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5789666 |
Resonant sensor for determining multiple physical values
The invention relates to a resonant sensor with a vibrating body (10) for the determination of at least two physical values characterised by the fact that the vibrating body (10) has at least two...
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5780727 |
Electromechanical transducer
A field effect transistor and a piezoelectric sensor are positioned between layers of silicon and aluminum to function as a bimetallic electromechanical transducer. The transducer can be used in...
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5780726 |
Method of determining slope angles of impression walls and depths of impressions on an embossed sheet surface
An embossed cold rolled metal (e.g. steel) sheet for use in manufacturing appliances and method of making same wherein the surface attributes of the embossed sheet are optimized to improve...
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5772325 |
Apparatus for providing surface images and method for making the apparatus
A probe (10) is formed to provide a topographical and thermal image of a semiconductor device. The probe (10) is made from a first ribbon of material (11) and a second ribbon of material (12) which...
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5773714 |
Scanner beam dynamic deflection measurement system and method
In a scanner used in a paper-making process to measure basis weight and other parameters of the fabricated paper sheet, variations in the separation of an opposed pair of sensing heads due to...
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5773824 |
Method for improving measurement accuracy using active lateral scanning control of a probe
A scanning probe microscope includes probe moved into and out of engagement with a sample surface by a combination of deflections occurring within a fast actuator, having a relatively small range...
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5763767 |
Atomic force microscope employing beam-tracking
A scanning probe microscope such as an atomic force microscope for measuring a feature of a sample surface with a sharp probe over an area of interest by means of a collimated light beam reflected...
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5763768 |
Analytical method using modified scanning probes
The present invention provides a method of analyzing for a specific material in a sample using a sensor including a resonating member having resonating properties. The resonating member has a probe...
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5763879 |
Diamond probe tip
A probe for electrical contact with a metal layer of an integrated circuit wherein the probe features a polycrystalline diamond layer coating a fine conductive wire. The diamond coating has exposed...
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5760300 |
Scanning probe microscope
A probing apparatus having an elastic body supported by a support and provided with a probe at its free end. The elastic body is disposed in a solution in which a sample is held. The elastic body...
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5756886 |
Touch probe with reseat position system
A touch probe which includes a fixed member, a movable member, a stylus, a bias means, and a reseat position system which permits the fixed member and the movable member to make contact with each...
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5756887 |
Mechanism for changing a probe balance beam in a scanning probe microscope
A scanning probe microscope equipped with a mechanism for exchanging a probe balance beam from the scan head, wherein the probe balance beam is of the type which is magnetically constrained on the...
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5753912 |
Cantilever chip
A cantilever chip comprises a support section having a support face and an attachment face opposed to the support face, a cantilever supported on the support face of the support section, and a...
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5753814 |
Magnetically-oscillated probe microscope for operation in liquids
In accordance with a first aspect of the present invention, the sensitivity of a magnetically modulated AC-AFM is substantially improved by the use of a ferrite-core solenoid for modulating the...
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5747676 |
Method and device for determining the surface contour in an elastic seat cushion deformable for under load
A method and a device for determining the surface contour of an elastic seat cushion deformable under load are provided. Through the use of a measuring mat placed on the seat cushion, after the...
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5744704 |
Apparatus for imaging liquid and dielectric materials with scanning polarization force microscopy
The invention images dielectric polarization forces on surfaces induced by a charged scanning force microscope (SFM) probe tip. On insulators, the major contribution to the surface polarizability...
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5739425 |
Cantilever with integrated deflection sensor
A cantilever for scanning probe microscopy and other force or deflection measurements is described. The cantilever includes at least one one integrated strain sensing element within a constriction...
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5729015 |
Position control system for scanning probe microscope
A position control system for a scanning probe microscope which performs calculations so that the natural resonant frequency of a piezoelectric element may be as flat as possible, and then controls...
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5726705 |
Surface defect inspection apparatus
A surface defect inspection apparatus a lighting unit shaped in an arched form laid across the path of movement of an object under inspection for illuminating its surface. A light diffusion sheet...
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5726350 |
Contour measuring apparatus with a stylus
A detecting device for detecting fluctuation of an arm, to which a stylus is attached, comprises a linear guide installed to an arm supporting member and for guiding vertical or horizontal linear...
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5723774 |
Profilometry scanner mechanism
A mechanism (10) for scanning the contour of a tri-dimensional body (R) including control circuitry (120) for processing and storing the pattern data obtained. The contour pattern is measured by...
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5723775 |
Atomic force microscope under high speed feedback control
An object of the invention is to enable high-speed feedback control by decreasing the mass of a cantilever including an axial driving actuator and eliminate drawbacks caused by the decrease in...
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5717132 |
Cantilever and process for fabricating it
A probe formed in a flexible portion of a cantilever is protected by a protection frame. This protection frame is separated from a support portion at a border of a groove between the protection...
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5705741 |
Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation
A profilometer has a constant force mechanism for biasing of the stylus arm. The mechanism has a centrally-aligned configuration of the moving magnet relative to the magnetic coil and also has a...
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5700953 |
Method for mapping mechanical property of a material using a scanning force microscope
The method for mapping a mechanical property of a surface of a sample with a scanning force microscope comprises the steps of (a) scanning a fine tip in contact with the surface of the sample...
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5698798 |
Method and apparatus for dynamic observation of specimen
In a measuring method and a measuring apparatus which are suited for observing a dynamic physical phenomenon particularly in a microdevice, a signal for generating a physical phenomenon in a...
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5691467 |
Method for mapping surfaces adapted for receiving electrical components
A method for mapping a surface adapted for receiving electrical components comprising the steps or providing a probe having a plurality of contacts, moving the probe toward the surface at a...
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5689063 |
Atomic force microscope using cantilever attached to optical microscope
Without necessitating complicated operations, an image of a low to medium magnification and an image of a high magnification are efficiently observed by an optical microscope and by an atomic force...
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5689064 |
Glide head assembly and method therefor
A glide head assembly is associated with a support structure for use with a system for testing a moving surface to detect a presence of asperities thereon. This system includes signal processing...
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5681987 |
Resonance contact scanning force microscope
The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is...
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5679889 |
Method for extracting electrode and cantilever for AFM using said method for extracting electrode
A method for extracting electrodes, comprises the steps of forming an electrode of a dielectric thin film on a first substrate member, forming a small projection on a second substrate member,...
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5679888 |
Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor
The dynamic quantity sensor includes an electrically insulating substance layer and at least one pair of electrodes contacting the electrically insulating substance layer, wherein a plurality of...
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5675075 |
Acoustic microscope
An acoustic microscope allowing both the topography and the elasticity of a sample to be measured at the same time. To this end the displacement of a cantilever with a tip is measured by the...
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5672816 |
Large stage system for scanning probe microscopes and other instruments
A large scale horizontal translation stage for a microscope or other instrument particularly a scanning probe microscope is disclosed. The translation stage is provided with air bearings which...
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5665253 |
Method of manufacturing single-wafer tunneling sensor
A tunneling tip sensor and a method of photolithographically fabricating a unitary structure sensor on a semiconductor substrate are disclosed. A cantilever electrode is formed on the substrate...
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5656769 |
Scanning probe microscope
An apparatus includes an X-direction piezoelectric driving member expandable in the X direction upon application of a voltage, and a Y-direction piezoelectric driving member expandable in the Y...
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5654546 |
Variable temperature scanning probe microscope based on a peltier device
A compact Peltier Device is used to heat or cool a small sample stage of a scanning probe (AFM or STM) microscope. The entire heating/cooling system may fit onto a small platen which may be...
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5652377 |
Scanning method with scanning probe microscope
A scanning method with a scanning probe microscope, wherein the scan time and the timing of data measurement are optimized on the basis of transient characteristics of vibration of the cantilever,...
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5652428 |
Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere
A method of use of a scanning probe microscope includes the step of mounting a probe to a scanning probe microscope in ambient atmosphere, the step of drawing on a surface of a standard sample by...
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5646339 |
Force microscope and method for measuring atomic forces in multiple directions
A sensor (100) is set forth with which a microscope based on atomic forces is constructed and which represents the forces in up to three components. The sensor (100) is designed such that different...
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5644512 |
High precision calibration and feature measurement system for a scanning probe microscope
The present invention allows for calibration of a scanning probe microscope under computer control. The present invention comprehends either the removal of nonlinear artifacts in the microscope...
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5641896 |
Coupled oscillator scanning imager
A scanning probe microscope, in particular for near-field scanning optical, friction force and atomic force microscopy, comprises a tip piece attached to an oscillator of piezoelectric material....
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5642289 |
Drum lead measuring method and apparatus capable of precisely evaluating lead shape
Any shape lead formed on various types of drum may be measured without employing an exclusively-used profiling plane by a lead shape measuring apparatus. The lead shape measuring apparatus includes...
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5641897 |
Scanning apparatus linearization and calibration system
The scanning apparatus linearization and calibration system includes an electromechanical scanner having a sample stage portion, and a deflecting member, mounted between the scanning means and a...
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5640089 |
Method and apparatus for surface roughness detection - using a magnetoresistive element
A magnetoresistive element is used to detect a surface roughness of an object, such as a magnetic recording medium, a photomask blank, a semiconductor wafer, and is assembled into a reproducing...
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5633455 |
Method of detecting particles of semiconductor wafers
A device for detecting the presence of particles and irregularities on the surface of a semiconductor wafer or other substrate includes a plurality of cantilevers formed on a semiconductor...
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5631410 |
Vibrating probe atomic force microscope
An atomic force microscope capable of vibrating a cantilever at a constant amplitude at all times. Variations in the vibration of the cantilever are sensed by detecting the variation in the...
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5627365 |
Scanning near-field optic/atomic force microscope in which imaging light is controlled in relation to a vibrating position of an optical fiber probe
A radiated light of a light source for optical characteristic measurement is amplitude modulated by an optical modulator and directed into a light-propagating probe. A phase and intermittent rate...
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5621210 |
Microscope for force and tunneling microscopy in liquids
An instrument for carrying out both scanning tunneling microscopy and atomic force microscopy on the same sample under liquid. A microscope body with a magnetically-suspended sample platen permits...
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5616853 |
Measuring machine for measuring object
A machine for measuring objects includes a piston that is hydrostatically supported in a cylinder. A rod projects from the piston and an injection nozzle is attached to the tip of the rod. A...
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