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7624178 |
Apparatus, system, and method for dynamic adjustment of performance monitoring
An apparatus, system, and method are disclosed for dynamically adjusting performance monitoring of storage area network (“SAN”) components. An initial violation module is included to determine...
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7622311 |
Inspection of underfill in integrated circuit package
In inspecting for quality of underfill material dispensed in an IC package, a camera image is captured for the IC package having the underfill material dispensed between an IC die and a package...
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7599755 |
System and method for dynamically simulating value stream and network maps
A computer readable medium comprising instructions which when executed by a computer system causes the computer to implement a method for creating a dynamic value network map of a process flow is...
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7596421 |
Process control system, process control method, and method of manufacturing electronic apparatus
A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution...
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7591440 |
Methods and systems for cement finishing mill control
Methods and systems for controlling a cement finishing mill, and operating the mill at an optimal point, are disclosed. To determine an optimal point of operation, values of mill power and sound...
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7590465 |
Method and apparatus for detecting abnormal characteristic values capable of suppressing detection of normal characteristic values
In a method for detecting abnormal characteristic values of at least three products sequentially manufactured in the same manufacturing line, it is determined whether or not a...
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7589845 |
Process control using an optical metrology system optimized with signal criteria
Provided is system and method for controlling a fabrication cluster using at least one parameter of a structure measured with an optical metrology system designed and configured to meet one or more...
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7587178 |
Signaling device
A signaling device, in particular a signal pillar 1 , is provided which is able to generate signals even outside the range of the usual optical and acoustic signals, and flexibly create them as...
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7580768 |
Method of adjusting process variables in a processing flow
A method of adjusting process variables in a processing flow is disclosed. Processed samples are tested to determine sample parameters of the tested samples. The sample parameters are analyzed...
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7574417 |
Self configuration of embedded historians
Systems and methods that configure an embedded historian(s) to a predetermined setting and an automatic propagation thereof to other embedded historians and units on the factory floor. Embedded...
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7561938 |
Method for using data regarding manufacturing procedures integrated circuits (ICS) have undergone, such as repairs, to select procedures the ICs will undergo, such as additional repairs
An inventive method in an integrated circuit (IC) manufacturing process for using data regarding repair procedures conducted on ICs at probe to determine whether any further repairs will be...
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7561937 |
Automated sputtering target production
A system and method are provided for manufacturing workpieces, such as metal articles like sputtering target, the system comprising: comparing one or more physical or chemical values of a...
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7546178 |
Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device
An aligner evaluation system includes (a) an error calculation module configured to calculate error information on mutual optical system errors among a plurality of aligners; (b) a simulation...
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7542880 |
Time weighted moving average filter
A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting...
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7542821 |
Multi-unit process spatial synchronization of image inspection systems
A conversion control system is described that includes a database to store data defining a set of rules and an interface to receive local anomaly information from a plurality of different analysis...
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7536233 |
Method and apparatus for adjusting processing speeds based on work-in-process levels
The present invention provides a method and apparatus for adjusting tool processing speeds based on work-in-process levels. The method includes determining at least one work-in-process level...
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7535688 |
Method for electrically discharging substrate, substrate processing apparatus and program
The present invention provides a substrate processing apparatus that executes electrical discharge processing before detaching a substrate held onto an electrostatic chuck of a lower electrode...
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7531368 |
In-line lithography and etch system
The invention can provide a method of processing a wafer using Site-Dependent (S-D) processing sequences that can include S-D creation procedures, S-D evaluation procedures, and S-D transfer...
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7526699 |
Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system
A method of monitoring a processing system in real-time using low-pressure based modeling techniques that include processing one or more of wafers in a processing chamber, calculating dynamic...
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7519885 |
Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table
A method of monitoring a processing system in real-time using low-pressure based modeling techniques that include processing one or more of wafers in a processing chamber; determining a measured...
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7519447 |
Method and apparatus for integrating multiple sample plans
The present invention provides a method and apparatus for integrating multiple sample plans. The method includes receiving a first wafer state data set from an in situ wafer measurement device, the...
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7516047 |
Diagnostic method for manufacturing processes
A method for use in a system for diagnosing the causes of manufacturing defects involves process characterization. A set of forms is identified for a workpiece and for a piece of manufacturing...
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7509177 |
Self-calibrating orienting system for a manipulating device
The invention relates to the control of an orienting/positioning system comprising comprising at least a sensor and an actuator for controlling an orienting and/or positioning action adapted to...
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7505879 |
Method for generating multivariate analysis model expression for processing apparatus, method for executing multivariate analysis of processing apparatus, control device of processing apparatus and control system for processing apparatus
According to the present invention, multivariate analysis model expressions are generated for a plasma processing apparatus 100 A and a plasma processing apparatus 100 B by executing a...
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7502659 |
Sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
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7502658 |
Methods of fabricating optimization involving process sequence analysis
An exemplary method for performing fabrication sequence analysis, the method comprising, defining a process group, wherein a process group includes fabrication processes in a fabrication sequence,...
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7496421 |
Method and apparatus for order control in a production process for a fiber product
The invention relates to a method and an apparatus for order control in a production process for a fiber product. In this case, at least one primary product is provided and processed further to...
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7477262 |
Automatic calculation of minimum and maximum tolerance stack
Determining a minimum condition and a maximum condition of an assembly of parts includes determining a subset of the assembly of parts, constructing a tolerance chain comprised of tolerance...
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7472024 |
Data analysis apparatus and method
There is provided with a data analysis method, including: providing a database storing for each of devices an example that includes inspection time, the degradation level, operation...
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7471991 |
Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes
Methods for performing boundary value analysis on a pharmaceutical manufacturing process are described and disclosed herein. The algorithm performing the boundary value analysis is integrated into...
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7465417 |
Parametric injection molding system and method
The present invention provides a method and system for controlling the quality of a product produced by an injection molding production process. The invention includes performing a multivariate...
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7463941 |
Quality control system, quality control method, and method of lot-to-lot wafer processing
A quality control system has: a QC value storage unit, a data acquisition device, a device internal information storage unit, a recipe storage unit, a QC value prediction unit, a wafer...
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7460968 |
Method and apparatus for selecting wafers for sampling
The present invention provides a method and apparatus for selecting wafers for sampling. The method includes determining a plurality of sampling rules associated with at least one of a plurality of...
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7457679 |
Solid model of statistical process control
A computer based proactive process control technique used to predict the capability of a manufacturing process. A solid model of statistical process control is created by a computer program to...
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7447610 |
Method and system for reliability similarity of semiconductor devices
A method and system for reliability similarity of semiconductor devices. The method includes providing a first plurality of semiconductor devices, providing a second plurality of semiconductor...
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7447559 |
Apparatus and method of forming a photoresist pattern, and repair nozzle
In an apparatus and a method of forming a photoresist pattern, a photoresist-coating section coats a substrate with a photoresist composition to form a photoresist film. A light is irradiated onto...
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7444196 |
Optimized characterization of wafers structures for optical metrology
A patterned structure in a wafer is created using one or more fabrication treatment processes. The patterned structure has a treated and an untreated portion. One or more diffraction sensitivity...
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7424336 |
Test data analyzing system and test data analyzing program
Disclosed is a test data analyzing method and system for use in estimation of a defect cause of a product, such as, an integrated circuit, a liquid crystal display, an optical transceiver, a thin...
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7419271 |
Manufacturing method for fine structure element, fine structure element manufactured by the method, spatial light modulator, and projector
Aspects of the invention can provide a manufacturing method for fine structure elements having a first flat portion forming step of forming an upper flat surface serving as a first flat portion on...
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7412297 |
Method and system for designing and manufacturing lens modules
A method for designing and manufacturing lens modules includes selecting design parameters from a design database stored with the design parameters suitable for a lens module desired to be...
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7409306 |
System and method for estimating reliability of components for testing and quality optimization
A system and method for determining the early life reliability of an electronic component, including classifying the electronic component based on an initial determination of a number of fatal...
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7404167 |
Method for improving design window
A method of forming photo masks having rectangular patterns and a method for forming a semiconductor structure using the photo masks is provided. The method for forming the photo masks includes...
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7403834 |
Methods of and apparatuses for controlling process profiles
Presented are methods and apparatus for controlling the processing of a substrate during a process step that is sensitive to one or more process conditions. One embodiment includes a method...
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7403832 |
Method and system for advanced process control including tool dependent machine constants
A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into...
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7401004 |
System for reviewing defects, a computer implemented method for reviewing defects, and a method for fabricating electronic devices
A system for reviewing defects includes an analysis module configured to analyze defect information of a plurality of intermediate products, the defect information including information of an...
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7398131 |
Method and system for concrete quality control based on the concrete's maturity
Method and system for controlling and monitoring the quality of concrete based on the concrete's maturity. Various embodiments of the present invention are discussed. First, Enhanced Maturity...
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7395122 |
Data capture for electronically delivered automation services
Content is generated on a host system based on real-time data from a controlled process collected over an internet from a customer's client machine tool control system. The real-time data is...
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7392107 |
Methods of integrating computer products with pharmaceutical manufacturing hardware systems
Methods of integrating computer products with pharmaceutical manufacturing hardware systems are described and disclosed herein. Consequently, the methods provide a means to perform validation and...
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7383156 |
Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface
It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11 , by providing a means 21 for detecting aggregation of...
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7369908 |
Method for manufacturing product formed with a plurality of parts and method for combining parts
A parts-combining method having high quality or yield for a product having a large number of parts. First entering an identification number group of nondefective completed products, a table of a...
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