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8989890 GST film thickness monitoring  
In polishing a substrate having a layer of GST disposed over an underlying layer, during polishing, a non-polarized light beam is directed onto the layer of GST. The non-polarized light beam...
8988033 Machine tool  
A machine tool includes a main axis 30 to which a touch probe 17 is attached, a motor 15 that rotationally drives the main axis 30, a rotation angle position detector 16 that detects a rotation...
8977379 Endpoint method using peak location of spectra contour plots versus time  
In one aspect, a method of polishing includes polishing a substrate, and receiving an identification of a selected spectral feature and a characteristic of the selected spectral feature to monitor...
8965555 Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus  
A method dresses a polishing member with a diamond dresser having diamond particles arranged on a surface thereof. The method includes determining dressing conditions by performing a simulation of...
8930013 Adaptively tracking spectrum features for endpoint detection  
A method of controlling polishing includes polishing a substrate having a second layer overlying a first layer, detecting exposure of the first layer with an in-situ monitoring system, receiving...
8892238 Edge break details and processing  
A method and an apparatus for shaping an edge at a juncture of two adjoining surfaces of a part. A first surface and a second surface of the part are abraded by contacting a polishing surface of a...
8892235 Method and system for generating a dental implant surgical drill guide  
A method and system for producing a dental implant surgical guide is disclosed. A patient-specific virtual model is generated using image data specific to a patient and virtual dental implants....
8874250 Spectrographic monitoring of a substrate during processing using index values  
Methods, systems, and apparatus for spectrographic monitoring of a substrate during chemical mechanical polishing are described. In one aspect, a computer-implemented method includes storing a...
8831767 Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool  
Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, a characteristic of a polishing pad, or a characteristic of a...
8774958 Selection of polishing parameters to generate removal profile  
Values are selected for a plurality of controllable parameters of a chemical mechanical polishing system that includes a carrier head with a plurality of zones to apply independently controllable...
8755928 Automatic selection of reference spectra library  
A computer-implemented method of generating reference spectra includes polishing a plurality of set-up substrates, the plurality of set-up substrates comprising at least three set-up substrates,...
8747188 Smart automation of robotic surface finishing  
A method and an apparatus for smart automation of robotic surface finishing of a three-dimensional surface of a work piece is described. A three-dimensional motion path is created along the...
8751033 Adaptive tracking spectrum features for endpoint detection  
A method of controlling polishing includes polishing a substrate, monitoring a substrate during polishing with an in-situ monitoring system, generating a sequence of values from measurements from...
8747189 Method of controlling polishing  
A method of controlling polishing includes polishing a substrate of a non-metallic layer undergoing polishing and a metal layer underlying the non-metallic layer; storing a metal reference...
8718810 Semi-quantitative thickness determination  
While a substrate is polished, it is also irradiated with light from a light source. A current spectrum of the light reflected from the surface of the substrate is measured. A selected peak,...
8712575 Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder  
Systems and methods are disclosed for modulating the hydrostatic pressure in a double side wafer grinder having a pair of grinding wheels. The systems and methods use a processor to measure the...
8706287 Control system for a mill and method for operating a mill  
The invention related to a control system for a mill, particularly a roller grinding mill, comprising a mill control device (11), which is designed to control at least one mill characteristic on...
8694144 Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing  
A difference between a first expected required polish time for a first substrate and a second expected required polish time for a second substrate is determined using a first pre-polish thickness...
8694145 Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles  
A method of controlling surface non-uniformity of a wafer in a polishing operation includes (a) providing a model for a wafer polishing that defines a plurality of regions on a wafer and...
8682463 Denture grinding machine  
A denture grinding machine includes: a denture-holding table for holding dentures; a grinding tool for grinding the dentures held on the denture-holding table; a main body for holding the grinding...
8660684 Method of removing stock material from a workpiece by machining with a tool  
A method of determining a desired power level (P) as a function of relative tool to workpiece position, thereby enabling adaptive control advantages that were previously inaccessible for...
8655478 Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus  
A method dresses a polishing member with a diamond dresser having diamond particles arranged on a surface thereof. The method includes determining dressing conditions by performing a simulation of...
8644978 Machining apparatus and method of making endodontic instruments  
A machining apparatus and method for fabricating endodontic instruments adapted for use in performing root canal procedures is disclosed. The machining apparatus includes computer numerical...
8639377 Metrology for GST film thickness and phase  
Methods of determining thickness and phase of a GST layer on a semiconductor substrate are described using intensity spectra within the infra-red range. In particular, techniques for using certain...
8615317 Process and apparatus for generating control data for controlling a tool on a machine tool comprising at least 5 axes  
A process and an apparatus for generating control data for controlling a tool on a machine tool comprising at least 5 axes for the production of a predetermined finished part having a base body...
8569174 Using spectra to determine polishing endpoints  
Methods of determining a polishing endpoint are described using spectra obtained during a polishing sequence. In particular, techniques for using only desired spectra, faster searching methods and...
8560111 Method of determining pressure to apply to wafers during a CMP  
A method for uniformly planarizing a wafer that includes determining a first wafer warped value at a first zone on the wafer, determining a second wafer warped value at a second zone on the wafer,...
8554351 Spectrographic monitoring of a substrate during processing using index values  
Methods, systems, and apparatus for spectrographic monitoring of a substrate during chemical mechanical polishing are described. In one aspect, a computer-implemented method includes storing a...
8540915 Concrete block and method of making same  
Molds and processes that permit high-speed, mass production of retaining wall blocks having patterned or other processed front faces, as well as retaining wall blocks formed by such processes. The...
8532809 Network of fully automatic self-service key duplicating kiosks  
A self-service, fully-automatic kiosk for duplicating keys includes a kiosk housing having a customer interface for receiving payment from a customer for the purchase of at least one duplicate of...
8527085 Method for operating a gear grinding machine  
The present invention relates to a method for operating a gear grinding machine, with the following operating phases of the gear grinding machine: machining a workpiece on the gear grinding...
8506352 Eyeglass lens processing apparatus  
An eyeglass lens processing apparatus for processing a peripheral edge of an eyeglass lens, includes: a processing unit including a plurality of processing tools that process the peripheral edge...
8489222 Machine and method for grinding spacer grid of nuclear fuel assembly  
A machine and a method for grinding a spacer grid of a nuclear fuel assembly. The machine includes a spacer grid holding unit, a first rectangular coordinates robot for grinding an outer surface...
8452443 Method for controlling a plurality of axes in an industrial robot system and an industrial robot system  
An industrial robot system including a workcell including a load area and a process area. A detector detects when a human enters the load area. A manipulator is located in the workcell. At least...
8412370 Polishing apparatus with dressing position setting means  
While data that indicate a relationship between a dressing position P defined by a distance between a rotating shaft 11 of a polishing pad 13 and a rotating shaft 31 of a dresser 30 and shape...
8392012 Multiple libraries for spectrographic monitoring of zones of a substrate during processing  
A computer-implemented method includes receiving a first sequence of current spectra of reflected light from a first zone of a substrate. A second sequence of current spectra of reflected light...
8380338 Method and apparatus for stripping holes in a metal substrate  
A method and apparatus for stripping foreign matter from holes in a substrate, such as a turbine component, which includes using a scanner to locate the hole and operating a water jet apparatus to...
8380339 Customized polish pads for chemical mechanical planarization  
A polishing pad for chemical mechanical planarization of a film on a substrate is customized by obtaining one or more characteristics of a structure on a substrate. For example, when the structure...
8369978 Adjusting polishing rates by using spectrographic monitoring of a substrate during processing  
A computer-implemented method includes receiving a sequence of current spectra of reflected light from a substrate; comparing each current spectrum from the sequence of current spectra to a...
8352061 Semi-quantitative thickness determination  
While a substrate is polished, it is also irradiated with light from a light source. A current spectrum of the light reflected from the surface of the substrate is measured. A selected peak,...
8332064 Polishing method and polishing apparatus, and program for controlling polishing apparatus  
A polishing method can bring a polishing surface to the optimum condition for polishing, without using a dummy wafer, before resuming polishing, thereby eliminating the cost of dummy wafer. The...
8292693 Using optical metrology for wafer to wafer feed back process control  
A method of controlling the polishing of a substrate includes polishing a substrate on a first platen using a first set of parameters, obtaining first and second sequences of measured spectra from...
8271120 Method and system for processing optical elements using magnetorheological finishing  
A method of finishing an optical element includes mounting the optical element in an optical mount having a plurality of fiducials overlapping with the optical element and obtaining a first...
8260446 Spectrographic monitoring of a substrate during processing using index values  
Methods, systems, and apparatus for spectrographic monitoring of a substrate during chemical mechanical polishing are described. In one aspect, a computer-implemented method includes storing a...
8260450 Eyeglass lens processing apparatus  
An eyeglass lens processing apparatus for forming a hole on an eyeglass lens to attach a rimless frame to the lens, includes: a lens chuck that holds the lens; a drilling tool; a designating unit...
8260451 Eyeglass lens processing apparatus  
An eyeglass lens processing apparatus comprising a processing control unit which performs polishing by controlling a lens rotating unit, a grindstone rotating unit and an axis-to-axis distance...
8209050 Method for the classification of defects and running of lamination cylinder grinding  
A method for classification of defects and running of grinding of lamination cylinders includes identifying defect areas in a map illustrating a plurality of surface measurements of a cylinder....
8180480 Tool bit monitoring for on-vehicle brake lathe  
A system and method for monitoring the contact of tool bits of a lathe with surfaces of a brake disk being machined employs a vibration sensor coupled to the lathe. Signals from the vibration...
8135492 Method of making a surgical template used for a computer-guided dental implant surgery  
A method of making a surgical template used for a computer-guided dental implant surgery includes the steps of: establishing implant planning data of a patient's jaw, producing a digital plaster...
8128851 Concrete block and method of making same  
Molds and processes that permit high-speed, mass production of retaining wall blocks having patterned or other processed front faces, as well as retaining wall blocks formed by such processes. The...

Matches 1 - 50 out of 224 1 2 3 4 5 >