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6073485 |
Scanning microscope for image topography and surface potential
There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential...
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6073484 |
Microfabricated torsional cantilevers for sensitive force detection
A torsional cantilever is microfabricated for reduced size to increase its resonance frequency, increase its scanning speed, and permit fabrication of large numbers in an array to provide parallel...
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6073486 |
Piezoelectric glide head
A glide head for detecting anomalies on a flat surface of a recording disk includes a slider having a sensing edge extending generally radially of the disk and a piezoelectric transducer element...
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6071007 |
Thermal asperity detection head
An apparatus for detecting surface variations on a rotating disc includes a slider, suspension assembly, first surface variation sensor, second surface variation sensor, and a controller. The...
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6062948 |
Apparatus and method for gauging a workpiece
A gauging apparatus for use with a grinding machine performs dimensional measurements during machining of a workpiece. The gauging apparatus has a sensor head with a single sensor for performing...
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6064060 |
Near-field scanning optical microscope
A near-field scanning microscope is constructed so that a probe is brought close to a specimen and is relatively moved with respect to the surface of said specimen to scan a region proximate to the...
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6050722 |
Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors
A non-contact infrared thermometer measures target temperatures remotely without requiring the ratio of the target size to the target distance to the thermometer. A collection means collects and...
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6051833 |
Probe scanning device
A spindle scans a scanner unit comprising a slender tube portion, a thick tube portion and the like in x and y directions by receiving power from a movable member of a voice coil motor. A...
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6038916 |
Method and apparatus for measuring energy dissipation by a probe during operation of an atomic force microscope
A method and apparatus are provided for measuring energy dissipation during oscillatory operation of an atomic force microscope (AFM). Interaction between the AFM's probe and another medium of...
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6032518 |
Scanning stylus atomic force microscope with cantilever tracking and optical access
A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical...
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6026678 |
Surface finish, displacement and contour scanner
A surface finish, displacement and contour scanner comprising an arm with a stylus pivotally attached to a housing, and a transducer with a blade attached to the arm and an E-shaped ferrite core...
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6026677 |
Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
A force, weight or position sensor unit and sensor element incorporated into an apparatus for microindentation hardness testing and surface imaging which allows immediate imaging of the surface...
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6026676 |
Method of determining a glide avalanche break point of a magnetic recording medium
A glide head with mounted PZT sensor is used to obtain a glide avalanche curve. The glide head is subsequently gradually decreased until the signal is extremely high. First, at least one resonance...
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6021665 |
Cantilever tracking type scanning probe microscope
A scanning probe microscope including a scanner having a moving end movable in three-dimensional directions, a cantilever removably attached to the moving end, a displacement sensor including a...
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6021666 |
Determining a close point for glide heads
A method of determining the close point for a glide head includes measuring the fly height of at least three positions remove from the selected close point position. The three selected positions...
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6018991 |
Scanning probe microscope having cantilever attached to driving member
An apparatus includes an X-direction piezoelectric driving member expandable in the X direction upon application of a voltage, and a Y-direction piezoelectric driving member expandable in the Y...
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6016692 |
Glide test slider having electrically isolated piezoelectric crystal for improved noise suppression
A high resolution, low noise glide height test slider is provided to detect irregularities on a surface of a rotatable disc. A slider body is arranged to be supported by a support structure in...
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6016693 |
Microfabrication of cantilevers using sacrificial templates
A sacrificial cantilever is used as a template for making cantilevers of non-standard materials for use in an atomic force microscope. The desired metal is deposited onto the sacrificial...
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RE36488 |
Tapping atomic force microscope with phase or frequency detection
An atomic force microscope in which a probe tip is oscillated at a resonant frequency and at amplitude setpoint and scanned across the surface of a sample, which may include an adsorbed water layer...
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6011261 |
Probe formed of mono-crystalline SI, the manufacturing method thereof, and an information processing device using the probe
A probe for detecting minute physical behavior comprises a lever member, particularly in the form of a cantilever, formed of a monocrystalline silicon layer and a tip in the form of...
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6008489 |
Method for improving the operation of oscillating mode atomic force microscopes
The oscillation parameters of a probe of an atomic force microscope (AFM) typically vary over time. This variation can cause problems during either 1) scanning or measurement functions in which the...
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6006595 |
Device for vibrating cantilever
There is disclosed a device for applying vibrations to a cantilever used in an atomic force microscope. The cantilever has a base portion, and a probe is attached to the front end of the...
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6006594 |
Scanning probe microscope head with signal processing circuit
A head for a scanning probe microscope comprising a tuning fork (130) with an SPM tip (134) attached to one prong of the tuning fork. An AC signal (Vin) generated by oscillation of the tuning fork...
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6006593 |
Method using cantilever to measure physical properties
A method of measuring physical properties using a cantilever comprises bringing a tip attached at one end of a cantilever into contact with a sample and causing a vibrational force of a frequency...
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6003364 |
Glide head for testing a disc surface
An improved glide head is useful for testing the glide quality of a disc. The glide head includes an air bearing surface, pads extending from the air bearing surface and a contact sensor, the...
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6000281 |
Method and apparatus for measuring critical dimensions on a semiconductor surface
A combined atomic force microscope and stylus profilometer adapted to measure critical dimensions on a surface. The stylus profilometer is placed at a first position sufficiently near an edge of a...
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6000282 |
System and method for uniform frequency response independent of slider contact location in glide tests
A system for detecting and measuring the height of asperities on a substantially flat solid surface is disclosed. The system includes a glide head assembly for contacting asperities on the...
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6000280 |
Drive electrodes for microfabricated torsional cantilevers
A comb-type actuator for movable microelectromechanical structures includes first and second asymmetric sets of interdigitated fingers. Asymmetry is obtained by fabricating on set of fingers to...
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5992226 |
Apparatus and method for measuring intermolecular interactions by atomic force microscopy
A sample support member for atomic force microscopy of intermolecular interactions includes a sample support base having a plurality of protrusions, each protrusion having an apical substrate...
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5994698 |
Microprobe, preparation thereof and electronic device by use of said microprobe
A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe...
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5992225 |
Cantilever probe and scanning type probe microscope utilizing the cantilever probe
A cantilever probe for scanning a sample surface comprises a cantilever having a free end and a fixed end. A first support section is disposed at the free end and extends along a first plane. A...
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5983712 |
Microscope for compliance measurement
An atomic force microscope and method of operation are provided and include a force sensing probe tip adapted to be brought into close proximity with a sample surface, a scanning element for...
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5986262 |
Probe array for a scanning probe microscope
A probe array for a scanning microscope has numerous individual probes that respectively have a probe tip on one or more beams. The individual probes are arranged in the form of a two-dimensional...
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5983713 |
Scanning probe microscope
Scanning signals SX and SY produced from a scanning signal-generating portion are directly supplied to a VCM driver amplifier without being attenuated according to the magnification factor. A...
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5975757 |
Method and apparatus for providing surface images
An apparatus and method for providing a topographical and thermal image of a semiconductor device. A probe (10) is made from a first ribbon of material (11) and a second ribbon of material (12)...
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5970312 |
Method for evaluating HSG silicon film of semiconductor device by atomic force microscopy
An evaluating method of an HSG silicon film using atomic force microscopy (AFM). The characteristics of the HSG silicon film are measured and expressed with quantitative values using AFM. The above...
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5969238 |
Thermoelectric microprobe
A microprobe for thermoelectric microscopic measurements comprises a probe body (11), which consists of a doped or intrinsically conductive semiconductor material and has at least one...
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5965881 |
Scanning probe microscope and processing apparatus
This scanning probe microscope can accurately obtain information on surfaces of a sample when measuring the sample in a broad range from a slow scanning speed to a fast scanning speed. The scanning...
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5963396 |
Glide head with an outside active rail
A glide head using a slider with an outside active rail is described. In one embodiment, the trailing end of the outside rail extends beyond the trailing end of the inside rail. Thus, during use,...
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5958701 |
Method for measuring intramolecular forces by atomic force
A method is disclosed for measuring intramolecular forces within a sample compound by providing an atomic force microscope that includes a sample support member and a cantilever. The sample support...
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5960255 |
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
A calibration standard comprises a supporting structure (1) of single crystal material with at least one pair of different kinds of structures consisting of a raised line (2) and a trench (3)....
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5959200 |
Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams
A micromachined structure providing for independent vertical and lateral deflection sensing. The structure uses high aspect ratio ribs which bend much more easily in one direction than in other...
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5955660 |
Method of controlling probe microscope
An improved stable feedback control circuit for a scanning probe microscope has a vibrationally driven cantilever having a probe mounted at a distal end thereof at a frequency near the resonance...
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5955654 |
Calibration standard for microroughness measuring instruments
A metrology standard that is useful for calibrating instruments for the levels of microroughness encountered in semiconductor, disk drive, and related industries today. In advanced applications,...
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5955661 |
Optical profilometer combined with stylus probe measurement device
An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an...
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5952563 |
Dynamic threshold margin to test memory storage media
A memory media tester uses a dynamic threshold margin between the sensor signal produced by a sensor and a threshold level. The dynamic threshold margin is generated as a function of a DC signal...
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5952562 |
Scanning probe microscope incorporating an optical microscope
A scanning probe microscope includes a cantilever having a probe on its free end, a displacement measuring unit for measuring a displacement of the cantilever caused by an interaction between a...
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5945595 |
Online roll profile measuring system and measuring method using the same
An online roll profile measuring system for measuring a roll profile during rolling without the effect of an error caused by the change in rolling condition. The system includes a roll grinder unit...
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5942680 |
Multi-impact asperity sensor and burnish head
A sensor head for mapping asperities on a disc surface including a plurality of spaced members having unique excitation characteristics for distinguishing the members excited. The sensor head is...
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5939624 |
Slider for use in glide head device and methodology for fabricating the same
A glide head device for attachment to a flexure and for operation with a test system to detect a presence of asperities on a moving surface includes a slider constructed as a rigid body that is...
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