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7373816 |
Printed-circuit board having a plastic part for accommodating a measuring device
The arrangement relates to a hot-film mass flow meter for recording the flow rate of a flowing medium in the intake tract or the charge air tract of an internal combustion engine. A substrate part...
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7363810 |
Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same
A corrosion resistant thermal type mass flow rate sensor, and a fluid supply device employing the sensor are provided thus allowing enhanced corrosion resistance of the thermal type mass flow rate...
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7360416 |
Non-contact condensation detecting apparatus
A disclosed detector element includes a substrate including a void, a heating unit including a heat generating electrode bridged across the void, and a temperature sensor including a temperature...
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7360415 |
Thermal type air flow meter having semiconductor sensor elements with similar diaphragm sizes
A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second...
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7337661 |
Thermal fluid flow meter having heat-generating resistor and temperature adjuster therefor
A low-cost thermal flow meter that has good temperature characteristics and little variations. The thermal flow meter includes a sensor element including a heat-generating resistor and at least two...
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7331224 |
Tilt-insensitive flow sensor
A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is...
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7305878 |
Sensor equipment having sensing portion and method for manufacturing the same
Sensor equipment includes: a sensor device having a sensing portion; and an electric connection portion coated with an electric insulation member. The electric connection portion electrically...
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7302845 |
Method for measurement of gas flow velocity, method for energy conversion using gas flow over solid material, and device therefor
The present invention relates to a method for energy conversion by gas flow over solid materials and also to a method for measurement of velocity of a gas flow over solid material such as doped...
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7302838 |
System and method for closed loop control of boundary layer shear stress
A system is provided for controlling boundary layer shear stress adjacent a surface over which a fluid stream has been established. The system comprises a boundary layer control device adapted for...
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7287424 |
Thermal type flow measurement apparatus having asymmetrical passage for flow rate measurement
IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is...
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7284424 |
Thermal air flow rate measuring apparatus and its flowmeter and internal combustion engine and thermal air flow rate measuring method using it
A thermal air flow rate measuring apparatus of great precision wherein sensitivity is enhanced by sensors having different output characteristics and an operating device employing a digitized...
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7278309 |
Interdigitated, full wheatstone bridge flow sensor transducer
A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating...
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7278308 |
Thermal isolation between heating and sensing for flow sensors
A flow sensor system includes a plurality of flow sensor chips, wherein each flow sensor chip among the plurality of flow sensor chips comprises a substrate, a heater element, a heater control...
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7270000 |
Fluid flow sensor and fluid flow measurement device
A Thermal type fluid flow sensor comprises a heating resistor formed on a thin film of a substrate, and plural thermal sensitive resistors configuring a bridge circuit. The thermal sensitive...
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7263882 |
Fluid system and method of assessing a property of a fluid flowing therein
A fluid system installed on a vehicle and a method for assessing a property of a fluid flowing in the fluid system. The fluid system and method entail flowing at least a portion of the fluid...
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7258003 |
Flow sensor with self-aligned flow channel
A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel...
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7255001 |
Thermal fluid flow sensor and method of forming same technical field
A thermal fluid flow sensor and method of forming same. The flow sensor has an integrated circuit substrate, such as a silicon substrate, and a region of low thermal conductivity material carried...
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7251995 |
Fluid flow sensor
Two heat generating resistors are formed on a substrate in the upstream side with respect to an air flow direction and two other heat generating resistors are formed in the downstream side. A...
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7248942 |
Airflow detection system having an airflow indicating device
According to an embodiment, the present invention pertains to a system for detecting airflow in a room. The system includes an airflow indicating device having a movable component whose movement...
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7234237 |
Method for producing a protective cover for a device
In a method for producing a protective cover for a device formed in a substrate, at first a sacrificial structure is produced on the substrate, wherein the sacrificial structure comprises a first...
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7228735 |
Fluid sensing device with integrated bypass and process therefor
A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a...
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7219544 |
Thermal-type flow rate sensor and manufacturing method thereof
In a thermal-type flow rate sensor, a mold material is formed to integrally cover a predetermined range including a circuit chip, connecting parts of connecting wires with a flow rate detecting...
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7211873 |
Sensor device having thin membrane and method of manufacturing the same
A sensor device for use in an automobile as an airflow sensor is composed of a silicon substrate in which a cavity is formed and a base plate bonded to the silicon substrate. An upper end of the...
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7204139 |
Analytical chip, analytical-chip unit, and analysis apparatus
An analytical chip is provided with a flow channel ( 5 ), whose section is in a closed shape and through which a fluid sample (Fs) is made to flow, for carrying out analysis regarding the fluid...
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7201048 |
Measuring device for a flow sensor, in particular an air mass sensor for internal combustion engines and method for measuring air flows
A measuring device for a flow sensor is provided, in which the drift is minimized.
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7194920 |
Sensor probe and pipeline construction and method
A sensor and carrier device are provided in combination with a pipeline for either placing a sensor element within the flow stream of the pipeline or a device to divert flow outside of the pipeline...
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7188519 |
Device and method for measuring the flow and at least one material parameter of a fluid
For measuring the flow and the thermal conductivity of a fluid, a sensor is used, which has a first temperature detector for measuring a first temperature and a second temperature detector for...
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7181963 |
Thermal flow sensor having streamlined packaging
A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second...
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7181962 |
Thermal flow sensor
A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity ( 7 ) formed in a semiconductor substrate ( 2 ), at least a heating resistance ( 4 ) is formed...
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7150189 |
Thermal-process-type air-flow-rate sensor
A sensor element ( 10 ) and sensor supporting body ( 30 ) are fixed on a jig ( 80 ) by adhesive ( 48 ) so that a surface ( 10 A) of the sensor element ( 10 ) and a surface ( 30 A) of the sensor...
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7137298 |
Thermal air flowmeter
A thermal air flowmeter which improves air flow rate measurement sensitivity, reduces power consumption of a heating element and broadens the measuring range. A heating resistor is provided on...
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7107835 |
Thermal mass flow sensor
A thermal mass flow sensor is disclosed that includes a housing ( 16 ) having a first sensor region and a second sensor region, a first thin film temperature sensor ( 39 ) formed at the first...
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7104126 |
Thermal type flow rate measuring apparatus
A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the...
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7096729 |
Disposable fluid flow sensor
A disposable fluid flow sensor is disclosed herein, which generally includes a flow channel assembly comprising a flow channel tube in association with a disposable flow channel portion. A sensor...
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7095064 |
Semiconductor sensor with pressure difference adjusting means
In a semiconductor sensor having a membrane structure, the destruction of the membrane caused by the expansion or contraction of a fluid within a hollow part formed under the membrane while the...
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7077002 |
Method and an apparatus for measuring flow rates
A device for measuring the flow rate of a fluid confined by a wall member, and wherein the device comprises contacting apparatus for contacting the wall member, the contacting apparatus being...
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7069779 |
Thermal flow sensor having an inverted substrate
A thermal flow sensor has a first substrate, second substrate and a third substrate, each of which has a first side and a second opposite side. The first substrate is connected to the second...
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7059186 |
Integrated flow sensor for measuring a fluid flow
An integrated flow sensor for determining a fluid flow is described. It has a first function layer and a second function layer which is applied to the first function layer and is electrically...
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7051418 |
Method of measuring weak gas flows
Firstly, a supporting frame is produced, whose opening is spanned by an auxiliary layer flush on one side. Following the production of microstructures, flat parts or membranes on the common plane...
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7049556 |
Heating device
A heating device at least having an electrically insulating film formed on a surface of a substrate, a heating member formed on the electrically insulating film, and a protection film formed over...
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7040160 |
Flow sensor
A flow sensor is described, in particular for analysis of gas flows, having a substrate and at least one sensor component which is sensitive to a flow of a medium, the sensor component being...
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7036369 |
Thermal flow sensor having recesses in a substrate
A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second...
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7021136 |
Mass flow meter with symmetrical sensors
A mass flow meter employs discrete chip-type temperature sensors to sense a fluid flow rate. The sensor can be a semiconductor chip such as SiC or silicon, or thin film tungsten on an AlN...
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7010971 |
Heating resistor type flow-measuring device having a heating resistor and a thermoresistance, whose resistance value varies in response to the ambient temperature
A heating resistor type flow-measuring device is capable of adjusting heating temperature of a heating resistor according to the ambient temperature as well as making the initial adjustment. A...
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7010423 |
Method for operating an internal combustion engine
A method and a control unit for operating an internal combustion engine of a motor vehicle are provided, in particular for controlling/regulating the internal combustion engine as a function of an...
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6988399 |
Physical quantity detecting device having second lead conductors connected to the electrodes and extending to the circumference of the substrate
It is an object of the present invention to provide a simple-structure physical quantity detecting device whose resistance does not vary irrespective of use for long periods, a method for...
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6983653 |
Flow sensor having thin film portion and method for manufacturing the same
A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of...
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6981411 |
Measuring element for a flow rate sensor, in particular an air-mass flowsensor for internal combustion engines
A measuring element for a flow rate sensor is described, in which the number of terminals is minimized to reduce the dimensions of the measuring element.
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6981410 |
Flow sensor and method of manufacturing the same
A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a...
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6971266 |
Thermosensitive flow rate detecting element and method for the manufacture thereof
Cavities are formed so as to extend from a rear surface side of a base material to a protective film, an electrically-insulating film is formed on a rear surface of the base material, wall surfaces...
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