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7389645 |
Radiation shield for cryogenic pump for high temperature physical vapor deposition
A method and apparatus to shield a cryogenic pump in a physical vapor deposition chamber comprising a physical vapor deposition chamber, a gasket in thermal contact with the physical vapor...
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7370482 |
Rapidly regenerating cryogenic trap
The cryogenic trap of the invention comprises, in a hollow body ( 3 ) having an access valve ( 2 ) and an outlet valve ( 6 ), a cold core ( 11 ) associated with a plate ( 13 ) having low thermal...
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7320224 |
Method and apparatus for detecting and measuring state of fullness in cryopumps
The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in...
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7313922 |
High conductance cryopump for type III gas pumping
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases...
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7300261 |
Vibration damper with nested turbo molecular pump
A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump...
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7297055 |
Vacuum-insulating system and method for generating a high-level vacuum
A method of generating a high-level vacuum comprises evacuating a chamber having a substantially-pure gas therein to a medium-level vacuum, and freezing the residual gas to generate the high-level...
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7287391 |
Automated modular hyperpolarizers and related devices and methods
Modular expandable hyperpolarizers include a central control module and at least one optical pumping module that can be expandable to a plurality of optical pumping modules that can be separately...
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7287390 |
Optical pumping modules, polarized gas blending and dispensing systems, and automated polarized gas distribution systems and related devices and methods
Hyperpolarizers for producing polarized noble gases can include: (a) a control module configured to direct the operation of a hyperpolarizer to produce polarized noble gas via spin-exchange...
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7228687 |
Valve device
A valve device, according to the invention, for connecting to a cryopump, wherein the valve device comprises a body with a through-channel and a connection flange at one end of the through-channel...
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7217306 |
Trap apparatus
A continuous processing trap apparatus is capable of increasing the trapping efficiency while maintaining conductance required by a vacuum chamber. The trap apparatus includes an exhaust passage...
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7201004 |
Panels for pulse tube cryopump
The pulse tubes ( 165, 175 ) and regenerators ( 160, 170 ) contained within a cryopump housing ( 210 ) are arranged in a way that facilitates the fabrication and installation of the cryopanels (...
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7194867 |
Integrated rough/purge/vent (RPV) valve
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer...
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7165406 |
Integral pulse tube refrigerator and cryopump
An integrated cryopump and 2 stage pulse tube refrigeration system ( 100 ) comprising a cryopump, a compressor for a pulse tube refrigerator, a pulse tube refrigerator located within the vacuum...
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7155919 |
Cryopump temperature control of arrays
An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The...
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7114341 |
Cryopump with two-stage pulse tube refrigerator
Disclosed is a two-stage pulse tube cryopump cooling system in which the pulse tubes and valves are inline, with the hot ends of the pulse tubes at the top and the valve mechanism is at the bottom...
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7044997 |
Process byproduct trap, methods of use, and system including same
A trap device including at least one substance delivery element for introducing a substance therein is disclosed. The delivered substance may influence the nature of deposits that have formed...
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7037083 |
Radiation shielding coating
A vacuum conduit connected to a vacuum pump has a shield surface which absorbs radiation to reduce the total radiation falling on the vacuum pump. The vacuum system includes the vacuum conduit...
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6907740 |
Gas charging system for fill of gas storage and dispensing vessels
An apparatus and method for charging a gas storage and dispensing vessel with gas to a predetermined pressure level, e.g., a gas to be employed in a semiconductor manufacturing operation such as a...
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6895766 |
Fail-safe cryopump safety purge delay
An electronic controller is integral with a cryopump and provides an offline solution for purging a cryopump and an exhaust line during unsafe conditions. The electronic controller is responsible...
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6835221 |
Exhaust gas filtration device and auxiliary filtration device
The present invention has an object to improve the efficiency of collection of solidification constituents and solids in exhaust gas and to prevent early blockage of the filter without damaging the...
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6831022 |
Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamber
A system, apparatus and/or method is provided for removing water vapor from a wafer processing chamber generated as a byproduct of wafer processing. A water vapor trap is used to collect the water...
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6830600 |
Cold traps for vapor lubrication processes
A method for preventing migration of lubrication molecules into adjacent process chambers while coating a thin layer of lubricant over a storage surface of a disc using a vapor lubrication process....
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6814812 |
Double acting cold trap
A double acting cold trap equipped with a set of exhaust gas condensing fins and a set of exhaust gas condensing plates is disclosed. The invention also discloses a double acting cold trap that...
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6755028 |
Electronically controlled cryopump
In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery...
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6746516 |
Method and apparatus for treating air emissions and recovering products therefrom
An air treatment system including an exhaust including an exhaust annulus defined by an inner exhaust wall, an outer exhaust wall circumscribing the inner wall, and a pressurized annulus between...
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6718775 |
Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system
An integrated phase separator for use in an ultra high vacuum system, for example, a molecular beam epitaxy system, is described. The vacuum chamber has a cryogenic panel disposed therein. The...
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6688116 |
Refrigerator electron beam ion trap-source
An ion beam producing device employing a refrigeration system to provide the cooling for a superconducting compression magnet at a trap core of an electron beam ion trap (EBIT) without the use of...
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6655154 |
Operation method and operation apparatus for multi-system refrigerators, and refrigerating apparatus
An operation method and an operation apparatus for multi-system refrigerators, and a refrigerating apparatus. When gas compressed by a single compressor is supplied to a plurality of refrigerators...
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6620250 |
Method and apparatus for shielding a device from a semiconductor wafer process chamber
A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The apparatus comprises a shield connected to a mounting portion....
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6550256 |
Alternative backing up pump for turbomolecular pumps
As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert...
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6510697 |
System and method for recovering from a power failure in a cryopump
In a power failure recovery, the operating state before a power failure and present conditions of a cryopump are determined to initiate a regeneration or startup process. Where the refrigerator was...
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6488745 |
Trap apparatus and method for condensable by-products of deposition reactions
A trap for condensable liquids, such as tantalum pentoxide, has a primary trapping chamber surrounding a secondary trapping chamber and a sump connected by a small enough opening to the primary or...
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6484532 |
NMR polarization monitoring coils, hyperpolarizers with same, and methods for determining the polarization level of accumulated hyperpolarized noble gases during production
Hyperpolarizers which produce hyperpolarized noble gases include one or more on-board NMR monitoring coils configured to monitor the polarization level of the hyperpolarized gas at various...
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6474080 |
Cryopump system with modular electronics
A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second...
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6412290 |
Cryogenic refrigerating device
A cryogenic refrigerating device comprising includes an adiabatic vacuum tank, a refrigerator having at least a low temperature generating portion of the refrigerator accommodated in the adiabatic...
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6367267 |
Integrated phase separator for ultra high vacuum system
An integrated phase separator for use in an ultra high vacuum system, for example, a molecular beam epitaxy system, is described. The vacuum chamber has a cryogenic panel disposed therein. The...
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6332925 |
Evacuation system
An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital...
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6330801 |
Method and system for increasing cryopump capacity
A cryopump in which the surface area of the condensing or adsorbing panels is increased without materially increasing the dimensions by applying a porous or roughened layer on the surface of the...
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6327863 |
Cryopump with gate valve control
The present invention provides a cryopump coupled to a gate valve in which the gate valve is automatically prevented from being opened during unsafe conditions, for example, when combustible gases...
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6318092 |
Alkali metal hybrid spin-exchange optical pumping
Methods of hyperpolarizing a noble gas by spin-exchange optical pumping use an alkali metal hybrid comprising a primary alkali metal and an auxiliary alkali metal to effectuate spin transfer...
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6309184 |
Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line
A temperature-responsive, mobile shielding device (10) is located between a getter pump (GP) and a turbo pump (TMP) being in line to each other, capable of providing a complete shielding to the...
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6293109 |
Pulse pipe refrigerating machine and cryopump using the refrigerating machine
A pulse tube refrigerator which enables holding a cooling temperature without the use of a heater and the like. The pulse tube refrigerator employs a working gas which has a liquefying temperature...
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6286321 |
Condenser cold trap unit with separate fraction collection feature
A condenser cold trap unit for recovering as separate primary and secondary condensate fractions solvents contained in an effluent drawn from products being dried in a vacuum chamber includes inner...
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6282920 |
Apparatus and method for producing polarized vapor-phase helium-3, particularly for NMR imaging
The present invention relates to an apparatus for producing polarized high-pressure vapor-phase helium-3, particularly for NMR imaging. The apparatus comprises a means for injecting helium-3 or a...
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6263679 |
Particulate dam for cryopump flange
A gasket designed for use with a cryogenic vacuum pump, or cryopump, includes a ring and a dam extending inwardly from the ring. The dam acts as a barrier preventing transport of particulates to a...
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6257001 |
Cryogenic vacuum pump temperature sensor
An assembly includes a temperature sensor having an operating range that includes a normal operating temperature of a cryogenic vacuum pump and a temperature of the pump following a dump. The...
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6241793 |
Cold trap equipped with curvilinear cooling plate
A cold trap that is equipped with a curvilinear housing and a curvilinear cooling plate contained therein for collecting unwanted reactant gases and reaction byproducts in an exhaust gas is...
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6233948 |
Control apparatus for a plurality of cryopumps
For simultaneously controlling a plurality of cryopumps, one processor and communication conversion sections of the respective cryopumps are connected to each other with a communication network....
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6223540 |
Gas processing techniques
The present invention provides techniques for processing effluent gases from vacuum fabrication processes. The effluent gases are condensed on cold surfaces (512 and 514) inside a novel pump (220)...
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6202421 |
Detachable cryogenic refrigerator expander
A detachable work extraction system includes an expansion engine including a self-sealing coupling adapted to detachably connect the expansion engine to a cold box, and a hydraulic work extractor...
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