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7228735 |
Fluid sensing device with integrated bypass and process therefor
A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a...
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7219544 |
Thermal-type flow rate sensor and manufacturing method thereof
In a thermal-type flow rate sensor, a mold material is formed to integrally cover a predetermined range including a circuit chip, connecting parts of connecting wires with a flow rate detecting...
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7211873 |
Sensor device having thin membrane and method of manufacturing the same
A sensor device for use in an automobile as an airflow sensor is composed of a silicon substrate in which a cavity is formed and a base plate bonded to the silicon substrate. An upper end of the...
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7204139 |
Analytical chip, analytical-chip unit, and analysis apparatus
An analytical chip is provided with a flow channel ( 5 ), whose section is in a closed shape and through which a fluid sample (Fs) is made to flow, for carrying out analysis regarding the fluid...
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7201048 |
Measuring device for a flow sensor, in particular an air mass sensor for internal combustion engines and method for measuring air flows
A measuring device for a flow sensor is provided, in which the drift is minimized.
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7194920 |
Sensor probe and pipeline construction and method
A sensor and carrier device are provided in combination with a pipeline for either placing a sensor element within the flow stream of the pipeline or a device to divert flow outside of the pipeline...
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7188519 |
Device and method for measuring the flow and at least one material parameter of a fluid
For measuring the flow and the thermal conductivity of a fluid, a sensor is used, which has a first temperature detector for measuring a first temperature and a second temperature detector for...
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7181962 |
Thermal flow sensor
A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity ( 7 ) formed in a semiconductor substrate ( 2 ), at least a heating resistance ( 4 ) is formed...
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7181963 |
Thermal flow sensor having streamlined packaging
A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second...
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7150189 |
Thermal-process-type air-flow-rate sensor
A sensor element ( 10 ) and sensor supporting body ( 30 ) are fixed on a jig ( 80 ) by adhesive ( 48 ) so that a surface ( 10 A) of the sensor element ( 10 ) and a surface ( 30 A) of the sensor...
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7137298 |
Thermal air flowmeter
A thermal air flowmeter which improves air flow rate measurement sensitivity, reduces power consumption of a heating element and broadens the measuring range. A heating resistor is provided on...
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7107835 |
Thermal mass flow sensor
A thermal mass flow sensor is disclosed that includes a housing ( 16 ) having a first sensor region and a second sensor region, a first thin film temperature sensor ( 39 ) formed at the first...
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7104126 |
Thermal type flow rate measuring apparatus
A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the...
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7096729 |
Disposable fluid flow sensor
A disposable fluid flow sensor is disclosed herein, which generally includes a flow channel assembly comprising a flow channel tube in association with a disposable flow channel portion. A sensor...
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7095064 |
Semiconductor sensor with pressure difference adjusting means
In a semiconductor sensor having a membrane structure, the destruction of the membrane caused by the expansion or contraction of a fluid within a hollow part formed under the membrane while the...
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7077002 |
Method and an apparatus for measuring flow rates
A device for measuring the flow rate of a fluid confined by a wall member, and wherein the device comprises contacting apparatus for contacting the wall member, the contacting apparatus being...
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7069779 |
Thermal flow sensor having an inverted substrate
A thermal flow sensor has a first substrate, second substrate and a third substrate, each of which has a first side and a second opposite side. The first substrate is connected to the second...
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7059186 |
Integrated flow sensor for measuring a fluid flow
An integrated flow sensor for determining a fluid flow is described. It has a first function layer and a second function layer which is applied to the first function layer and is electrically...
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7051418 |
Method of measuring weak gas flows
Firstly, a supporting frame is produced, whose opening is spanned by an auxiliary layer flush on one side. Following the production of microstructures, flat parts or membranes on the common plane...
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7049556 |
Heating device
A heating device at least having an electrically insulating film formed on a surface of a substrate, a heating member formed on the electrically insulating film, and a protection film formed over...
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7040160 |
Flow sensor
A flow sensor is described, in particular for analysis of gas flows, having a substrate and at least one sensor component which is sensitive to a flow of a medium, the sensor component being...
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7036369 |
Thermal flow sensor having recesses in a substrate
A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second...
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7021136 |
Mass flow meter with symmetrical sensors
A mass flow meter employs discrete chip-type temperature sensors to sense a fluid flow rate. The sensor can be a semiconductor chip such as SiC or silicon, or thin film tungsten on an AlN...
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7010971 |
Heating resistor type flow-measuring device having a heating resistor and a thermoresistance, whose resistance value varies in response to the ambient temperature
A heating resistor type flow-measuring device is capable of adjusting heating temperature of a heating resistor according to the ambient temperature as well as making the initial adjustment. A...
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7010423 |
Method for operating an internal combustion engine
A method and a control unit for operating an internal combustion engine of a motor vehicle are provided, in particular for controlling/regulating the internal combustion engine as a function of an...
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6988399 |
Physical quantity detecting device having second lead conductors connected to the electrodes and extending to the circumference of the substrate
It is an object of the present invention to provide a simple-structure physical quantity detecting device whose resistance does not vary irrespective of use for long periods, a method for...
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6983653 |
Flow sensor having thin film portion and method for manufacturing the same
A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of...
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6981410 |
Flow sensor and method of manufacturing the same
A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a...
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6981411 |
Measuring element for a flow rate sensor, in particular an air-mass flowsensor for internal combustion engines
A measuring element for a flow rate sensor is described, in which the number of terminals is minimized to reduce the dimensions of the measuring element.
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6971266 |
Thermosensitive flow rate detecting element and method for the manufacture thereof
Cavities are formed so as to extend from a rear surface side of a base material to a protective film, an electrically-insulating film is formed on a rear surface of the base material, wall surfaces...
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6945106 |
Mass flowmeter
A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein...
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6945107 |
Flow rate detection device and method for manufacturing the same
A flow rate detection device has a flow rate detection chip that is partially exposed to the flowing material to be measured and a casing that accommodates the flow rate detection chip. The casing...
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6938474 |
Sensing device and method for measuring features in a fluid
A method and a device for measuring features in a fluid such as pressure, flow rate, and temperature measurements is disclosed. The sensing device includes at least two sensing elements, all of...
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6923053 |
Gas flowmeter and manufacturing method thereof
A gas flowmeter capable of reducing a secular change comprises a silicon semiconductor substrate formed with a cavity and a heat element formed above the cavity of the semiconductor substrate by...
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6912899 |
Flow rate sensor having a holder supported as a cantilever
An electrical connection portion between a flow rate detecting element and a circuit board is constructed on a portion of a holder positioned inside a holder insertion aperture. The holder is...
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6901794 |
Multiple technology flow sensor
A flow sensor includes sensors connected to a flexible membrane. The sensors detect ambient temperature, pressure, and flow rate of a medium. A method of sensing flow rate includes providing the...
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6898969 |
Flow sensor element and method of using same
A flow sensor element is provided having at least one temperature-measuring element and at least one heating element each having at least one platinum thin film resistor, the at least one...
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6889545 |
Flow rate sensor
A flow rate sensor detects the flow rate in a pulsating condition including a large amount of the reverse flow. Upstream temperature sensors and downstream temperature sensors are formed in both...
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6883370 |
Mass flow meter with chip-type sensors
A mass flow meter employs discrete chip-type temperature sensors to sense a fluid flow rate. The sensor can be a semiconductor chip such as SiC or silicon, or thin film tungsten on an AlN...
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6871536 |
Temperature averaging fluid flow measuring apparatus
A fluid flow measuring method and apparatus with high sensitivity, quick response, and a wide dynamic range measures the flow of a fluid based on a difference in radiation of heat at an upstream...
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6871537 |
Liquid flow sensor thermal interface methods and systems
A sensor method and system are disclosed. A fluid flow sensor can be provided, which measures the thermal conductivity of a fluid. The sensor itself can be configured to comprise one or more...
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6871538 |
Flow sensor and flow rate measuring method
A flow sensor and a flow rate measuring method are disclosed, in which an error caused by dust attached to the flow sensor is accurately corrected taking advantage of the fact that the output...
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6862930 |
Fluid flow amount measuring apparatus responsive to fluid flow in forward and reverse directions
In a thermal-type air flow measuring apparatus, a heater is set to a reference temperature which is a predetermined temperature higher than an intake air temperature detector. A flow amount...
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6854326 |
Measurement apparatus for measuring physical quantity such as fluid flow
Resin members, on the surfaces of which metal films are formed, are used for; an auxiliary air passage provided in a main air passage, in which a sensor element of a physical quantity sensor such...
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6851311 |
Thermal-type flow meter with bypass passage
A flow measurement sensor accurately outputs signals even when pulsation flow is generated at high engine speed and also when pulsation flow accompanying reverse flow is generated. The flow...
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6840102 |
Flow amount measuring apparatus
The flow amount measuring apparatus has two detecting portions for generating signal indicative of flow amount respectively. The outputs of two detecting portions are subject to a differential...
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6820481 |
Mass flow sensor having an improved membrane stability
A mass flow sensor is described. To improve the membrane stability of the known mass flow sensor, in particular the reoxide layer which is present in the known mass flow sensor is replaced by a...
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6820479 |
Device for determining at least one parameter of a flowing medium
A device includes a sensor carrier, on which is arranged a sensor element introduced into the flowing medium. The sensor carrier is produced separately, and the at least one sensor element may be...
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6820482 |
Method and device for determining gas flow
A gas flow determination method and a corresponding gas flow determination device. A sensor device including a diaphragm and a frame enclosing it is provided; a predetermined temperature profile is...
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6813944 |
Flow sensor
The flow sensor comprises a semiconductor device ( 1 ) on which a heat source and, symmetrically thereto, two temperature sensors are arranged. The semiconductor device ( 1 ) is arranged on an...
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