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7640071 |
Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots
The present invention generally comprises a method for achieving fault tolerance in a PV FAB. A plurality of processing tools may be coupled together along a processing line, and a plurality of...
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7630785 |
Substrate processing system for setting uniform module cycle length and access control time lag in two pipeline processing systems
In a substrate processing system according to the present invention, module cycle periods at a plurality of process modules PM 1 through PM 4 connected around a transfer module TM having...
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7630787 |
System for integrating insert with molded article
System comprising mold-moving assembly cooperative with molding station and insert-integration station. Mold-moving assembly operative over cycle, including: first phase: molding station and...
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7620471 |
Method of managing a system for the manufacture of tobacco products
A system for manufacturing tobacco products whereby, a number (P n ) that represents a nominal production target for products of a given brand, and a number (C max ) representing the maximum output...
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7613542 |
Reference-based automatic address assignment system and method for a material handling system
A material handling system and method of automatic address assignment of components of the material handling system, includes a conveying surface divided into a plurality of zones, a plurality of...
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7603195 |
Methods and apparatus for integrating large and small lot electronic device fabrication facilities
In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses large...
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7603194 |
Fabrication system and fabrication method
A fabricating method for a system that includes a plurality of processing apparatuses connected to each other by an inter-apparatus transporter and a computer storing managing information of...
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7603196 |
Methods and apparatus for material control system interface
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots to...
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7577487 |
Methods and apparatus for a band to band transfer module
A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate...
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7575382 |
Coating/developing apparatus and operation method thereof
A coating/developing apparatus has a carrier block including a first transfer device, a process block including processing modules, an examination block including examination modules and a second...
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7567851 |
Method and system for dynamically changing the transport sequencing in a cluster tool
By dynamically adapting the transport sequencing rules of a cluster tool, the overall performance of the tool may be increased. In some illustrative embodiments, the transport sequencing rule for a...
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7529595 |
Method of controlling substrate processing apparatus and substrate processing apparatus
It is an object of the present invention to realize, in a coating and developing apparatus including an inspection section, reduction in the startup time, cost reduction, and an improved operating...
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7525646 |
Multiple pattern generator integration with single post expose bake station
A system and method of operation for a lithographic system having multiple exposure stations sharing one or more post-expose bake station and a centralized control system that schedules work...
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7496423 |
Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots
The present invention generally comprises a method for achieving fault tolerance in a PV FAB. A plurality of processing tools may be coupled together along a processing line, and a plurality of...
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7487002 |
Method and system for determining utilization of process tools in a manufacturing environment based on characteristics of an automated material handling system
By determining a metric for tool utilization in a manufacturing environment on the basis of tool-specific characteristics and a probability distribution for the transport capability of an automated...
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7474934 |
Methods and apparatus for enhancing electronic device manufacturing throughput
Methods, systems, and apparatus are provided that include determining a number of storage locations corresponding to busy chambers of an electronic device manufacturing tool; based on the number of...
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7467024 |
Method and apparatus for an elevator system for a multilevel cleanspace fabricator
The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple...
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7457680 |
Conveyance method for transporting objects
The present invention relates to conveyance method for transporting a plurality of unprocessed/processed objects between an automatic transporting device (AGV) and a semiconductor manufacturing...
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7451164 |
System and method for replicating data
According to the present invention, techniques for controlling copying of logical volumes within a computer storage system are provided. A representative embodiment includes a plurality of storage...
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7426421 |
Methods and systems for transport system (TS) integration
A method for transport system (TS) integration. A request comprising information regarding a manufacturing object is received. A TS server is determined among multiple TS servers contingent upon...
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7406360 |
Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment
A dummy substrate ( 17 ) differs from a substrate to be processed in having a first guide (G 1 ) for assisting centering, however, it can be handled as a substitute of the substrate to be...
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7403882 |
Material handling system enabling enhanced data consistency and method thereof
Material handling systems that enable enhanced data consistency, and methods thereof, are disclosed. Behavior and life cycle of a semiconductor product for a material handling system are modeled in...
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7398850 |
Transport apparatus
A transport apparatus including: a travel route having a plurality of retrieval locations continuous with the route; a plurality of article transporting vehicles that move along the route; control...
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7379785 |
Substrate processing system, coating/developing apparatus, and substrate processing apparatus
In a coating and developing apparatus that forms a resist film on substrates such as semiconductor wafers, and develops substrates exposed by an aligner, times after the aligner unloads substrates...
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7356378 |
Method and system for smart vehicle route selection
In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system (“MES”) for providing lot information; a...
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7353076 |
Vacuum processing method and vacuum processing apparatus
The invention provides a semiconductor processing apparatus having a high throughput capable of appropriately coping with the positional displacement that may occur during transfer of the wafer...
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7333872 |
Product processing system
A product processing system applicable to a production process for producing an electronic device is disclosed. The product processing system includes a plurality of processing apparatuses...
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7328079 |
Process and system for conveying semifinished products during LCD manufacture
A system ( 20 ) for conveying semifinished products during the manufacturing of liquid crystal displays, includes a first processing station ( 21 ); a second processing station ( 22 ) proximate to...
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7317961 |
Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus
A substrate processing apparatus includes a plurality of cells each including a predetermined processing unit, a transport mechanism, and a cell controller. The cell controller independently...
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7299104 |
Substrate processing apparatus and substrate transferring method
Shock waves occurring when opening a gate valve between two vacuum chambers and peeling of particles by a viscous force taking place when a gas is supplied into a vacuum chamber are necessary to be...
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7292909 |
Substrate processing apparatus and management method
A variety of maintenance work is performed for each of operation units in a substrate processing apparatus. Doors are provided at given positions on sides of an apparatus space, each of which is...
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7283886 |
Practical measurement system for a manufacturing process
A complete Direct Digital Numerical Control (DDNC) automation system for a practical measurement system for a manufacturing process where a given slide or ram is moved under power by input of GO-TO...
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7277774 |
Transportation state notification system and method, and information storage medium
A server includes a communication section which receives event information from an event detection device which detects a plurality of types of events occurring in a plurality of temporary storage...
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7274971 |
Methods and apparatus for electronic device manufacturing system monitoring and control
In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to...
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7266418 |
Substrate processing apparatus, history information recording method, history information recording program, and history information recording system
A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the...
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7263409 |
Method and apparatus for tracking a load on a conveyor system
A method and apparatus for tracking a load on a conveyor system using the trailing edge of the load. The method includes the steps of sensing the trailing edge of the load with a first sensor and...
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7254457 |
Manufacturing process control methods and systems
A manufacturing process control system comprises a process controller and an order manager coupled to a network. When receiving an order for a batch of lots requiring a manufacturing process by a...
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7233907 |
Parcel or service delivery with partially scheduled time windows
A delivery scheduling system that is configured for scheduling the delivery of an item or service from a sender to an intended recipient. After receiving a signal indicating that, for example, a...
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7231273 |
Substrate processing apparatus and method including obstacle detection
A camera is fixed to a camera fixture extending forward and upward from a rear end of an arm mechanism. The camera picks up the direction of extension of the arm mechanism when the substrate is...
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7228192 |
Method for manufacturing an item
According to a first aspect of the present invention, a method is provided for manufacturing an item. The method comprises the steps of creating a build schedule; creating a first portion of the...
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7228194 |
Power supply system, power supply method and lot processing method
A power supply system is disclosed. The system includes a power supply unit which supplies power to a processing unit, an arrival time calculating portion which calculates arrival time taken for a...
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7225043 |
System, method and program for tracing manufacturing processes
System, method and program product for tracing first, second and third processes for producing a product. First, second and third process instances for the first, second and third processes,...
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7221993 |
Systems and methods for transferring small lot size substrate carriers between processing tools
In a first aspect, a method of managing work in progress within a small lot size semiconductor device manufacturing facility is provided. The first method includes providing a small lot size...
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7218983 |
Method and apparatus for integrating large and small lot electronic device fabrication facilities
In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses large...
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7203563 |
Automatic N2 purge system for 300 mm full automation fab
A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system,...
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7194332 |
Data based node penalties
A method for determining a node based penalty for use in a path finding algorithm for an automated material handling system (AMHS) is described. The AMHS includes a track interconnecting a...
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7187994 |
Method of interfacing ancillary equipment to FIMS processing stations
This invention includes a method of integrating into a semiconductor specimen fabrication station a process diagnostic module that performs on the semiconductor specimen a processing operation that...
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7184851 |
Method of providing cassettes containing control wafers to designated processing tools and metrology tools
A system for tool monitoring is provided. The system comprises a first cassette, a second cassette, a processing tool, a first metrology tool, and a second metrology tool. The first cassette...
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7177716 |
Methods and apparatus for material control system interface
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots to...
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7162320 |
Assembly line quality control
Disclosed herein is a method of controlling an assembly line, comprising the steps of providing an article assembly line; designating, on the assembly line, an upstream processing station and a...
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