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7352117 Piezoelectric vibrator  
A tuning fork type piezoelectric vibrator is provided with vibrating arms which can improve shock resistance while suppressing a CI value to a small value. A first groove (base end side) and a...
7334491 Sensor arrangement, in particular a micro-mechanical sensor arrangement  
A sensor array, in particular a micromechanical sensor array, and methods for manufacturing the sensor array are provided, which sensor array includes a sensor section for supplying certain sensor...
7320253 Stress detection method for sensor device with multiple axis sensor and sensor device employing this method  
The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is...
7308827 Integrated gyroscope and temperature sensor  
A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in...
7287427 Rate-of-rotation sensor having frequency adjustment  
A yaw-rate sensor having a resonant driving frequency and a resonant Coriolis frequency. In addition, the yaw-rate sensor has at least one operating voltage, of which the resonant Coriolis...
7249488 Method for detecting a zero-point error of a coriolis gyroscope and coriolis gyroscope using said method  
In a method for determining the zero-point error of a Coriolis gyro, the resonator of the Coriolis gyro has a disturbance force applied to it such that a change in the stimulation oscillation of...
7246512 Method for determining a zero-point error in a vibratory gyroscope  
A method for determination of the zero error of a Coriolis gyro. Appropriate disturbance forces are applied to the resonator of the Coriolis gyro such that at least one natural oscillation of the...
7225524 Method for fabricating a gyroscope  
Method for fabricating a gyroscope including: fabricating a SMS wafer where a first wafer, a metal film, and a second wafer are sequentially stacked; forming a cantilever or a bridge...
7191636 Inertial measurement system and method with sensor bias cancellation  
Inertial measurement system and method in which a base is rotated about an input axis in accordance with a rotation to be measured, rotation about the input axis is sensed with one or more angular...
7159459 Multiple microelectromechanical (MEM) devices formed on a single substrate and sealed at different pressures and method therefor  
Methods and apparatus are provided forming a plurality of semiconductor devices on a single substrate, and sealing two or more of the devices at different pressures. First and second semiconductor...
7159441 Cloverleaf microgyroscope with electrostatic alignment and tuning  
A micro-gyroscope ( 10 ) having closed loop output operation by a control voltage (V ty ), that is demodulated by a drive axis (x-axis) signal V thx of the sense electrodes (S 1 , S 2 ), providing...
7124632 Electronically configurable rate sensor circuit and method  
Angular rate sensor and method in which the parameters of a circuit which provides drive signals and processes signals from a sensing element are configured electronically by a programmable memory....
7100444 Isolated resonator gyroscope  
The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially...
7059188 Angular velocity sensor  
A flexible substrate ( 110 ) having flexibility and a fixed substrate ( 120 ) disposed so as to oppose it are supported at their peripheral portions by a sensor casing ( 140 ). An oscillator ( 130...
7040164 Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope  
A sensor is fabricated with micron feature sizes capable of simultaneously measuring absolute angles of rotation and angular rotational rates. The measurements are made directly from the position...
7036373 MEMS gyroscope with horizontally oriented drive electrodes  
Devices and methods for reducing rate bias errors and scale factor errors in a MEMS gyroscope are disclosed. A MEMS actuator device in accordance with an illustrative embodiment of the present...
7017411 Apparatus with selected fill gas  
An inertial sensor has an interior filled with a relatively low viscosity fill gas. To that end, the inertial sensor has a housing forming the noted interior, and a movable component within the...
6981415 Reduced start time for MEMS gyroscope  
By applying a first value of voltage to a first side of a MEMS gyroscope and applying a second value of voltage to a second side of the MEMS gyroscope, the start time of the MEMS gyroscope may be...
6952965 Vertical MEMS gyroscope by horizontal driving  
A vertical MEMS gyroscope by horizontal driving includes a substrate, a support layer fixed on an upper surface of an area of the substrate, a driving structure floating above the substrate and...
6934665 Electronic sensor with signal conditioning  
A method for extracting components from signals in an electronic sensor ( 50 ) having a sensing element ( 52 ). The sensing element ( 52 ) generates a first signal ( 60 ) and a second signal ( 62...
6934660 Multi stage control architecture for error suppression in micromachined gyroscopes  
Due to restrictive tolerancing, structural imperfections that reduce performance of fabricated micro gyroscopes are typical. While feedback control is normally used to compensate for these...
6906849 Micro-mirror element  
A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with...
6904377 Method for measuring force-dependent gyroscope sensitivity  
System and method for measuring force-dependent gyroscopic sensitivity. A force-effect model of the effects of acceleration on the output of a gyro triad is determined. Rotation sequences are then...
6901799 Vibratory double-axially sensing micro-gyroscope  
The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended...
6895321 Angular and linear flexure plate accelerometer  
An accelerometer system includes a rigid plate system coupled to an inertial platform. A first flexure plate defines a first flex axis and is adjacent to the rigid plate system a first distance...
6895069 Apparatus for counting rotation frequency of numeral wheel of meter for remote meter reading system  
Disclosed is an apparatus for counting the rotation frequency of a numeral wheel of a meter to be used for a remote metering system. A light reflection tape is coated on one of low placed numeral...
6862934 Tuning fork gyroscope  
A tuning fork gyroscope typically including at least one proof mass with an upper sense plate disposed above the proof mass and a lower sense plate disposed below the proof mass and means for...
6834247 Off-set elimination system for a vibrating gyroscope  
A gyroscope that may include various sources of error, with those sources of error each being dependent upon a different parameter, is associated with a simulation or “model” of the gyroscope...
6823733 Z-axis vibration gyroscope  
An angular velocity sensor is disclosed having a sensing element and a pair of driven mass drive elements. The driven mass drive elements have a support structure which defines at least one...
6810737 Resonant element and vibration adjusting method therefor  
A resonant element including: a vibrating body vibratable in orthogonal X- and Z-directions; exciting means for causing the vibrating body to be subjected to an excitation vibration in the...
6796178 Rotation-type decoupled MEMS gyroscope  
A rotation-type decoupled MEMS gyroscope including a drive body movable about the X-axis, a sensing body movable about the Z-axis, a medium body moving together with the drive body about the X-axis...
6796177 Gyroscopic apparatus and electronic apparatus including same  
A gyroscopic apparatus includes two gyro sensors having substantially the same structure. The two gyro sensors are arranged on first and second major surfaces, respectively, of a mounting base so...
6792792 Diagnostic test for a resonant micro electro mechanical system  
A balanced resonant micro electromechanical system angular rate sensor includes a feedback control loop that generates a null signal to rebalance the sense element to cancel any a Coriolis force...
6761068 Micromechanical rotation rate sensor and method for producing the same  
In a method for producing a micromechanical rotation rate sensor, a wafer stack arrangement is used wherein a substrate wafer arrangement ( 12, 16 ) is connected to a structural wafer arrangement (...
6758093 Microgyroscope with integrated vibratory element  
A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which is the rotation rate sensing...
6742388 Device for measuring the angular velocity of a pivotally mounted vehicle element  
A vehicle is provided, including a vehicle body; at least one vehicle element pivotally mounted to the vehicle, the vehicle element configured to pivot through an angle not more than 360 degrees;...
6736008 Inertia force sensor  
An inertia force sensor with a damper. The damper includes a cantilever for a movable part disposed in a movable electrode protruding therefrom, and a cantilever for a fixed part disposed in a...
6725169 Methods and apparatus for automatic gain control  
An apparatus for controlling an amplitude of a signal generated from a digitized sinusoid of rapidly and widely varying amplitude is described herein. The apparatus includes a two stage gain...
6718825 Methods and systems for reducing stick-down within MEMS structures  
A method for reduces the sticking of proof masses in micro-electromechanical systems (MEMS) devices to sense plates in the MEMS device due to acceleration forces to which the MEMS device is...
6718823 Pulse width modulation drive signal for a MEMS gyroscope  
A MEMS gyroscope may be coupled to drive electronics that provide a pulse width modulation drive signal to the MEMS gyroscope. The pulse width modulation drive signal may be generated by comparing...
6715352 Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method  
For a decoupled to gyro to have high sensitivity to angular rate, it is necessary to have the design flexibility to achieve all the critical frequencies in the design. The geometry of the gyro is...
6694504 Method of fabricating an electrostatic vertical and torsional actuator using one single-crystalline silicon wafer  
The present invention, by improving the silicon surface/bulk micromachining technology using two steps of silicon etch mask patterning and four steps of silicon etching, fabricates a structure...
6675630 Microgyroscope with electronic alignment and tuning  
A micro-gyroscope having electronic alignment by performing an electronic coordinate transformation on control voltages (V TX , V Ty ) through an attenuator network thereby canceling first and...
6666090 Vibrating gyroscope and electronic device using the same  
A vibrating gyroscope includes a vibrator having a driving electrode and a sensor electrode, a driving circuit for applying a driving voltage to the driving electrode, a detection circuit which...
6665110 Diagonal to rectangular pixel mapping for spatial light modulator  
A method of mapping diagonal rows and columns of two-dimensional grid elements to rectangular rows and columns of two-dimensional grid elements. The method is of particular use with a spatial light...
6662656 Gyroscopic sensor  
A gyroscopic sensor comprising: a sensing element ( 1 ) associated with detection and excitation electrodes ( 8 ); conductive rods ( 6 ) connected in particular to said electrodes ( 8 ); a...
6629460 Isolated resonator gyroscope  
The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially...
6619121 Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors  
Quadrature error occurs in Corolis based vibrating rate sensors because of manufacturing flaws that permit the sensing element to oscillate either linearly along or angularly about an axis that is...
6588274 Self-diagnosing circuit for vibrating gyroscope  
A self-diagnosing circuit for a vibrating gyroscope for detecting a vibration due to a Coriolis force including a differential operating circuit for determining a difference between output signals...
6564636 Wide band digital phase locked loop (PLL) with a half-frequency output  
A digital phase locked loop includes an automatic gain control that applies a gain to an input signal in order to provide a gain controlled signal. A 90° phase shifter applies a 90° phase shift...
Matches 1 - 50 out of 137 1 2 3 >