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7608468 |
Apparatus and methods for determining overlay and uses of same
Disclosed are techniques and apparatus are provided for determining overlay error or pattern placement error (PPE) across the field of a scanner which is used to pattern a sample, such as a...
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7571074 |
Method of using a wafer-thickness-dependant profile library
A method for facilitating an ODP (optical digital profile) measurement of a semiconductor wafer. The method includes obtaining real time wafer characteristic data for a measurement site on the...
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7561984 |
Method for calculating a model spectrum
With technical surfaces, in particular in semiconductor manufacture, it is a regular requirement to determine the reflection coefficient. For this purpose, a model spectrum of an object of a...
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7538938 |
Optical filter for flash lamps in pulsed thermal imaging
An optical filter made from a borosilicate optical material is provided for flash lamps used in pulsed thermal imaging. The filter substantially eliminates the infrared radiation from flash lamps...
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7518109 |
Method and apparatus of measuring thin film sample and method and apparatus of fabricating thin film sample
In a method of measuring a thin film sample of irradiating an electron beam to a thin film sample, detecting a generated secondary electron and measuring a film thickness of the thin film sample by...
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7474993 |
Selection of wavelengths for integrated circuit optical metrology
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection...
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7424389 |
Measuring layer thickness or composition changes
A method of measuring the thickness or the rate of change of thickness of a layer as the layer is being formed on a substrate, includes illuminating the layer through the substrate with low...
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7421370 |
Method and apparatus for measuring a characteristic of a sample feature
A scanning probe microscope (SPM) based measuring technique for measuring surface features of a sample fits a curve to a family of feature edge points acquired as a result of an SPM scan of the...
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7409313 |
Method and apparatus for nondestructive evaluation of insulative coating
An apparatus is provided for determining thickness and thermal conductivity for an insulative coating disposed on a substrate in an object. The apparatus includes a source for rapidly applying a...
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7409309 |
Method of deciding the quality of the measurement value by the edge width
A method of deciding the quality of a measurement value of the line width, the line interval or the like of a pattern on an object to-be-measured, including acquiring the signal intensity...
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7406394 |
Spectra based endpointing for chemical mechanical polishing
Methods and apparatus for spectrum-based endpointing. An endpointing method includes selecting two or more reference spectra. Each reference spectrum is a spectrum of white light reflected from a...
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7353141 |
Method and system for monitoring component consumption
A method for monitoring consumption of a component, including the steps of emitting a radiation beam onto a first area of the component and detecting a portion of the radiation beam that is...
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7313501 |
Method and system for determining the location of a potential defect in a device based on a temperature profile
According to one embodiment of the invention a method for determining the location of a potential defect in a device includes scanning a surface of the device with a temperature sensor while...
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7262865 |
Method and apparatus for controlling a calibration cycle or a metrology tool
A method and apparatus for controlling when a calibration cycle is started for a metrology tool. The method and apparatus exploits a correlation between a drift of a first parameter (e.g., film...
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7197426 |
Method and apparatus for measuring thickness of metal layer
In a method and apparatus for measuring a thickness of a metal layer formed on a semiconductor substrate first, second, and third light pulses are successively irradiated onto a top surface of the...
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7194360 |
Method of determining radioactive nuclides
A method of simply and quickly determining α-ray releasing nuclides having long half-life without carrying out a chemical separation is provided. By inputting a data of pulses incident to an...
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7174272 |
Method for detecting an element
A method for detecting an element is disclosed and which includes the steps of providing a gamma-ray spectrum which depicts, at least in part, a test region having boundaries, and which has a small...
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7146279 |
Measuring device
A device for measuring at least one property of a material web, in particular a paper or board web, includes movable measuring probes provided on both sides of the web, which can be pressed against...
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7120553 |
Iso-reflectance wavelengths
A method of measuring a physical characteristic of a patterned substrate comprises determining a wavelength where a first reflectance from a patterned substrate equals a second reflectance from the...
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7085676 |
Feed forward critical dimension control
Feed forward techniques can be used to improve optical metrology measurements for microelectronic devices. Metrology tools can be used to measure parameters such as critical dimension, profile,...
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7079975 |
Scatterometry and acoustic based active control of thin film deposition process
A system for monitoring and controlling the deposition of thin films employed in semiconductor fabrication is provided. The system includes one or more acoustic and/or ultrasonic wave sources, each...
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7069153 |
CD metrology method
A method for rapidly analyzing data gathered during scatterometry and related methods uses a combination of database lookup, database interpolation and theoretical model evaluation. Database lookup...
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7026637 |
Method and system for measuring runout of a rotating tool
A method, system, and computer program product for measuring runout of a rotating tool are provided. A rotating tool is illuminated with a coherent electromagnetic radiation. The tool has an axis...
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6963782 |
System and method for effecting control tuning of a manufacturing process
The present invention includes a system and method for fine tuning the control of a manufacturing process. A material adjusting device is in communication with a PID controller and PID control...
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6934929 |
Method for improving OPC modeling
The invention provides a method for OPC modeling. The procedure for tuning a model involves collecting cross-section images and critical dimension measurements through a matrix of focus and...
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6895360 |
Method to measure oxide thickness by FTIR to improve an in-line CMP endpoint determination
A method for determining a material layer thickness transmissive to infrared (IR) energy in a semiconductor wafer manufacturing process including providing at least one semiconductor wafer...
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6826511 |
Method and apparatus for the determination of layer thicknesses
A method and apparatus for determination of layer thicknesses and optical parameters of a number of layers of a specimen, in which the reflectance spectrum of the specimen is measured and then...
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6820013 |
Method and device for the online analysis of solvent mixtures
The invention relates to a method and an apparatus for the on-line analysis of liquid substance mixtures by means of NIRS. For evaluation by spectral data comparison, merely the binary mixtures of...
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6766271 |
Infrared out-of-position detection system and method for a vehicle restraint system
An improved infrared occupant detection system that provides accurate and reliable occupant intrusion information at a speed sufficient to timely inhibit or otherwise control deployment of occupant...
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6742168 |
Method and structure for calibrating scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device
The present invention is generally directed to a method and a structure for calibrating a scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device. In one...
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6721939 |
Electron beam shot linearity monitoring
Electron beam (e-beam) shot linearity monitoring is disclosed. A pattern is written that has a predetermined size and a predetermined form in a predetermined position on a substrate, such as a...
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6651030 |
Method and system for collecting and retrieving time-series, real-time and non-real-time data
Disclosed is a data collection and retrieval system that puts data produced by real-time and non-real-time data sources into parallel “streams” or data files. Real-time data points are stored...
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6600805 |
Method and apparatus for determination of properties of food or feed
Properties of a medium of food or feed, such as the fat content of meat, are determined by the use of dual X-ray absorptiometry with dual energy levels. Substantially, the entire medium is scanned...
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6559931 |
Three-dimensional (3-D) coordinate measuring method, 3-D coordinate measuring apparatus, and large-structure building method
A 3-D coordinate measurement is performed in such a way that an electrooptical distance-measuring device is used to measure a linear distance to a target point set on a surface of a measurement...
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6556947 |
Optical measurements of patterned structures
A method for measuring at least one desired characteristic of a patterned article is presented. The article is of a kind containing a plurality of different pattern elements located at different...
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6542849 |
Method for determining defect depth using thermal imaging
A method and apparatus are provided for determining the thickness of a sample and defect depth using thermal imaging in a variety of plastic, ceramic, metal and other products. A pair of flash...
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6542841 |
Method for managing test measurements
A method is provided for managing test measurements for an optical entity. The method can include determining if testing is needed, and building an object that includes a test variable and a...
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6526369 |
Apparatus and process for a cross-direction profile of a material web
Measurement system and process for measuring a cross-direction profile of specific properties of at least one of a material web and a coating on the material web. The system includes at least one...
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6502052 |
Note bundle managing apparatus to store and count note bundles
An internal sensor is moved in a direction of stacking of note bundles within a cashbox along bands of the bundles. The bands of bundles are detected in accordance with movement of the internal...
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6480802 |
Method for determining the flatness of a material strip
A method for determining the flatness of a material strip and a device for performing the method. The method and device solve the technical problem of calculating the strip elongation from values...
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6470294 |
System and method for the on-line measurement of glue application rate on a corrugator
The system and method of the present invention determines the rate of application of liquid glue to corrugated board on a corrugator. A sensor employing the principle of infrared absorption...
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6453264 |
Surface flaw detection using spatial raman-based imaging
A Raman-based spatial analysis method of detecting surface flaws. Special filters and optics are used to acquire filtered Raman response data from a portion of the surface. The filtered Raman...
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6421418 |
Method and system for detecting hidden edges
A system for detecting hidden edges is disclosed. The system comprises a workpiece having a surface and a hidden edge located below the surface. A radiation source moves along the workpiece surface...
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6411907 |
Accurate tissue injury assessment
Systems and methods using a spectrometer system for real-time automatic evaluation of tissue injury are described. A method of assessing an injury to tissue comprises reflecting an electromagnetic...
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6405153 |
Microscopic feature opacity measurement system
A measurement tool connects to a microscope which may be an automatic inspection machine for identifying and measuring microscopic dimensions of features on a photographic mask such as opacity,...
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6366861 |
Method of determining a wafer characteristic using a film thickness monitor
A method for determining a wafer characteristic, such as the surface quality of a film formed on the wafer, using a film thickness monitor is described. In one embodiment, the method comprises the...
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6363328 |
Software controlled meat probe for use in determining meat tenderness
A data processor used in the overall process of determining meat tenderness which receives, analyses and graphically displays in a dynamic format collected fluorescence emitted by connective tissue...
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6049282 |
Method and apparatus for measuring ice thickness on substrates using backscattering of gamma rays
The present invention provides a method and apparatus for in situ measuring thicknesses of ice buildup on airfoil. The method and device uses a probe including a radioactive 241 Am gamma ray...
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6038525 |
Process control for pulsed laser deposition using raman spectroscopy
A method of controlling a pulsed laser deposition process. A spectroscope is used to acquire Raman response data from a substrate as it is being coated with a film. A processor compares the...
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5987396 |
Computer-controlled device for detecting optical transmission and/or remittance properties of a measuring object, method for operating such a device and method for initializing measuring functions of such a device
A computer-controlled device for detecting optical transmission and/or remittance properties of a measuring object has a measuring unit for illuminating the measuring object and for receiving the...
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