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8176752 |
Silica glass with saturated induced absorption and method of making
A silica glass article, such as a lens in a stepper/scanner system, having saturated induced absorption at wavelengths of less than about 250 nm. Saturated induced absorption is achieved by first...
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8156761 |
Method for producing quartz glass using a mixed powder
A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected...
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8091384 |
Method of manufacturing silica glass crucible for pulling silicon single crystals
The disclosed is a method of manufacturing a silica glass crucible for pulling silicon single crystals. In the method, reduced pressure is imparted from the inner surface to the outer surface of a...
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8062986 |
Fused silica having low OH, OD levels and method of making
A fused silica article having a combined concentration of hydroxyl (OH) and deuteroxyl (OD) concentration of less than 10 parts per million (ppm) and, in one embodiment, less than 1 ppm. The fused...
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8017536 |
Component of quartz glass for use in semiconductor manufacture and method for producing the same
The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a...
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8012894 |
Glasses having low OH, OD levels
A fused silica glass and a fused silica article having a combined concentration of at least one of OH and OD of up to about 50 ppm. The fused silica glass is formed by drying a fused silica soot...
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7994083 |
Fused silica glass and method for making the same
Disclosed are methods for hydrogen loading silica glass and silica glass comprising loaded H2. The methods can lead to H2 gradient in the glass material. Alternatively, the method may involve the...
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7992413 |
Process for producing synthetic quartz glass
An object of the invention is to provide a process for producing a synthetic quartz glass while taking account of a refractive index distribution remaining in the synthetic quartz glass; a jig for...
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7981824 |
Quartz glass blank and method for producing said blank
The present invention relates to a quartz glass blank for an optical component for transmitting radiation of a wavelength of 15 nm and shorter, the blank consisting of highly pure quartz glass,...
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7937968 |
Method for bonding components made of material with a high silicic acid content
In a known method for bonding components made of material with a high silicic acid content by means of a substance to substance bond, a SiO2-containing bonding mass is formed between connecting...
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7928026 |
Synthetic silica material with low fluence-dependent-transmission and method of making the same
Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit...
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7905112 |
Reforming process of quartz glass crucible
A reforming process of a quartz glass crucible in which the quartz glass crucible is reformed by an arc discharge generated by electrodes positioned around a rotational axis and configured to heat...
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7811482 |
Curved optical device and method for making the same
A method of constructing a curved optical device includes assembling of at least one cell having opposed flexible substrates with a controlled distance therebetween to form a gap adapted to receive...
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7784307 |
Optical member made of synthetic quartz glass, and process for its production
To reduce the change in the refractive index of an irradiated portion of synthetic quartz glass, caused by the irradiation with a high energy light emitted from a light source such as a KrF excimer...
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7749930 |
Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder
An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that...
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7596968 |
Borosilicate glass compositions and uses thereof
Glass, glass compositions, methods of preparing the glass compositions, microfluidic devices that include the glass composition, and methods of fabricating microfluidic devices that include the...
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7589039 |
Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same
Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica...
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7534733 |
Synthetic silica glass optical material having high resistance to laser induced damage
Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength less...
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7407604 |
Nanostructured re-doped SiO2-base fluorescent materials and methods for production of same
A new class of nanostructured RE-doped SiO2-base materials that display superior fluorescence properties is provided. In particular, high gain combined with a broad and flat spectral band width is...
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7299657 |
Method of making high strain point glass
A method of forming a glass sheet includes obtaining a preform generated from a glass composition and conveying the preform through a channel having a temperature that decreases along a length of...
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7232778 |
Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof
In a synthetic quartz glass ingot which is produced by vapor phase hydrolyzing or oxidatively decomposing a silica-forming starting compound in an oxyhydrogen flame such that silica growth in a...
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7169721 |
Self-foamed porous ceramic composition and method for making porous ceramic using the same
Disclosed herein are a self-foamed porous ceramic composition and a method for making a porous ceramic using the self-foamed porous ceramic composition. The self-foamed porous ceramic is obtained...
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7159418 |
Method of producing synthetic quartz glass
Fluorine-containing synthetic quartz glass is produced by feeding silica-forming material, hydrogen, and oxygen gases from a burner to a reaction zone, flame hydrolyzing the silica-forming material...
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7082790 |
Quartz glass blank for an optical component, and manufacturing procedure and use thereof
The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank...
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7069746 |
Method for producing ultra-high purity, optical quality glass articles
A method for producing ultra-high purity, optical quality, glass articles is disclosed which involves: 1. compacting metaloxide or metalloidoxide to granules having a mean particle size of less...
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6997015 |
EUV lithography glass structures formed by extrusion consolidation process
The invention discloses a method for forming substantially striae-free glass substrates that are suitable for optical applications, including use in forming optical elements or structures such as...
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6832493 |
High purity glass bodies formed by zero shrinkage casting
The present invention relates to a method for forming an optical device. The method includes providing a glass aggregate. Typically, the glass aggregate is a mixture of fine glass soot particles...
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6824862 |
Fiber-reinforced ceramic composite
Fiber-reinforced ceramic composites contain bundles, tows or hanks of long fibers, wherein the long fiber bundles, tows or hanks are completely surrounded by a short fiber-reinforced matrix, with...
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6796143 |
Process for producing SiO2-TiO2 glasses having a low coefficient of thermal expansion
SiO2—TiO2 glasses having a low coefficient of thermal expansion are produced by a molding being produced that consists of SiO2 powder, SiO2—TiO2 powder or TiO2 powder and that contains by way of ...
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6776006 |
Method to avoid striae in EUV lithography mirrors
A method for manufacturing an EUV lithography element mirror includes sagging a plate of a glass material to produce an EUV mirror blank; and polishing a top face of the EUV mirror blank to produce...
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6772611 |
Making a glass rod with a step of measuring an incremental weight gain
The present invention provides a simple method for fabricating fiber-optic glass preforms having complex refractive index configurations and/or dopant distributions in a radial direction with a...
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6763682 |
Process and apparatus for manufacturing a glass ingot from synthetic silica
A method and apparatus for the manufacture of synthetic vitreous silica ingots involves the production of a melt of synthetic vitreous silica in a crucible (35) within a refractory furnace (31),...
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6758063 |
Photolithography method, photolithography mask blanks, and method of making
The invention provides optical projection lithography methods, photolithography photomasks, and optical photolithography mask blanks for use in optical photolithography systems utilizing deep...
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6732546 |
Product method of synthetic silica glass and thermal treatment apparatus
A production method of synthetic silica glass according to the present invention comprises a first step of ejecting a silicon compound and a combustion gas containing oxygen and hydrogen from a...
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6705115 |
Synthetic quartz glass and production process
A process for producing synthetic quartz glass using a burner composed of a plurality of concentric nozzles involves the steps of feeding a silica-forming raw material gas and a fluorine compound...
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6684664 |
Process for manufacture of a component made of opaque synthetic quartz glass
A process for manufacture of a component made of opaque synthetic quartz glass, and a quartz glass tube manufactured according to said process. The process comprises (i) providing a starting...
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6656860 |
Synthetic silica glass member, photolithography apparatus and process for producing photolithography apparatus
A photolithography apparatus has an exposure light source for emitting exposure light with a wavelength of 400 nm or less, a reticle with a pattern original image formed therein, an illumination...
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6576578 |
Synthetic quartz glass and method for preparing the same
A synthetic quartz glass to be used for light with a wavelength of from 150 to 200 nm, wherein the OH group concentration is at most 100 ppm, the hydrogen molecule concentration is at most 1×1017 ...
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6550277 |
Quartz glass body for optical component and process for manufacture thereof
The invention concerns a quartz glass body for an optical component for the transmission of UV radiation with a wavelength of 250 nm and less, especially for a wavelength of 157 nm, as well as a...
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6510707 |
Methods for making silica crucibles
Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against...
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6494062 |
Fused silica having high resistance to optical damage
This invention relates to a method of rendering fused silica resistant to compaction caused by UV laser beam irradiation. The method of the invention results is a fused silica member that is...
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6474103 |
Glass spraying method
The method comprises a preheating step to heat a metal base 10 entirely, a pre-spraying step to for a glass pre-coating 13 by pre-spraying a glass material onto the surface of the preheated base, a...
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6442973 |
Synthetic silica glass and its manufacturing method
A method is provided for manufacturing a synthetic silica glass. The method includes the steps of maintaining a silica glass member, which is formed using a flame hydrolysis method and having an OH...
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6355587 |
Quartz glass products and methods for making same
The application discloses a number of unique sintered quartz glass products together with new silica compositions and processes for making and using such products. Nitrided clear and opaque...
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6311521 |
Process for producing flame reaction members for burners
A raw material mixture, which has a glass composition containing a salt or an oxide of a flame reaction metal, is heated, and an intermediate base material, in which the salt of the flame reaction...
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6260388 |
Method of fabricating photonic glass structures by extruding, sintering and drawing
Disclosed is a method of making a photonic crystal using a combination of extruding and drawing techniques. The method is contemplated as being capable of producing both two and three dimensional...
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6205818 |
Production of fused silica having high resistance to optical damage
A method of rendering fused silica resistant to compaction caused by UV laser beam irradiation. The method of the invention results in a fused silica member that is desensitized to compaction...
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6189339 |
Method for producing silica glass used for photolithography
A method for producing a silica glass for photolithography, which comprises the following steps: jetting a starting material gas, an oxygen gas and a hydrogen gas from a burner and depositing and...
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6143676 |
Synthetic silica glass used with uv-rays and method producing the same
An object of the present invention is to provide a synthetic silica glass optical material which exhibits excellent transmittance as well as durability for high output power vacuum ultraviolet...
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6050107 |
Method of forming barrier ribs for display panels
A method of forming barrier ribs for a display panel, comprising the steps of: forming a glass layer for an underlying layer having a first low-melting glass powder with a softening point of a...
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