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7424336 Test data analyzing system and test data analyzing program  
Disclosed is a test data analyzing method and system for use in estimation of a defect cause of a product, such as, an integrated circuit, a liquid crystal display, an optical transceiver, a thin...
7419271 Manufacturing method for fine structure element, fine structure element manufactured by the method, spatial light modulator, and projector  
Aspects of the invention can provide a manufacturing method for fine structure elements having a first flat portion forming step of forming an upper flat surface serving as a first flat portion on...
7412297 Method and system for designing and manufacturing lens modules  
A method for designing and manufacturing lens modules includes selecting design parameters from a design database stored with the design parameters suitable for a lens module desired to be...
7409306 System and method for estimating reliability of components for testing and quality optimization  
A system and method for determining the early life reliability of an electronic component, including classifying the electronic component based on an initial determination of a number of fatal...
7404167 Method for improving design window  
A method of forming photo masks having rectangular patterns and a method for forming a semiconductor structure using the photo masks is provided. The method for forming the photo masks includes...
7403834 Methods of and apparatuses for controlling process profiles  
Presented are methods and apparatus for controlling the processing of a substrate during a process step that is sensitive to one or more process conditions. One embodiment includes a method...
7403832 Method and system for advanced process control including tool dependent machine constants  
A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into...
7401004 System for reviewing defects, a computer implemented method for reviewing defects, and a method for fabricating electronic devices  
A system for reviewing defects includes an analysis module configured to analyze defect information of a plurality of intermediate products, the defect information including information of an...
7398131 Method and system for concrete quality control based on the concrete's maturity  
Method and system for controlling and monitoring the quality of concrete based on the concrete's maturity. Various embodiments of the present invention are discussed. First, Enhanced Maturity...
7395122 Data capture for electronically delivered automation services  
Content is generated on a host system based on real-time data from a controlled process collected over an internet from a customer's client machine tool control system. The real-time data is...
7392107 Methods of integrating computer products with pharmaceutical manufacturing hardware systems  
Methods of integrating computer products with pharmaceutical manufacturing hardware systems are described and disclosed herein. Consequently, the methods provide a means to perform validation and...
7383156 Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface  
It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter 11 , by providing a means 21 for detecting aggregation of...
7369908 Method for manufacturing product formed with a plurality of parts and method for combining parts  
A parts-combining method having high quality or yield for a product having a large number of parts. First entering an identification number group of nondefective completed products, a table of a...
7359830 Method for automatic on-line calibration of a process model  
A method is disclosed for collecting and processing raw process data. The method includes processing the raw data through a process model to obtain a prediction of the process quality; processing...
7349753 Adjusting manufacturing process control parameter using updated process threshold derived from uncontrollable error  
A method, system and medium are provided for enabling improved feedback and feedforward control. An error, or deviation from target result, is observed during manufacture of semi conductor chips....
7346413 Productivity for tool having plurality of processing modules  
Method, system and program product are disclosed for determining productivity for a tool including a plurality of processing modules. The invention provides an understanding of a relationship...
7346410 Method and system for manufacturing electronic device, electronic device, and electro-optical apparatus  
A system for manufacturing an electronic device having a processing unit which includes a timer that processes a plurality of lots each having a plurality of work pieces and measuring in units of...
7346409 Information processing apparatus, and information processing method  
There is provided an information processing apparatus that allows a user to understand what kinds of causes are accumulated stepwise in what kind of order to cause abnormality and due to what kinds...
7340359 Augmenting semiconductor's devices quality and reliability  
A method for augmenting quality or reliability of semiconductor units, including providing few populations of semiconductor units that are subject to quality or reliability testing. The populations...
7340318 Method and apparatus for assessing controller performance  
A method includes providing a process controller for controlling a process tool. The process tool is controlled in accordance with a process parameter. Measurements associated with the processing...
7337034 Method and apparatus for determining a root cause of a statistical process control failure  
The present invention provides a method and apparatus for determining a root cause of a fault. The method includes detecting at least one fault associated with at least one first wafer processed...
7337033 Data mining to detect performance quality of tools used repetitively in manufacturing  
A tool with one or more chambers in a manufacturing system is identified as performing at or below an acceptable level by the following steps. Store process data from tools for each one of a...
7333906 Quality analysis including cumulative deviation determination  
A device and technique for monitoring the quality of a manufacturing process, a resulting part or both includes determining a cumulative deviation of an actual process signature from an expected...
7324862 Quality control apparatus and control method of the same, and recording medium recorded with quality control program  
Various items of data collected at different process steps are associated on production sites where traceability is hard to conduct. A quality control apparatus controls a manufacturing process in...
7324193 Measuring a damaged structure formed on a wafer using optical metrology  
A method of measuring a damaged structure formed on a semiconductor wafer using optical metrology, the method includes obtaining a measured diffraction signal from a damaged periodic structure. A...
7308385 Diagnostic systems and methods for predictive condition monitoring  
A system for empirically diagnosing a condition of a monitored system. Estimates of monitored parameters from a model of the system provide residual values that can be analyzed for failure mode...
7308331 Apparatus and method for monitoring and maintaining plant equipment  
A computer system implements a process for gathering, synthesizing, and analyzing failure and other data relating to a pump, seal or other equipment. Data indicating the current state of the...
7292900 Power distribution expert system  
Content is generated on a host system based on real-time data from a controlled process collected over the internet from a customer's client automation system, such as a machine tool control...
7289862 Methods to support process quality and maintenance during control of an industrial process such as welding  
A number of methods to support process quality and maintenance during control of an industrial process such as welding are provided. The methods provide, among other things: automatic process limit...
7272532 Method for predicting the quality of a product  
A method is provided for predicting a quality characteristic of a product to be manufactured. The method may integrate one or more of feature and tolerance information associated with the product,...
7269470 Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device  
An aligner evaluation system includes (a) an error calculation module configured to calculate error information on mutual optical system errors among a plurality of aligners; (b) a simulation...
7266502 Feature centric release manager method and system  
A feature centric method of and system for monitoring the development and release process of a product, monitoring the development and release of a product, where the product is characterized by...
7263510 Human factors process failure modes and effects analysis (HF PFMEA) software tool  
Methods, computer-readable media, and systems for automatically performing Human Factors Process Failure Modes and Effects Analysis for a process are provided. At least one task involved in a...
7260441 Method of inspecting a workpiece during a production run in which workpieces are supplied to workstations by an autoloader  
A method of inspecting a workpiece during a production run in which workpieces are supplied to workstations by an autoloader. In accordance with the method, the supply of the workpieces by the...
7254458 Systems and methods for metrology recipe and model generation  
Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement...
7248939 Method and apparatus for multivariate fault detection and classification  
The present invention provides a method and apparatus for multivariate fault identification and classification. The method includes accessing data indicative of a plurality of physical parameters...
7245985 Process and apparatus for improving and controlling the vulcanization of natural and synthetic rubber compounds  
A process for curing a natural or synthetic rubber compound under a plurality of curing conditions by: (1) obtaining time dependent data streams of dielectric or impedance values from a non-bridged...
7242995 E-manufacturing in semiconductor and microelectronics processes  
Architecture that facilitates management of a semiconductor and/or microelectronics manufacturing process. A manufacturing component in communication with the semiconductor and/or microelectronics...
7239970 Robotic system for optically inspecting workpieces  
A manufacturing cell for inspecting workpieces such as magnetic disk substrates comprises an input conveyor for providing workpieces to be tested, one or more testers for inspecting the workpieces,...
7225047 Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements  
Methods, systems, and mediums of controlling a semiconductor manufacturing process are described. The method comprises the steps of measuring at least one critical dimension of at least one device...
7221990 Process control by distinguishing a white noise component of a process variance  
A method, system and medium is provided for enabling improved control systems. An error, or deviation from a target result, is observed for example during manufacture of semiconductor chips. The...
7221987 Generating a reliability analysis by identifying casual relationships between events in an event-based manufacturing system  
Analyzing an event chronology record to permit identification of periods of a production sequence that correspond to a high probability of failure. Systems and methods include receiving an event...
7212950 Methods and apparatus for equipment matching and characterization  
Computer program products, methods, systems, and apparatus for fingerprinting and process matching process tools such as process tools used for processing workpieces are described. One embodiment...
7209846 Quality control system for manufacturing industrial products  
In a quality control system for manufacturing industrial products, the product quality history and the manufacturing process history are collected and collated to calculate the correlation...
7200455 Method of process control  
The present invention relates to a method of run-to-run control of a manufacturing process. A plurality of runs of the manufacturing process is performed. In each of the runs, a value of a process...
7194366 System and method for estimating reliability of components for testing and quality optimization  
A system and method for determining the early life reliability of an electronic component, including classifying the electronic component based on an initial determination of a number of fatal...
7194320 Method for implementing indirect controller  
A system and method for implementing an indirect controller for a plant. A plant can be provided with both a direct controller and an indirect controller with a system model or a committee of...
7181355 Automatic quality control method for production line and apparatus therefor as well as automatic quality control program  
Production condition data and product quality data in a production line are monitored and stored in a production history database. When a quality deterioration event in the production line is...
7177718 Semiconductor production system  
A semiconductor production system has storage devices for storage of all kinds of information including, but not limited to, the information concerning semiconductor design and information as to...
7174233 Quality/reliability system and method in multilevel manufacturing environment  
This is a system and method for management system. The system and method includes a raw pull indicator database which receives inputs comprising data from participant nodes. A system comprises...
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