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7623978 |
Damage assessment of a wafer using optical metrology
A method of assessing damage of a dual damascene structure includes obtaining a wafer after the wafer has been processed using a dual damascene process. A first damage-assessment procedure is...
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7620519 |
Burn-in process of producing data correlating elevation of disk drive head to temperature and method of controlling the elevation of the disk drive head using the data
Data characterizing a read/write head of a hard disk drive is produced in a burn-in process. The method includes measuring the flying height of the head at a first temperature in a burn-in chamber,...
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7618832 |
Semiconductor substrate having reference semiconductor chip and method of assembling semiconductor chip using the same
A semiconductor substrate having a reference semiconductor chip and a method of assembling semiconductor chips using the same are provided. According to the method, a semiconductor substrate having...
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7617075 |
Library accuracy enhancment and evaluation
The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated...
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7616927 |
Method and apparatus to reduce multipath effects on radio link control measurements
One or more median filter circuits are used to filter radio link control measurements corresponding to one or more radio link parameters of interest, such as received signal quality or round trip...
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7599815 |
Building management performance indexing and control
A method for measuring compliance with building air quality attribute set points. The method includes the steps of sensing a first attribute of environmental air quality, setting a range of...
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7599755 |
System and method for dynamically simulating value stream and network maps
A computer readable medium comprising instructions which when executed by a computer system causes the computer to implement a method for creating a dynamic value network map of a process flow is...
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7591440 |
Methods and systems for cement finishing mill control
Methods and systems for controlling a cement finishing mill, and operating the mill at an optimal point, are disclosed. To determine an optimal point of operation, values of mill power and sound...
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7580808 |
Onboard trip computer for emissions subject to reduction credits
Methods and a system are provided for monitoring and processing the emissions footprint of one or more vehicles. An embodiment of an onboard vehicle method involves the collection of vehicle data...
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7567878 |
Evaluating anomaly for one class classifiers in machine condition monitoring
A method for monitoring machine conditions provides additional information using a one-class classifier in which an evaluation function is learned. In the method, a distance is determined from an...
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7558641 |
Recipe report card framework and methods thereof
A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card...
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7555395 |
Methods and apparatus for using an optically tunable soft mask to create a profile library
The present invention provides methods and system for improving the accuracy of measurements made using optical metrology. The present invention relates to methods and systems for changing the...
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7548824 |
Automated analysis system for semiconductor manufacturing fabrication
A system and method for an automated analysis system for semiconductor manufacturing fabrication is disclosed. The system includes one or more site databases that each store data generated by an...
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7539585 |
System and method for rule-based data mining and problem detection for semiconductor fabrication
A fabrication history of a group of wafers is provided, having a record for each wafer of the manufacturing events that did or did not occur in its fabrication, and having the measured value of a...
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7539584 |
Volume based extended defect sizing system
A system and method for sizing semiconductor wafer defects combines contiguous light intensity values over a defect area of the wafer to provide a defect sizing metric. The light intensity values...
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7539583 |
Method and system for defect detection
A method for inspecting objects such as semiconductor wafers. A staging platform and an optical platform are arranged so that the object may be staged and its surface scanned by optical equipment...
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7533313 |
Method and apparatus for identifying outlier data
A method for converting data includes generating a first data vector of data measurements related to processing of at least one workpiece. Each element of the first data vector is associated with...
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7532990 |
System and method for press signature tracking and data association
In an exemplary embodiment of the present invention, a method for operation of a printing press includes the steps of generating unique individual signature identification information, tracking...
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7529627 |
Method of sea electrical survey of oil and gas deposits and apparatus complex for its realization ‘VeSoTEM’
A method for electrical survey of hydrocarbons deposits under seabed depths up to 1500 m and equipment therefor are provided. The equipment includes a vessel, a generator, an excitation field...
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7526396 |
Method for determining treatability of a wood product
A method for determining potential uptake and/or potential penetration of a liquid and/or chemical within a wood product is provided. The methods involve the use of single and/or multiple sensor...
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7526394 |
Quality assessment tool
Non-intrusive speech quality assessment method and apparatus for: storing a sequence of intercepted packets associated with a call, each packet containing speech data, and an indication of a...
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7526354 |
Managing and using metrology data for process and equipment control
A system for examining a patterned structure formed on a semiconductor wafer using an optical metrology model includes a first fabrication cluster, a metrology cluster, an optical metrology model...
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7521950 |
Wafer level I/O test and repair enabled by I/O layer
A 3D chip having at least one I/O layer connected to other 3D chip layers by a vertical bus such that the I/O layer(s) may accommodate protection and off-chip device drive circuits, customization...
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7520188 |
Method for controlling quality of a fiberglass mat
A method is provided for controlling the quality of a fiberglass mat. The method includes the steps of dyeing a test specimen of the fiberglass mat, scanning the test specimen with an optical...
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7516047 |
Diagnostic method for manufacturing processes
A method for use in a system for diagnosing the causes of manufacturing defects involves process characterization. A set of forms is identified for a workpiece and for a piece of manufacturing...
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7516042 |
Load test load modeling based on rates of user operations
Various technologies and techniques are disclosed for performing load tests based upon user pace. A load test application is provided. Load test settings are received from a user that includes a...
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7516040 |
System and method for automated detection of printing defects in an image output device
A system and method for the automated detection of printing defects in an image output device are described, employing an imaging device adjacent a photoresponsive member in the output device,...
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7512508 |
Determining and analyzing integrated circuit yield and quality
Methods, apparatus, and systems for computing and analyzing integrated circuit yield and quality are disclosed herein. For example, in one exemplary method disclosed herein information is received...
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7512501 |
Defect inspecting apparatus for semiconductor wafer
A defect inspecting apparatus comprising:
an inspection region dividing section which divides a defect inspection region of a wafer on which a circuit pattern is formed into a plurality of...
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7502702 |
Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities
The present invention provides a method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities. The method includes accessing measurement information provided by a first...
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7493185 |
Quality prognostics system and method for manufacturing processes
A quality prognostics system and a quality prognostics method for predicting the product quality during manufacturing processes are disclosed, wherein the current production tool parameters sensed...
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7487054 |
Automated dynamic metrology sampling system and method for process control
A system and method for optimizing and implementing a metrology sampling plan. A system is provided that includes a system for collecting historical metrology data from a metrology tool; and a...
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7484357 |
Apparatus, system, and method for determining and implementing estimate reliability
An apparatus, system, and method are disclosed for determining the reliability of an estimate such as particulate accumulation on a diesel particulate filter, weighing the estimate according to a...
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7478000 |
Method and system to develop a process improvement methodology
A method to create an instance of a defect-based production and testing process analysis machine (DPTPAM) provides continual process improvement based on foundational questions and classified...
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7467054 |
System and method for integrating the internal and external quality control programs of a laboratory
A system and method that enables a laboratory to integrate its internal and external quality control programs to thereby control the quality of its laboratory testing services. The system comprises...
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7457763 |
Predictive maintenance system
A method and system for maintaining an item of equipment supports the provision of predictive maintenance in a manner which eliminates or reduces downtime of the equipment. The method includes...
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7454302 |
Method of inspecting integrated circuits during fabrication
A method, system and a computer program product for inspecting integrated circuit chips during fabrication. The method including: selecting an integrated circuit chip at a selected level of...
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7447610 |
Method and system for reliability similarity of semiconductor devices
A method and system for reliability similarity of semiconductor devices. The method includes providing a first plurality of semiconductor devices, providing a second plurality of semiconductor...
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7444251 |
Detecting and diagnosing faults in HVAC equipment
A method and system detects and diagnoses faults in heating, ventilating and air conditioning (HVAC) equipment. Internal state variables of the HVAC equipment are measured under external driving...
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7440870 |
System for monitoring the quality of industrial processes and method therefrom
The invention relates to a system for monitoring industrial processes, comprising sensor means for detecting one or more process quantities in at least one process station, acquisition and...
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7440860 |
Sequential unique marking
The present invention comprises a method of sequential unique marking comprising providing a multi-die handling device with a plurality of semiconductor devices therein, reading an ID code on the...
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7437269 |
Method, system and program for evaluating reliability on component
The present invention provides a system which is capable of supporting a designer in confirming constituent information of a component at early stages of design. The system has a functional...
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7430485 |
Method and system for analyzing coatings undergoing exposure testing
A method and system for analyzing a plurality of coatings undergoing exposure testing is disclosed. Included in the system are a data acquisition system and a computer system. The data acquisition...
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7423442 |
System and method for early qualification of semiconductor devices
According to one embodiment of the invention, a method for early qualification of semiconductor device includes performing initial testing on a semiconductor device, receiving fail data on the...
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7421358 |
Method and system for measurement data evaluation in semiconductor processing by correlation-based data filtering
By performing a contingency-based correlation test of measurement data, such as defect data, with respect to electrical test data after progressively filtering the measurement data, an enhanced...
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7421357 |
Inspection data analysis program, inspection tools, review apparatus and yield analysis apparatus
An operation unit executes a process for calling to a main memory first data representative of a result of equipment QC applied to a production unit. A process for reading out to the main memory an...
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7415317 |
Method and system for correlating and combining production and non-production data for analysis
This document discusses, among other things, a method and system for correlating and combining production and non-production data for analysis for the purposes of increasing manufacturing...
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7412297 |
Method and system for designing and manufacturing lens modules
A method for designing and manufacturing lens modules includes selecting design parameters from a design database stored with the design parameters suitable for a lens module desired to be...
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7409309 |
Method of deciding the quality of the measurement value by the edge width
A method of deciding the quality of a measurement value of the line width, the line interval or the like of a pattern on an object to-be-measured, including acquiring the signal intensity...
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7409306 |
System and method for estimating reliability of components for testing and quality optimization
A system and method for determining the early life reliability of an electronic component, including classifying the electronic component based on an initial determination of a number of fatal...
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