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7620511 |
Method for determining plasma characteristics
Methods for determining characteristics of a plasma are provided. In one embodiment, a method for determining characteristics of a plasma includes obtaining metrics of current and voltage...
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7620470 |
Method and apparatus for impasse detection and resolution
A method, apparatus and a system, for provided for performing an automated process flow adjustment. A semiconductor wafer is processed based upon a routing plan and a predetermined schedule. A...
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7620459 |
Controlling and operating technical processes
A system for operating and controlling technical processes having at least one component fashioned as a measuring instrument and a control device, which is connected by electrical lines to sensor...
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7618832 |
Semiconductor substrate having reference semiconductor chip and method of assembling semiconductor chip using the same
A semiconductor substrate having a reference semiconductor chip and a method of assembling semiconductor chips using the same are provided. According to the method, a semiconductor substrate having...
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7618203 |
Substrate processing method, substrate processing apparatus, and computer readable storage medium
In the present invention, when trouble occurs and the operation of a substrate processing apparatus is stopped, substrate information containing positions and processing states of the substrates...
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7613598 |
Global shape definition method for scatterometry
A method for modeling samples includes the use of control points to define lines profiles and other geometric shapes. Each control point used within a model influences a shape within the model....
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7613535 |
Independent, self-contained, risk isolated, sectional CIM design for extremely large scale factory operation
A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of...
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7613534 |
Web based semiconductor ordering architecture
A semiconductor fabrication architecture which includes a middleware component, a fabrication facility coupled to the middleware component, a real time dispatcher application program interface...
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7610111 |
Method and system for wafer lot order
Methods and systems for wafer lot ordering using including estimation of allowable queue time based on utilization loss and rework percentage have been achieved. The method invented comprises steps...
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7603196 |
Methods and apparatus for material control system interface
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots to...
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7603195 |
Methods and apparatus for integrating large and small lot electronic device fabrication facilities
In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses large...
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7603194 |
Fabrication system and fabrication method
A fabricating method for a system that includes a plurality of processing apparatuses connected to each other by an inter-apparatus transporter and a computer storing managing information of...
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7599757 |
System and methods for automatic generation of component data
A method of manufacturing an electronic circuit including employing a pick & place machine-specific component placement sequence, pick & place machine-specific component data for governing the...
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7597492 |
Coating and developing system, coating and developing method and storage medium
A buffer module is installed in a coating film forming unit block of a coating and developing system to reduce the number of interface arms needed by an interface block, and the manufacturing cost...
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7596423 |
Method and apparatus for verifying a site-dependent procedure
The present invention includes a method of verifying a Site-Dependent (S-D) processing procedure, the method including receiving a plurality of wafers by a S-D transfer system, determining S-D...
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7596422 |
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables
One or more profile parameters of a structure fabricated on a wafer in a wafer application are determined by developing a correlation between a set of profile models and one or more key profile...
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7596421 |
Process control system, process control method, and method of manufacturing electronic apparatus
A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution...
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7596420 |
Device manufacturing method and computer program product
A method is provided wherein a lithographic projection apparatus is used to print a series of test patterns on a test substrate to measure printed critical dimension as function of exposure dose...
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7592611 |
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam
A creation method of charged particle beam writing data for writing a pattern using a charged particle beam based on design data of circuits includes creating, based on the design data, a location...
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7590966 |
Data path for high performance pattern generator
A method and system for a high-speed datapath for a high-performance pattern generator such as an analog SLM for generating the image is disclosed. The data path has provisions for completely...
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7588949 |
Optical metrology model optimization based on goals
The optimization of an optical metrology model for use in measuring a wafer structure is evaluated. An optical metrology model having metrology model variables, which includes profile model...
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7587700 |
Process monitoring system and method for processing a large number of sub-micron measurement targets
The invention provides a method that includes the stages of: (i) receiving design information representative of a portion of an object that includes sub micron measurement targets, (ii) processing...
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7587300 |
Parts management system and method and parts management program and storage medium
A parts management system which is capable of preventing use of a non-conforming part. A first computer for a user has component parts for an apparatus, delivered to the user. A second computer for...
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7585202 |
Computer-implemented method for process control in chemical mechanical polishing
A computer-implemented method for process control in chemical mechanical polishing in which an initial pre-polishing thickness of a substrate is measured at a metrology station, a parameter of an...
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7584012 |
Automatic defect review and classification system
An automatic defect review and classification system including at least one automatic defect review apparatus for specifically observing defect portions of a sample and at least one automatic...
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7583833 |
Method and apparatus for manufacturing data indexing
A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as...
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7577493 |
Temperature regulating method, thermal processing system and semiconductor device manufacturing method
A temperature regulating method in a thermal processing system includes controlling a heating means by performing integral operation, differential operation and proportional operation by means of a...
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7577487 |
Methods and apparatus for a band to band transfer module
A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate...
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7576832 |
Lithographic apparatus and device manufacturing method
A lithographic apparatus includes a movable object and a control system to control the position of the movable object. The control system includes a position measurement system configured to...
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7575382 |
Coating/developing apparatus and operation method thereof
A coating/developing apparatus has a carrier block including a first transfer device, a process block including processing modules, an examination block including examination modules and a second...
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7574278 |
Scheduling system and method
A method and apparatus for scheduling in a wafer fab. The method comprising means for weighting inventories according to at least one of logpoints or reticle, and photolithography units, means for...
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7571021 |
Method and system for improving critical dimension uniformity
A method for improving critical dimension of a substrate is provided. Manufacturing data of a plurality of critical dimension deviations corresponding to a plurality of areas on the substrate is...
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7571020 |
Method and system for controlling process tools by interrupting process jobs depending on job priority
By enabling an interleaved mode when supplying substrates from a plurality of load ports to a respective process module, a reduction of non-productive time of the process tool and/or a reduction of...
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7571019 |
Integrated configuration, flow and execution system for semiconductor device experimental flows and production flows
According to embodiments of the invention, an integrated configuration, flow and execution systems (ICFES) may be used to specify, control and record a history of processing of both semiconductor...
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7571017 |
Intelligent data multiplexer
An Intelligent Data Multiplexer (“IDM”) can be used to interface a plurality of host computers with a semiconductor manufacturing tool. In one embodiment, the IDM has a plurality of host-side...
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7569402 |
Chip data providing system and chip data providing server used therefore
A chip data providing system is provided. The chip data providing system is equipped with an inspection device for inspecting each chip after processing steps of forming integrated circuits on a...
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7567851 |
Method and system for dynamically changing the transport sequencing in a cluster tool
By dynamically adapting the transport sequencing rules of a cluster tool, the overall performance of the tool may be increased. In some illustrative embodiments, the transport sequencing rule for a...
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7565220 |
Targeted data collection architecture
A targeted data collection system configured to collect processing data in a plasma processing system is provided. The system includes a data collection host and a plurality of plasma processing...
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7565219 |
Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
A method according to one embodiment of the invention relates to determining at least one parameter of a model that provides information about a position of an object. The object has a plurality of...
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7563043 |
Coating/developing apparatus and substrate transfer method
In a coating/developing apparatus, a process section includes post-exposure baking units each having a waiting position and configured to perform a baking process on a substrate. An interface...
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7562337 |
OPC verification using auto-windowed regions
A method is provided for performing optical proximity correction (“OPC”) verification in which features of concern of a photomask are identified using data relating to shapes of the photomask,...
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7561938 |
Method for using data regarding manufacturing procedures integrated circuits (ICS) have undergone, such as repairs, to select procedures the ICs will undergo, such as additional repairs
An inventive method in an integrated circuit (IC) manufacturing process for using data regarding repair procedures conducted on ICs at probe to determine whether any further repairs will be...
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7560946 |
Method of acceptance for semiconductor devices
A method of accepting semiconductor chips is provided using on-chip parametric measurements. An on-chip parametric measurement structure is determined for each parameter in a set of parametric...
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7560376 |
Method for adjoining adjacent coatings on a processing element
Two or more coatings applied to processing elements of a plasma processing system are treated with protective barriers or coatings. A method is described for adjoining two or more coatings on the...
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7559138 |
Method for replacing defective PCB from PCB panel
An apparatus for replacing a defective PCB unit formed on a PCB panel includes a location correcting table on which a nondefective PCB unit for replacing the defective PCB unit is disposed, a panel...
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7558641 |
Recipe report card framework and methods thereof
A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card...
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7556899 |
System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device
A system for controlling an overlay includes a processing data receiving module receiving a processing data string describing a name of an exposure process for a target layer and an original...
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7556246 |
Unloading method of object, program storage medium, and mounting mechanism
There is provided a method for unloading an object vacuum-chucked on a mounting table having one or more gas flow paths opened at one or more locations on the mounting table, including the steps of...
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7555358 |
Process and method for continuous, non lot-based integrated circuit manufacturing
A method for continuous, non lot-based manufacturing of integrated circuit (IC) devices of the type to each have a unique fuse identification (ID) includes: reading the fuse ID of each of the IC...
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7551628 |
Wireless dongle with computing capability for equipment control and method of operation thereof
The present invention includes a dongle, with embedded computing capability, placed in a communication path and capable of passing information from a control device through a smart gateway to a...
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