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7620470 |
Method and apparatus for impasse detection and resolution
A method, apparatus and a system, for provided for performing an automated process flow adjustment. A semiconductor wafer is processed based upon a routing plan and a predetermined schedule. A...
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7620478 |
Control system, method and computer program for synchronizing several robots
A control system for controlling the movements of a plurality of mechanical units. The control system includes a program that includes a plurality of mechanical unit programs. Each program includes...
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7614154 |
System and method for locating components of a structure
In non-limiting, illustrative embodiments, methods, systems, and manufacturing facilities are provided for locating components of a structure. Locations of features of components of a structure are...
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7574278 |
Scheduling system and method
A method and apparatus for scheduling in a wafer fab. The method comprising means for weighting inventories according to at least one of logpoints or reticle, and photolithography units, means for...
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7550681 |
Method and apparatus for measuring weight of CNC workpieces
This invention discloses a method and apparatus for measuring the weight of a CNC workpiece. As the weight of the workpiece on a loading platform increases, the loading of a driving module which...
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7529595 |
Method of controlling substrate processing apparatus and substrate processing apparatus
It is an object of the present invention to realize, in a coating and developing apparatus including an inspection section, reduction in the startup time, cost reduction, and an improved operating...
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7519448 |
Method for determining position of semiconductor wafer, and apparatus using the same
A light source emits light toward a semiconductor wafer, and a light receiving sensor detects light passing a peripheral edge of the semiconductor wafer. Each coordinates of the peripheral edge of...
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7512455 |
Method for self-synchronization of modular production systems
A system and method for self-synchronization of modular production systems having components with various alternative capabilities for processing and transporting work units along transport...
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7512456 |
Substrate processing apparatus
When a first substrate transferred outwardly from an indexer cell is the last substrate prior to reticle change in an exposure apparatus, the outward transfer of a second substrate to be processed...
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7507296 |
Methods and apparatus for determining scrubber brush pressure
In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The...
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7467024 |
Method and apparatus for an elevator system for a multilevel cleanspace fabricator
The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple...
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7451164 |
System and method for replicating data
According to the present invention, techniques for controlling copying of logical volumes within a computer storage system are provided. A representative embodiment includes a plurality of storage...
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7447560 |
System and methods for automatic generation of component data
A method of manufacturing electronic circuits including generating CAD data, a bill of materials and an approved component vendor list for an electronic circuit and employing the CAD data, the bill...
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7439531 |
Alignment systems and methods for lithographic systems
An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining...
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7406360 |
Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment
A dummy substrate ( 17 ) differs from a substrate to be processed in having a first guide (G 1 ) for assisting centering, however, it can be handled as a substitute of the substrate to be...
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7390681 |
Derived metric for monitoring die placement
A method for monitoring die placement includes receiving measurements of an alignment of a semiconductor die mounted in a package by a die packaging tool. The measurements include center offset...
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7353076 |
Vacuum processing method and vacuum processing apparatus
The invention provides a semiconductor processing apparatus having a high throughput capable of appropriately coping with the positional displacement that may occur during transfer of the wafer...
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7346415 |
Semiconductor wafer positioning method, and apparatus using the same
The intensity of light of a predetermined wavelength corresponding to the type of a protective tape joined to the surface of a semiconductor wafer is adjusted by a controller, and a holding stage...
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7346847 |
Power tool control system user interface
A power tool control system allows a user to operate a power tool through a graphical user interface communicatively coupled with a non-contact measurement and alignment device. The graphical user...
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7310566 |
Quality control method for two-dimensional matrix codes on metallic workpieces, using an image processing device
A quality control method for two-dimensional matrix codes on metallic workpieces, the codes being in the form of stamped marking dots is disclosed. The stamping process for the marking dots is...
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7305277 |
Methods and systems for position sensing of components in a manufacturing operation
Methods and systems for position sensing are disclosed. In one embodiment, a method includes measuring at least three discrete point positions associated with a first component by using at least...
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7302306 |
Determining processing times at stations in an assembly system
An assembly system may assemble articles of manufacture at a plurality of assembly regions and may log a time at which each article of manufacture enters or exits an assembly region. Assembly...
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7286890 |
Transfer apparatus for target object
A processing system includes a transfer chamber, a plurality of chambers connected to the transfer chamber, a transfer apparatus disposed in the transfer chamber, and a control section configured...
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7274971 |
Methods and apparatus for electronic device manufacturing system monitoring and control
In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to...
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7248931 |
Semiconductor wafer position shift measurement and correction
A method and apparatus is provided for determining substrate drift from its nominal or intended position. The apparatus includes at least two fixed reference points. The reference points can be...
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7245978 |
Managing apparatus for managing assisting work to assist substrate-related-work performing system, and managing program for managing assisting work to assist substrate-related-work performing system
Assisting-work management apparatus and an assisting-work management program for performing the assisting work in a substrate work machine system efficiently by a plurality of workers. A worker...
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7194326 |
Methods and systems for large-scale airframe assembly
Methods and systems for large-scale airframe assembly are disclosed. In one embodiment, a method includes measuring a plurality of discrete point positions at least one of on and adjacent to at...
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7155299 |
Method and apparatus for precise marking and placement of an object
The present invention provides a precise marking apparatus for performing precise marking on an object and methods of using the same. The precise marking apparatus comprises an object input handler...
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7117055 |
Process and system for designing molds and dies
A system and method for designing a tooling assembly automatically validates and maintains relationships between components in view of predefined requirements, preferences, and best design...
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7089074 |
Host feeder setup validation
The present invention features a method and apparatus for feeder setup validation on a component placement machine. Provided are a host computer in communication with a feeder setup station...
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7089073 |
Component mounting apparatus and component mounting method, and recognition apparatus for a component mount panel, component mounting apparatus for a liquid crystal panel, and component mounting method for a liquid crystal panel
Transfer of liquid crystal panels to subsequent processes is performed with the panels placed on transfer arms and held by suction pads. A small suction force can be sufficient, and a suction...
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7055233 |
Device and method for assigning a tool to a workpiece
For assigning a tool to a workpiece conveyed on an assembly line, at least one transmitter is arranged in the area of an assembly line, and a receiver is arranged on the tool. An analyzing unit...
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7003368 |
Manufacturing method for a plurality of manufacturing lots
As a basic managing pattern, each manufacturing lot containing at least one workpiece is designated as a main objective to be managed. An appropriate number of similar type manufacturing lots...
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6983230 |
Method and apparatus for simulating a radiation dose delivered to an object
Methods and an apparatus for determining a radiation dosage received by a product being exposed to radiation in an irradiator cell through a computer simulation are provided. One exemplary method...
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6958588 |
Machine equipped with a temperature compensated lathe spindle
A machine for machining a workpiece with at least one revolving or rotating tool has a work spindle with a shaft ( 5 ), whose temperature is monitored by means of at least one temperature sensor (...
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6944517 |
Substrate apparatus calibration and synchronization procedure
A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus,...
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6941189 |
Programmable adaptable assembly system
A positioner for use in a tooling apparatus, the positioner including a tool, at least one servo-motor for actuating said tool, a controller for controlling the servo-motor, nonvolatile memory in...
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6937916 |
Automatic recognition of locator die in partial wafermap process
An off-line partial wafer scanner system is disclosed that resolves partial wafermap related issues that result holt-lot in semiconductor assembly. The system eliminates the need to teach locator...
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6934595 |
Method and system for reducing semiconductor wafer breakage
In a system and method to reduce wafer breakages in a wafer handling system, the position of a wafer on a platen is monitored and closing of the platen on a vacuum chamber is prevented if a...
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6931295 |
Method and system of calculating lot hold time
A method of calculating lot hold time. First, identification parameters of a lot are input. The lot may be a split child lot or an unsplit parent lot. The identification parameters include an...
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6928332 |
Process system and process tool for processing a workpiece
The invention related to a processing tool and a processing device for processing a workpiece ( 5 ) that is located in a predetermined processing area ( 1 ), at a plurality of processing points (...
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6892160 |
Assembly method
A method of locating an assembly point (P) on a first part ( 40 ), at which assembly point the first part is to be joined to a second part ( 1 ), the method comprising the steps of: determining an...
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6879868 |
Alignment system for lithographic apparatus for measuring a position of an alignment mark
An alignment system for a lithographic apparatus includes a detection system arranged in a path of at least a portion of an alignment radiation. The alignment system also includes a position...
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6876897 |
Positioning device and method for operation
A positioning device precisely positions a work piece at a workstation. Precise positioning is accomplished through the use of a tool controller, a programmed mechanism, and a minimal pneumatic...
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6876898 |
Method of identifying workstations that performed work on a workpiece
A method of identifying workstations that performed work on a workpiece in a work line having a plurality of zones, wherein each zone includes workstations that perform the same type of operation....
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6859677 |
Assembly verification method and inspection system
A system and method for verifying proper assembly of devices such as a vehicle that are constructed of two or more components assembled to one another. According to the method the device is placed...
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6856854 |
Numerical control device for a machine tool
A numerical control device for a machine tool switching two reference axes comprising switching timing determining means for determining a timing for switching the moving position definition on the...
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6823708 |
Sheet metal bending system provided with a press brake and a sheet metal support device and a method to prepare its control data and a computer readable storage medium that stores its control data
A computer readable recording medium which stores control data to control the action of a sheet metal bending system which is provided with a press brake and a sheet metal support device, where the...
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6804583 |
Automatic locating system for a vehicle crash pad and a method thereof
In order to automatically supply and locate a crash pad assembly in a vehicle by means of a robot in an automobile manufacturing plant, an automatic locating system of a crash pad for a vehicle...
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6792330 |
Drive control system
A drive control system having constituent devices such as control unit for drive control, servo amplifier for driving motor by receiving a command from the control unit, spindle amplifier, and...
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