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8174352 |
Method for making a transducer, transducer made therefrom, and applications thereof
A method for manufacturing or preparing thin-film stacks that exhibit moderate, finite, stress-dependent resistance and which can be incorporated into a transduction mechanism that enables simple,...
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8166814 |
Flow sensor and manufacturing method therefor
A flow sensor may be formed by bonding a sensor chip formed with a flow rate detecting part and a flow path-forming member that is provided on the sensor chip and is formed with a flow path for a...
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8161811 |
Flow sensors having nanoscale coating for corrosion resistance
A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate...
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8143689 |
Sensor device
A sensor device for sensing air flow speed at the exterior of an aircraft, comprising a substrate having an upper side on which is mounted a diaphragm over an aperture or recess in the substrate,...
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8132455 |
Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane
A micromachined thermal mass flow sensor comprises a high mechanical strength polyimide film as a supporting layer of suspending membrane. The polyimide film provides superior thermal insulating...
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8069718 |
Thermal flowmeter
A simply configured thermal flowmeter can provide high measurement accuracy over a long period of time by suppressing the characteristics degradation due to adhering contaminants. On the surface of...
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8011240 |
Flow sensor with thermocouples
The flow sensor comprises a heater arranged between two sensing thermopiles. In addition, at least one monitoring thermocouple is provided for measuring the temperature of the heater. The signal...
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8006553 |
Semiconductor sensor having heater on insulation film and manufacturing method of the same
A sensor includes: a silicon substrate having a hollow portion, which is arranged on a backside of the substrate; an insulation film disposed on a front side of the substrate and covering the...
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7992435 |
Air flow meter
In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm...
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7980126 |
Method for operating hot-film air-mass sensors
A method is provided for operating a hot-film air-mass sensor, which can be used especially for measuring air mass flows in the intake tract of an internal combustion engine. The hot-film air-mass...
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7966877 |
Heated hot-film air-mass sensor
To determine air mass flows, especially for controlling internal combustion engines, a hot-film air-mass sensor is provided, which may be used especially for sensing air mass flows in the intake...
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7963162 |
300° C flow sensor
A measurement device, particularly an anemometric measurement device, is provided for mounting in an exhaust-gas pipe, particularly an exhaust-gas recirculation pipe. The device includes a ceramic...
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7963161 |
Heating resistor type air flow rate measuring device utilizing an auxiliary passage
An object of the present invention is to provide a structure which prevents a particulate contaminant and a liquid contaminant on which centrifugal separation hardly works, from arriving at a...
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7962576 |
Quantity conversion interface for external program calls
The application is directed to methods, systems, procedures, networks and storage apparatus used to conduct conversions of data using remote conversion servers. In one embodiment of the present...
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7954373 |
Thermal type flow meter
There is provided a thermal type flow meter capable of accurately detecting a flow rate even when a fluid temperature varies rapidly or when the fluid temperature is high. A probe includes: a first...
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7942053 |
Air flow measuring instrument having dust particle diverting structure
An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for...
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7905140 |
Device with flow sensor for handling fluids
A channel substrate containing at least one channel for a fluid is provided. A sensor substrate carrying a thermal flow sensor is arranged adjacent to the channel substrate. The flow sensor...
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7892488 |
Thermal liquid flow sensor and method of forming same
A thermal liquid flow sensor and method of forming same. The sensor has a substrate and one or more sensing elements, disposed on the substrate, for sensing a property of a liquid. The liquid flow...
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7886594 |
Thermal type fluid flow sensor with metal film resistor
A thermal-type fluid flow sensor is provided to measure an air flow rate flowing through an air intake passage. The thermal-type fluid flow sensor includes a heating resistive element; a first...
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7878056 |
Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same
The current invention generally relates to Micro Electro Mechanical Systems (MEMS) thermal mass flow sensors for measuring the flow rate of a flowing fluid (gas/liquid) and the methods of...
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7861586 |
Hot-film air mass meter having frequency-modulated signal detection
A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are...
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7823444 |
Device and process for measuring the velocity of flow of a fluid using pulse signal generated based on feedback
A device is provided for measuring the velocity of flow of a fluid in a respiration system and includes a first thermal sensor element (5) provided with a controllable heating element (50) and a...
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7823445 |
System and method of assessing a property of a flowing fluid
A fluid sensing system and method for sensing properties of a flowing fluid. The system and method entail a microfluidic device having a micromachined tube supported above a substrate, a tube...
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7797997 |
Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor
This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a...
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7793410 |
Method of making a plurality of flow sensors
A method of making a plurality of flow sensors is provided, each flow sensor having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses...
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7775104 |
Thermal flowmeter in which relationship among length of heat resistor, heating temperature for the heat resistor, and power supplied to the heat resistor is prescribed
To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined...
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7765865 |
Flow sensor unit including an insulating member interposed between the sensor chip and the attachment plate
A flow sensor may be formed of a sensor chip in which a flow rate detecting section is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper...
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7765679 |
Method of manufacturing a flow rate sensor
A mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or lightly doped P-type silicon substrate with orientation <100>. This mass flow sensor comprises a...
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7752910 |
Micromachined mass flow sensor and methods of making the same
A mass flow sensor is supported on an N or P-type silicon substrate with orientation <100>. This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements,...
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7739908 |
Flow sensor element and its self-cleaning
A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and...
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7721599 |
Reduced resistance thermal flow measurement device
Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present...
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7703320 |
Flow measuring device having resistors arranged in nesting arrangement
According to a flow measuring device, first ranges formed by a first plurality of resistors form a single continuous value range on a flow direction coordinate axis. Thus, the first plurality of...
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7698938 |
Flowmeter having a bent inlet passage for constant flow-velocity distribution
To provide a flowmeter producing stable measurement results and coincidentally achieving miniaturization, a bent portion is provided in a flow path located between an inlet port of fluids to the...
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7677097 |
Heating resistor-type gas flowmeter
In a gas flowmeter in which a rod and a sensor element are formed as a single body, for preventing heat of the sensor element from flowing into a sensor probe through a substrate (rod) so as to...
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7673508 |
Thermal type fluid flow sensor
A thermal-type fluid flow sensor technology for measuring more precisely the temperature of the heater for an improved sensibility of detecting flow measurements. The thermal-type fluid flow sensor...
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7661304 |
Heated H2 sensor
A method and a sensor for detecting a component, in particular H2, in a gaseous fluid containing multiple components. A measuring chamber, which accommodates a heatable measuring element, is...
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7652586 |
Early fouling detection
According to one embodiment, a first capacitive element may be provided and associated with a surface where a fouling layer is to be detected. A second capacitive element may also be provided, and...
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7650784 |
Thermal type flow rate measuring apparatus
A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the...
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7647825 |
Thermal type flowmeter
In the thermal type flowmeter for measuring the flow rate by a measuring element with an exothermic resistor and a temperature measuring resistor being shaped in the side of the surface of a...
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7644614 |
Flow quantity measuring device
In a flow quantity measuring device, each of upstream side and downstream side sensing resistors, which are placed on an upstream side and a downstream side, respectively, of a heating resistor,...
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7644613 |
Flow detector device with self check
A thermal flow sensor is equipped with a self-test unit that monitors the device and generates a fault signal in the presence of a malfunction. The self-test unit can e.g. monitor the integrity of...
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7640798 |
Semiconductor device for detecting flow rate of fluid
A semiconductor device includes: a semiconductor substrate; a flow sensor having a first heater for detecting a flow rate of fluid; and a humidity sensor for detecting a humidity of the fluid. The...
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7635091 |
Humidity sensor formed on a ceramic substrate in association with heating components
A humidity sensor system and method include a ceramic substrate upon which a heater can be printed. A humidity sensor can be mounted above and in contact with the heater, or the heater can be...
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7631555 |
Thermal flowmeter for measuring a flow rate of fluid
A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter includes a temperature sensor disposed in a casing of the air...
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7624633 |
Fluid flow sensor and fluid flow measurement device
A thermal-type fluid flow sensor comprises a heating resistor formed on a thin film of a substrate, and plural thermal sensitive resistors configuring a bridge circuit. The thermal sensitive...
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7621180 |
Flow sensor with metal film resistor
There is a need for providing a flow sensor with metal film resistor that improves detection sensitivity using a metal film for a resistance heat detector and a resistance temperature detector. The...
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7617723 |
Thermal type flow rate measuring apparatus having decrease in coupling capacitance between wiring portions of detection element
The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the...
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7603898 |
MEMS structure for flow sensor
A MEMS based flow sensor is disclosed which generally incorporate isolation between a sensing structure and the sensed media. An internal flow channel can be configured by attaching a backing...
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7574910 |
Non-contact condensation detecting method and non-contact condensation detecting apparatus
A disclosed detector element includes a substrate including a void, a heating unit including a heat generating electrode bridged across the void, and a temperature sensor including a temperature...
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7568399 |
Microfluidic device
A microfluidic device a micromachined freestanding member adapted to sense one or more properties of a fluid flowing through the freestanding member. The freestanding member is supported by a...
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