7043985 |
High-resolution in-plane tuning fork gyroscope and methods of fabrication
A microstructure comprising an in-plane solid-mass electrically conductive tuning fork gyroscope and fabrication methods. The gyroscope is formed using substrate material having lower and upper...
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6981414 |
Coupled micromachined structure
A suspended, coupled micromachined structure including two proof masses and multiple support arms configured to suspend the masses above a substrate and a coupling spring element having two ends....
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6966224 |
Micromachined vibratory gyroscope with electrostatic coupling
Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a...
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6938483 |
Phase-locked mechanical resonator pair and its application in micromachined vibration gyroscope
This invention is related to a phase-locked mechanical resonator pair that comprises at least two mechanical resonators wherein the resonance of the second mechanical resonator is phase-locked to...
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6934665 |
Electronic sensor with signal conditioning
A method for extracting components from signals in an electronic sensor ( 50 ) having a sensing element ( 52 ). The sensing element ( 52 ) generates a first signal ( 60 ) and a second signal ( 62...
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6928873 |
Silicon dual inertial sensors
A silicon dual inertial sensor made of a ( 110 ) silicon chip comprises at least a proof-mass, which is connected to a corresponding inner frame with a plurality of sensing resilient beams to make...
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6928872 |
Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
An integrated gyroscope, including an acceleration sensor formed by: a driving assembly; a sensitive mass extending in at least one first and second directions and being moved by the driving...
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6907782 |
Micromechanical inertial sensor
A micromechanical inertial sensor that includes three component planes, namely a bottom part, a center part and a cover part. The center part is a silicon wafer in which a cardan-type (i.e. gimbal)...
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6906849 |
Micro-mirror element
A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with...
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6894576 |
Temperature compensation mechanism for a micromechanical ring resonator
A time base including a resonator ( 4 ) and an integrated electronic circuit ( 3 ) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a...
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6892575 |
X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they...
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6889550 |
Planar mechanical resonator sensitive along an axis perpendicular to its plane
The invention concerns a mechanical resonator with a planar monolithic vibrating structure extending along a closed contour whereof the axis of sensitivity is substantially perpendicular to the...
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6848304 |
Six degree-of-freedom micro-machined multi-sensor
A six degree-of-freedom micro-machined multi-sensor that provides 3-axes of acceleration sensing, and 3-axes of angular rate sensing, in a single multi-sensor device. The six degree-of-freedom...
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6845665 |
Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
A micro-machined multi-sensor that provides 2-axes of acceleration sensing and 1-axis of angular rate sensing. The multi-sensor includes a rigid accelerometer frame, a first proof mass, and a...
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6843126 |
Triaxial angular rate and acceleration sensor
A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual...
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6777857 |
Piezoelectric gyroscope system, and method of use
Disclosed are coriolis force driven piezoelectric gyroscope systems which each comprise two substantially orthogonally oriented elements projecting from a mass. Each substantially orthogonally...
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6766689 |
Integrated gyroscope of semiconductor material
The gyroscope is formed by a driving system including a driving mass having an open concave shape; an accelerometer including a sensing mass and comprising mobile sensing electrodes; a linkage...
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6752017 |
Rotation speed sensor
A yaw-rate sensor is proposed having a first and a second Coriolis element ( 100, 200 ) which are arranged side-by-side above a surface ( 1 ) of a substrate. The Coriolis elements ( 100, 200 ) are...
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