|
Match
|
Document |
Document Title |
|
|
6805003 |
Mass flow sensor and mass flowmeter comprising the same
A mass flow sensor includes a semiconductor substrate 1 , an insulating thin film 2 , heaters 311 and 312 , temperature measurement resistors 321 and 322 , and a protective layer 4 . The...
|
|
|
6799456 |
Thermal flow sensor
A board mounting thereon a measuring chip is fixed to a body in close contact relation to form a main passage and a sensor passage inside of the body, while a hot wire for a temp. sensor and a hot...
|
|
|
6796172 |
Flow sensor
A flow sensor system is provided for measuring the rate of flow of a fluid in a flow channel that is configured to contain the flow. A substrate may be disposed in the flow channel, and a plurality...
|
|
|
6776817 |
Airflow sensor, system and method for detecting airflow within an air handling system
An airflow sensor including a housing, a flexible substrate, and electrical components. The housing defines an internal compartment and a top face opening. The substrate includes circuitry traces,...
|
|
|
6769299 |
Integral dual technology flow sensor
A flow sensor includes a mounting plate, bending plate, and a sensing assembly. The mounting plate is mounted to an internal surface of an air hose. The mounting plate is flexibly coupled to the...
|
|
|
6763712 |
Flow-sensing device and method for fabrication
A gaseous flow sensor that utilizes non-platinum resistive sensing elements and a method for fabricating such sensor are disclosed. The gaseous flow sensor is constructed by an insulating...
|
|
|
6745625 |
Fluid flow rate measuring apparatus
A fluid flow rate measuring apparatus for measuring a flow rate of fluid, including a first heating element which is disposed at an upstream side in a direction of flow of the fluid, a first...
|
|
|
6732583 |
Sensor element and its manufacturing method
The present invention provides a sensor element having a sensor substrate and a sensing portion supported by the sensor substrate. A resin film is provided between the sensor substrate and the...
|
|
|
6729183 |
Thermosensitive flow rate detecting device
To provide a thermosensitive flow rate detecting in which no response lag occurs even if the flow rate change frequency is high, and no error in detection flow rate is produced even if the power...
|
|
|
6729187 |
Self-compensated ceramic strain gage for use at high temperatures
A self-compensated strain gage sensor having a temperature co-efficient of resistance (TCR) of essentially zero comprised of a wide band semiconductor and a compensating metal functioning as serial...
|
|
|
6725717 |
Non-intrusive locating of a blockage in a pipeline
A blockage in a pipeline is detected by selecting a position on the pipeline between a supply position and a downstream receiving position where the blockage may be located, attaching a strain...
|
|
|
6725716 |
Thermo-sensitive flow rate sensor and method of manufacturing the same
A thermo-sensitive flow rate sensor having a flow rate detecting device comprising: a plate-like substrate; a heating element and a temperature compensating element constituted by thermo-sensitive...
|
|
|
6705160 |
Flow sensor
A thin-film type flow sensor having a thin-film part in which a plurality of patterned resistor films are sandwiched between a pair of insulator films. The resistance ratios among the resistor...
|
|
|
6698282 |
Heated type air flow rate sensor and its forming method
The object of this invention is to provide a heated type air flow rate sensor for measuring an air flow rate using heat generating resistive element or resistor formed within a diaphragm of which...
|
|
|
6698283 |
Thin film sensor, method of manufacturing thin film sensor, and flow sensor
A flow sensor includes a substrate in which a cavity is formed. A thin film structure is located above the cavity. The thin film structure includes a patterned multilayer film. A dummy film layer...
|
|
|
6688170 |
Sensor for measuring flow velocity in gases and method for the production thereof
A sensor for measuring the flow velocity of gases. The sensor includes a printed circuit board ( 1 ) having an opening ( 2 ) formed therein. A pair of first contact elements are disposed on...
|
|
|
6684694 |
Flow sensor, method of manufacturing the same and fuel cell system
In a flow sensor, a heater is provided in the middle of an insulation thin film stretched above a gap on a substrate. Temperature measuring elements, which in some embodiments are thermopiles, are...
|
|
|
6684693 |
Heat generation type flow sensor
A heat generation type flow sensor of an enhanced output sensitivity which is destined for use, for example, as an air flow sensor employed in an engine control system of a motor vehicle. The heat...
|
|
|
6684695 |
Mass flow sensor utilizing a resistance bridge
A mass flow sensor to be mounted within a duct and measures the mass flow of a fluid stream moving through the duct. The sensor is an elongated thin quartz substrate having a plurality of platinum...
|
|
|
6679114 |
Thermosensitive flow rate sensor
A thermosensitive flow rate sensor includes a detecting element, in which a heating element and a fluid temperature detector are formed so as to be separated from each other on a surface of a flat...
|
|
|
6679113 |
Flow rate sensor having a terminal protecting wall
A frame-shaped peripheral wall member is disposed on a holder so as to surround an electrical connection portion between a terminal and a flow rate detecting element, a bottom surface of the...
|
|
|
6675644 |
Thermo-sensitive flow rate sensor
A thermo-sensitive flow rate sensor that comprises a plate-like substrate, a part of which is removed so that a space is provided therein, a diaphragm portion formed like a thin layer above the...
|
|
|
6670582 |
Micro-thermocouple for a mass flow meter
Construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, includes of the following steps: depositing an insulating layer...
|
|
|
6666082 |
Thermal airflow sensor
A thermal airflow sensor is made highly resistant to thermal stresses due to cold-heat cycles, highly reliable even in the presence of corrosive gases, and capable of low dispersion of output...
|
|
|
6662121 |
Thermal fluid sensor, fluid discriminating apparatus and method, flow sensor, and flow rate measuring apparatus and method
When a micro-heater heats fluid using an external driving current, an upstream thermopile 8 detects the temperature of the fluid before it is heated to produce a first temperature detected signal...
|
|
|
6647779 |
Temperature sensing resistance element and thermal flow sensor using same
A temperature sensing resistance element includes a substrate made of an insulating material, a temperature sensing resistor formed on at least a part of the outer peripheral surface of the...
|
|
|
6647778 |
Integrated microtube sensing device
A sensing device that comprises a micromachined tube on a substrate for resonant sensing of mass flow and density of a fluid flowing through the tube. The sensing device further incorporates on the...
|
|
|
6647777 |
Flow rate sensor, flow meter, and discharge rate control apparatus for liquid discharge machines
A pipe line for fluid to be detected is formed so that heat from a flow rate detector in which a thin-film heating element and a thin-film temperature sensing element are laminated on a first...
|
|
|
6644113 |
Flow-rate detecting device for heat-sensitive type flow sensor
A flow-rate detecting device for a heat-sensitive type flow sensor having high reliability. The device includes a planar substrate having first and second through-holes formed therein in...
|
|
|
6631638 |
Fluid flow sensor
A flow sensor for determining the velocity and direction of a fluid flow including a substrate, a heat source located on the substrate, and a first and a second heat sensor located on the substrate...
|
|
|
6629456 |
Thermal flowmeter for detecting rate and direction of fluid flow
A flowmeter includes a heating resistor and a resistive element for detecting the temperature of the heating resistor. The heating resistor is controlled so that the temperature detected by the...
|
|
|
6626037 |
Thermal flow sensor having improved sensing range
A flow sensor, which can detect flow velocity in a wide range including high flow velocity area with simple structure. A flow sensor includes a substrate having a hollow portion; and a thin film...
|
|
|
6615655 |
Heat-sensitive type flow rate detecting element and holder therefor
A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer...
|
|
|
6595050 |
Wire bonded sensor and method for manufacturing wire bonded sensor
A sensor includes a first insulating layer, a second insulating layer having an opening, a plurality of metal wirings, and a plurality of electrodes. Each metal wiring has a contacting area. Each...
|
|
|
6588268 |
Flow rate sensor, temperature sensor and flow rate detecting apparatus
A flow rate sensor for performing a flow rate detection of fluid with high accuracy without suffering adverse effect of the environmental temperature condition even when the fluid is viscous fluid...
|
|
|
6579740 |
Method of making a thin film sensor
In a thin-film infrared sensor, (100)-oriented semiconductor substrate is used for the sensor fabrication. A surface of the substrate is partially masked to provide an unmasked section where a...
|
|
|
6557411 |
Heating element type mass air flow sensor, and internal combustion engine-control apparatus using the sensor
A heating element type mass flow sensor has a composition such that a heating resistor is located substantially in a straight line in the direction perpendicular to the air flow direction; at least...
|
|
|
6553829 |
Air flow sensor having grooved sensor element
Grooves into which an adhesive agent is poured are formed on the adhesion face of a sensor element, the adhesion face being adhered to a surface of a sensor-supporting member, which in turn can...
|
|
|
6550325 |
Electric device and method of driving the same
A thermistor layer made of platinum is formed on a thin diamond film. An amount of heat carried away from the diamond film by a fluid is detected as a change in the temperature of the thermistor...
|
|
|
6536274 |
Flow velocity detector
A flow velocity detector, wherein an upstream side temperature sensor ( 3 U 1 ) and a downstream side temperature sensor ( 3 D 1 ) are disposed on both sides of a heater ( 2 - 1 ) with the recessed...
|
|
|
6531859 |
Electronic arrangement for an electric component and as a support for sensors
The invention relates to an electrode arrangement for an electronic component, also acting as a support for sensors. Said electrode arrangement is mounted on a substrate ( 1 ) as a suitably...
|
|
|
6526823 |
Microelectromechanical system sensor assembly
A sensor assembly has a substrate with a microchannel formed therein through which a fluid can flow. At least one sensor is proximate to the microchannel. The temperature of the at least one sensor...
|
|
|
6527835 |
Chemical preconcentrator with integral thermal flow sensor
A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either...
|
|
|
6523403 |
Mass flow sensor
A mass flow sensor is described. To improve the membrane stability of the known mass flow sensor and to increase the thermal conductivity of a membrane having a greater mechanical stability, in...
|
|
|
6520010 |
System and methods for characterizing a liquid
A system for characterizing a liquid comprises a sensor for providing an electrical output signal depending on a characteristic of the liquid, and a processing unit for processing the output signal...
|
|
|
6516785 |
Air flow sensor
In a thermal air flow sensor, an air flow measuring element and an intake air temperature sensing element of an intake air temperature sensor are mounted on a single support member so as to be...
|
|
|
6508117 |
Thermally balanced mass air flow sensor
A bi-directional mass air flow sensing device for measuring air flow, comprising a bridge circuit coupled across a voltage potential, wherein the bridge circuit comprises a first side including...
|
|
|
6494090 |
Air-mass sensor
An air-mass sensor having an air mass sensor module provided with two temperature sensors ( 6, 7 ) and two heat sensors ( 4, 5 ) which are incorporated into two separately acting bridges (I, II)...
|
|
|
6474155 |
Constant-temperature-difference flow sensor
An integrated sensor for automated systems includes a flow sensor, a temperature sensor, and a network interface. In a particular embodiment of the invention, the flow sensor includes a temperature...
|
|
|
6470742 |
Flow sensor
To obtain a flow sensor having excellent responsibility, sensitivity and reliability and high flow detection accuracy by suppressing the deformation of a diaphragm, first additional patterns are...
|